CN111551037A

CN111551037A - Process pipe with water cooling at two ends

Info

Publication number: CN111551037A
Application number: CN202010545036.3A
Authority: CN
Inventors: 张海林; 刘国霞; 吴季浩
Original assignee: Qingdao Sunred Electronic Equipment Co ltd
Current assignee: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd.
Priority date: 2020-06-15
Filing date: 2020-06-15
Publication date: 2020-08-18

Abstract

The invention discloses a process tube with water cooling at two ends, which comprises a process tube main body, a water cooling sleeve, a water inlet and outlet nozzle, front and rear fixing flanges, a furnace door sealing ring, a sealing compaction flange, a process tube sealing ring, a rear furnace door, a front furnace door, a wafer boat, a silicon wafer and an equipment frame body, wherein the process tube main body is fixedly arranged on the inner wall of the equipment frame body through the front and rear fixing flanges, and the water cooling sleeve is fixedly arranged at the positions, close to the equipment frame body, of two ends of the process tube main body through the front and rear fixing. The invention has the advantages that the temperature generated by the furnace mouth on the sealing part by the heat radiation at the two ends affects the furnace door sealing ring and the heat generated by the heater on the process tube main body, so that the heat is taken away by the rapid flow of the cooling water in the furnace mouth, the heat influence on the furnace door sealing ring and the process tube sealing ring by the heat conducted by the process tube main body is well blocked, the temperature at the furnace door sealing ring and the process tube sealing ring is kept at low temperature, the sealing effect is ensured, and the service life of the furnace door sealing ring and the process tube sealing ring is obviously prolonged.

Description

Process pipe with water cooling at two ends

Technical Field

The invention relates to the technical field of photovoltaics, in particular to a process pipe with water cooling at two ends.

Background

The photovoltaic field is in a tube furnace device (horizontal type) form, the furnace mouth sealing rings are protected by arranging cooling water channels on front and rear fixed flanges, the cooling of the vicinity of the seal ring is achieved, but the side of the seal ring in contact with the flange may have a cooling effect, but the side of the sealing ring contacted with the process tube is inevitably unable to be isolated due to the heat conduction of the process tube, therefore, the whole annular surface of the sealing ring contacting the process pipe is in a high-temperature environment, so that the sealing ring is rapidly aged and loses efficacy, although the material of the sealing ring is selected at high cost, the material with high temperature resistance is selected (the price of the material with high temperature resistance is several times or ten times that of the common sealing material), however, the service life is still low, because the problem of sealing ring failure caused by heat conducted to the sealing ring along with the process pipe due to high temperature in the furnace cannot be solved, a process pipe with water cooling at both ends is needed to solve the problem.

Disclosure of Invention

The invention aims to provide a process pipe with water cooling at two ends, which aims to solve the problem that the heat conduction of the process pipe cannot be isolated inevitably, so that the whole annular surface of a sealing ring contacting the process pipe is in a high-temperature environment, the sealing ring is aged and loses efficacy quickly, and the sealing ring has a short service life because the sealing ring fails due to the fact that the material of the sealing ring is selected at a high cost (the price of the material with high temperature resistance is several times or ten times that of the common sealing material), although the material with high temperature resistance is selected at a high cost.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a both ends area water-cooling's technology pipe, includes technology pipe main part, water-cooling cover, business turn over water mouth, front and back mounting flange, furnace gate sealing washer, sealed hold-down flange, technology pipe sealing washer, back furnace gate, preceding furnace gate, piece boat and silicon chip and equipment support body, the inner wall of equipment support body has technology pipe main part through front and back mounting flange fixed mounting, the position department that technology pipe main part both ends are close to the equipment support body has the water-cooling cover through front and back mounting flange fixed mounting, and the surface cover of water-cooling cover is equipped with sealed hold-down flange and technology pipe sealing washer, one side outer wall of equipment support body has preceding furnace gate through furnace gate sealing washer fixed mounting, the opposite side outer wall of equipment support body has back furnace gate through furnace gate sealing washer fixed mounting, the external fixed surface cover of technology pipe main part.

Preferably, water inlet and outlet nozzles are arranged at the upper and lower parts of the ports at the two ends of the process tube main body, and two groups of water inlet and outlet nozzles are arranged.

Preferably, a process tube sealing ring is compressed at a position between the front and rear fixing flanges and the sealing and compressing flange, and the water cooling jacket, the sealing and compressing flange and the front and rear fixing flanges are compressed and sealed through the process tube sealing ring.

Preferably, the water cooling jacket is internally provided with a cooling water channel, and the cooling water channel is tightly attached to the furnace door sealing ring and the process tube sealing ring.

Preferably, two groups of furnace door sealing rings are arranged, and a closed process chamber is formed between the front furnace door and the rear furnace door through the furnace door sealing rings.

Preferably, an air extraction opening is arranged at the center of the rear furnace door, the air extraction opening is communicated with the interior of the process tube main body, and a tail exhaust system (not marked) is fixedly installed on the outer side of the rear furnace door.

Compared with the prior art, the invention has the beneficial effects that:

the invention solves the problems that the high heat generated by the heater, the temperature generated by the heat radiation of the furnace mouths at two ends to the sealing position, the influence on the furnace door sealing ring and the heat generated by the heater to the main body of the process tube, the heat conducted by the main body of the process tube to the sealing ring of the process tube are all caused by the water cooling jacket at the end part, so that the heat is taken away by the rapid flow of the cooling water inside the main body, the heat influence on the furnace door sealing ring and the process tube sealing ring caused by the heat conducted by the main body of the process tube can be well blocked, the temperature at the furnace door sealing ring and the process tube sealing ring can be kept low, the sealing effect is ensured, the service life of the furnace door sealing ring and the process tube sealing ring is obviously prolonged, the shutdown rate of replacing the furnace door sealing ring and the process tube sealing ring of the equipment is obviously reduced, the yield of, The method is smart, safe, reliable, low in manufacturing cost and suitable for large-scale production.

Drawings

FIG. 1 is a schematic sectional elevation view of the structure of the present invention;

FIG. 2 is an enlarged view of the structure at A in FIG. 1 according to the present invention;

fig. 3 is an enlarged view of the structure at B in fig. 1 according to the present invention.

In the figure: 1. a process tube body; 2. water cooling jacket; 3. a water inlet and outlet nozzle; 4. front and rear fixed flanges; 5. sealing the compression flange; 6. a furnace door sealing ring; 7. a process tube seal ring; 8. a rear oven door; 9. a front oven door; 10. a heater; 11. a wafer boat and a silicon wafer; 12. an equipment rack body; 13. an air extraction opening; 14. and a cooling water channel.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, an embodiment of the present invention is shown: a process tube with water cooling at two ends comprises a process tube main body 1, a water cooling jacket 2, water inlet and outlet nozzles 3, front and rear fixing flanges 4, a furnace door sealing ring 6, a rear furnace door 8, a front furnace door 9, a wafer boat and silicon wafers 11 and an equipment frame body 12, wherein the inner wall of the equipment frame body 12 is fixedly provided with the process tube main body 1 through the front and rear fixing flanges 4, according to the attached

drawings

1, 2 and 3, the upper and lower parts of the ports at the two ends of the process tube main body 1 are provided with the water inlet and outlet nozzles 3, the water inlet and outlet nozzles 3 are provided with two groups, the water nozzles 3 are respectively arranged on the upper and lower parts of the water cooling jacket 2 for welding without water leakage, water baffles can be arranged inside the water cooling jacket 2, the two sides of the water baffles are welded with the water inlet and outlet nozzles 3, the water baffles are partition walls in the water channels and do not have short circuit effect inside the water outlet channels, and a complete annular channel for, the water nozzle 3 is connected with an external water supply system (not marked)

The process tube main body 1 is fixedly provided with a water cooling jacket 2 at the positions close to the equipment frame body 12 at the two ends through a front fixing flange and a rear fixing flange 4, the surface of the water cooling jacket 2 is sleeved with a sealing compaction flange 5 and a process tube sealing ring (7), the process tube sealing ring 7 is compacted at the position between the front fixing flange 4 and the rear fixing flange 5, the water cooling jacket 2, the sealing compaction flange 5 and the front fixing flange and the rear fixing flange 4 are compacted and sealed through the process tube sealing ring 7 to play a sealing role, according to the attached

drawings

1, 2 and 3, the water cooling jacket 2 is internally provided with a cooling water channel 14, the cooling water channel 14 is tightly attached to the furnace door sealing ring 6 and the process tube sealing ring 7, and due to the work of the heater 10, the high heat generated by the furnace door sealing ring 6 and the process tube sealing ring 7 is taken away, so that the heat is taken away by the, the heat influence of the heat conducted by the process tube main body 1 on the furnace door sealing ring 6 and the process tube sealing ring 7 can be well blocked, so that the temperature of the furnace door sealing ring 6 and the process tube sealing ring 7 is kept at low temperature, the sealing effect is ensured, the service lives of the furnace door sealing ring 6 and the process tube sealing ring 7 are obviously prolonged, the shutdown rate of replacing the furnace door sealing ring 6 and the process tube sealing ring 7 by equipment is obviously reduced, and the yield of the equipment is obviously improved.

The outer wall of one side of the equipment support body 12 is fixedly provided with a front furnace door 9 through a furnace door sealing ring 6, the outer wall of the other side of the equipment support body 12 is fixedly provided with a rear furnace door 8 through the furnace door sealing ring 6, a heater 10 is fixedly sleeved on the outer surface of the process tube main body 1, a sheet boat and a silicon wafer 11 are arranged inside the process tube main body 1, the furnace door sealing rings 6 are arranged in two groups, a closed process cavity is formed between the front furnace door 9 and the rear furnace door 8 through the furnace door sealing ring 6, so that the heater 10 can work to rapidly generate heat in the closed process cavity, the center of the rear furnace door 8 is provided with an air suction opening 13, the air suction opening 13 is communicated with the inside of the process tube main body 1, the air suction opening 13 is arranged outside the rear furnace door.

The working principle is as follows: before the furnace door sealing ring is ready to be used, a worker opens an external cooling water system (not shown) to enter a water channel 14 through a water nozzle 3 at the lower part and then flow out of the water nozzle 3 at the upper part to form a continuous cooling water supply system, when a heater 10 works, the process tube main body 1, a boat and a silicon wafer 11 inside the process tube main body are subjected to process heating through heat radiation of the heater, and when the process tube main body 1 starts to generate heat, the heat affects the process tube sealing ring 7 through the heat generated by the heat radiation of a furnace door sealing ring 6 at the sealing part of a rear furnace door 8 and a front furnace door 9 at two ends and the heat generated by the heater 10 on the process tube main body 1, and due to the design of a water cooling sleeve 2 and a cooling water channel 14 at the end part and the tight joint action of the cooling water channel 14, the process tube sealing ring 7 and the furnace door sealing ring 6, the heat at the furnace door sealing ring 7 is taken away by the quick flow of, therefore, the temperature of the furnace door sealing ring 6 and the process pipe sealing ring 7 is kept low, the sealing effect is ensured, the service life of the sealing ring is obviously prolonged, the shutdown rate of replacing the furnace door sealing ring 6 and the process pipe sealing ring 7 by equipment is obviously reduced, and the equipment yield is obviously improved.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a both ends area water-cooling's technology pipe, includes technology pipe main part (1), water-cooling jacket (2), business turn over water mouth (3), front and back mounting flange (4), furnace gate sealing washer (6), technology pipe sealing washer (7), sealed hold-down flange (5) back furnace gate (8), forehearth door (9), piece boat and silicon chip (11) and equipment support body (12), its characterized in that: the inner wall of equipment support body (12) has process tube main part (1) through front and back mounting flange (4) fixed mounting, the position department that process tube main part (1) both ends are close to equipment support body (12) has water cooling jacket (2) through front and back mounting flange (4) fixed mounting, and the surface cover of water cooling jacket (2) is equipped with sealed hold-down flange (5) and process tube sealing washer (7), one side outer wall of equipment support body (12) has preceding furnace gate (9) through furnace gate sealing washer (6) fixed mounting, the opposite side outer wall of equipment support body (12) has back furnace gate (8) through furnace gate sealing washer (6) fixed mounting, the external fixed surface cover of process tube main part (1) is equipped with heater (10), and inside wafer boat and the silicon chip (11) of being provided with of process tube main part (1).

2. A process tube with water cooling at both ends as claimed in claim 1, wherein: the upper and lower parts of the ports at the two ends of the process tube main body (1) are provided with water inlet and outlet nozzles (3), and the water inlet and outlet nozzles (3) are provided with two groups.

3. A process tube with water cooling at both ends as claimed in claim 1, wherein: the process pipe sealing rings (7) are compressed at positions between the front and rear fixing flanges (4) and the sealing and pressing flange (5), and the water cooling jacket (2), the sealing and pressing flange (5) and the front and rear fixing flanges (4) are compressed and sealed through the process pipe sealing rings (7).

4. A process tube with water cooling at both ends as claimed in claim 1, wherein: and cooling water channels (14) are formed in the water cooling jacket (2), and the cooling water channels (14) are tightly attached to the furnace door sealing ring (6) and the process tube sealing ring (7).

5. A process tube with water cooling at both ends as claimed in claim 1, wherein: two groups of furnace door sealing rings (6) are arranged, and a closed process chamber is formed between the front furnace door (9) and the rear furnace door (8) through the furnace door sealing rings (6).

6. A process tube with water cooling at both ends as claimed in claim 1, wherein: an air extraction opening (13) is formed in the center of the rear furnace door (8), the air extraction opening (13) is communicated with the interior of the process tube main body (1), and a tail exhaust system (not marked) is fixedly mounted on the outer side of the rear furnace door (8) of the air extraction opening (13).