CN212962844U - Process pipe with water cooling at two ends - Google Patents

Abstract

The utility model discloses a both ends area water-cooling's technology pipe, including technology pipe main part, water-cooling cover, business turn over water mouth, front and back mounting flange, furnace gate sealing washer, sealed hold-down flange, technology pipe sealing washer, back furnace gate, preceding furnace gate, piece boat and silicon chip and equipment support body, the inner wall of equipment support body has technology pipe main part through front and back mounting flange fixed mounting, and the position department that technology pipe main part both ends are close to the equipment support body has the water-cooling cover through front and back mounting flange fixed mounting. The utility model discloses at the temperature of both ends fire door mouth to the thermal radiation production of sealed department, to the influence of furnace gate sealing washer to and the heat that the heater produced to technology pipe main part, make the quick flow of its inside cooling water take away the heat, fine blocking because of the heat that technology pipe main part conduction comes to the heat influence of furnace gate sealing washer and technology pipe sealing washer, the temperature that makes furnace gate sealing washer and technology pipe sealing washer department keeps low temperature, guaranteed sealed effect and obviously prolonged the life of furnace gate sealing washer and technology pipe sealing washer.

Description

Process pipe with water cooling at two ends

Technical Field

The utility model relates to a photovoltaic technology field specifically is a both ends area water-cooling's technology pipe.

Background

The photovoltaic field is in a tube furnace device (horizontal type) form, the furnace mouth sealing rings are protected by arranging cooling water channels on front and rear fixed flanges, the cooling of the vicinity of the seal ring is achieved, but the side of the seal ring in contact with the flange may have a cooling effect, but the side of the sealing ring contacted with the process tube is inevitably unable to be isolated due to the heat conduction of the process tube, therefore, the whole annular surface of the sealing ring contacting the process pipe is in a high-temperature environment, so that the sealing ring is rapidly aged and loses efficacy, although the material of the sealing ring is selected at high cost, the material with high temperature resistance is selected (the price of the material with high temperature resistance is several times or ten times that of the common sealing material), however, the service life is still low, because the problem of sealing ring failure caused by heat conducted to the sealing ring along with the process pipe due to high temperature in the furnace cannot be solved, a process pipe with water cooling at both ends is needed to solve the problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a water-cooled technology pipe is taken at both ends to propose in solving above-mentioned background art because the heat-conduction of technology pipe is inevitable exist can't completely cut off, so the whole annular face of sealing washer contact technology pipe all is high temperature environment, so cause the sealing washer ageing fast, become invalid, though spent very high-cost selection temperature resistant high material (the high material price of temperature resistant can be ordinary sealed material several times or ten times price), but still be life-span, because can not solve the interior high temperature of stove and lead to the fact the sealing washer inefficacy problem for the heat of sealing washer along with the technology pipe conduction.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a both ends area water-cooling's technology pipe, includes technology pipe main part, water-cooling cover, business turn over water mouth, front and back mounting flange, furnace gate sealing washer, sealed hold-down flange, technology pipe sealing washer, back furnace gate, preceding furnace gate, piece boat and silicon chip and equipment support body, the inner wall of equipment support body has technology pipe main part through front and back mounting flange fixed mounting, the position department that technology pipe main part both ends are close to the equipment support body has the water-cooling cover through front and back mounting flange fixed mounting, and the surface cover of water-cooling cover is equipped with sealed hold-down flange and technology pipe sealing washer, one side outer wall of equipment support body has preceding furnace gate through furnace gate sealing washer fixed mounting, the opposite side outer wall of equipment support body has back furnace gate through furnace gate sealing washer fixed mounting, the external fixed surface cover of technology pipe main part.

Preferably, water inlet and outlet nozzles are arranged at the upper and lower parts of the ports at the two ends of the process tube main body, and two groups of water inlet and outlet nozzles are arranged.

Preferably, a process tube sealing ring is compressed at a position between the front and rear fixing flanges and the sealing and compressing flange, and the water cooling jacket, the sealing and compressing flange and the front and rear fixing flanges are compressed and sealed through the process tube sealing ring.

Preferably, the water cooling jacket is internally provided with a cooling water channel, and the cooling water channel is tightly attached to the furnace door sealing ring and the process tube sealing ring.

Preferably, two groups of furnace door sealing rings are arranged, and a closed process chamber is formed between the front furnace door and the rear furnace door through the furnace door sealing rings.

Preferably, the center of the rear furnace door is provided with an air exhaust opening, the air exhaust opening is communicated with the inside of the process tube main body, and a tail exhaust system is fixedly installed on the outer side of the rear furnace door.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model discloses fine solution because the high heat that the heater produced, the temperature that produces at both ends fire door to the heat radiation of seal, to the influence of furnace gate sealing washer, and the heat that the heater produced to technology pipe main part, the heat influence to technology pipe sealing washer department through the heat that technology pipe main part body conducted, all be the water-cooling jacket through the tip, make the quick flow of its inside cooling water take away the heat, can fine block the heat influence to furnace gate sealing washer and technology pipe sealing washer because of the heat that technology pipe main part conducted, thereby make the temperature of furnace gate sealing washer and technology pipe sealing washer department keep low temperature, guaranteed sealed effect and obviously prolonged the life of furnace gate sealing washer and technology pipe sealing washer, of course also obviously reduced the outage rate of equipment change furnace gate sealing washer and technology pipe sealing washer, obviously improve equipment yield, its overall structure design is light and convenient, The method is smart, safe, reliable, low in manufacturing cost and suitable for large-scale production.

Drawings

FIG. 1 is a schematic sectional view of the front view of the structure of the present invention;

fig. 2 is an enlarged schematic view of the structure at a in fig. 1 according to the present invention;

fig. 3 is an enlarged schematic view of the structure at B in fig. 1 according to the present invention.

In the figure: 1. a process tube body; 2. water cooling jacket; 3. a water inlet and outlet nozzle; 4. front and rear fixed flanges; 5. sealing the compression flange; 6. a furnace door sealing ring; 7. a process tube seal ring; 8. a rear oven door; 9. a front oven door; 10. A heater; 11. a wafer boat and a silicon wafer; 12. an equipment rack body; 13. an air extraction opening; 14. and a cooling water channel.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides an embodiment: a process tube with water cooling at two ends comprises a process tube main body 1, a water cooling jacket 2, water inlet and outlet nozzles 3, front and rear fixing flanges 4, a furnace door sealing ring 6, a rear furnace door 8, a front furnace door 9, a wafer boat and silicon wafers 11 and an equipment frame body 12, wherein the inner wall of the equipment frame body 12 is fixedly provided with the process tube main body 1 through the front and rear fixing flanges 4, according to the attached drawings 1, 2 and 3, the upper and lower parts of the ports at the two ends of the process tube main body 1 are provided with the water inlet and outlet nozzles 3, the water inlet and outlet nozzles 3 are provided with two groups, the water nozzles 3 are respectively arranged on the upper and lower parts of the water cooling jacket 2 for welding without water leakage, water baffles can be arranged inside the water cooling jacket 2, the two sides of the water baffles are welded with the water inlet and outlet nozzles 3, the water baffles are partition walls in the water channels and do not have short circuit effect inside the water outlet channels, and a complete annular channel for, the water nozzle 3 is connected with an external water supply system.

The process tube main body 1 is fixedly provided with a water cooling jacket 2 at the positions close to the equipment frame body 12 at the two ends through a front fixing flange and a rear fixing flange 4, the surface of the water cooling jacket 2 is sleeved with a sealing compaction flange 5 and a process tube sealing ring 7, the position between the front fixing flange 4 and the rear fixing flange 5 is compacted with the process tube sealing ring 7, the water cooling jacket 2, the sealing compaction flange 5 and the front fixing flange and the rear fixing flange 4 are compacted and sealed through the process tube sealing ring 7 to play a sealing role, according to the attached drawings 1, 2 and 3, the water cooling jacket 2 is internally provided with a cooling water channel 14, the cooling water channel 14 is tightly attached to a furnace door sealing ring 6 and the process tube sealing ring 7, and due to the work of a heater 10, the furnace door sealing ring 6 and the process tube sealing ring 7 take away high heat, so that the heat is taken away by the rapid flow of cooling, the heat influence of the heat conducted by the process tube main body 1 on the furnace door sealing ring 6 and the process tube sealing ring 7 can be well blocked, so that the temperature of the furnace door sealing ring 6 and the process tube sealing ring 7 is kept at low temperature, the sealing effect is ensured, the service lives of the furnace door sealing ring 6 and the process tube sealing ring 7 are obviously prolonged, the shutdown rate of replacing the furnace door sealing ring 6 and the process tube sealing ring 7 by equipment is obviously reduced, and the yield of the equipment is obviously improved.

The outer wall of one side of the equipment support body 12 is fixedly provided with a front furnace door 9 through a furnace door sealing ring 6, the outer wall of the other side of the equipment support body 12 is fixedly provided with a rear furnace door 8 through the furnace door sealing ring 6, a heater 10 is fixedly sleeved on the outer surface of the process tube main body 1, a sheet boat and a silicon wafer 11 are arranged inside the process tube main body 1, the furnace door sealing ring 6 is provided with two groups, a closed process cavity is formed between the front furnace door 9 and the rear furnace door 8 through the furnace door sealing ring 6, so that the heater 10 can work to rapidly generate heat in the closed process cavity, the center of the rear furnace door 8 is provided with an air suction opening 13, the air suction opening 13 is communicated with the inside of the process tube main body 1, the air suction opening 13 is arranged outside the rear.

The working principle is as follows: before the process tube is ready for use, a worker opens an external cooling water system, enters a water channel 14 through a water nozzle 3 at the lower part and then flows out from the water nozzle 3 at the upper part to form a continuous cooling water supply system, when a heater 10 works, the process tube main body 1 and a boat and a silicon wafer 11 inside the process tube main body are subjected to process heating by heat radiation of the heater, and the process tube main body 1 starts to generate heat, the heat affects the process tube sealing ring 7 by the heat conducted by the process tube main body 1, due to the design of a water cooling sleeve 2 and a cooling water channel 14 at the end part and the close fit effect of the cooling water channel 14 and the process tube sealing ring 7 and the furnace door sealing ring 6, the heat at the furnace door 6 and the process tube sealing ring 7 is taken away by the rapid flow of cooling water inside the cooling water channel 14, thereby make the temperature of furnace gate sealing washer 6 and technology pipe sealing washer 7 department keep low temperature, guaranteed sealed effect and the life of obvious extension sealing washer, also obviously reduced the outage rate that equipment changed furnace gate sealing washer 6 and technology pipe sealing washer 7 certainly, obviously improve equipment output, go up do the utility model discloses a whole theory of operation.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (6)

1. The utility model provides a both ends area water-cooling's technology pipe, includes technology pipe main part (1), water-cooling jacket (2), business turn over water mouth (3), front and back mounting flange (4), furnace gate sealing washer (6), technology pipe sealing washer (7), sealed hold-down flange (5) back furnace gate (8), forehearth door (9), piece boat and silicon chip (11) and equipment support body (12), its characterized in that: the inner wall of equipment support body (12) has process tube main part (1) through front and back mounting flange (4) fixed mounting, the position department that process tube main part (1) both ends are close to equipment support body (12) has water cooling jacket (2) through front and back mounting flange (4) fixed mounting, and the surface cover of water cooling jacket (2) is equipped with sealed hold-down flange (5) and process tube sealing washer (7), one side outer wall of equipment support body (12) has preceding furnace gate (9) through furnace gate sealing washer (6) fixed mounting, the opposite side outer wall of equipment support body (12) has back furnace gate (8) through furnace gate sealing washer (6) fixed mounting, the external fixed surface cover of process tube main part (1) is equipped with heater (10), and inside wafer boat and the silicon chip (11) of being provided with of process tube main part (1).

2. A process tube with water cooling at both ends as claimed in claim 1, wherein: the upper and lower parts of the ports at the two ends of the process tube main body (1) are provided with water inlet and outlet nozzles (3), and the water inlet and outlet nozzles (3) are provided with two groups.

3. A process tube with water cooling at both ends as claimed in claim 1, wherein: the process pipe sealing rings (7) are compressed at positions between the front and rear fixing flanges (4) and the sealing and pressing flange (5), and the water cooling jacket (2), the sealing and pressing flange (5) and the front and rear fixing flanges (4) are compressed and sealed through the process pipe sealing rings (7).

4. A process tube with water cooling at both ends as claimed in claim 1, wherein: and cooling water channels (14) are formed in the water cooling jacket (2), and the cooling water channels (14) are tightly attached to the furnace door sealing ring (6) and the process tube sealing ring (7).

5. A process tube with water cooling at both ends as claimed in claim 1, wherein: two groups of furnace door sealing rings (6) are arranged, and a closed process chamber is formed between the front furnace door (9) and the rear furnace door (8) through the furnace door sealing rings (6).

6. A process tube with water cooling at both ends as claimed in claim 1, wherein: an air extraction opening (13) is formed in the center of the rear furnace door (8), the air extraction opening (13) is communicated with the interior of the process tube main body (1), and a tail exhaust system is fixedly mounted on the outer side of the rear furnace door (8) of the air extraction opening (13).

Images