CN106048731B - A kind of low pressure diffusion furnace furnace door sealing device - Google Patents
A kind of low pressure diffusion furnace furnace door sealing device Download PDFInfo
- Publication number
- CN106048731B CN106048731B CN201610660200.9A CN201610660200A CN106048731B CN 106048731 B CN106048731 B CN 106048731B CN 201610660200 A CN201610660200 A CN 201610660200A CN 106048731 B CN106048731 B CN 106048731B
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- fire door
- low pressure
- adjustment
- fixed
- spring
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
Abstract
The invention discloses a kind of low pressure diffusion furnace furnace door sealing devices, it include: the fire door for being arranged successively and being coaxially disposed from front to back, fixing axle and fixing seat, the rear end face center of fire door is fixed with bearing block, plain radial bearing is equipped in bearing block, the outer ring of plain radial bearing is fixed in bearing block, the inner ring fixing sleeve of plain radial bearing is in the front end of fixing axle, the rear end of fixing axle is fixed in fixing seat, the front end face of fixing seat is further fixed on support plate, and support plate, which is equipped with, is equipped at intervals with multiple spring adjustment components.The present invention has zero offset capability, can better meet the seal request of low pressure diffusion furnace reaction chamber.
Description
Technical field
The present invention relates to the fire door of diffusion furnace more particularly to a kind of low pressure diffusion furnace furnace door sealing devices.
Background technique
In photovoltaic industry, high temperature dispersing furnace is mainly used for being doped to form PN junction to monocrystalline silicon piece, polysilicon chip.With
The development of diffusion technique, the uniform doping of traditional high temperature dispersing furnace be unable to satisfy advanced battery process route technology need
It asks, low pressure diffusion furnace comes into being, however low pressure diffusion technique need to carry out under vacuum conditions, and the sealing performance of fire door is direct
Influence the quality of production.
Furnace door sealing device in the prior art, majority are all that fire door is directly anchored to fire door fixing seat by screw
On, the position of fire door relies primarily on adjusting screw and is adjusted, when the screw by adjusting fire door fixing seat adjusts fire door
Whole, this mode by screw adjustment operates fairly cumbersome, need to manually be adjusted, and be frequently necessary to repeatedly more
Secondary adjusting, production efficiency are low.
Summary of the invention
In order to solve the above technical problems, the present invention proposes a kind of low pressure diffusion furnace furnace door sealing device, oven door sealing dress
It sets with zero offset capability, good sealing effect can be easily reached as long as being adjusted slightly.
The technical solution adopted by the present invention is that designing a kind of low pressure diffusion furnace furnace door sealing device, comprising: from front to back according to
Fire door, fixing axle and the fixing seat of secondary arrangement and coaxial arrangement, the rear end face center of fire door is fixed with bearing block, sets in bearing block
There is plain radial bearing, the outer ring of plain radial bearing is fixed in bearing block, and the inner ring fixing sleeve of plain radial bearing is solid
The rear end of the front end of dead axle, fixing axle is fixed in fixing seat.
The front end face of fixing seat is further fixed on support plate, and support plate, which is equipped with, is equipped at intervals with multiple spring adjustment components, until
It is few that there are three spring adjustment component is evenly distributed centered on the axis of fire door.It includes: to be fixed on support plate that spring, which adjusts component,
On adjustment sleeve, the adjusting screw in adjustment sleeve, rear end is located in adjustment sleeve, the top stretched out to fire door of front end
Column, the spring in adjustment sleeve, the both ends of spring are compressed between adjusting screw and top pillar.
Wherein, top pillar is made of the rear cylinder being located in adjustment sleeve and the preceding cylinder stretched out outside adjustment sleeve, rear cylinder
Diameter is greater than preceding body diameter, and the front end for adjusting sleeve is equipped with and accommodates the telescopic hole that preceding cylinder activity passes through just.
Preferably, the rear inside wall for adjusting sleeve is equipped with interior adjustment screw thread, and the lateral wall of adjusting screw is equipped with and interior tune
The whole external-adjuster screw thread being threadedly engaged, rotation adjusting screw can adjust its front-rear position in adjustment sleeve.
Preferably, the rear end face of fire door is also secured to a few stop pin, and support plate is equipped with diameter and is greater than stop pin
Limit hole, stop pin protrude into the limit hole.
Preferably, it is set in support plate there are four spring adjustment component, two of them spring adjustment component is located at the upper of fire door
Portion two sides, other two spring adjustment component are arranged in a linear among the lower part of the fire door.
Preferably, fixed there are three stop pin evenly distributed centered on the axis of fire door on fire door, two of them are anti-
It ships and resell on another market positioned at the lower part two sides of fire door, another stop pin is located among the top of fire door.
With the prior art, the present invention is using plain radial bearing as core component, work of the fire door in plain radial bearing
The universal space that plain radial bearing is formed is constrained with lower tiltable oscillation adjustment position, then using spring, promotion furnace
Door wallowing motion reaches the effect for automatically correcting position and sealing reaction chamber to fit closely the sealing flange at reaction chamber port
Fruit.
Detailed description of the invention
Below with reference to embodiment and attached drawing, the present invention is described in detail, in which:
Fig. 1 is schematic rear view of the invention；
Fig. 2 is the diagrammatic cross-section of A-A in Fig. 1；
Fig. 3 is the enlarged diagram in Fig. 2 at B；
Fig. 4 is stereoscopic schematic diagram of the invention；
Fig. 5 is the diagrammatic cross-section that the present invention is sealed in reaction chamber port.
Specific embodiment
As shown in Figure 1, 2, low pressure diffusion furnace furnace door sealing device proposed by the present invention, comprising: the fire door 1 of coaxial arrangement,
Fixing axle 2 and fixing seat 3, fire door 1, fixing axle 2 and fixing seat 3 are arranged successively from front to back, and the rear end of fixing axle 2 is fixed on
In reservation 3, the front end of fixing axle 2 is connect by a plain radial bearing 4 with the rear end face of fire door 1.
As shown in figure 3, the front end of fixing axle 2 is fixed in the inner ring of plain radial bearing 4, the front end of fixing axle 2 is equipped with
One spacing collar that outwardly protrudes of circle, the sleeve 5 being also cased in fixing axle 2 between plain radial bearing 4 and fixing seat 3, Gu
The rear end of dead axle 2 is equipped with threaded hole, and fixing seat 3 is equipped with the locking hole for being connected to the threaded hole, and fixing axle 2 is fixed by screw
In fixing seat 3, the inner ring of plain radial bearing 4 is clamped between spacing collar and sleeve 5 after screw locking, realizes its inner ring
With being fixedly connected for fixing axle 2.
The rear end face center of fire door 1 is fixed with bearing block 6, and the front end of bearing block 6 is opening, and plain radial bearing 4 is located at
In the bearing block 6, washer 7 is additionally provided between the outer ring of plain radial bearing 4 and the rear end face of fire door 1, the rear end of bearing block 6 is set
There is through-hole, the outer ring of plain radial bearing 4 is limited in bearing block 6 by the size of through-hole just, and bearing block 6 and fire door 1 are fixed
Afterwards, the outer ring of plain radial bearing 4 is clamped between washer 7 and bearing block, realizes being fixedly connected for its outer ring and fire door 1.
As shown in Fig. 1,2,4, the front end face of fixing seat 3 is further fixed on support plate 8, and support plate 8 is more equipped with being equipped at intervals with
A spring adjusts component, and at least there are three spring adjustment component is evenly distributed centered on the axis of fire door 1.Spring adjusts component
It include: adjustment sleeve 9, adjusting screw 10, spring 11 and top pillar 12.
Adjustment sleeve 9 is fixed in support plate 8, and support plate 8, which is equipped with, accommodates the mounting hole that adjustment sleeve 9 passes through, adjustment
Sleeve 9 is fixed in support plate 8 by nut seat 13 and nut 14, and the front end outer side wall of adjustment sleeve 9 is equipped with outer fixed thread,
Nut seat 13 and nut 14 are respectively fitted in the outer fixed thread, and support plate 8 is clamped between nut seat 13 and nut 14, are realized
Adjustment sleeve 9 is fixedly connected with support plate 8.Adjusting screw 10 is connected in the rear end of adjustment sleeve 9, and top pillar 12 is by preceding cylinder
The rear cylinder for being greater than preceding cylinder with diameter is constituted, and rear cylinder is located in adjustment sleeve 9, and preceding cylinder is located at the export-oriented furnace of adjustment sleeve 9
Door 1 stretches out, and the front end of adjustment sleeve 9 is equipped with the telescopic hole that lucky cylinder activity before accommodating passes through, and the both ends of spring 11 are compressed in
Between adjusting screw 10 and the rear end of top pillar 12, since spring 11 is in compressive state, guarantee oriented always on top pillar 12 be pushed forward
The thrust of dynamic fire door 1.
As shown in figure 5, actual installation using when fixing seat 3 rear end be also connected with driving mechanism, pushed away by driving mechanism
Dynamic furnace door sealing device is mobile to reaction chamber 15, and the port sealing of reaction chamber 15 is equipped with sealing flange 16, the end of sealing flange 16
Face is equipped with a circle and outwardly protrudes sealing ring 17, and fire door 1 is mobile until being fitted on sealing flange 16 completely, extruding sealing ring 17
To complete the sealing of reaction chamber 15.Since plain radial bearing 4 is a kind of spherical bearing, sliding contact surface is one
Internal Spherical Surface and a spherical outside surface, can be in any angle rotary oscillation when movement, and tiltable is swung after plain radial bearing 4 is installed
The surface of gluing, sealing flange 16 is gone to, to adapt to sealing flange 16 and sealing ring 17 automatically, position adjustment effect is very good, simultaneously
During 1 rotary oscillation of fire door, since multiple top pillars 12 have the thrust pushed forward to fire door 1 always, guarantee fire door 1
While adapting to sealing flange 16 and sealing ring 17, it can be closely compressed on the surface of sealing ring 17, sealing performance is more preferable.
Preferably, it as shown in Fig. 1,4, is set in support plate 8 there are four spring adjustment component, two of them spring adjusts component
Positioned at the top two sides of fire door 1, other two spring adjustment component is arranged in a linear among the lower part of fire door 1, this is because
There are gravity for fire door 1, and fire door 1 can be to lower swing under the effect of gravity, i.e., top turns forward, bottom tilts backwards, in fire door 1
Lower part among two springs be set adjust components fire door 1 can be made to keep vertically, each position after being bonded with sealing flange 16 of fire door 1
The stress set is also relatively uniform.
More preferably, as shown in Fig. 2, the rear inside wall of adjustment sleeve 9 is equipped with interior adjustment screw thread, the outside of adjusting screw 10
Wall is equipped with can be such that it is moved forward and backward in adjustment sleeve 9 with the interior external-adjuster screw thread for adjusting and being threadedly engaged, rotation adjusting screw 10,
To change the compressive state of spring 11, adjustment top pillar 12 acts on the thrust on fire door 1.
Further, as shown in Figure 2,3, fire door 1 is rotated for 360 ° with plain radial bearing 4 for center in order to prevent, fire door 1
Rear end face be also secured to a few stop pin 18, support plate 8 is equipped with the limit hole that diameter is greater than stop pin 18, stop pin 18
It protrudes into the limit hole, both will not influence the rotary oscillation of fire door 1 in a certain range, again limit 360 ° of rotations of fire door 1,
In the present embodiment, as shown in Fig. 1,4, fixed on fire door 1 there are three stop pins evenly distributed centered on the axis of fire door 1
18, two of them stop pin 18 is located at the lower part two sides of fire door, another stop pin 18 is located among the top of fire door 1.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (6)
1. a kind of low pressure diffusion furnace furnace door sealing device, comprising: the fire door (1) that is arranged successively and is coaxially disposed from front to back, solid
Dead axle (2) and fixing seat (3), which is characterized in that the rear end face center of the fire door (1) is fixed with bearing block (6), the bearing
Plain radial bearing (4) are equipped in seat (6), the outer ring of the plain radial bearing (4) is fixed in the bearing block (6), institute
The inner ring fixing sleeve of plain radial bearing (4) is stated in the front end of the fixing axle (2), the rear end of the fixing axle (2) is fixed on
In the fixing seat (3)；
The front end face of the fixing seat (3) is further fixed on support plate (8), and the support plate (8) is equipped with and is equipped at intervals with multiple bullets
Spring adjusts component, and at least there are three spring adjustment component is evenly distributed centered on the axis of the fire door (1)；
The spring adjustment component includes: the adjustment sleeve (9) being fixed on the support plate (8), is set to the adjustment sleeve
(9) adjusting screw (10) in, the top pillar that rear end is located in adjustment sleeve (9), front end is stretched out to the fire door (1)
(12), the spring (11) being set in adjustment sleeve (9), the both ends of the spring (11) are compressed in the adjusting screw (10)
Between the top pillar (12).
2. low pressure diffusion furnace furnace door sealing device as described in claim 1, which is characterized in that the top pillar (12) is by being located at institute
It states the rear cylinder adjusted in sleeve (9) and stretches out the preceding cylinder of adjustment sleeve (9) outside and constitute, the rear body diameter is greater than
Preceding body diameter, the front end of adjustment sleeve (9) is equipped with accommodates the telescopic hole that the preceding cylinder activity passes through just.
3. low pressure diffusion furnace furnace door sealing device as claimed in claim 2, which is characterized in that after the adjustment sleeve (9)
Inner sidewall is held to be equipped with interior adjustment screw thread, the lateral wall of the adjusting screw (10) is equipped with the transferring being threadedly engaged with the interior adjustment
Whole screw thread, rotating the adjusting screw (10) can adjust its front-rear position in adjustment sleeve (9).
4. low pressure diffusion furnace furnace door sealing device as described in any one of claims 1 to 3, which is characterized in that the fire door (1)
Rear end face be also secured to a few stop pin (18), the support plate (8) is equipped with diameter and is greater than the stop pin (18)
Limit hole, the stop pin (18) are protruded into the limit hole.
5. low pressure diffusion furnace furnace door sealing device as claimed in claim 4, which is characterized in that the support plate (8) is equipped with
Four springs adjust component, and two of them spring adjustment component is located at the top two sides of the fire door (1), other two spring tune
Whole group part is arranged in a linear among the lower part of the fire door (1).
6. low pressure diffusion furnace furnace door sealing device as claimed in claim 5, which is characterized in that be fixed on the fire door (1)
Three evenly distributed stop pins (18) centered on the axis of the fire door (1), two of them stop pin (18) are located at described
The lower part two sides of fire door (1), another stop pin (18) are located among the top of the fire door (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610660200.9A CN106048731B (en) | 2016-08-12 | 2016-08-12 | A kind of low pressure diffusion furnace furnace door sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610660200.9A CN106048731B (en) | 2016-08-12 | 2016-08-12 | A kind of low pressure diffusion furnace furnace door sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106048731A CN106048731A (en) | 2016-10-26 |
| CN106048731B true CN106048731B (en) | 2019-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610660200.9A Active CN106048731B (en) | 2016-08-12 | 2016-08-12 | A kind of low pressure diffusion furnace furnace door sealing device |
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| Country | Link |
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| CN (1) | CN106048731B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205980793U (en) | 2016-08-12 | 2017-02-22 | 深圳市捷佳伟创新能源装备股份有限公司 | Low pressure diffusion furnace furnace gate sealing device |
| CN106546101B (en) * | 2016-10-27 | 2019-03-08 | 湖南红太阳光电科技有限公司 | A kind of diffusion furnace stove gate device |
| CN109423697B (en) * | 2017-08-25 | 2021-02-23 | 中国电子科技集团公司第四十八研究所 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
| CN110600398B (en) * | 2019-07-30 | 2023-02-07 | 深圳市拉普拉斯能源技术有限公司 | Semiconductor processing equipment |
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| CN103884647A (en) * | 2012-12-20 | 2014-06-25 | 山东新华医疗器械股份有限公司 | Bottle pressing apparatus of automatic lamp inspector |
| CN204490990U (en) * | 2014-12-31 | 2015-07-22 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of door structure of PECVD device |
| CN205980793U (en) * | 2016-08-12 | 2017-02-22 | 深圳市捷佳伟创新能源装备股份有限公司 | Low pressure diffusion furnace furnace gate sealing device |
-
2016
- 2016-08-12 CN CN201610660200.9A patent/CN106048731B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5252062A (en) * | 1992-10-15 | 1993-10-12 | International Business Machines Corporation | Thermal processing furnace |
| CN200972331Y (en) * | 2006-10-31 | 2007-11-07 | 北京七星华创电子股份有限公司 | Door sealing device of diffusion furnace |
| CN201081550Y (en) * | 2007-01-12 | 2008-07-02 | 敦南科技股份有限公司 | Improved feeder mechanism of diffusion oven |
| CN201532119U (en) * | 2009-09-25 | 2010-07-21 | 深圳市捷佳伟创微电子设备有限公司 | Automatic furnace door cover of diffusion furnace |
| CN201990767U (en) * | 2011-02-27 | 2011-09-28 | 百力达太阳能股份有限公司 | Diffusion-room furnace-door device |
| CN102851741A (en) * | 2012-04-05 | 2013-01-02 | 深圳市大族光伏科技股份有限公司 | Diffusion furnace and furnace door sealing device thereof |
| CN202582204U (en) * | 2012-04-20 | 2012-12-05 | 中国电子科技集团公司第四十八研究所 | Furnace door sealing device for diffusion furnace |
| CN103884647A (en) * | 2012-12-20 | 2014-06-25 | 山东新华医疗器械股份有限公司 | Bottle pressing apparatus of automatic lamp inspector |
| CN203432348U (en) * | 2013-07-11 | 2014-02-12 | 上海大学 | Automatic furnace door sealing device for diffusion furnace |
| CN204490990U (en) * | 2014-12-31 | 2015-07-22 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of door structure of PECVD device |
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| CN106048731A (en) | 2016-10-26 |
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Address after: 518000 No. 62 Jinniu East Road, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Shenzhen S. C New Energy Equipment Co., Ltd. Address before: 518000 D Silicon Valley, Guangdong Province, Longgang, Henggang, Shenzhen No. 89 Ping Ping Road, No. Patentee before: Shenzhen S. C New Energy Equipment Co., Ltd. |
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