CN200972331Y

CN200972331Y - Door sealing device of diffusion furnace

Info

Publication number: CN200972331Y
Application number: CN 200620148207
Authority: CN
Inventors: 李补忠; 钟华; 盛金龙; 郝晓明
Original assignee: Beijing Sevenstar Electronics Co Ltd
Current assignee: Beijing Sevenstar Electronics Co Ltd
Priority date: 2006-10-31
Filing date: 2006-10-31
Publication date: 2007-11-07
Anticipated expiration: 2016-10-31

Abstract

The utility model relates to a sealing device for furnace door in expansion technique for closed pipe of the furnace, including a quartz furnace door and SiC pulp. The sealing device includes an O-shape sealing ring, a fixed pipe and a bellow, the O-shape sealing ring is arranged between the quartz furnace door and a craft pipe, the fixed pipe closely contacts the SiC pulp outside and a flange that is square inside and round outside is arranged at the SiC pulp hole on the quartz furnace door. The bellow is positioned between the protruded flange and the fixed pipe. The utility model has an additional O-shape sealing ring between the quartz furnace door and the craft pipe in order to seal the space between them, at the same time, a flange that is square inside and round outside is arranged at the place where the quartz furnace door contacts the SiC pulp, which exerts no influence over the operation of SiC, settles the problem of expanding closed pipe and avoids environment pollution by exhaust air.

Description

The furnace door sealing device of diffusion furnace

Technical field

The utility model relates to the furnace door sealing device in a kind of push-and-pull boat system in diffusion furnace stopped pipe diffusion technique.

Background technology

Furnace door sealing device is contained in the push-and-pull boat system of diffusion furnace, and the motion by the push-and-pull boat is fitted furnace door sealing device and process duct closely, and is isolated and keep certain tightness with the outside, satisfies the stopped pipe diffusion technique that is used on the manufacture of solar cells line.

Traditional diffusion furnace all is an open pipe technology, and promptly fire door and process duct do not need sealing.Therefore, stove gate device is fairly simple, has only the center rod, and the SiC oar directly contacts with base, cover plate, and quartzy fire door is a flat plectane, has chimney simultaneously, makes convenient discharge of residual gas in the process duct.Such structure can't satisfy stopped pipe diffusion requirement, the residual gas contaminated environment of Pai Chuing simultaneously.

The utility model content

Technical problem to be solved in the utility model is to propose a kind of furnace door sealing device that is used in the diffusion furnace stopped pipe diffusion technique, and good airproof performance is easy to operate.

For this reason, the utility model provides the furnace door sealing device in a kind of push-and-pull boat system that is used in diffusion furnace, include quartzy fire door and SiC oar, described sealing device includes O RunddichtringO, stationary pipes and bellows, and described O RunddichtringO is arranged between quartzy fire door and the process duct; Described stationary pipes closely contacts outside the SiC oar, and perforation place of SiC oar is provided with a square internally and round externally projection flange on quartzy fire door; Described bellows is arranged between projection flange and the stationary pipes.

Described furnace door sealing device includes the push rod of five energy elastic telescopics, distributes in quartzy fire door outer circumference, and leans on quartzy fire door, and the other end passes the stainless steel fire door, and is connected by big spring with the stainless steel fire door; These five push rods all are fixed on the support.

The utility model has following advantage: set up the O RunddichtringO between quartzy fire door and process duct, will seal between fire door and the process duct, be provided with a square internally and round externally projection flange at quartzy fire door and SiC oar contact position simultaneously, do not influence the operation of SiC oar; Solve stopped pipe diffusion requirement, avoided the residual gas contaminated environment of discharging simultaneously.

Description of drawings

Below in conjunction with drawings and embodiments the utility model is described in further detail.

Fig. 1 is a structural representation of the present utility model;

Fig. 2 is the right view of Fig. 1.

Wherein: 1: push rod 2: regulate the head of a nail 3: quartzy fire door 4:O RunddichtringO

5: rod 6: projection flange 7: bellows 8: stationary pipes

9: stainless steel fire door 10:SiC oar 11: big spring

12: little spring 13: knob 14: base

15: push-and-pull boat 16: support

The specific embodiment

As illustrated in fig. 1 and 2 a kind of is used in the furnace door sealing device in the push-and-pull boat system of diffusion furnace, be fixedly connected on the push-and-pull boat 15 by base 14, under 15 effects of push-and-pull boat, move, this furnace door sealing device includes quartzy fire door 3 and SiC oar 10, have seal groove on the quartzy fire door 3, load onto O RunddichtringO 4; The quartzy fire door of choosing with rod 53 closely contacts with process duct by O RunddichtringO 4, avoids the residual gas in the process duct to discharge; Influence the life-span in order to prevent SiC oar 10 from contacting with outside atmosphere, 10 perforation place of SiC oar are provided with a square internally and round externally projection flange 6 on quartzy fire door 3, and adopt stationary pipes 8 closely to contact outside SiC oar 10 with corrosion-resistant function, between projection flange 6 and stationary pipes 8, adopt simultaneously and have corrosion-resistant function bellows 7, handled easily.

Quartzy fire door 3 can be regulated sealing condition by five push rods 1 that are provided with, five push rods 1 distribute in quartzy fire door 3 outer circumference, and be equipped with between the quartzy fire door 3 and regulate the head of a nail 2, regulate the stressed of quartzy fire door 3, push rod 1 other end passes stainless steel fire door 9, and be connected by big spring 11 with stainless steel fire door 9, five push rods 1 all are fixed on the support 16; Push rod 1 for two bars of suit and in the little spring 12 established form, have the elastic telescopic performance, and be provided with in push rod 1 another termination and can regulate little spring 12 flexible knobs 13.

Quartzy fire door 3 mainly provides pressure by push-and-pull boat 15 with the sealing property of process duct, but can also be by little spring 12 local adjustment.By above improvement, realized the sealing function of fire door.

Furnace door sealing device moves under push-and-pull boat 15 effect, and when quartzy fire door 3 touches process duct, promptly O RunddichtringO 4 closely contacts with process duct, and this moment, push rod 1 elasticity owing to self played cushioning effect, avoided the damage of quartzy fire door 3; The stainless steel fire door 9 of corresponding this moment also contacts with the external door of diffusion furnace, plays damping effect equally by big spring 11.Adopt knob 13 to finely tune sealing then.

Claims

1, a kind of furnace door sealing device of diffusion furnace, include quartzy fire door (3) and SiC oar (10), it is characterized in that: described sealing device includes O RunddichtringO (4), stationary pipes (8) and bellows (7), and described O RunddichtringO (4) is arranged between quartzy fire door (3) and the process duct; Described stationary pipes (8) closely contacts outside SiC oar (10), and is provided with a square internally and round externally projection flange (6) in last SiC oar (10) perforation place of quartzy fire door (3); Described bellows (7) is arranged between projection flange (6) and the stationary pipes (8).

2, the furnace door sealing device of diffusion furnace according to claim 1, it is characterized in that: described furnace door sealing device includes the push rod (1) of five energy elastic telescopics, distribute in quartzy fire door (3) outer circumference, and lean on quartzy fire door (3), the other end passes stainless steel fire door (9), and is connected by big spring (11) with stainless steel fire door (9); These five push rods (1) all are fixed on the support (16).