CN203432348U - Automatic furnace door sealing device for diffusion furnace - Google Patents
Automatic furnace door sealing device for diffusion furnace Download PDFInfo
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- CN203432348U CN203432348U CN201320412103.XU CN201320412103U CN203432348U CN 203432348 U CN203432348 U CN 203432348U CN 201320412103 U CN201320412103 U CN 201320412103U CN 203432348 U CN203432348 U CN 203432348U
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- stove
- door
- fire door
- furnace
- diffusion furnace
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Abstract
The utility model discloses an automatic furnace door sealing device for a diffusion furnace. The automatic furnace door sealing device comprises a device base, a platform device and a furnace door device. A furnace door opening/closing mechanism of the platform device is a two-stage linkage mechanism which is composed of a sliding block mechanism and a four-bar linkage mechanism, wherein a motor drives a sliding block to move, and a draw bar drives a side link of the four-bar linkage mechanism to swing to further drive the furnace door device to move vertically through connecting rods; meanwhile, the platform device is driven by another motor to move horizontally to be matched with the sliding block to close and open a furnace mouth of the diffusion furnace. The automatic furnace door sealing device for the diffusion furnace can open and close a furnace door system automatically and ensure good sealing performance when the furnace door system is closed so that heat loss and diffusion gas leakage inside the furnace can be reduced; meanwhile, the flexible structure and construction of the furnace door effectively avoids rigid collisions between a furnace door and the furnace mouth, so that the diffusion furnace is well protected, the service life and maintenance cycle of the diffusion furnace are prolonged, and therefore the automatic furnace door sealing device is particularly suitable for being applied to the field of solar cell manufacturing.
Description
Technical field
The utility model relates to a kind of stove door switch sealing device, particularly relates to a kind of auto stove-door switch seal device, is applied to diffusion furnace and solar cell preparation field.
Background technology
Along with the rise of renewable eco-friendly power source exploitation, solar energy more and more receives people's concern.In recent years, the industry that solar cell has become countries in the world common concern and greatly developed, diffusion furnace is one of equipment important in solar cell manufacture process, and raising capacity utilization, reducing maintenance cost, save consumptive material, is to reduce costs indispensable necessary links.Consider economy, the stove gate device of diffusion furnace opens and closes automaticity and sealing can directly affect production cost, the sealing property of the stove gate device of diffusion furnace directly affects the utilization rate of diffuse source and the transformation efficiency of solar cell, its high automation degree and reliability can increase the utilization rate of equipment greatly simultaneously, and then reduce production costs, also can improve the quality of products and productivity ratio, so automaticity and the sealing of the stove gate device of diffusion furnace are most important, the complex structure of the sealing device of current diffusion furnace, while closing fire door system, easily producing rigid collision interferes, reduced the service life of fire door system, result of use is desirable not enough.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art; a kind of diffusion furnace auto stove-door sealing device is provided; energy automatic open close fire door system; when closed fire door system, guarantee good sealing, to reduce the loss of furnace heat and leaking of diffusion gas; the flexible structure of fire door and structure have effectively been avoided the rigid collision of fire door and fire door simultaneously; well protected equipment, extended its life-span and maintenance cycle, be particularly suitable for applying in solar cell preparation field.
For reaching foregoing invention, create object, the utility model adopts following technical proposals:
A kind of diffusion furnace auto stove-door sealing device, comprise device pedestal, stage apparatus and stove gate device, the fixed seat at bottom of stage apparatus is arranged on device pedestal, when closing fire door, the stove door switch mechanism of stage apparatus sets the motion of track by output, promote stove gate device approaching to the fire door of diffusion furnace, make diffusion furnace fire door close and seal, when opening fire door, the stove door switch mechanism of stage apparatus makes stove gate device separated with fire door, thereby open loose furnace door, stage apparatus is provided with stove door switch mechanism, stove door switch mechanism forms two-stage link gear by slide block mechanism and quadric chain, quadric chain is by sloping platform plate, the first side link forms plane mechanism with the second side link together with connecting rod, sloping platform plate is as frame and fixedly mount on the leading portion plate face of landing slab, sloping platform plate and landing slab are fixedly connected to form the fixed seat at bottom of stage apparatus, on sloping platform plate, be provided with two twisted branch seats, sloping platform plate is rotationally connected with the first side link and the second side link respectively, one end of the connecting rod being rotationally connected with the second side link stretches out along the length direction of connecting rod, form the overhanging end of encorbelmenting of connecting rod, the overhanging end of encorbelmenting of connecting rod is connected with stove gate device by bindiny mechanism, the movement locus that connecting rod is set as the driven member output of quadric chain, the first side link is controlled the motion mode of quadric chain as driving member, slide block mechanism is by draw bar, slide block and sliding-rail groove form, sliding-rail groove is fixed on the back segment plate face of landing slab, slide block embeds sliding-rail groove and carries out linear slide, screw mandrel through slide block is driven by motor, slide block is as the nut of screw body, by the rotational transform of motor, be that slide block slides along the linear reciprocation of sliding-rail groove, one end of slide block and draw bar is hinged, the middle part of the other end first side link of draw bar is hinged, slide block is by push-and-pull draw bar, make the first side link reciprocally swinging of quadric chain, and then drive stove gate device to carry out sealing and breakdown action to the fire door of diffusion furnace by connecting rod.
Improvement as technical solutions of the utility model, stove gate device is mainly comprised of front end stove door plant, rear end fire door connecting portion and middle flexible linking device, rear end fire door connecting portion is connected with the overhanging end of encorbelmenting of connecting rod by connector, middle flexible linking device is arranged between front end stove door plant and rear end fire door connecting portion, make front end stove door plant and rear end fire door connecting portion carry out spatial translation campaign in opposite directions or dorsad along boiler tube axis direction, when closing fire door, make the fire door flexible contact of front end stove door plant and diffusion furnace.
Further improvement as technical solutions of the utility model, the middle flexible linking device of stove gate device is telescopic sleeve mechanism, by outer cylinder body, inner barrel and spring assembling form, the end of outer cylinder body is fixedly connected with rear end fire door connecting portion, the front end of inner barrel is fixedly connected with stove gate device, inner barrel is nested in outer cylinder body inner chamber, inner barrel carries out Linear telescopic slip along outer cylinder body inner chamber slideway, spring housing is being stated on inner barrel outer surface, the two ends of spring are fixedly connected with the front end of front end stove door plant and outer cylinder body respectively, when closing fire door, the contraction in length of middle flexible linking device, spring compressive deformation, when opening fire door, middle flexible linking device length extending, spring is reinstatement gradually.
Further improvement as technique scheme, the bottom of landing slab is movably arranged on device pedestal, under the driving of another motor, by guiding mechanism, making landing slab carry out straight line advance and retreat along the plane of movement of quadric chain moves, when closing fire door, make stove gate device close along the fire door towards diffusion furnace on boiler tube axis direction, and between stove gate device and the fire door of diffusion furnace, give and set big or small pretightning force, by regulating the size of the distortion support force of pretightning force and spring, the fire door of stove gate device and diffusion furnace is sealed and matched.
As the further improvement of technique scheme, the overhanging end of encorbelmenting of stove gate device and connecting rod is preferably connected by sphere connecting mechanism.
The utility model compared with prior art, has following substantive distinguishing features and advantage:
1. the diffusion furnace of application the utility model auto stove-door sealing device has good sealing, to reduce the loss of furnace heat and leaking of diffusion gas, employing is with the stove gate device of middle flexible linking device, when closing fire door, realize flexible contact, avoided rigid collision, improved the service life of fire door system, under the certain pretightning force of drive unit, it has better sealing property.
2. the utility model diffusion furnace auto stove-door sealing device has the advantages such as simple in structure, precision is high, action is quick and ride comfort is good, and power set drive quadric chain that stove gate device is accurately aimed at fire door.
3. the utility model diffusion furnace auto stove-door sealing device drives stove gate device at vertical direction with along moving on boiler tube axis direction both direction by two motor drivers, the space of regulation output movement locus is larger, operation is controlled simpler, automaticity is higher, efficiency is also significantly improved, and better tightness.
Accompanying drawing explanation
Fig. 1 is the fire door system architecture schematic diagram of application the utility model embodiment mono-diffusion furnace auto stove-door sealing device.
Fig. 2 is the stove door switch mechanism structure schematic diagram of the stage apparatus of the utility model embodiment mono-.
Fig. 3 is that the stove gate device of the utility model embodiment bis-is at the structural representation closing under state.
Fig. 4 is the stove gate device of the utility model embodiment bis-structural representation under opening.
Fig. 5 is the structural representation that the connecting rod of the utility model embodiment tetra-is connected by ball bindiny mechanism with stove gate device.
The specific embodiment
Preferred embodiment accompanying drawings of the present utility model is as follows:
embodiment mono-:
In the present embodiment, referring to Fig. 1 and 2, a kind of diffusion furnace auto stove-door sealing device, comprise device pedestal 4, stage apparatus 5 and stove gate device 2, the fixed seat at bottom of stage apparatus 5 is arranged on device pedestal 4, when closing fire door, the stove door switch mechanism of stage apparatus 5 sets the motion of track by output, promote stove gate device 2 approaching to the fire door 1 of diffusion furnace, make diffusion furnace fire door close and seal, when opening fire door, the stove door switch mechanism of stage apparatus 5 makes stove gate device 2 separated with fire door 1, thereby open loose furnace door, stage apparatus 5 is provided with stove door switch mechanism, stove door switch mechanism forms two-stage link gear by slide block mechanism and quadric chain 3, quadric chain 3 is by sloping platform plate 52, the first side link 33 forms plane mechanism with the second side link 31 together with connecting rod 32, sloping platform plate 52 is as frame and fixedly mount on the leading portion plate face of landing slab 51, sloping platform plate 52 and landing slab 51 are fixedly connected to form the fixed seat at bottom of stage apparatus 5, on sloping platform plate 52, be provided with two twisted branch seats 53, sloping platform plate 52 is rotationally connected with the first side link 33 and the second side link 31 respectively, one end of the connecting rod 32 being rotationally connected with the second side link 31 stretches out along the length direction of connecting rod 32, form the overhanging end of encorbelmenting of connecting rod 32, the overhanging end of encorbelmenting of connecting rod 32 is connected with stove gate device 2 by bindiny mechanism, the movement locus that connecting rod 32 is set as the driven member output of quadric chain 3, the first side link 33 is controlled the motion mode of quadric chain 3 as driving member, slide block mechanism is by draw bar 34, slide block 54 and sliding-rail groove 56 form, sliding-rail groove 56 is fixed on the back segment plate face of landing slab 51, slide block 54 embeds sliding-rail groove 56 and carries out linear slide, screw mandrel through slide block 54 is driven by motor 55, slide block 54 is as the nut of screw body, by the rotational transform of motor 55, be that slide block 54 slides along the linear reciprocation of sliding-rail groove 56, slide block 54 is hinged with one end of draw bar 34, the middle part of the other end first side link 33 of draw bar 34 is hinged, slide block 54 is by push-and-pull draw bar 34, make the first side link 33 reciprocally swingings of quadric chain 3, and then drive the fire door 1 of 2 pairs of diffusion furnaces of stove gate device to carry out sealing and breakdown action by connecting rod 32.In the present embodiment, the stove door switch mechanism of the stage apparatus 5 that slide block mechanism and quadric chain 3 forms has that precision is high, action fast and the advantage such as ride comfort is good, slide block mechanism drives quadric chain 3 that stove gate device 2 is accurately aimed at fire door as power set, to reduce the loss of furnace heat and leaking of diffusion gas, operation is controlled simpler, automaticity is higher, and efficiency is also significantly improved, and better tightness.
embodiment bis-:
The present embodiment and embodiment mono-are basic identical, and special feature is:
In the present embodiment, referring to Fig. 3 and Fig. 4, stove gate device 2 is mainly by front end stove door plant 21, rear end fire door connecting portion 25 and middle flexible linking device form, rear end fire door connecting portion 25 is connected with the overhanging end of encorbelmenting of connecting rod 32 by connector, middle flexible linking device is arranged between front end stove door plant 21 and rear end fire door connecting portion 25, the middle flexible linking device of stove gate device 2 is telescopic sleeve mechanism, by outer cylinder body 24, inner barrel 23 and spring 22 assemble, the end of outer cylinder body 24 is fixedly connected with rear end fire door connecting portion 25, the front end of inner barrel 23 is fixedly connected with stove gate device 2, inner barrel 23 is nested in outer cylinder body 24 inner chambers, inner barrel 23 carries out Linear telescopic slip along outer cylinder body 24 inner chamber slideways, spring 22 is enclosed within to be stated on inner barrel 23 outer surfaces, the two ends of spring 22 are fixedly connected with the front end of outer cylinder body 24 with front end stove door plant 21 respectively, middle flexible linking device makes front end stove door plant 21 and rear end fire door connecting portion 25 carry out spatial translation campaign in opposite directions or dorsad along boiler tube axis direction, when closing fire door, the contraction in length of middle flexible linking device, spring 22 compressive deformations, make fire door 1 flexible contact of front end stove door plant 21 and diffusion furnace, when opening fire door, middle flexible linking device length extending, spring 22 reinstatement gradually.In the present embodiment, referring to Fig. 3, adopt the stove gate device 2 with middle flexible linking device; when closing fire door, can realize flexible contact, avoid rigid collision, well protect equipment; improve the service life of fire door system, extended the maintenance cycle of fire door system.
embodiment tri-:
The present embodiment and previous embodiment are basic identical, and special feature is:
In the present embodiment, the bottom of landing slab 51 is movably arranged on device pedestal 4, under the driving of another motor, by guiding mechanism, making landing slab 51 carry out straight line advance and retreat along the plane of movement of quadric chain 3 moves, when closing fire door, make stove gate device 2 close along the fire door 1 towards diffusion furnace on boiler tube axis direction, and between the fire door 1 of stove gate device 2 and diffusion furnace, give and set big or small pretightning force, by regulating the size of the distortion support force of pretightning force and spring 22, the fire door 1 of stove gate device 2 and diffusion furnace is sealed and matched.In the present embodiment, in the horizontal direction, stove gate device 2 is guaranteed by installation accuracy with the positional precision of fire door, motor 55 on the back segment plate face of landing slab 51 drives slide block 54 and by quadric chain 3, stove gate device 2 in the vertical directions is adjusted to the position of setting, again by the driving of another motor, make stove gate device 2 along on boiler tube axis direction towards fire door near and give and the pretightning force of setting, now fire door is closed and is reached good sealing.
embodiment tetra-:
The present embodiment and previous embodiment are basic identical, and special feature is:
In the present embodiment, referring to Fig. 5, the overhanging end of encorbelmenting of stove gate device 2 and connecting rod 32 is connected by sphere connecting mechanism, make stove gate device 2 along on boiler tube axis direction towards fire door near time, automatically the axis angle of stove gate device 2 is finely tuned, realize angle compensation, avoided between connecting rod 32 and stove gate device 2 because excessive the caused part of appliance distortion of stressed local pressure that unbalance loading causes even damages, when ensureing that stove gate device and fire door carry out accurately aiming at, improve the stability of whole equipment work.
By reference to the accompanying drawings the utility model embodiment is illustrated above; but the utility model is not limited to above-described embodiment; the object that can also create according to utility model of the present utility model is made multiple variation; the change of making under all Spirit Essences according to technical solutions of the utility model and principle, modification, substitute, combination, simplify; all should be equivalent substitute mode; as long as meet structure and aufbauprinciple for the utility model diffusion furnace auto stove-door sealing device, all belong to protection domain of the present utility model.
Claims (6)
1. a diffusion furnace auto stove-door sealing device, comprise device pedestal (4), stage apparatus (5) and stove gate device (2), the fixed seat at bottom of described stage apparatus (5) is arranged on described device pedestal (4), when closing fire door, the stove door switch mechanism of described stage apparatus (5) sets the motion of track by output, promote described stove gate device (2) approaching to the fire door (1) of diffusion furnace, make diffusion furnace fire door close and seal, when opening fire door, the stove door switch mechanism of described stage apparatus (5) makes described stove gate device (2) separated with described fire door (1), thereby open loose furnace door, it is characterized in that: described stage apparatus (5) is provided with stove door switch mechanism, described stove door switch mechanism forms two-stage link gear by slide block mechanism and quadric chain (3), described quadric chain (3) is by sloping platform plate (52), the first side link (33) and the second side link (31) and connecting rod (32) form plane mechanism together, described sloping platform plate (52) is as frame and fixedly mount on the leading portion plate face of landing slab (51), described sloping platform plate (52) and described landing slab (51) are fixedly connected to form the fixed seat at bottom of described stage apparatus (5), on described sloping platform plate (52), be provided with two twisted branch seats (53), described sloping platform plate (52) is rotationally connected with described the first side link (33) and described the second side link (31) respectively, one end of the described connecting rod (32) being rotationally connected with described the second side link (31) stretches out along the length direction of described connecting rod (32), form the overhanging end of encorbelmenting of described connecting rod (32), the overhanging end of encorbelmenting of described connecting rod (32) is connected with described stove gate device (2) by bindiny mechanism, the movement locus that described connecting rod (32) is set as the driven member output of described quadric chain (3), described the first side link (33) is controlled the motion mode of described quadric chain (3) as driving member, described slide block mechanism is by draw bar (34), described slide block (54) and sliding-rail groove (56) form, described sliding-rail groove (56) is fixed on the back segment plate face of described landing slab (51), described slide block (54) embeds described sliding-rail groove (56) and carries out linear slide, screw mandrel through described slide block (54) is driven by motor (55), described slide block (54) is as the nut of screw body, by the rotational transform of described motor (55), be that described slide block (54) slides along the linear reciprocation of described sliding-rail groove (56), described slide block (54) is hinged with one end of described draw bar (34), described in the other end of described draw bar (34), the middle part of the first side link (33) is hinged, described slide block (54) is by draw bar described in push-and-pull (34), make the first side link (33) reciprocally swinging of described quadric chain (3), and then drive stove gate device (2) to carry out sealing and breakdown action to the fire door of diffusion furnace (1) by described connecting rod (32).
2. diffusion furnace auto stove-door sealing device according to claim 1, it is characterized in that: described stove gate device (2) is mainly by front end stove door plant (21), rear end fire door connecting portion (25) and middle flexible linking device form, described rear end fire door connecting portion (25) is connected with the overhanging end of encorbelmenting of described connecting rod (32) by connector, in the middle of described, flexible linking device is arranged between described front end stove door plant (21) and described rear end fire door connecting portion (25), make described front end stove door plant (21) and described rear end fire door connecting portion (25) carry out spatial translation campaign in opposite directions or dorsad along boiler tube axis direction, when closing fire door, make fire door (1) flexible contact of described front end stove door plant (21) and diffusion furnace.
3. diffusion furnace auto stove-door sealing device according to claim 2, it is characterized in that: the middle flexible linking device of described stove gate device (2) is telescopic sleeve mechanism, by outer cylinder body (24), inner barrel (23) and spring (22) assemble, the end of described outer cylinder body (24) is fixedly connected with described rear end fire door connecting portion (25), the front end of described inner barrel (23) is fixedly connected with described stove gate device (2), described inner barrel (23) is nested in described outer cylinder body (24) inner chamber, described inner barrel (23) carries out Linear telescopic slip along described outer cylinder body (24) inner chamber slideway, described spring (22) is enclosed within on described inner barrel (23) outer surface, the two ends of described spring (22) are fixedly connected with the front end of described outer cylinder body (24) with described front end stove door plant (21) respectively, when closing fire door, the contraction in length of flexible linking device in the middle of described, described spring (22) compressive deformation, when opening fire door, flexible linking device length extending in the middle of described, described spring (22) reinstatement gradually.
4. according to the diffusion furnace auto stove-door sealing device described in any one in claim 1～3, it is characterized in that: the bottom of described landing slab (51) is movably arranged on described device pedestal (4), under the driving of another motor, by guiding mechanism, make described landing slab (51) carry out the motion of straight line advance and retreat along the plane of movement of described quadric chain (3), when closing fire door, make described stove gate device (2) close along the fire door (1) towards diffusion furnace on boiler tube axis direction, and between the fire door (1) of described stove gate device (2) and diffusion furnace, give and set big or small pretightning force, by regulating the size of the distortion support force of pretightning force and described spring (22), the fire door (1) of described stove gate device (2) and diffusion furnace is sealed and matched.
5. according to the diffusion furnace auto stove-door sealing device described in any one in claim 1～3, it is characterized in that: stove gate device (2) is connected by sphere connecting mechanism with the overhanging end of encorbelmenting of described connecting rod (32).
6. diffusion furnace auto stove-door sealing device according to claim 4, is characterized in that: stove gate device (2) is connected by sphere connecting mechanism with the overhanging end of encorbelmenting of described connecting rod (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320412103.XU CN203432348U (en) | 2013-07-11 | 2013-07-11 | Automatic furnace door sealing device for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320412103.XU CN203432348U (en) | 2013-07-11 | 2013-07-11 | Automatic furnace door sealing device for diffusion furnace |
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| Publication Number | Publication Date |
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| CN203432348U true CN203432348U (en) | 2014-02-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201320412103.XU Expired - Fee Related CN203432348U (en) | 2013-07-11 | 2013-07-11 | Automatic furnace door sealing device for diffusion furnace |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048731A (en) * | 2016-08-12 | 2016-10-26 | 深圳市捷佳伟创新能源装备股份有限公司 | Low-pressure diffusion furnace door sealing device |
| CN108240767A (en) * | 2016-12-26 | 2018-07-03 | 北京北方华创微电子装备有限公司 | A kind of diffusion furnace oven door sealing structure |
| CN110173996A (en) * | 2019-05-13 | 2019-08-27 | 浙江中硅新材料有限公司 | A kind of swing door structure of heating furnace |
| CN114000202A (en) * | 2021-09-30 | 2022-02-01 | 江苏龙恒新能源有限公司 | Crystalline silicon solar cell variable-temperature diffusion furnace |
-
2013
- 2013-07-11 CN CN201320412103.XU patent/CN203432348U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048731A (en) * | 2016-08-12 | 2016-10-26 | 深圳市捷佳伟创新能源装备股份有限公司 | Low-pressure diffusion furnace door sealing device |
| CN106048731B (en) * | 2016-08-12 | 2019-02-19 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of low pressure diffusion furnace furnace door sealing device |
| CN108240767A (en) * | 2016-12-26 | 2018-07-03 | 北京北方华创微电子装备有限公司 | A kind of diffusion furnace oven door sealing structure |
| CN110173996A (en) * | 2019-05-13 | 2019-08-27 | 浙江中硅新材料有限公司 | A kind of swing door structure of heating furnace |
| CN110173996B (en) * | 2019-05-13 | 2024-04-16 | 浙江中硅新材料有限公司 | Swinging type furnace door structure of heating furnace |
| CN114000202A (en) * | 2021-09-30 | 2022-02-01 | 江苏龙恒新能源有限公司 | Crystalline silicon solar cell variable-temperature diffusion furnace |
| CN114000202B (en) * | 2021-09-30 | 2023-06-02 | 江苏龙恒新能源有限公司 | Crystal silicon solar cell variable-temperature diffusion furnace |
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Granted publication date: 20140212 Termination date: 20150711 |
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