CN106546101B - A kind of diffusion furnace stove gate device - Google Patents
A kind of diffusion furnace stove gate device Download PDFInfo
- Publication number
- CN106546101B CN106546101B CN201610954401.XA CN201610954401A CN106546101B CN 106546101 B CN106546101 B CN 106546101B CN 201610954401 A CN201610954401 A CN 201610954401A CN 106546101 B CN106546101 B CN 106546101B
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- Prior art keywords
- fire door
- adjustable column
- door
- fastener
- diffusion furnace
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Special Wing (AREA)
Abstract
The invention discloses a kind of diffusion furnace stove gate devices, structure is executed including fire door, fire door support component, fire door and the interior quartzy door being connect with fire door, it further include adjusting component, the adjusting component includes adjustable column and multiple adjutages radially arranged along adjustable column, the adjustable column is installed on the center of the fire door, angle between adjacent two adjutage is equal, adjutage one end is fixedly connected with the adjustable column, the other end is equipped with regulating part, the regulating part offsets with the fire door, fire door support component one end executes structure with fire door and connect, the other end is connect with the adjustable column.The present invention has many advantages, such as that structure is simple, easy to adjust, good airproof performance.
Description
Technical field
The present invention relates to diffusion furnace more particularly to a kind of diffusion furnace stove gate devices.
Background technique
Diffusion furnace be mainly used for silicon wafer solar device manufacture in diffusion, oxidation technology, furnace body is diffusion, oxidation technology
Reaction chamber, the structure type of fire door is very crucial.In process operation, in order to avoid the collision of fire door and quartz ampoule causes
Quartz ampoule damage, door opened and closing motion are two steps, F.F.-slow-motion and move back-rewind slowly, i.e., close to quartz ampoule and far
Slowly movement is needed when from quartz ampoule.
The stove gate device of diffusion furnace mainly has rotary fire door and two kinds of linear fire door.Rotary fire door is generally adopted
With, but it needs to occupy vertical direction space, and at present according to customer demand, an equipment generally installs 4 pipes even 5 pipe furnace bodies,
Cause whole device height higher, is not easy to the transport, installation and debugging and daily maintenance of equipment.Linear fire door can effectively drop
Every tube layer of low equipment is high (height of whole equipment is compared and is mounted with the low 300mm ~ 400mm of the equipment of rotary fire door), for
The transport and installation and debugging of equipment are all advantageous.
A kind of known linear door structure is as shown in attached Fig. 1 to Fig. 4, and wherein label 1 is fire door executing agency, fire door
Executing agency 1 pushes the slide block movement on guide rail by horizontal and vertical two groups of cylinders；Label 2 is fire door support rod, fire door branch
2 one end of strut is connect with the sliding block of executing agency 1, and the other end is then connected with fire door adjusting block 3, and fire door adjusting block 3 and fire door are solid
With being fixedly connected, fire door 7 is installed in fire door fixing seat 5 for reservation 5, and interior quartz door 8 is connected as one with fire door 7；Label 4 is to adjust
Ring is saved, 7 are mounted with 6 compressed springs between adjusting bad 4 and fire door, by adjusting bad 4 sealings for adjusting fire door 7.It is existing linear
Fire door is disadvantageous in that: the stress point of fire door 7 is not in 7 center of fire door, 7 distal end of fire door (one end far from adjusting block 3) meeting
It tilts, causes fire door 7 to adjust difficult or poorly sealed；It adjusts ring 4 to be adjusted by six bolts, six bolt adjustings are distributed in furnace
7 immediate vicinities of door, the arm of force is short when compressing fire door 7, and regulating power is limited；Interior quartz door 8 is that rigidity connects with quartz ampoule 9 when closing
Touching, is easily damaged quartz ampoule；Fire door support rod 2 is similar to cantilever beam structure, and bending deformation can be generated when compressing fire door 7.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, provide a kind of structure it is simple, it is easy to adjust,
The diffusion furnace stove gate device of good airproof performance.
In order to solve the above technical problems, the invention adopts the following technical scheme:
A kind of diffusion furnace stove gate device executes structure, fire door support component, fire door and in connecting with fire door including fire door
Quartzy door further includes adjusting component, and the adjusting component includes adjustable column and multiple adjutages radially arranged along adjustable column, institute
The center that adjustable column is installed on the fire door is stated, the angle between adjacent two adjutages is equal, adjutage one end and the adjusting
Column is fixedly connected, and the other end is equipped with regulating part, and the regulating part offsets with the fire door, fire door support component one end with
Fire door executes structure connection, and the other end is connect with the adjustable column.
As a further improvement of the above technical scheme:
The adjustable column is I-shaped column, and the one end of multiple adjutages far from the regulating part integrally connects with a mounting ring
It connects, the mounting ring is sheathed on the middle part of the adjustable column, and the adjustable column is solid by one group of first fastener and the fire door
Fixed connection, the adjustable column are fixedly connected by one group of second fastener with the mounting ring, first fastener and second
Fastener is axially arranged along the adjustable column.
The regulating part is screw rod, and the nut with regulating part cooperation is welded on the adjutage.
It is connected between the fire door and the interior quartzy door by multiple groups elastic buffer member, multiple groups elastic buffer member edge
Circumferencial direction is evenly arranged.
The elastic buffer member includes guiding axis, flexible shaft sleeve, buffer spring and nut cap, and the flexible shaft sleeve is embedded at
In the fire door, the nut cap is fixedly connected with the fire door by fastener, and the guiding axis passes through the flexible shaft sleeve, is led
It is fixedly connected to axis one end by third fastener with the interior quartzy door, the buffering is set between the other end and the nut cap
Spring.
The elastic buffer member further includes a pair of of T-type cushion collar, and the interior quartzy door is equipped with through-hole, and a pair of of T-type is slow
Punching set is divided into the interior quartzy door two sides and path section protrudes into the through-hole, and the third fastener passes through a pair of T
Type cushion collar and the guiding axis connection.
It is equipped with the first sealing ring between the fire door and diffusion furnace quartz ampoule, the is equipped between the nut cap and the fire door
Two sealing rings.
The fire door support component includes support plate, connecting rod and a pair of U-shaped otic placode, and side arm is equipped under the adjustable column
The section portion parallel with the support plate, a pair of U-shaped otic placode is along the adjustable column axial direction arrangement and is open towards the adjustable column,
Described support plate one end is fixedly connected with section portion by fastener, and the other end is located in the pair of U-shaped otic placode, the company
Extension bar and the adjustable column are arranged in parallel and one end passes through in a pair of U-shaped otic placode, and fire door described in the other end executes structure connection.
The junction in the support plate and the section portion is equipped with waist-shaped hole.
Length on the downside of the U-shaped otic placode is longer than upside.
Compared with the prior art, the advantages of the present invention are as follows: diffusion furnace stove gate device disclosed by the invention, using adjustable column
And adjustable column is set to the center of fire door, fire door stress more evenly, avoids fire door from tilting, improves when fire door executing agency acts
The sealing performance of fire door；Adjutage is set, and adjutage one end is fixedly connected with adjustable column, and other end installation and adjustment part expands
Adjustable range increases arm of force when compression fire door, adjusts more convenient, reliable.
Detailed description of the invention
Fig. 1 is the schematic perspective view of existing linear diffusion furnace stove gate device.
Fig. 2 is the overlooking structure diagram of existing linear diffusion furnace stove gate device.
Fig. 3 is the structural schematic diagram of the adjusting ring in existing linear diffusion furnace stove gate device.
Fig. 4 is A-A view in Fig. 3.
Fig. 5 is the schematic perspective view of diffusion furnace stove gate device of the present invention.
Fig. 6 is the forward sight structural schematic diagram of diffusion furnace stove gate device of the present invention.
Fig. 7 is the overlooking structure diagram of diffusion furnace stove gate device of the present invention.
Fig. 8 is the B-B view in Fig. 6.
Each label indicates in figure: 1, fire door executes structure；2, fire door support component；21, support plate；22, connecting rod；23,U
Type otic placode；24, waist-shaped hole；3, fire door adjusting block；4, ring is adjusted；5, fire door fixing seat；6, compressed spring；7, fire door；8, interior stone
Ying Men；81, through-hole；9, quartz ampoule；100, component is adjusted；101, adjustable column；102, adjutage；103, regulating part；104, it installs
Ring；105, the first fastener；106, the second fastener；107, section portion；200, elastic buffer member；201, guiding axis；202,
Flexible shaft sleeve；203, buffer spring；204, nut cap；205, third fastener；206, T-type cushion collar；301, the first sealing ring；
302, the second sealing ring.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
As shown in Fig. 5 to Fig. 8, the diffusion furnace stove gate device of the present embodiment, including fire door execute structure 1, fire door support group
Part 2, fire door 7 and the interior quartzy door 8 connecting with fire door 7, further include adjusting component 100, adjusting component 100 includes adjustable column 101
And multiple adjutages 102 radially arranged along adjustable column 101, adjustable column 101 are installed on the center of fire door 7, adjacent two adjutage
Angle between 102 is equal, and 102 one end of adjutage is fixedly connected with adjustable column 101, and the other end is equipped with regulating part 103, adjusts
Part 103 offsets with fire door 7, and 2 one end of fire door support component executes structure 1 with fire door and connect, and the other end is connect with adjustable column 101.
The diffusion furnace stove gate device is set to the center of fire door 7 using adjustable column 101 and by adjustable column 101, when fire door executing agency 1 acts
7 stress of fire door more evenly, avoids fire door 7 from tilting, improves the sealing performance of fire door 7；Adjutage 102, adjutage 102 1 are set
End is fixedly connected with adjustable column 101, and other end installation and adjustment part 103 expands adjustable range, is increased when compressing fire door 7
The arm of force is adjusted more convenient, reliable.
Adjustable column 101 is I-shaped column, 104 one of the one end of multiple adjutages 102 far from regulating part 103 and a mounting ring
Connection, mounting ring 104 are sheathed on the middle part of adjustable column 101, and adjustable column 101 is fixed by one group of first fastener 105 and fire door 7
Connection, adjustable column 101 are fixedly connected by one group of second fastener 106 with mounting ring 104, and the first fastener 105 and second is tight
Firmware 106 is along the axial arrangement of adjustable column 101.In the present embodiment, there are three adjutage 102 is set, three adjutages 102 are whole to be in
Y-type layout adds a regulating part 103 on the adjutage 102 of the lower section of adjustable column 101 because fire door 7 is self-possessed heavier；First
Fastener 105 and the second fastener 106 be all provided with there are three and arrangement in equilateral triangle, wherein the first fastener 105 is located at
101 center of adjustable column, the second fastener 106 are located at 101 edge of adjustable column；Regulating part 103 is screw rod, on adjutage 102
It is welded with the nut cooperated with regulating part 103.
In the present embodiment, connected between fire door 7 and interior quartzy door 8 by multiple groups elastic buffer member 200, multiple groups elasticity is slow
It is evenly distributed in the circumferential direction to rush component 200, damages quartz ampoule 9 when avoiding closing fire door 7.
In the present embodiment, elastic buffer member 200 includes guiding axis 201, flexible shaft sleeve 202, buffer spring 203 and nut cap
204, flexible shaft sleeve 202 is embedded in fire door 7, and nut cap 204 is fixedly connected with fire door 7 by fastener, and guiding axis 201 passes through soft
Property axle sleeve 202,201 one end of guiding axis is fixedly connected by third fastener 205 with interior quartzy door 8, the other end and nut cap 204 it
Between be arranged buffer spring 203.When 7 F.F. of fire door, interior quartz door 8 is first contacted with quartz ampoule 9, and 201 stress of guiding axis starts at this time
Buffer spring 203 is compressed, realizes that interior quartzy door 8 is contacted with the soft of quartz ampoule 9；Flexible shaft sleeve 202 can be the flexible of guiding axis 201
Movement improves guiding role, and guiding axis 201 is made to have higher kinematic accuracy.
In the present embodiment, elastic buffer member 200 further includes a pair of of T-type cushion collar 206, and interior quartz door 8 is equipped with through-hole
81, a pair of of T-type cushion collar 206 is divided into interior quartzy 8 two sides of door and path section protrudes into through-hole 81, and third fastener 205 passes through
A pair of of T-type cushion collar 206 is connect with guiding axis 201 so that between interior quartz door 8 and third fastener 205, interior quartzy door 8 with
It is flexible contact between guiding axis 201, avoids damaging interior quartzy door 8.
In the present embodiment, be equipped with the first sealing ring 301 between fire door 7 and diffusion furnace quartz ampoule 9, nut cap 204 and fire door 7 it
Between be equipped with the second sealing ring 302, guarantee equipment have good sealing performance.
In the present embodiment, fire door support component 2 includes support plate 21, connecting rod 22 and a pair of U-shaped otic placode 23, adjustable column
101 lower side arms are equipped with the section portion 107 parallel with support plate 21, and a pair of U-shaped otic placode 23 is axially arranged and opened along adjustable column 101
Towards adjustable column 101,21 one end of support plate is fixedly connected with section portion 107 by fastener mouth, and the other end is located in a pair of U-shaped
In otic placode 23, connecting rod 22 and the parallel arrangement of adjustable column 101 and one end are passed through in a pair of U-shaped otic placode 23, and other end fire door executes
Structure 1 connects, and a pair of U-shaped otic placode 23 of setting substantially increases the rigidity and intensity of fire door support component 2, and it is heavier to meet self weight
The demand of fire door 7.
In the present embodiment, the junction in support plate 21 and section portion 107 is equipped with waist-shaped hole 24, convenient for adjusting support plate 21
Installation site.
In the present embodiment, the length of U-shaped 23 downside of otic placode is longer than upside, and support plate 21 is enabled to have higher load-bearing
Power.
Although the present invention has been disclosed as a preferred embodiment, however, it is not intended to limit the invention.It is any to be familiar with ability
The technical staff in domain, without deviating from the scope of the technical scheme of the present invention, all using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible changes and modifications or equivalent example modified to equivalent change.Therefore, all
Without departing from the content of technical solution of the present invention, according to the present invention technical spirit any simple modification made to the above embodiment,
Equivalent variations and modification, all shall fall within the protection scope of the technical scheme of the invention.
Claims (7)
1. a kind of diffusion furnace stove gate device, including fire door execute structure (1), fire door support component (2), fire door (7) and and fire door
(7) the interior quartzy door (8) of connection, it is characterised in that: further include adjusting component (100), the adjusting component (100) includes adjusting
Column (101) and multiple adjutages (102) radially arranged along adjustable column (101), the adjustable column (101) are installed on the fire door
(7) center, the angle between adjacent two adjutage (102) is equal, and adjutage (102) one end and the adjustable column (101) are solid
Fixed connection, the other end are equipped with regulating part (103), and the regulating part (103) offsets with the fire door (7), the fire door support
Component (2) one end executes structure (1) with fire door and connect, and the other end is connect with the adjustable column (101), the fire door (7) and institute
It states and is connected between interior quartzy door (8) by multiple groups elastic buffer member (200), multiple groups elastic buffer member (200) is circumferentially square
To being evenly arranged, the elastic buffer member (200) include guiding axis (201), flexible shaft sleeve (202), buffer spring (203) and
Nut cap (204), the flexible shaft sleeve (202) are embedded in the fire door (7), and the nut cap (204) passes through with the fire door (7)
Fastener is fixedly connected, and the guiding axis (201) passes through the flexible shaft sleeve (202), and guiding axis (201) one end is tight by third
Firmware (205) is fixedly connected with the interior quartzy door (8), and the buffer spring is arranged between the other end and the nut cap (204)
(203), the elastic buffer member (200) further includes a pair of of T-type cushion collar (206), and the interior quartzy door (8) is equipped with through-hole
(81), a pair of of T-type cushion collar (206) is divided into interior quartzy door (8) two sides and path section protrudes into the through-hole (81), institute
Third fastener (205) are stated to connect across a pair of T-type cushion collar (206) with the guiding axis (201).
2. diffusion furnace stove gate device according to claim 1, it is characterised in that: the adjustable column (101) is I-shaped column,
Multiple adjutages (102) one end and a mounting ring (104) integrally connected far from the regulating part (103), the mounting ring
(104) be sheathed on the middle part of the adjustable column (101), the adjustable column (101) by one group of first fastener (105) with it is described
Fire door (7) is fixedly connected, and the adjustable column (101) connects by the way that one group of second fastener (106) and the mounting ring (104) are fixed
It connects, first fastener (105) and the second fastener (106) are axially arranged along the adjustable column (101).
3. diffusion furnace stove gate device according to claim 2, it is characterised in that: the regulating part (103) is screw rod, described
The nut with the regulating part (103) cooperation is welded on adjutage (102).
4. diffusion furnace stove gate device according to any one of claim 1 to 3, it is characterised in that: the fire door (7) and expansion
It dissipates and is equipped with the first sealing ring (301) between furnace quartz ampoule (9), it is close that second is equipped between the nut cap (204) and the fire door (7)
Seal (302).
5. diffusion furnace stove gate device according to any one of claim 1 to 3, it is characterised in that: the fire door support group
Part (2) includes support plate (21), connecting rod (22) and a pair of U-shaped otic placode (23), under the adjustable column (101) side arm be equipped with
The parallel section portion (107) of the support plate (21), a pair of U-shaped otic placode (23) are axially arranged and are opened along the adjustable column (101)
Towards the adjustable column (101), described support plate (21) one end is fixedly connected with section portion (107) by fastener mouth, another
End is located in the pair of U-shaped otic placode (23), and the connecting rod (22) is arranged in parallel with the adjustable column (101) and one end is worn
It crosses in a pair of U-shaped otic placode (23), the other end executes structure (1) with the fire door and connect.
6. diffusion furnace stove gate device according to claim 5, it is characterised in that: the support plate (21) and the section portion
(107) junction is equipped with waist-shaped hole (24).
7. diffusion furnace stove gate device according to claim 5, it is characterised in that: the length on the downside of the U-shaped otic placode (23)
It is longer than upside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610954401.XA CN106546101B (en) | 2016-10-27 | 2016-10-27 | A kind of diffusion furnace stove gate device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610954401.XA CN106546101B (en) | 2016-10-27 | 2016-10-27 | A kind of diffusion furnace stove gate device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106546101A CN106546101A (en) | 2017-03-29 |
| CN106546101B true CN106546101B (en) | 2019-03-08 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610954401.XA Active CN106546101B (en) | 2016-10-27 | 2016-10-27 | A kind of diffusion furnace stove gate device |
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| Country | Link |
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| CN (1) | CN106546101B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109423697B (en) * | 2017-08-25 | 2021-02-23 | 中国电子科技集团公司第四十八研究所 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
| CN109916181B (en) * | 2017-12-13 | 2020-09-18 | 中国电子科技集团公司第四十八研究所 | Furnace door device for liquid phase epitaxy equipment |
| CN109166947B (en) * | 2018-08-30 | 2019-12-20 | 深圳市拉普拉斯能源技术有限公司 | Multi-shaft adjustable suspension supporting device |
| CN111397358A (en) * | 2020-03-23 | 2020-07-10 | 北京北方华创微电子装备有限公司 | Buffer mechanism, vertical furnace and process door thereof |
| CN111721110B (en) * | 2020-06-24 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Vertical reaction furnace |
| CN116607128B (en) * | 2023-05-11 | 2024-03-29 | 湖南红太阳光电科技有限公司 | Air inlet furnace door and tubular PECVD (plasma enhanced chemical vapor deposition) reaction chamber comprising same |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201440038U (en) * | 2009-06-30 | 2010-04-21 | 北京七星华创电子股份有限公司 | Diffusion furnace door sealing structure |
| CN201532119U (en) * | 2009-09-25 | 2010-07-21 | 深圳市捷佳伟创微电子设备有限公司 | Automatic furnace door cover of diffusion furnace |
| CN102851741A (en) * | 2012-04-05 | 2013-01-02 | 深圳市大族光伏科技股份有限公司 | Diffusion furnace and furnace door sealing device thereof |
| CN204138353U (en) * | 2014-07-17 | 2015-02-04 | 湖南红太阳光电科技有限公司 | A kind of accurate controlling organization for fire door |
| CN105509474A (en) * | 2015-12-11 | 2016-04-20 | 湖南红太阳光电科技有限公司 | Furnace door device of diffusion furnace |
| CN205470105U (en) * | 2016-01-18 | 2016-08-17 | 浙江机电职业技术学院 | Closing device of closure |
| CN106048731B (en) * | 2016-08-12 | 2019-02-19 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of low pressure diffusion furnace furnace door sealing device |
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2016
- 2016-10-27 CN CN201610954401.XA patent/CN106546101B/en active Active
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| CN106546101A (en) | 2017-03-29 |
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