CN111397358A - Buffer mechanism, vertical furnace and process door thereof - Google Patents
Buffer mechanism, vertical furnace and process door thereof Download PDFInfo
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- CN111397358A CN111397358A CN202010208397.9A CN202010208397A CN111397358A CN 111397358 A CN111397358 A CN 111397358A CN 202010208397 A CN202010208397 A CN 202010208397A CN 111397358 A CN111397358 A CN 111397358A
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- Prior art keywords
- mounting plate
- guide rod
- guide
- sealing disc
- sealing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
- F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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Abstract
The embodiment of the application provides a buffer mechanism, a vertical furnace and a process door thereof. The buffer mechanism is arranged between a supporting arm and a sealing disc of the vertical furnace process door and comprises an installation plate and a buffer; the mounting plate is arranged on the supporting arm; the plurality of buffers are uniformly distributed on the mounting plate; the buffer comprises a guide rod, a guide assembly and an elastic assembly; the top end of the guide rod is connected with the sealing disc, the bottom end of the guide rod penetrates through the mounting plate through the guide assembly, and the guide rod can slide in the vertical direction relative to the mounting plate; the guide assembly is arranged on the mounting plate and used for guiding the guide rod to slide along the vertical direction; the outside of guide arm is located to the elastic component cover to be located between mounting panel and the sealed dish, elastic component is used for buffering the packing force that the support arm applyed to sealed dish. The embodiment of the application can ensure that the sealing disc does not deflect when stressed, so that the sealing effect of the sealing disc on the process chamber is better, and the safety of the process door and the process chamber is improved.
Description
Technical Field
The application relates to the technical field of semiconductor processing, in particular to a buffer mechanism, a vertical furnace and a process door thereof.
Background
Currently, vertical heat treatment equipment is used as a front process in a semiconductor manufacturing processThe processing equipment mainly carries out thermal treatment processes such as oxidation film, annealing, low-pressure chemical vapor deposition and the like. Dichloroethylene (C) is introduced during the heat treatment process2H2Cl2) Chlorine (Cl)2) Or a process gas such as hydrogen chloride (HCl). The process chamber is a space for performing a heat treatment process, and needs to be strictly sealed when performing the heat treatment process, so that the external environment is prevented from affecting the inside of the process chamber, and the process gas inside the process chamber is prevented from leaking.
The process door is arranged at an opening of the process chamber, and the process door and the process chamber are sealed through a sealing ring and used for sealing the process chamber. Since the process chamber is generally made of a quartz tube and the process door is of a metal structure, when the process door closes the seal, the seal ring at the opening of the process chamber needs to be pressed, but too much force cannot be applied to press the seal ring, otherwise the process chamber is easily crushed. Therefore, a buffer mechanism needs to be designed during the design of the process door, so that the process door is prevented from applying excessive force to the process chamber, and meanwhile, the process door can play a role in sealing. However, the general buffer structure may cause uneven stress on various parts of the process door, affect the horizontality of the process door, cause uneven compression force on the process door, and further cause poor sealing performance of the whole process door or damage to a process chamber due to excessive partial compression force.
Disclosure of Invention
The utility model provides a to the shortcoming of current mode, proposes a buffer gear, vertical furnace and technology door thereof for solve prior art and have the technical problem such as the compressive force of technology door is inhomogeneous and technology door is sealed relatively poor.
In a first aspect, embodiments of the present application provide a buffer mechanism disposed between a support arm and a seal disk of a vertical furnace process door for buffering a pressing force applied to the seal disk by the support arm, the support arm being configured to close the vertical furnace by pressing the seal disk; the buffer mechanism is positioned above the supporting arm, and the buffer mechanism is positioned below the sealing disc; the buffer mechanism comprises a mounting plate and a buffer; the mounting plate is arranged on the supporting arm; the plurality of buffers are uniformly distributed on the mounting plate; the buffer comprises a guide rod, a guide assembly and an elastic assembly; the top end of the guide rod is connected with the sealing disc, the bottom end of the guide rod penetrates through the mounting plate through the guide assembly, and the guide rod can slide in the vertical direction relative to the mounting plate; the guide assembly is arranged on the mounting plate and used for guiding the guide rod to slide along the vertical direction; the elastic component cover is located the outside of guide arm, and be located the mounting panel reaches between the sealed dish, elastic component is used for buffering the support arm to the packing force that sealed dish was applyed.
In an embodiment of the present application, the guide assembly includes a linear bearing, the linear bearing is disposed on the mounting plate in a penetrating manner, and the bottom end of the guide rod is disposed in the linear bearing in a penetrating manner.
In one embodiment of the present application, the guide assembly further comprises a washer and a fastener; the gasket is sleeved at the bottom end of the guide rod, the fastening piece comprises a connecting part and an operating part, the connecting part penetrates through the gasket and then is connected with the bottom end of the guide rod, and the operating part fixes the gasket at the bottom end of the guide rod; the washer and the fastener are matched to stop the guide rod.
In an embodiment of the application, be provided with the step portion in the packing ring, the step portion with the bottom cooperation of guide arm, just the bottom surface of step portion with the terminal surface parallel and level setting of guide arm bottom.
In an embodiment of the present application, the elastic element includes an inner elastic element and an outer elastic element nested inside and outside, a height of the inner elastic element is greater than a height of the outer elastic element, and a rigidity of the inner elastic element is less than a rigidity of the outer elastic element.
In an embodiment of the present application, the elastic assembly further includes an inner cover body for separating the inner elastic member and the outer elastic member, the inner cover body is a double-layer structure and is sleeved outside the inner elastic member and the outer elastic member; the bottom of the inner cover body is arranged on the mounting plate.
In an embodiment of this application, buffer gear still includes the supporting shoe and the outer cover body, the top of guide arm is passed through the supporting shoe with sealed dish is connected, the outer cover body sets up the supporting shoe periphery just extends the setting to mounting panel place direction, the outer cover body cover is located the inner cover body top outside.
In an embodiment of the present application, the mounting plate is a triangular structure, and the plurality of buffers are uniformly distributed around the axis of the mounting plate.
In a second aspect, embodiments of the present application provide a vertical furnace process door for selectively sealing an opening of a vertical furnace process chamber, comprising a support arm, a sealing disk, and a buffer mechanism as provided in the first aspect; the mounting plate is arranged on the supporting arm through a plurality of adjusting bolts, the adjusting bolts are used for adjusting the horizontal state of the mounting plate, and the sealing disc is connected with the top end of the guide rod; the support arm is used to bring the sealing disk into sealing engagement with the opening of the process chamber.
In a third aspect, embodiments of the present application provide a vertical furnace comprising a process chamber and a vertical furnace process door as provided in the second aspect.
The technical scheme provided by the embodiment of the application has the following beneficial technical effects:
this application embodiment is through the mounting panel with sealed dish concentric setting to with a plurality of buffers evenly distributed at the mounting panel, thereby make the packing force that the support arm applyed to sealed dish more even. The guide rod is arranged on the mounting plate through the guide assembly, so that the guide rod moves along the vertical direction, and the sealing disc can be prevented from deflecting when stressed, so that the sealing effect of the sealing disc on the process chamber is better; and the damage of the process chamber caused by overlarge pressing force applied to the sealing disc can be avoided, so that the safety of the process door and the process chamber is improved.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic structural diagram of a vertical furnace process door according to an embodiment of the present disclosure;
FIG. 2 is a schematic illustration in partial cross-sectional view of a cushioning mechanism provided in an embodiment of the present application;
FIG. 3 is a schematic view, partially in section, of a cushioning mechanism according to an embodiment of the present disclosure with parts of the assembly omitted;
FIG. 4 is a schematic top view of a cushioning mechanism according to an embodiment of the present disclosure;
fig. 5 is a schematic structural diagram of a vertical furnace according to an embodiment of the present application.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.
The embodiment of the application provides a buffer mechanism 100, which is arranged between a supporting arm 201 and a sealing disc 202 of a vertical furnace process door 200 and is used for buffering the pressing force applied to the sealing disc 202 by the supporting arm 201, and the supporting wall 201 is used for closing the vertical furnace by pressing the sealing disc 202. The structure of the damping mechanism 100 is schematically shown in fig. 1 and fig. 2, the damping mechanism 100 includes a mounting plate 1 and a damper 2; the mounting plate 1 is arranged on the supporting arm 201; the plurality of buffers 2 are uniformly distributed on the mounting plate 1, and each buffer 2 comprises a guide rod 21, a guide component 22 and an elastic component 23; the top end of the guide rod 21 is connected with the sealing disc 202, the bottom end of the guide rod 21 is arranged on the mounting plate 1 through the guide assembly 22, and the guide rod 21 can slide in the vertical direction relative to the mounting plate 1; the guide assembly 22 is arranged on the mounting plate 1 and used for guiding the guide rod 21 to slide along the vertical direction; the elastic component 23 is sleeved outside the guide rod 21 and located between the mounting plate 1 and the sealing disc 202, and the elastic component 23 is used for buffering the pressing force applied by the supporting arm 201 to the sealing disc 202.
As shown in fig. 1, 2 and 5, the supporting arm 201 is transversely disposed at the bottom of the process chamber 300, and mainly functions to support the buffer mechanism 100 and the sealing disk 202, the supporting arm 201 can seal the sealing disk 202 with the opening of the process chamber 300 under the driving of the lifting device, and when the supporting arm 201 applies a pressing force to the sealing disk 202, the buffer mechanism 100 can buffer the pressing force applied by the supporting arm 201 to the sealing disk 202. The damper mechanism 100 includes a mounting plate 1 and a damper 2, wherein the mounting plate 1 may be a plate-shaped structure made of a metal material, and is transversely disposed between the support arm 201 and the sealing plate 202, and the mounting plate 1 and the sealing plate 202 are concentrically disposed. Even distribution of a plurality of buffers 2 is on mounting panel 1, and a plurality of buffers 2 are located between support arm 201 and the sealed dish 202 with the mounting panel 1 cooperation for sealed dish 202 atress is more even. The buffer 2 comprises a guide rod 21, a guide assembly 22 and an elastic assembly 23, the top end of the guide rod 21 is connected with the sealing disc 202, the bottom end of the guide rod 21 is arranged on the mounting plate 1 through the guide assembly 22, and the guide rod 21 can slide in the vertical direction relative to the mounting plate 1 under the guiding action of the guide assembly 22; the guide assembly 22 is arranged on the mounting plate 1 and used for guiding the guide rod 21 to slide along the vertical direction; the elastic member 23 is disposed outside the guide bar 21 and is integrally located between the seal plate 202 and the mounting plate 1, and the elastic member 23 can buffer the pressing force applied by the support arm 201 to the seal plate 202 when the seal plate 202 is sealed with the opening of the process chamber 300.
This application embodiment is through the mounting panel with sealed dish concentric setting to with a plurality of buffers evenly distributed at the mounting panel, thereby make the packing force that the support arm applyed to sealed dish more even. The guide rod is arranged on the mounting plate through the guide assembly, so that the guide rod moves along the vertical direction, and the sealing disc can be prevented from deflecting when stressed, so that the sealing effect of the sealing disc on the process chamber is better; and the damage of the process chamber caused by overlarge pressing force applied to the sealing disc can be avoided, so that the safety of the process door and the process chamber is improved.
In an embodiment of the present application, the guiding assembly 22 includes a linear bearing 221, the linear bearing 221 is disposed on the mounting plate 1, and the bottom end of the guiding rod 21 is disposed in the linear bearing 221.
As shown in fig. 1 to 3, the linear bearing 221 is disposed through the mounting plate 1, an axis of the linear bearing 221 may be disposed perpendicular to the mounting plate 1, and the mounting plate 1 may be disposed in a horizontal direction. The linear bearing 221 is fixedly connected to the mounting plate 1, and the connection manner may be welding or screwing. The guide rod 21 may be a cylindrical rod-shaped structure made of metal, the bottom end of the guide rod 21 is slidably disposed in the linear bearing 221, and when the seal disc 202 contacts the opening of the process chamber 300, the guide rod 21 moves in the vertical direction under the guiding action of the linear bearing 221. The linear bearing 221 guides the moving direction of the guide rod 21, the moving direction of the guide rod 21 cannot incline, the problems of uneven stress and poor sealing effect caused by shaking of the sealing disc 202 are avoided, and therefore the sealing efficiency of the sealing disc 202 can be greatly improved. In addition, the linear bearing 221 is used, so that the guide rod 21 can slide relative to the guide assembly 22 more easily, and the manufacturing cost and the maintenance cost of the buffer mechanism are reduced.
It should be noted that the embodiment of the present application is not limited to a specific structure of the guide assembly 22, for example, the guide assembly 22 may be a sleeve structure, and the bottom end of the guide rod 21 is slidably disposed in the sleeve structure to achieve the above technical effects. The embodiment of the present application does not limit this, and those skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, the guiding assembly 22 further includes a washer 222 and a fastener 223, the washer 222 is sleeved on the bottom end of the guide rod 21, the fastener 223 includes a connecting portion and an operation portion, the connecting portion is connected with the bottom end of the guide rod 21 after penetrating through the washer 222, and the operation portion fixes the washer 222 on the bottom end of the guide rod 21; washer 222 and fastener 223 cooperate to stop the guide bar. Optionally, a stepped portion 224 is provided in the washer 222, the stepped portion 224 is engaged with the bottom end of the guide rod 21, and the bottom surface of the stepped portion 224 is flush with the end surface of the bottom end of the guide rod 21.
As shown in fig. 2 and 3, the bottom end of the guide bar 21 passes through the linear bearing 221 and is fixed to the washer 222 and the fastener 223. The washer 222 may be a ring structure made of metal, and may be located at the bottom of the linear bearing 221 and sleeved on the bottom end of the guide rod 21 to stop the guide rod 21. The fastening member 223 may be a bolt, a connection portion of the fastening member 223 (i.e., a threaded portion of the bolt) passes through the washer 222 and then is connected to the bottom end of the guide bar 21, an operation portion of the fastening member 223 (i.e., a nut of the bolt) fixes the washer 222 to the bottom end of the guide bar 21, and the fastening member 223 cooperates with the washer 222 to stop the guide bar 21. Adopt above-mentioned design, owing to set up packing ring and fastener, can be spacing in guide assembly 23 with guide arm 21, prevent that guide arm 21 and guide assembly 23 from taking place to drop to improve the buffer gear's of this application security and stability.
Optionally, a step 224 is further disposed in the washer 222, i.e. the inner diameter of the step 224 is larger than the inner diameter of the washer 222 at other positions. The step portion 224 is sleeved on the bottom end of the guide rod 21, and the bottom surface of the step portion 224 is flush with the end surface of the bottom end of the guide rod 21, and is connected and fastened with the guide rod 21 by a fastening member 223. When the elastic assembly 23 is in a compressed state, the guide rod 21 extends outwards, and the fastening member 223 can be completely locked with the guide rod 21 because the end surface of the guide rod 21 is attached to the bottom surface of the washer 222, so that the fastening member 223 cannot be loosened due to the fact that the guide rod 21 extends out to lose the pretightening force. By adopting the design, the stability of the application is better, and the efficiency of dismounting and maintenance is greatly improved due to the simple structure.
In an embodiment of the present application, the elastic element 23 includes an inner elastic element 231 and an outer elastic element 232 which are nested inside and outside, a height of the inner elastic element 231 is greater than a height of the outer elastic element 232, and a rigidity of the inner elastic element 231 is less than a rigidity of the outer elastic element 232.
As shown in fig. 1 to 3, both the inner elastic member 231 and the outer elastic member 232 may be coil springs, the inner elastic member 231 is located between the guide rod 21 and the outer elastic member 232, two ends of the inner elastic member 231 respectively support the supporting block 3 and the mounting plate 1, and the rigidity of the inner elastic member 231 is less than that of the outer elastic member 232; the top end of the outer elastic member 232 is arranged at an interval with the supporting block 3, and the bottom end of the outer elastic member 232 is contacted with the mounting plate 1. Referring to fig. 4, three buffers 2 are disposed on the mounting plate 1, when the three buffers 2 are pressed, the inner elastic member 231 is compressed by a force first, and when the compression amount of the inner elastic member 231 of the three buffers 2 is inconsistent, the inner elastic member 231 with a larger compression amount reaches a position where the outer elastic member 232 starts to be compressed first, and at this time, the rigidity of the outer elastic member 232 is larger and is difficult to be compressed, so that the buffer 2 stops being compressed; the inner elastic members 231 with smaller compression amount are compressed continuously until the compression amounts of the three inner elastic members 231 all reach the position where the outer elastic member 232 starts to be compressed, at this time, the compression amounts of the three inner elastic members 231 are consistent, and the three buffers 2 are uniformly stressed. At this time, all the three buffers 2 are positioned at the position where the outer elastic member 232 just contacts and begins to be stressed and compressed, the pressing force transmitted to the sealing disc 202 by the buffers 2 at this time is designed into standard pressure through calculation, the standard pressure is the standard size that the sealing ring between the sealing disc 202 and the process chamber 300 is stressed, compressed and sealed and the process chamber 300 is not damaged, and the purposes of sealing and uniform stressed and compressed of the process door 200 can be achieved by adopting the standard pressure. At the same time, because the contact with the sealing disc 202 is still a spring structure, the sealing disc 202 is still subjected to a buffered pressing force, and even if the pressing force is suddenly increased, the pressing force is absorbed by the outer elastic member 232, so that the purpose of protecting the process chamber 300 is achieved.
It should be noted that, the embodiment of the present application does not limit the specific types of the inner elastic member 231 and the outer elastic member 232, as long as the requirements of the embodiments can be met, and the embodiment of the present application does not limit this, and the setting can be adjusted by a person skilled in the art according to the actual situation.
In an embodiment of the present application, the elastic assembly 23 further includes an inner cover 233 for separating the inner elastic member 231 and the outer elastic member 232, wherein the inner cover 233 is a double-layer structure and is disposed outside the inner elastic member 231 and the outer elastic member 232; the bottom end of the inner cover 233 is disposed on the mounting plate 1.
As shown in fig. 2 and 3, the inner housing 233 includes an inner sleeve, an outer sleeve and a bottom plate, the inner sleeve is disposed outside the inner elastic member 231, the outer sleeve is disposed outside the outer elastic member 232, the bottom plate is disposed between the inner sleeve and the outer sleeve, and the inner sleeve and the outer sleeve can be fixedly connected by welding, and the inner housing 233 is disposed with two sleeves to separate the inner elastic member 231 from the outer elastic member 232. Specifically, the inner sleeve, the linear bearing 221 and the guide rod 21 form a movable space of the inner elastic member 231, and a movable space of the outer elastic member 232 is formed between the inner sleeve and the outer sleeve, so that the inner elastic member 231 and the outer elastic member 232 do not interfere with each other when moving, thereby reducing the failure rate of the damping mechanism of the present application, and further improving the safety. The top end of the inner cover 233 is located in the middle of the guide bar 21, and avoids interfering with the support block 3 when the seal disc 202 is subjected to pressing force, thereby further improving the safety of the present application.
It should be noted that the embodiment of the present application is not limited to the specific structure of the inner cover 233, and the inner cover 233 may also be formed in a double-layer structure by integral molding. The embodiment of the present application does not limit this, and those skilled in the art can adjust the setting according to the actual situation.
In an embodiment of the present application, the buffering mechanism 100 further includes a supporting block 3 and an outer cover 234, the top end of the guide rod 21 is connected to the sealing disc 202 through the supporting block 3, the outer cover 234 is disposed on the outer periphery of the supporting block 3 and extends toward the mounting plate 1, and the outer cover 234 is sleeved on the outer side of the top end of the inner cover 233.
As shown in fig. 2 and 3, the supporting block 3 may be a circular block structure made of metal, and the top of the supporting block may be provided with a protrusion to facilitate connection with the sealing disc 202, and the bottom of the supporting block may be connected with the top end of the guide rod 21 by screwing or clipping. The guide rod 21 is connected to the seal disc 202 through the support block 3, and the top ends of the inner elastic member 231 and the outer elastic member 232 are both abutted against the bottom surface of the support block 3. The supporting block 3 can increase the contact area of the guide rod 21 and the sealing disc 202, thereby further improving the stress uniformity of the sealing disc 202. The outer cover body 234 can be a circular sleeve structure made of metal materials, the top end of the outer cover body 234 is connected with the outer edge of the supporting block 3 in a welding or screwing mode, the bottom end of the outer cover body 234 is sleeved on the outer side of the top end of the inner cover body 233, the outer cover body 234 is sleeved on the outer side of the inner cover body 233 to form a protection effect on the inner elastic piece 231 and the outer elastic piece 232 in a matching mode, and the inner elastic piece 231 and the outer elastic piece 232 are prevented from being polluted by high temperature and process gas, so that the performance is prevented from being affected.
In an embodiment of the present application, as shown in fig. 4, the mounting plate 1 may be a plate-shaped structure made of a metal material, and the specific shape thereof may be a triangular structure, which enables the metal plate to be more stable while saving material. The three buffers 2 are evenly distributed around the axis of the mounting plate 1, i.e. the three buffers 2 are respectively positioned at three corners of the mounting plate 1. By adopting the design, the mounting plate 1 is convenient to mount and dismount, and the three buffers 2 are circumferentially distributed around the axis of the mounting plate 1, so that the stress uniformity of the sealing disc 202 is effectively improved. It should be noted that, the embodiment of the present application does not limit the specific structure of the mounting plate 1 and the number of the bumpers 2, for example, the mounting plate 1 adopts a circular structure or a rectangular structure, and the number of the bumpers 2 can be correspondingly set according to the size of the shape of the mounting plate 1, which is not limited to this, and those skilled in the art can adjust the setting according to the actual situation.
Based on the same inventive concept, the embodiment of the present application provides a vertical furnace process door 200, as shown in fig. 1 and 5, which includes a supporting arm 201, a sealing disk 202, and the buffer mechanism 100 provided in the above embodiments, wherein the supporting arm 201 drives the sealing disk 202 to seal an opening of the process chamber 300, and the buffer mechanism 100 is disposed between the supporting arm 201 and the sealing disk 202. Alternatively, the mounting plate 1 is provided on the support arm 201 by a plurality of adjustment bolts for adjusting the horizontal state of the mounting plate 1, and a seal disk is attached to the top end of the guide rod 21. Optionally, a seal ring 203 is also provided between the seal plate 202 and the opening of the process chamber 300 for sealing the process chamber 300.
Based on the same inventive concept, the present embodiment provides a vertical furnace, as shown in fig. 1 and 5, which includes a process chamber 300 and a vertical furnace process door 200 as provided in the above embodiments.
By applying the embodiment of the application, at least the following beneficial effects can be realized:
this application embodiment is through the mounting panel with sealed dish concentric setting to with a plurality of buffers evenly distributed at the mounting panel, thereby make the packing force that the support arm applyed to sealed dish more even. The guide rod is arranged on the mounting plate through the guide assembly, so that the guide rod moves along the vertical direction, and the sealing disc can be prevented from deflecting when stressed, so that the sealing effect of the sealing disc on the process chamber is better; and the damage of the process chamber caused by overlarge pressing force applied to the sealing disc can be avoided, so that the safety of the process door and the process chamber is improved.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (10)
1. A buffer mechanism is arranged between a supporting arm and a sealing disc of a vertical furnace process door and used for buffering the pressing force applied to the sealing disc by the supporting arm, and the supporting arm is used for closing the vertical furnace by pressing the sealing disc; the buffer mechanism is positioned above the supporting arm, and the buffer mechanism is positioned below the sealing disc; the buffer mechanism is characterized by comprising a mounting plate and a buffer;
the mounting plate is arranged on the supporting arm;
the plurality of buffers are uniformly distributed on the mounting plate; the buffer comprises a guide rod, a guide assembly and an elastic assembly;
the top end of the guide rod is connected with the sealing disc, the bottom end of the guide rod penetrates through the mounting plate through the guide assembly, and the guide rod can slide in the vertical direction relative to the mounting plate; the guide assembly is arranged on the mounting plate and used for guiding the guide rod to slide along the vertical direction; the elastic component cover is located the outside of guide arm, and be located the mounting panel reaches between the sealed dish, elastic component is used for buffering the support arm to the packing force that sealed dish was applyed.
2. The cushioning mechanism of claim 1, wherein said guide assembly includes a linear bearing, said linear bearing being disposed through said mounting plate, a bottom end of said guide rod being disposed through said linear bearing.
3. The cushioning mechanism of claim 2, wherein said guide assembly further comprises a washer and a fastener; the gasket is sleeved at the bottom end of the guide rod, the fastening piece comprises a connecting part and an operating part, the connecting part penetrates through the gasket and then is connected with the bottom end of the guide rod, and the operating part fixes the gasket at the bottom end of the guide rod; the washer and the fastener are matched to stop the guide rod.
4. The cushion mechanism of claim 3, wherein a step is provided in the washer, the step engages the bottom end of the guide bar, and a bottom surface of the step is flush with an end surface of the bottom end of the guide bar.
5. The cushioning mechanism of claim 1, wherein said spring assembly includes inner and outer spring members nested inside and outside, said inner spring member having a height greater than a height of said outer spring member, and said inner spring member having a stiffness less than a stiffness of said outer spring member.
6. The cushioning mechanism according to claim 5, wherein said elastic member further comprises an inner cover for separating said inner elastic member from said outer elastic member, said inner cover having a double-layer structure and being disposed outside said inner elastic member and said outer elastic member; the bottom of the inner cover body is arranged on the mounting plate.
7. The damping mechanism according to claim 6, further comprising a support block and an outer cover, wherein the top end of the guide rod is connected to the sealing disc through the support block, the outer cover is disposed around the support block and extends toward the mounting plate, and the outer cover is disposed outside the top end of the inner cover.
8. A damper mechanism according to any one of claims 1 to 7, wherein the mounting plate is of triangular configuration, and a plurality of the dampers are evenly distributed about the axis of the mounting plate.
9. A vertical furnace process door for selectively sealing an opening of a vertical furnace process chamber, comprising a support arm, a sealing disk, and a cushioning mechanism of any of claims 1 to 8; the mounting plate is arranged on the supporting arm through a plurality of adjusting bolts, the adjusting bolts are used for adjusting the horizontal state of the mounting plate, and the sealing disc is connected with the top end of the guide rod; the support arm is used to bring the sealing disk into sealing engagement with the opening of the process chamber.
10. A vertical furnace comprising a process chamber and a vertical furnace process door according to claim 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010208397.9A CN111397358A (en) | 2020-03-23 | 2020-03-23 | Buffer mechanism, vertical furnace and process door thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010208397.9A CN111397358A (en) | 2020-03-23 | 2020-03-23 | Buffer mechanism, vertical furnace and process door thereof |
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| CN111397358A true CN111397358A (en) | 2020-07-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010208397.9A Withdrawn CN111397358A (en) | 2020-03-23 | 2020-03-23 | Buffer mechanism, vertical furnace and process door thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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Application publication date: 20200710 |