CN109166947B - Multi-shaft adjustable suspension supporting device - Google Patents
Multi-shaft adjustable suspension supporting device Download PDFInfo
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- CN109166947B CN109166947B CN201811006251.5A CN201811006251A CN109166947B CN 109166947 B CN109166947 B CN 109166947B CN 201811006251 A CN201811006251 A CN 201811006251A CN 109166947 B CN109166947 B CN 109166947B
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- 239000000725 suspension Substances 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 163
- 238000007789 sealing Methods 0.000 claims abstract description 66
- 239000000919 ceramic Substances 0.000 claims description 18
- 230000033001 locomotion Effects 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 208000012661 Dyskinesia Diseases 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a multi-axis adjustable suspension supporting device.A Z-axis adjusting mechanism is used for driving an RZ-axis adjusting mechanism to move along the Z-axis direction; the RZ shaft adjusting mechanism is used for driving the Y shaft adjusting mechanism to rotate on a first plane, and the first plane is parallel to the Z shaft direction; the Y-axis adjusting mechanism is used for driving the RY-axis adjusting mechanism to move along the Y-axis direction; one end of the support rod mechanism is connected with the RY shaft adjusting mechanism, and the other end of the support rod mechanism penetrates through the furnace door sealing mechanism; the RY shaft adjusting mechanism is used for driving the support rod mechanism and the furnace door sealing mechanism to rotate on a second plane, and the second plane is parallel to the Y-axis direction; the furnace door sealing mechanism is used for sealing the furnace pipe opening. The invention has simple integral structure and convenient adjustment, and can realize the functions of supporting, adjusting and sealing simultaneously; and meanwhile, the supporting rod mechanism is strong in bearing capacity.
Description
Technical Field
The invention relates to production equipment in the photovoltaic or semiconductor industry, in particular to a multi-axis adjustable suspension supporting device.
Background
In the fields of semiconductors and photovoltaics, high and low pressure diffusion, oxidation furnaces, annealing furnaces, low pressure chemical vapor deposition coating and other equipment, the sealing of the furnace door and the bearing capacity of the support mechanism for supporting the quartz boat or graphite boat directly affect the performance of the equipment. Along with the increase of productivity, the sealing requirement on the furnace body is higher and higher, and the bearing requirement of the supporting mechanism is also higher and higher. Conventional sealing mechanisms and load bearing mechanisms have not been able to meet the demands of production.
In the conventional low-voltage diffusion equipment for solar cells, the used supporting mechanism is generally heavy, because during operation, the supporting mechanism needs to support the cells and carriers with the weight of more than 30KG, and the cells and carriers extend into the diffusion furnace (1200 ℃) to stay for more than 3 hours, which requires that the supporting mechanism has high bearing capacity and low deformation in a high-temperature environment.
In addition, because the furnace chamber of the furnace tube is deep, the corresponding supporting mechanism is long, the supporting mechanism needs to be controlled by the adjusting mechanism to be aligned with the furnace tube opening and then extend into the furnace chamber, and the supporting mechanism is generally required to be adjusted in Y, Z two linear directions and RY and RZ two angular directions. At present, common adjusting mechanisms are heavy and cannot simultaneously realize the functions of sealing, supporting, tightness adjusting and the like.
Disclosure of Invention
The invention aims to provide a multi-shaft adjustable suspension supporting device which is simple in overall structure and convenient to adjust, and can realize the functions of supporting, adjusting and sealing; and meanwhile, the supporting rod mechanism is strong in bearing capacity.
In order to realize the purpose, the following technical scheme is adopted:
a multi-axis adjustable suspension supporting device comprises a Z-axis adjusting mechanism, an RZ-axis adjusting mechanism, a Y-axis adjusting mechanism, a RY-axis adjusting mechanism, a supporting rod mechanism and a furnace door sealing mechanism; the RZ shaft adjusting mechanism is rotationally connected with one side of the Z shaft adjusting mechanism, and the Z shaft adjusting mechanism is used for driving the RZ shaft adjusting mechanism to move along the Z shaft direction; the Y-axis adjusting mechanism is fixedly connected with the RZ-axis adjusting mechanism, the RZ-axis adjusting mechanism is used for driving the Y-axis adjusting mechanism to rotate on a first plane, and the first plane is parallel to the Z-axis direction; the RY shaft adjusting mechanism is rotationally connected with the Y shaft adjusting mechanism, and the Y shaft adjusting mechanism is used for driving the RY shaft adjusting mechanism to move along the Y shaft direction; one end of the support rod mechanism is connected with the RY shaft adjusting mechanism, and the other end of the support rod mechanism penetrates through the furnace door sealing mechanism; the RY shaft adjusting mechanism is used for driving the support rod mechanism and the furnace door sealing mechanism to rotate on a second plane, and the second plane is parallel to the Y-axis direction; the furnace door sealing mechanism is used for sealing the furnace pipe orifice.
Preferably, the support rod mechanism comprises a support rod, a ceramic rod sleeve and a support rod mounting seat; the supporting rod comprises a handle section, a connecting section and a stress section, wherein the connecting section is used for connecting the handle section and the stress section; a cavity with an opening at one end is arranged in the ceramic rod sleeve, and a handle section of the supporting rod is embedded in the cavity; one end of the opening of the ceramic rod sleeve is abutted against one side of the furnace door sealing mechanism, and the connecting section and the stress section of the supporting rod penetrate through the furnace door sealing mechanism and extend to the other side of the furnace door sealing mechanism; the support rod mounting seat is fixedly mounted at the top of the RY shaft adjusting mechanism and used for fixing the ceramic rod sleeve.
Preferably, the furnace door sealing mechanism comprises a sealing door, a first buffer spring, a second buffer spring and a push rod module; the push rod module comprises a push rod and a push rod seat; the push rod seat is fixed at the top of the support rod mounting seat, one end of the push rod is fixed at one side of the sealing door, and the other end of the push rod movably penetrates through the push rod seat; the first buffer spring is sleeved on the outer side of the push rod, and two ends of the first buffer spring are respectively abutted against the sealing door and the push rod seat; the second buffer spring is sleeved outside the ceramic rod sleeve, and two ends of the second buffer spring are respectively abutted against the sealing door and the supporting rod mounting seat; the first buffer spring and the second buffer spring are matched to seal the furnace pipe opening with the sealing door.
Preferably, the Z-axis adjusting mechanism comprises a Z-axis fixing plate, a Z-axis sliding plate, at least one Z-axis linear guide rail, a plurality of first Z-axis adjusting nails, and at least one second Z-axis adjusting nail; the top of the Z-axis fixed plate is provided with a first lug part extending to the upper part of the Z-axis sliding plate; the first Z-axis adjusting nail and the second Z-axis adjusting nail movably penetrate through the first ear part; the first Z-axis adjusting nail is used for adjusting and driving the Z-axis sliding plate to slide in the direction close to the first ear part through the Z-axis linear guide rail, and the second Z-axis adjusting nail is used for adjusting and driving the Z-axis sliding plate to slide in the direction far away from the first ear part through the Z-axis linear guide rail.
Preferably, the RZ axis adjusting mechanism comprises an RZ axis movable plate, an RZ rotation axis, two RZ axis adjusting nails; second lug parts extending to the upper part of the RZ shaft movable plate are respectively arranged on two sides of the top of the Z shaft sliding plate, and each RZ shaft adjusting nail correspondingly penetrates through one second lug part; the RZ rotating shaft is arranged on the Z-axis sliding plate, and the RZ-axis adjusting nail is used for adjusting and driving the RZ-axis movable plate to rotate around the RZ rotating shaft.
Preferably, the number of the first Z-axis adjusting nails is two, and the two first Z-axis adjusting nails are distributed on two sides of the first ear part; the first Z-axis adjusting nail movably penetrates through the first lug part, and the lower end of the first Z-axis adjusting nail is in threaded connection with the Z-axis sliding plate; the middle part of the second Z-axis adjusting nail is in threaded connection with the first lug part, and the lower end of the second Z-axis adjusting nail is abutted against the top of the Z-axis sliding plate; the middle part of the RZ shaft adjusting nail is in threaded connection with the second lug part, and the lower end of the RZ shaft adjusting nail is abutted to the top of the RZ shaft movable plate.
Preferably, the Y-axis adjusting mechanism includes a Y-axis fixing plate, a Y-axis sliding plate, at least one Y-axis linear guide rail, and a Y-axis gear adjusting module; one side of the Y-axis fixing plate is fixedly connected with the RZ-axis movable plate, and the Y-axis fixing plate is vertically arranged with the RZ-axis movable plate; the Y-axis gear adjusting module is used for driving the Y-axis sliding plate to slide relative to the Y-axis fixing plate through the Y-axis linear guide rail.
Preferably, the Y-axis gear adjusting module comprises a Y-axis knob, a first gear, a second gear and a Y-axis rack; the Y-axis gear is fixedly arranged at the top of the Y-axis sliding plate, and the first gear is arranged at one end of the Y-axis knob; the second gear is respectively meshed with the first gear and the Y-axis rack; the Y-axis knob is used for driving the first gear to rotate so as to drive the Y-axis gear to do linear motion.
Preferably, the RY shaft adjusting mechanism comprises a RY shaft movable plate, a RY rotating shaft and a RY shaft gear adjusting module; the RY rotating shaft is fixedly arranged at the top of the Y-axis sliding plate, and the RY-axis gear adjusting module is used for driving the RY-axis movable plate to rotate around the RY rotating shaft.
Preferably, the RY shaft gear adjusting module comprises a RY shaft knob, a third gear, a fourth gear and a fifth gear; the third gear is arranged at one end of the RY shaft knob, and the fifth gear is fixedly nested at the outer side of the RY rotating shaft; the fourth gear is respectively in meshed connection with the third gear and the fifth gear, and the RY shaft knob is used for driving the third gear, the fourth gear and the fifth gear to move.
By adopting the scheme, the invention has the beneficial effects that:
1) the whole structure is simple, the adjustment is convenient, and the supporting, adjusting and sealing functions can be realized at the same time;
2) use the gear adjusting module to adjust in Y axle adjustment mechanism, RY axle adjustment mechanism, loosen the screw before adjusting, adjust back direct locking screw, relative debugging can be simple, can be through gear reduction moreover, gear adjustment can be 10 to the reduction ratio fall: 1, achieving the effect of accurate adjustment;
3) the design of the furnace door sealing mechanism can realize furnace door sealing and locking at the same time;
4) the supporting rod mechanism has strong bearing capacity, and the ceramic rod sleeve can well play the roles of supporting, sealing and heat insulation.
Drawings
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a perspective view of the support pole of FIG. 1, with the support pole omitted;
FIG. 3 is a perspective view of the RY axle adjustment mechanism of FIG. 2 rotated an angle;
FIG. 4 is a perspective view of the RZ axis adjustment mechanism of FIG. 3 rotated an angle;
FIG. 5 is a perspective view of FIG. 1 with the support bar mechanism and the oven door sealing mechanism omitted;
FIG. 6 is a schematic structural view of the Z-axis adjustment mechanism of the present invention;
FIG. 7 is a schematic structural view of an RZ axis adjustment mechanism of the present invention;
FIG. 8 is a perspective view of the support rod and ceramic rod sleeve of the present invention;
wherein the figures identify the description:
1-Z axis adjusting mechanism, 2-RZ axis adjusting mechanism,
3-Y axis adjusting mechanism, 4-RY axis adjusting mechanism,
5-a support rod mechanism, 6-a furnace door sealing mechanism,
11-Z axis fixed plate, 12-Z axis sliding plate,
13-Z-axis linear guide rail, 14-first Z-axis adjusting nail,
15-second Z-axis adjusting nail, 21-RZ-axis movable plate,
22-RZ rotating shaft, 23-RZ shaft adjusting nail,
31-Y axis fixed plate, 32-Y axis sliding plate,
33-Y-axis linear guide rail, 34-Y-axis gear adjusting module,
41-RY shaft movable plate, 42-RY rotary shaft,
43-RY shaft gear adjusting module, 51-supporting rod,
52-ceramic rod sleeve, 53-supporting rod mounting seat,
61-a sealing door, 62-a first buffer spring,
63-a second buffer spring, 64-a push rod module,
341-Y axis knob, 342-first gear,
343-second gear, 344-Y axis rack,
431-RY shaft knob, 432-third gear,
433-fourth gear, 434-fifth gear,
511-a handle section, 512-a connecting section,
513-force-bearing section, 641-push rod,
642-pusher shoe.
Detailed Description
The invention is described in detail below with reference to the figures and the specific embodiments.
Referring to fig. 1 to 8, the invention provides a multi-axis adjustable suspension supporting device, which comprises a Z-axis adjusting mechanism 2, an RZ-axis adjusting mechanism 3, a Y-axis adjusting mechanism 4, a RY-axis adjusting mechanism 5, a supporting rod mechanism 6 and a furnace door sealing mechanism 7; the RZ shaft adjusting mechanism 2 is rotationally connected with one side of the Z shaft adjusting mechanism 1, and the Z shaft adjusting mechanism 1 is used for driving the RZ shaft adjusting mechanism 2 to move along the Z shaft direction; the Y-axis adjusting mechanism 3 is fixedly connected with the RZ-axis adjusting mechanism 2, and the RZ-axis adjusting mechanism 2 is used for driving the Y-axis adjusting mechanism 3 to rotate on a first plane, wherein the first plane is parallel to the Z-axis direction; the RY shaft adjusting mechanism 4 is rotationally connected with the Y shaft adjusting mechanism 3, and the Y shaft adjusting mechanism 3 is used for driving the RY shaft adjusting mechanism 4 to move along the Y shaft direction; one end of the support rod mechanism 5 is connected with the RY shaft adjusting mechanism 4, and the other end of the support rod mechanism penetrates through the furnace door sealing mechanism 6; the RY shaft adjusting mechanism 4 is used for driving the support rod mechanism 5 and the furnace door sealing mechanism 6 to do rotary motion on a second plane, and the second plane is parallel to the Y-axis direction; the furnace door sealing mechanism 6 is used for sealing the furnace pipe orifice.
The support rod mechanism 5 comprises a support rod 51, a ceramic rod sleeve 52 and a support rod mounting seat 53; the supporting rod 51 comprises a handle section 511, a connecting section 512 and a stress section 513, wherein the connecting section 512 is used for connecting the handle section 511 and the stress section 513; a cavity with an opening at one end is arranged in the ceramic rod sleeve 52, and a handle section 511 of the support rod 51 is embedded in the cavity; one end of the opening of the ceramic rod sleeve 52 is abutted against one side of the furnace door sealing mechanism 6, and the connecting section 512 and the stressed section 513 of the supporting rod 51 penetrate through the furnace door sealing mechanism 6 and extend to the other side of the furnace door sealing mechanism 6; the support rod mounting seat 53 is fixedly mounted at the top of the RY shaft adjusting mechanism 4 and used for fixing the ceramic rod sleeve 52.
The furnace door sealing mechanism 6 comprises a sealing door 61, a first buffer spring 62, a second buffer spring 63 and a push rod module 64; the push rod module 64 comprises a push rod 641 and a push rod seat 642; the push rod base 642 is fixed on the top of the support rod mounting base 53, one end of the push rod 641 is fixed on one side of the sealing door 61, and the other end movably penetrates through the push rod base 642; the first buffer spring 62 is sleeved outside the push rod 641, and two ends of the first buffer spring are respectively abutted against the sealing door 61 and the push rod seat 642; the second buffer spring 63 is sleeved outside the ceramic rod sleeve 52, and two ends of the second buffer spring are respectively abutted against the sealing door 61 and the support rod mounting seat 53; the first buffer spring 62 and the second buffer spring 63 cooperate to seal the sealing door 61 to seal the furnace nozzle.
The Z-axis adjusting mechanism 1 comprises a Z-axis fixing plate 11, a Z-axis sliding plate 12, at least one Z-axis linear guide rail 13, a plurality of first Z-axis adjusting nails 14 and at least one second Z-axis adjusting nail 15; the top of the Z-axis fixed plate 11 is provided with a first lug part extending above the Z-axis sliding plate 12; the first Z-axis adjusting nail 14 and the second Z-axis adjusting nail 15 are movably arranged through the first ear part; the first Z-axis adjusting nail 14 is used for adjusting and driving the Z-axis sliding plate 12 to slide in the direction close to the first ear part through the Z-axis linear guide rail 13, and the second Z-axis adjusting nail 15 is used for adjusting and driving the Z-axis sliding plate 12 to slide in the direction away from the first ear part through the Z-axis linear guide rail 13.
The RZ shaft adjusting mechanism 2 comprises an RZ shaft movable plate 21, an RZ rotating shaft 22 and two RZ shaft adjusting nails 23; second lug parts extending to the upper part of the RZ shaft movable plate 21 are respectively arranged at two sides of the top of the Z shaft sliding plate 12, and each RZ shaft adjusting nail 23 correspondingly penetrates through one second lug part; the RZ rotation axis 22 is installed on the Z axis sliding plate 12, and the RZ axis adjustment nail 23 is used for adjusting and driving the RZ axis movable plate 21 to rotate around the RZ rotation axis 22.
The number of the first Z-axis adjusting nails 14 is two, and the two first Z-axis adjusting nails are distributed on two sides of the first ear part; the first Z-axis adjusting nail 14 movably penetrates through the first lug part, and the lower end of the first Z-axis adjusting nail is in threaded connection with the Z-axis sliding plate 12; the middle part of the second Z-axis adjusting nail 15 is in threaded connection with the first lug part, and the lower end of the second Z-axis adjusting nail is abutted against the top of the Z-axis sliding plate 12; the middle part of the RZ axis adjusting peg 23 is connected to the second ear thread, and the lower end thereof is abutted to the top of the RZ axis movable plate 21.
The Y-axis adjusting mechanism 3 comprises a Y-axis fixing plate 31, a Y-axis sliding plate 32, at least one Y-axis linear guide rail 33 and a Y-axis gear adjusting module 34; one side of the Y-axis fixing plate 31 is fixedly connected with the RZ-axis movable plate 21, and the Y-axis fixing plate 31 is arranged perpendicular to the RZ-axis movable plate 21; the Y-axis gear adjusting module 34 is used for driving the Y-axis sliding plate 32 to slide relative to the Y-axis fixing plate 31 through the Y-axis linear guide 33. The Y-axis gear adjusting module 34 comprises a Y-axis knob 341, a first gear 342, a second gear 343, and a Y-axis rack 344; the Y-axis rack 344 is fixedly installed on the top of the Y-axis sliding plate 32, and the first gear 342 is disposed at one end of the Y-axis knob 341; the second gear 343 is respectively meshed with the first gear 342 and the Y-axis rack 344; the Y-axis knob 341 is configured to drive the first gear 342 to rotate, so as to drive the Y-axis gear 344 to perform a linear motion.
The RY shaft adjusting mechanism 4 comprises a RY shaft movable plate 41, a RY rotating shaft 42 and a RY shaft gear adjusting module 43; the RY rotating shaft 42 is fixedly arranged at the top of the Y-axis sliding plate 32, and the RY-axis gear adjusting module 43 is used for driving the RY-axis movable plate 41 to rotate around the RY rotating shaft 42. The RY shaft gear adjusting module 43 comprises a RY shaft knob 431, a third gear 432, a fourth gear 433 and a fifth gear 434; the third gear 432 is arranged at one end of the RY shaft knob 431, and the fifth gear 434 is fixedly nested outside the RY rotating shaft 42; the fourth gear 433 is meshed with the third gear 432 and the fifth gear 434 respectively, and the RY shaft knob 431 is used for driving the third gear 432, the fourth gear 433 and the fifth gear 434 to move.
The working principle of the invention is as follows:
the invention is suitable for production equipment in photovoltaic or semiconductor industry, in particular to a furnace door sealing, furnace semi-finished product supporting and hanging load-bearing device required by high-pressure and low-pressure diffusion, oxidation furnaces, annealing furnaces, low-pressure chemical vapor deposition coating equipment and the like.
In the invention, a graphite boat or a quartz boat and the like are placed at the stress section of the supporting rod 51, the supporting rod 51 is aligned to the mouth of the furnace tube under the regulation of the Y-axis regulating mechanism 3, the RY-axis regulating mechanism 4, the Z-axis regulating mechanism 1 and the RZ-axis regulating mechanism 2, and the supporting rod 51 is sent into the cavity of the furnace tube under the drive of an external driving mechanism. When the sealing door 61 seals the furnace pipe opening, the first buffer spring 62 and the second buffer spring 63 are matched with each other to balance elasticity, so that the sealing door 61 can be better sealed at the furnace pipe opening, and the situation that the sealing door 61 is not sealed well (if one side of the sealing door 61 is clamped into the furnace pipe opening, the other side of the sealing door 61 is not contacted with the furnace pipe opening) is prevented from occurring during sealing.
The support rod 51:
the silicon carbide material is adopted, and has the advantages of high bending strength (15.5MPa), excellent high temperature resistance, corrosion resistance, very high abrasion resistance, low friction coefficient and the like; the bending strength can reach the maximum under the condition that the cross section size is not changed, and meanwhile, the bending strength can be made into different shapes to meet the actual requirements, such as T-shaped, round, square and the like. The longer the support rod 51, the more products can be carried, which is generally 3m or more at present, and the too long material is not easy to manufacture, the stress section 513 of the support rod 51 can be divided into a plurality of sections, and then the sections are connected by a connection mode such as a thread, etc., to achieve the same effect.
Y-axis adjusting mechanism 3:
since the Y-axis gear 344 is fixedly connected to the Y-axis sliding plate 32, the Y-axis sliding plate 32 can be adjusted to slide in the Y-axis direction by rotating the Y-axis knob 341. The Y-axis adjusting mechanism 3 further comprises a Y-axis locking screw, the Y-axis locking screw penetrates through the Y-axis sliding plate 32 and then is in threaded connection with the Y-axis fixing plate 31, and after adjustment is completed, the Y-axis locking screw is used for locking to prevent abnormal movement between the Y-axis sliding plate 32 and the Y-axis fixing plate 31.
RY shaft adjusting mechanism 4:
because the RY rotating shaft 42 is fixedly connected with the Y-axis sliding plate 32, the length direction of the RY rotating shaft 42 is vertical to the plane of the Y-axis sliding plate 32; meanwhile, the third gear 432 is fixed at one end of the RY axis knob 431, the fifth gear 434 is fixedly nested outside the RY rotation axis 42, and the RY axis movable plate 41 can be adjusted to rotate around the RY rotation axis 42 by rotating the RY axis knob 431. The RY shaft adjusting mechanism 4 further comprises a RY shaft locking screw, the RY shaft locking screw penetrates through the RY shaft movable plate 41 and then is in threaded connection with the Y shaft sliding plate 32, and after the adjustment is completed, the RY shaft locking screw is used for locking to prevent abnormal movement between the RY shaft movable plate 41 and the Y shaft sliding plate 32.
Z-axis adjusting mechanism 1:
when the Z-axis sliding plate 12 needs to be adjusted in the direction close to the first ear part, because the two first Z-axis adjusting nails 14 are distributed on the two sides of the first ear part, the middle part of the first Z-axis adjusting nail 14 is movably connected with the first ear part, and the lower end of the first Z-axis adjusting nail is in threaded connection with the Z-axis sliding plate 12; the first Z-axis adjusting nail 14 is used for pulling the Z-axis sliding plate 12 upwards (towards the direction close to the first ear part), the first Z-axis adjusting nail 14 only rotates during adjustment and does not move up and down, and the Z-axis sliding plate 12 moves up and down under the torsion of the screw thread;
when the Z-axis sliding plate 12 needs to be adjusted in a direction away from the first ear, the middle part of the second Z-axis adjusting nail 15 is in threaded connection with the first ear, and the lower end of the second Z-axis adjusting nail is abutted against the top of the Z-axis sliding plate 12; the second Z-axis adjusting nail 15 performs both a rotational movement and an up-and-down movement to push the Z-axis sliding plate 12 downward (in a direction away from the first ear portion).
RZ-axis adjusting mechanism 2:
because the middle part of the RZ axis adjustment screw 23 is screwed to the second ear, the lower end thereof abuts against the top of the RZ axis movable plate 21. When the adjustment is needed, the two RZ axis adjustment nails 23 need to be adjusted at the same time, and the adjustment directions are opposite (i.e. when one of the RZ axis adjustment nails is adjusted upward, the other one is adjusted downward), so that the lower ends of the two RZ axis adjustment nails 23 are always abutted to the top of the RZ axis movable plate 21.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A multi-axis adjustable suspension supporting device is characterized by comprising a Z-axis adjusting mechanism, an RZ-axis adjusting mechanism, a Y-axis adjusting mechanism, a RY-axis adjusting mechanism, a supporting rod mechanism and a furnace door sealing mechanism; the RZ shaft adjusting mechanism is rotationally connected with one side of the Z shaft adjusting mechanism, and the Z shaft adjusting mechanism is used for driving the RZ shaft adjusting mechanism to move along the Z shaft direction; the Y-axis adjusting mechanism is fixedly connected with the RZ-axis adjusting mechanism, the RZ-axis adjusting mechanism is used for driving the Y-axis adjusting mechanism to rotate on a first plane, and the first plane is parallel to the Z-axis direction; the RY shaft adjusting mechanism is rotationally connected with the Y shaft adjusting mechanism, and the Y shaft adjusting mechanism is used for driving the RY shaft adjusting mechanism to move along the Y shaft direction; one end of the support rod mechanism is connected with the RY shaft adjusting mechanism, and the other end of the support rod mechanism penetrates through the furnace door sealing mechanism; the RY shaft adjusting mechanism is used for driving the support rod mechanism and the furnace door sealing mechanism to rotate on a second plane, and the second plane is parallel to the Y-axis direction; the furnace door sealing mechanism is used for sealing the furnace pipe orifice.
2. The multi-axis adjustable suspension support apparatus as claimed in claim 1, wherein the support rod mechanism comprises a support rod, a ceramic rod sleeve, a support rod mount; the supporting rod comprises a handle section, a connecting section and a stress section, wherein the connecting section is used for connecting the handle section and the stress section; a cavity with an opening at one end is arranged in the ceramic rod sleeve, and a handle section of the supporting rod is embedded in the cavity; one end of the opening of the ceramic rod sleeve is abutted against one side of the furnace door sealing mechanism, and the connecting section and the stress section of the supporting rod penetrate through the furnace door sealing mechanism and extend to the other side of the furnace door sealing mechanism; the support rod mounting seat is fixedly mounted at the top of the RY shaft adjusting mechanism and used for fixing the ceramic rod sleeve.
3. The multi-axis adjustable suspension support device of claim 2, wherein the oven door sealing mechanism comprises a sealing door, a first buffer spring, a second buffer spring, a push rod module; the push rod module comprises a push rod and a push rod seat; the push rod seat is fixed at the top of the support rod mounting seat, one end of the push rod is fixed at one side of the sealing door, and the other end of the push rod movably penetrates through the push rod seat; the first buffer spring is sleeved on the outer side of the push rod, and two ends of the first buffer spring are respectively abutted against the sealing door and the push rod seat; the second buffer spring is sleeved outside the ceramic rod sleeve, and two ends of the second buffer spring are respectively abutted against the sealing door and the supporting rod mounting seat; the first buffer spring and the second buffer spring are matched to seal the furnace pipe opening with the sealing door.
4. The multi-axis adjustable suspension support apparatus of claim 1, wherein the Z-axis adjustment mechanism comprises a Z-axis fixing plate, a Z-axis sliding plate, at least one Z-axis linear guide, a plurality of first Z-axis adjustment nails, at least one second Z-axis adjustment nail; the top of the Z-axis fixed plate is provided with a first lug part extending to the upper part of the Z-axis sliding plate; the first Z-axis adjusting nail and the second Z-axis adjusting nail movably penetrate through the first ear part; the first Z-axis adjusting nail is used for adjusting and driving the Z-axis sliding plate to slide in the direction close to the first ear part through the Z-axis linear guide rail, and the second Z-axis adjusting nail is used for adjusting and driving the Z-axis sliding plate to slide in the direction far away from the first ear part through the Z-axis linear guide rail.
5. The multi-axis adjustable suspension support apparatus as claimed in claim 4, wherein the RZ axis adjustment mechanism comprises a RZ axis movable plate, a RZ rotation axis, two RZ axis adjustment pegs; second lug parts extending to the upper part of the RZ shaft movable plate are respectively arranged on two sides of the top of the Z shaft sliding plate, and each RZ shaft adjusting nail correspondingly penetrates through one second lug part; the RZ rotating shaft is arranged on the Z-axis sliding plate, and the RZ-axis adjusting nail is used for adjusting and driving the RZ-axis movable plate to rotate around the RZ rotating shaft.
6. The multi-axis adjustable suspension support apparatus as claimed in claim 5, wherein the number of first Z-axis adjustment nails is two and distributed on both sides of the first ear portion; the first Z-axis adjusting nail movably penetrates through the first lug part, and the lower end of the first Z-axis adjusting nail is in threaded connection with the Z-axis sliding plate; the middle part of the second Z-axis adjusting nail is in threaded connection with the first lug part, and the lower end of the second Z-axis adjusting nail is abutted against the top of the Z-axis sliding plate; the middle part of the RZ shaft adjusting nail is in threaded connection with the second lug part, and the lower end of the RZ shaft adjusting nail is abutted to the top of the RZ shaft movable plate.
7. The multi-axis adjustable suspension support apparatus of claim 1, wherein the Y-axis adjustment mechanism comprises a Y-axis fixed plate, a Y-axis sliding plate, at least one Y-axis linear guide, a Y-axis gear adjustment module; one side of the Y-axis fixing plate is fixedly connected with the RZ-axis movable plate, and the Y-axis fixing plate is vertically arranged with the RZ-axis movable plate; the Y-axis gear adjusting module is used for driving the Y-axis sliding plate to slide relative to the Y-axis fixing plate through the Y-axis linear guide rail.
8. The multi-axis adjustable suspension support apparatus of claim 7, wherein the Y-axis gear adjustment module comprises a Y-axis knob, a first gear, a second gear, a Y-axis rack; the Y-axis gear is fixedly arranged at the top of the Y-axis sliding plate, and the first gear is arranged at one end of the Y-axis knob; the second gear is respectively meshed with the first gear and the Y-axis rack; the Y-axis knob is used for driving the first gear to rotate so as to drive the Y-axis gear to do linear motion.
9. The multi-axis adjustable suspension support device of claim 1, wherein the RY axis adjustment mechanism comprises a RY axis movable plate, a RY axis of rotation, a RY axis gear adjustment module; the RY rotating shaft is fixedly arranged at the top of the Y-axis sliding plate, and the RY-axis gear adjusting module is used for driving the RY-axis movable plate to rotate around the RY rotating shaft.
10. The multi-axis adjustable suspension support apparatus of claim 9, wherein the RY axis gear adjustment module comprises a RY axis knob, a third gear, a fourth gear, a fifth gear; the third gear is arranged at one end of the RY shaft knob, and the fifth gear is fixedly nested at the outer side of the RY rotating shaft; the fourth gear is respectively in meshed connection with the third gear and the fifth gear, and the RY shaft knob is used for driving the third gear, the fourth gear and the fifth gear to move.
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| CN201811006251.5A CN109166947B (en) | 2018-08-30 | 2018-08-30 | Multi-shaft adjustable suspension supporting device |
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| CN201811006251.5A CN109166947B (en) | 2018-08-30 | 2018-08-30 | Multi-shaft adjustable suspension supporting device |
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| CN201408770Y (en) * | 2009-05-07 | 2010-02-17 | 锦州华昌光伏科技有限公司 | Quartz bearing heating device of solar battery diffusion furnace |
| KR101266439B1 (en) * | 2011-10-05 | 2013-05-22 | 대한동방 주식회사 | Hearth Roll |
| CN102615947A (en) * | 2012-03-21 | 2012-08-01 | 浙江源新光伏自动化设备有限公司 | Platform pose adjusting method and pose adjusting platform |
| CN103151248B (en) * | 2013-03-07 | 2016-04-20 | 武汉电信器件有限公司 | The disperser of zinc and method of diffusion thereof during a kind of photodetector makes |
| KR101448698B1 (en) * | 2013-03-15 | 2014-10-10 | 대한동방 주식회사 | Hearth Roll |
| CN106546101B (en) * | 2016-10-27 | 2019-03-08 | 湖南红太阳光电科技有限公司 | A kind of diffusion furnace stove gate device |
| CN206418010U (en) * | 2016-12-21 | 2017-08-18 | 杭州大和热磁电子有限公司 | A kind of quartz ampoule annealing support jig |
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Address after: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |