CN201408770Y - Quartz bearing heating device of solar battery diffusion furnace - Google Patents
Quartz bearing heating device of solar battery diffusion furnace Download PDFInfo
- Publication number
- CN201408770Y CN201408770Y CN2009200136148U CN200920013614U CN201408770Y CN 201408770 Y CN201408770 Y CN 201408770Y CN 2009200136148 U CN2009200136148 U CN 2009200136148U CN 200920013614 U CN200920013614 U CN 200920013614U CN 201408770 Y CN201408770 Y CN 201408770Y
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- CN
- China
- Prior art keywords
- quartz
- quartzy
- quartz ampoule
- quartz tube
- door
- Prior art date
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- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a quartz bearing heating device of a solar battery diffusion furnace. The device solves the problem that a large quantity of metaphosphoric acid is deposited at port aftereach diffusion technology because the distance between the port and the heating area in the heating furnace body is far due to long quartz tube. The device is provided with a heating furnace body, anda quartz tube is inserted in the heating furnace body. A gas exhaust hole is led out of one end of the quartz tube, and a sealing quartz door is arranged on the other end opening of the quartz tube.A suspension paddle is inserted in the quartz tube. A quartz boat is arranged on part of the suspension paddle within the quartz tube, and a buffer support device is arranged on the part of the suspension paddle out of the quartz door. The device is characterized in that the length A of the main cavity of the quartz tube is 2160-2180 mm. The utility model can reduce the deposition of a large quantity of metaphosphoric acid, therefore the product quality is enhanced, and the pollution on environment and equipment is reduced.
Description
Technical field
The utility model relates to a kind of carrying heater that uses in the solar cell production process, the quartzy carrying of particularly a kind of solar cell diffusion furnace heater.
Background technology
The solar cell production technology comprises cleaning and texturing, diffusion, etching, dephosphorization silex glass, plated film, prints electrode, sintering and testing, sorting operation, wherein in diffusing procedure, need silicon chip is put into quartzy carrying heater, again this device is put into the solar cell diffusion furnace and spread.Existing quartzy carrying heater mainly is by heating furnace body, be located at quartz ampoule in the heating furnace body, be located at the quartzy door of quartz ampoule charging aperture one end, by the cantilever paddle in the quartzy door insertion quartz ampoule and be located at the quartz boat that is installed in the quartz ampoule on the cantilever paddle and constitute, the length of its quartz ampoule main cavity is 2380mm.Because quartz ampoule is longer, fire door (being the quartz ampoule mouth of pipe) is distant apart from the thermal treatment zone in the heating furnace body, therefore the temperature of fire door is lower than the boiling point of diffusion with the metaphosphoric acid that process gas produced in process of production, all can deposit a large amount of metaphosphoric acids at the fire door place after causing each diffusion technology, equipment, product and process environments are all had very big harmful effect.
Summary of the invention
The purpose of this utility model is will provide a kind of can reduce the metaphosphoric acid deposition in a large number, thereby improves the quality of products, and reduces the quartzy carrying of the solar cell diffusion furnace heater to environment and equipment pollution.
The utility model is achieved in that it has a heating furnace body that is coiled to form by heating tube, in heating furnace body, be fitted with quartz ampoule, quartz ampoule one end is drawn steam vent, the another port is provided with the quartzy door of sealing, in quartz ampoule, be inserted with cantilever paddle, be positioned at quartz ampoule and be provided with quartz boat on cantilever paddle, be positioned at quartz and be provided with cushioning and supporting device outdoors on cantilever paddle, its special character is: the length A of described quartz ampoule main cavity is 2160-2180mm.
The quartzy carrying of above-mentioned solar cell diffusion furnace heater, the length A of described quartz ampoule main cavity is 2170mm.
The quartzy carrying of above-mentioned solar cell diffusion furnace heater, described cushioning and supporting device is by being located at the tetrafluoro bellows on the cantilever paddle and sending bar, be located at tetrafluoro bellows and the fire door and the bearing that send on the bar respectively, the fire door support bar that connects fire door and bearing, and the quartzy door support bar formation of quartzy door of connection and bearing.
The utility model has the advantages that: owing to contraction in length the quartz ampoule main cavity, promptly shortened the distance of the quartz ampoule mouth of pipe (being fire door) to the interior thermal treatment zone of heating furnace body, the temperature of fire door is improved, the fire door temperature is higher than the boiling point of diffusion with the metaphosphoric acid that process gas produced, the metaphosphoric acid that produces is difficult to sedimentation and is taken away by exhaust system with the form of gas, thereby improve the quality of products, reduce pollution environment and equipment.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Among the figure: heating furnace body 1, quartz ampoule 2, heat-preservation cotton 3, the quartzy door 4 of sealing, fire door 5, quartzy door support bar 6, bearing 7 send bar 8, fire door support bar 9, tetrafluoro bellows 10, cantilever paddle 11, offgas duct 12, quartz boat 13, quartzy even flow plate 14, waste liquid bottle 15, steam vent 16.
Embodiment
As shown in the figure, the utility model has a tubulose heating furnace body 1 that is coiled to form by heating tube, in heating furnace body 1, be fitted with quartz ampoule 2, heat-preservation cotton 3 location of quartz ampoule 2 by being fixed on 1 two ports of heating furnace body, quartz ampoule 2 one ends are drawn steam vent 16 by heat-preservation cotton 3, the another port is fixed with the quartzy door 4 of sealing, and the length A of quartz ampoule 2 main cavities is 2160-2180mm, and its optimum value is 2170mm.In quartz ampoule 2, be inserted with cantilever paddle 11, on cantilever paddle 11, be positioned at quartz ampoule 2 and be supported with slidably quartz boat 13, on cantilever paddle 11, be positioned at quartz boat 13 both sides and be placed with quartzy even flow plate 14 respectively by the quartzy door of sealing 4 one sides.On cantilever paddle 11, be positioned at quartz and be provided with cushioning and supporting device outdoors, described cushioning and supporting device be by be enclosed within on the cantilever paddle 11 and lean the quartzy door 4 of sealing tetrafluoro bellows 10, be fixed on cantilever paddle 11 outer ends send bar 8, the stainless steel fire door 5 on being located at tetrafluoro bellows 10 and sending bar 8 and bearing 7, the quartz support bar 6 that is connected the fire door support bar 9 of fire door 5 and bearing 7 and is connected quartzy door 4 of sealing and bearing 7 constitute respectively.Be inserted with the offgas duct 12 that is used to discharge tail gas at quartz ampoule 2 with steam vent 16 corresponding sides, be connected with two waste liquid bottles 15 in offgas duct 12 outer ends, so that tail gas evenly discharges.During work, silicon chip is placed on the quartz boat 13, quartz boat 13 is installed on the cantilever paddle 11 and with cantilever paddle 11 again and inserts in the quartz ampoule 2, quartzy door 4 of fixing seal and buffering bracing or strutting arrangement then can be put into the solar cell diffusion furnace with this device and spread then.
Claims (3)
1, the quartzy carrying of a kind of solar cell diffusion furnace heater, comprise a heating furnace body that is coiled to form by heating tube, in heating furnace body, be fitted with quartz ampoule, quartz ampoule one end is drawn steam vent, the another port is provided with the quartzy door of sealing, is inserted with cantilever paddle in quartz ampoule, is positioned at quartz ampoule and is provided with quartz boat on cantilever paddle, be positioned at quartz and be provided with cushioning and supporting device outdoors on cantilever paddle, it is characterized in that: the length A of described quartz ampoule main cavity is 2160-2180mm.
2, the quartzy carrying of solar cell diffusion furnace according to claim 1 heater, it is characterized in that: the length A of described quartz ampoule main cavity is 2170mm.
3, the quartzy carrying of solar cell diffusion furnace according to claim 1 heater, it is characterized in that: described cushioning and supporting device is by being located at the tetrafluoro bellows on the cantilever paddle and sending bar, be located at tetrafluoro bellows and the fire door and the bearing that send on the bar respectively, the fire door support bar that connects fire door and bearing, and the quartzy door support bar formation of quartzy door of connection and bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200136148U CN201408770Y (en) | 2009-05-07 | 2009-05-07 | Quartz bearing heating device of solar battery diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200136148U CN201408770Y (en) | 2009-05-07 | 2009-05-07 | Quartz bearing heating device of solar battery diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201408770Y true CN201408770Y (en) | 2010-02-17 |
Family
ID=41679715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200136148U Expired - Fee Related CN201408770Y (en) | 2009-05-07 | 2009-05-07 | Quartz bearing heating device of solar battery diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201408770Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102496653A (en) * | 2011-12-21 | 2012-06-13 | 中电电气（南京）光伏有限公司 | Correction method of crystalline silicon solar cell vulcanization electrode and correction apparatus thereof |
| CN107201549A (en) * | 2017-04-14 | 2017-09-26 | 中国电子科技集团公司第四十八研究所 | A kind of diffusion furnace for lifting fire door silicon chip sheet resistance uniformity |
| CN109166947A (en) * | 2018-08-30 | 2019-01-08 | 深圳市拉普拉斯能源技术有限公司 | A kind of adjustable holder suspension supporting device of multiaxis |
| CN111155174A (en) * | 2020-01-17 | 2020-05-15 | 深圳市拉普拉斯能源技术有限公司 | Continuous vacuum diffusion furnace |
| CN112820680A (en) * | 2020-12-31 | 2021-05-18 | 深圳市拉普拉斯能源技术有限公司 | Furnace feeding device with paddles and production process thereof |
| CN117038800A (en) * | 2023-10-08 | 2023-11-10 | 南通大鹏光电有限公司 | Diffusion furnace for manufacturing solar photovoltaic cells |
-
2009
- 2009-05-07 CN CN2009200136148U patent/CN201408770Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102496653A (en) * | 2011-12-21 | 2012-06-13 | 中电电气（南京）光伏有限公司 | Correction method of crystalline silicon solar cell vulcanization electrode and correction apparatus thereof |
| CN107201549A (en) * | 2017-04-14 | 2017-09-26 | 中国电子科技集团公司第四十八研究所 | A kind of diffusion furnace for lifting fire door silicon chip sheet resistance uniformity |
| CN109166947A (en) * | 2018-08-30 | 2019-01-08 | 深圳市拉普拉斯能源技术有限公司 | A kind of adjustable holder suspension supporting device of multiaxis |
| CN111155174A (en) * | 2020-01-17 | 2020-05-15 | 深圳市拉普拉斯能源技术有限公司 | Continuous vacuum diffusion furnace |
| CN112820680A (en) * | 2020-12-31 | 2021-05-18 | 深圳市拉普拉斯能源技术有限公司 | Furnace feeding device with paddles and production process thereof |
| CN117038800A (en) * | 2023-10-08 | 2023-11-10 | 南通大鹏光电有限公司 | Diffusion furnace for manufacturing solar photovoltaic cells |
| CN117038800B (en) * | 2023-10-08 | 2023-12-15 | 南通大鹏光电有限公司 | Diffusion furnace for manufacturing solar photovoltaic cells |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100217 Termination date: 20120507 |