CN208688755U - A kind of replacing panel of high-purity special gas - Google Patents
A kind of replacing panel of high-purity special gas Download PDFInfo
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- CN208688755U CN208688755U CN201821301172.2U CN201821301172U CN208688755U CN 208688755 U CN208688755 U CN 208688755U CN 201821301172 U CN201821301172 U CN 201821301172U CN 208688755 U CN208688755 U CN 208688755U
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- valve
- pressure helium
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Abstract
The utility model discloses a kind of replacing panels of high-purity special gas, it is related to high-purity special gas field, including connecting tube, high pressure helium tracheae, low pressure helium tube, exhaust pipe, exhaust tube, high-pressure helium storage device, exhaust gas processing device, vacuum pump, high pressure helium air valve, pressure reducing valve, low pressure helium valve, exhaust-valve, isolating valve,；The high pressure helium tracheae, low pressure helium tube, exhaust pipe, exhaust tube are arranged in parallel, and connect the connecting tube jointly；The high pressure helium tracheae, low pressure helium tube are all connected with the high-pressure helium storage device, and the high pressure helium tracheae is equipped with high pressure helium air valve, and the low pressure helium tube is equipped with pressure reducing valve and low pressure helium valve；The exhaust pipe connects the exhaust gas processing device, and the exhaust pipe is equipped with exhaust-valve；The exhaust tube connects the vacuum pump；The connecting tube is equipped with the 4th pressure gauge and isolating valve,.Utility model has the advantages that guaranteeing the purity of product and the safety of working environment.
Description
Technical field
The utility model relates to high-purity special gas field more particularly to a kind of replacing panels of high-purity special gas.
Background technique
As high-purity special gas of IC industry key raw material, not only occupy in IC industry important
Status, the fields such as photovoltaic, flat-panel screens, compound semiconductor device, petrochemical industry, optical-fibre communications also all
There is indispensable role, is widely used in the techniques such as film, doping, etching, diffusion, vapor deposition.With scientific skill
The development of art, also higher and higher for the quality requirements of high-purity special gas, the purity requirement generally for gas is greater than
99.9999%, impurity total concentration is not higher than 1ppm (ppm indicates hundred a ten thousandths).
The transport of high-purity special gas is usually to be contained in gas by pipeline by pressure vessels such as steel cylinders
In steel cylinder.If connecting pipe displacement is clean or there are leak sources, new impurity can be introduced so that product purity without
Method guarantees 99.9999%；And special gas usually has many characteristics, such as that severe toxicity, explosive range are wide, easily reacts with oxygen, these belong to
Property allows it to be even more important filling replacement operator when disconnecting and seem, and the implementation carrier of this operation is exactly replacing panel.It is existing
Some replacing panels are not easy to exclude leak source, it cannot be guaranteed that the airtightness of whole system.
Utility model content
The technical problem to be solved by the utility model is to provide one kind can guarantee the high-purity of the airtightness of whole system
The replacing panel of special gas.
The utility model is to solve a kind of above-mentioned technical problem: displacement of high-purity special gas by the following technical programs
Panel, including connecting tube (14), high pressure helium tracheae (15), low pressure helium tube (16), exhaust pipe (17), exhaust tube (18), high pressure
Helium storage device (19), exhaust gas processing device (20), vacuum pump (21), high pressure helium air valve (26), pressure reducing valve (27), low pressure helium
Air valve (28), exhaust-valve (29), isolating valve, (32)；The high pressure helium tracheae (15), low pressure helium tube (16), exhaust pipe (17),
Exhaust tube (18) is arranged in parallel, and connects the connecting tube (14) jointly；The high pressure helium tracheae (15), low pressure helium tube (16) are equal
The high-pressure helium storage device (19) is connected, the high pressure helium tracheae (15) is equipped with high pressure helium air valve (26), the low pressure
Helium tube (16) is equipped with pressure reducing valve (27) and low pressure helium valve (28)；The exhaust pipe (17) connects the exhaust gas processing device
(20), the exhaust pipe (17) is equipped with exhaust-valve (29)；The exhaust tube (18) connects the vacuum pump (21)；The connection
It manages (14) and is equipped with the 4th pressure gauge (25) and isolating valve, (32).Replacing panel is not only the carrier of replacement operator, can also lead to
It crosses the 4th pressure gauge and high pressure survey leakage is carried out to the pipe-line system of connection, exclude leak source to guarantee the airtightness of whole system.
As the technical solution of optimization, from the high-pressure helium storage device (19) to institute on the high pressure helium tracheae (15)
It states and is successively arranged first pressure gauge (22) and high pressure helium air valve (26) between connecting tube (14).
As the technical solution of optimization, from the high-pressure helium storage device (19) to institute on the low pressure helium tube (16)
It states and is successively arranged pressure reducing valve (27), second pressure gauge (23) and low pressure helium valve (28) between connecting tube (14).
As the technical solution of optimization, on the exhaust tube (18) from the vacuum pump (21) to the connecting tube (14) it
Between be successively arranged the first evacuation valve (30), third pressure gauge (24) and the second evacuation valve (31).It can be used for whether measuring valve
There are interior leakages.
As the technical solution of optimization, the high-pressure helium storage device (19) uses high-pressure helium steel cylinder or helium packaging
Lattice.
As the technical solution of optimization, each pressure gauge is all made of pressure gauge with digital display.
As the technical solution of optimization, each pressure gauge is all connected to automatic control system.
As the technical solution of optimization, each valve is all connected to automatic control system.
As the technical solution of optimization, each valve is all made of pneumatic diaphragm valve.The leak rate of this type valve is low, flux
Greatly.
As the technical solution of optimization, tubing, the component of the replacing panel are all made of stainless steel.
Utility model has the advantages that replacing panel is not only the carrier of replacement operator, pressure gauge pair can also be passed through
The pipe-line system of connection carries out high pressure survey leakage and low pressure judges whether there is valves leakage, excludes leak source to guarantee whole system
Airtightness, do not introduce new impurity in the course of work, guarantee the purity of product and the safety of working environment；Emission-free row
It puts；It is small in size, it is easy for installation, it is not take up space；Operator can remotely operate, and far from production line, reduce operation
Triviality improves safety coefficient.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the replacing panel of the high-purity special gas of the utility model embodiment.
Specific embodiment
As shown in Figure 1, a kind of replacing panel of high-purity special gas, including high pressure helium tracheae 15, low pressure helium tube 16, row
Tracheae 17, exhaust tube 18, high-pressure helium storage device 19, exhaust gas processing device 20, vacuum pump 21, first pressure gauge 22, second
Pressure gauge 23, third pressure gauge 24, the 4th pressure gauge 25, high pressure helium air valve 26, pressure reducing valve 27, low pressure helium valve 28, exhaust-valve
29, the first evacuation valve 30, the second evacuation valve 31, isolating valve, 32.
High pressure helium tracheae 15, low pressure helium tube 16, exhaust pipe 17, exhaust tube 18 are arranged in parallel, common to connect connecting tube 14.
High pressure helium tracheae 15, low pressure helium tube 16 are all connected with high-pressure helium storage device 19, high-pressure helium storage device 19
Using high-pressure helium steel cylinder or helium packaging lattice.
From high-pressure helium storage device 19 to being successively arranged first pressure gauge 22 connecting tube 14 on high pressure helium tracheae 15
With high pressure helium air valve 26.
From high-pressure helium storage device 19 to being successively arranged pressure reducing valve 27, second connecting tube 14 on low pressure helium tube 16
Pressure gauge 23 and low pressure helium valve 28.
Exhaust pipe 17 connects exhaust gas processing device 20, and exhaust pipe 17 is equipped with exhaust-valve 29.
Exhaust tube 18 connects vacuum pump 21, from vacuum pump 21 to being successively arranged the first pumping connecting tube 14 on exhaust tube 18
Empty valve 30, third pressure gauge 24 and the second evacuation valve 31.
In connecting tube 14 3 from replacing panel to filling tube between be successively arranged the 4th pressure gauge 25 and isolating valve, 32.
First pressure gauge 22, second pressure gauge 23, third pressure gauge 24, the 4th pressure gauge 25 are all made of with communications protocol
Pressure gauge with digital display, each pressure gauge passes through communications protocol and is connected to PLC, DCS automatic control system.
First valve 4, the second valve 5, third valve 13, high pressure helium air valve 26, low pressure helium valve 28, exhaust-valve 29,
One evacuation valve 30, the second evacuation valve 31, isolating valve, 32 are all made of pneumatic diaphragm valve, and the leak rate of this type valve is low, flux is big,
Each valve passes through communications protocol and is connected to PLC, DCS automatic control system.
The component of replacing panel uses VCR connection, and this connection type benefit is panel convenient disassembly, valve and pressure
Replacement is convenient when table has damage, and leak rate is low.
The workflow of the replacing panel of the high-purity special gas of the present embodiment are as follows:
1, high pressure whether there is leakage to measure pipe fitting, access: open high pressure helium air valve 26, isolating valve, 32 is passed through about
60atm helium is to the pipeline pressure maintaining leakage detection newly accessed, it is desirable that positive and negative twice of the helium of new access pipeline examined using hand-held helium inspection instrument,
Pressure maintaining 15 minutes.Helium leak test rate is lower than five times of environment leak rates, and the variation of 15 minutes the 4th pressure gauges 25 of pressure maintaining is less than 5psig,
It can be considered that helium inspection passes through.
2, low pressure whether there is interior leakage to measure valve: opening the first evacuation valve 30, the second evacuation valve 31, opens vacuum pump
21 registrations for being evacuated to third pressure gauge 24 are Absolute Negative Pressure, are then shut off the first evacuation valve 30, pressure maintaining 5 minutes, if third
The registration of pressure gauge 24 is constant, then valves leakage is not present.
3, replacement procedure: the high-pressure helium come out by high-pressure helium storage device 19 is adjusted to 3 using pressure reducing valve 27~
5atm opens low pressure helium valve 28, after keeping 10~20s to wait until pipeline concora crush, opens the emptying of exhaust-valve 29 to the 4th pressure gauge
After 25 display relative pressures, low pressure helium valve 28, exhaust-valve 29 are closed, then opens the first evacuation valve 30, the second evacuation valve 31 pumping
Vacuum all shows range minimum to second pressure gauge 23, third pressure gauge 24, and above-mentioned whole process can be considered 1 displacement of completion
Program, rerun 20 replacement procedures.
The above is only the preferred embodiment of the present invention, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (10)
1. a kind of replacing panel of high-purity special gas, it is characterised in that: including connecting tube (14), high pressure helium tracheae (15), low
Press helium tube (16), exhaust pipe (17), exhaust tube (18), high-pressure helium storage device (19), exhaust gas processing device (20), vacuum
Pump (21), high pressure helium air valve (26), pressure reducing valve (27), low pressure helium valve (28), exhaust-valve (29), isolating valve, (32)；The height
Pressure helium tube (15), low pressure helium tube (16), exhaust pipe (17), exhaust tube (18) are arranged in parallel, and connect the connecting tube jointly
(14)；The high pressure helium tracheae (15), low pressure helium tube (16) are all connected with the high-pressure helium storage device (19), the high pressure
Helium tube (15) is equipped with high pressure helium air valve (26), and the low pressure helium tube (16) is equipped with pressure reducing valve (27) and low pressure helium valve
(28)；The exhaust pipe (17) connects the exhaust gas processing device (20), and the exhaust pipe (17) is equipped with exhaust-valve (29)；Institute
It states exhaust tube (18) and connects the vacuum pump (21)；The connecting tube (14) is equipped with the 4th pressure gauge (25) and isolating valve,
(32)。
2. the replacing panel of high-purity special gas as described in claim 1, it is characterised in that: on the high pressure helium tracheae (15)
From the high-pressure helium storage device (19) to being successively arranged first pressure gauge (22) and high pressure helium the connecting tube (14)
Air valve (26).
3. the replacing panel of high-purity special gas as described in claim 1, it is characterised in that: on the low pressure helium tube (16)
From the high-pressure helium storage device (19) to being successively arranged pressure reducing valve (27), second pressure gauge the connecting tube (14)
(23) and low pressure helium valve (28).
4. the replacing panel of high-purity special gas as described in claim 1, it is characterised in that: from institute on the exhaust tube (18)
State vacuum pump (21) to be successively arranged between the connecting tube (14) the first evacuation valve (30), third pressure gauge (24) and second take out
Empty valve (31).
5. the replacing panel of high-purity special gas as described in claim 1, it is characterised in that: the high-pressure helium storage device
(19) high-pressure helium steel cylinder or helium packaging lattice are used.
6. the replacing panel of high-purity special gas as described in any one in claim 1-5, it is characterised in that: each pressure gauge is adopted
Use pressure gauge with digital display.
7. the replacing panel of high-purity special gas as described in any one in claim 1-5, it is characterised in that: each pressure gauge connects
It is connected to automatic control system.
8. the replacing panel of high-purity special gas as described in any one in claim 1-5, it is characterised in that: each valve is all connected with
To automatic control system.
9. the replacing panel of high-purity special gas as described in any one in claim 1-5, it is characterised in that: each valve is all made of
Pneumatic diaphragm valve.
10. the replacing panel of high-purity special gas as described in any one in claim 1-5, it is characterised in that: the replacing panel
Tubing, component be all made of stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821301172.2U CN208688755U (en) | 2018-08-13 | 2018-08-13 | A kind of replacing panel of high-purity special gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821301172.2U CN208688755U (en) | 2018-08-13 | 2018-08-13 | A kind of replacing panel of high-purity special gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208688755U true CN208688755U (en) | 2019-04-02 |
Family
ID=65884968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821301172.2U Active CN208688755U (en) | 2018-08-13 | 2018-08-13 | A kind of replacing panel of high-purity special gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208688755U (en) |
-
2018
- 2018-08-13 CN CN201821301172.2U patent/CN208688755U/en active Active
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