CN220289548U - Silane on-line sampling system - Google Patents
Silane on-line sampling system Download PDFInfo
- Publication number
- CN220289548U CN220289548U CN202321676274.3U CN202321676274U CN220289548U CN 220289548 U CN220289548 U CN 220289548U CN 202321676274 U CN202321676274 U CN 202321676274U CN 220289548 U CN220289548 U CN 220289548U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- pipe
- sampling
- tube
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005070 sampling Methods 0.000 title claims abstract description 119
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 46
- 238000004458 analytical method Methods 0.000 claims abstract description 79
- 238000010926 purge Methods 0.000 claims abstract description 62
- 239000007789 gas Substances 0.000 claims abstract description 54
- 239000001307 helium Substances 0.000 claims abstract description 7
- 229910052734 helium Inorganic materials 0.000 claims abstract description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000002347 injection Methods 0.000 claims description 25
- 239000007924 injection Substances 0.000 claims description 25
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 229910000831 Steel Inorganic materials 0.000 claims description 12
- 239000010959 steel Substances 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 238000005086 pumping Methods 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000012223 aqueous fraction Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000004457 water analysis Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model relates to an online silane sampling system. The silane online sampling system comprises a purging pipeline, a vacuum-pumping pipeline, a sampling pipeline, a sample analysis pipeline and a bypass pipeline, wherein the purging pipeline is respectively connected with the vacuum-pumping pipeline, the sampling pipeline and the sample analysis pipeline, the vacuum-pumping pipeline is respectively connected with the sampling pipeline and the sample analysis pipeline, the sampling pipeline is provided with a plurality of sampling interfaces, the sample analysis pipeline is connected with the sampling pipeline through the bypass pipeline, a gas leakage pipe is arranged on the bypass pipeline, and a stop valve is arranged on the gas leakage pipe. Compared with the prior art, the silane online sampling system provided by the utility model can be used for extracting silane in each pipeline in the system through helium replacement and vacuumizing, and the problems of silane leakage and inflammability are avoided. The plurality of second sampling tubes can be connected with a plurality of sampling points, so that the utility model can sample the plurality of sampling points. The bleed may accelerate the flow rate of gas within the system to ensure that a truly representative sample is obtained.
Description
Technical Field
The utility model belongs to the technical field of disilane analysis, and particularly relates to an online silane sampling system.
Background
In microelectronics, silicon dioxide films are widely used for their excellent electrical insulation and process feasibility. In the fields of liquid crystal display screens and semiconductors, silicon dioxide films are produced by reacting silane with laughing gas through a plasma vapor deposition process. In the production of silica films, the purity of the silane is critical.
The detection is a production eye and in order to ensure that the produced silica film is of high quality, it is generally necessary to detect the purity of the silane. The traditional online sampling system used for detection is controlled by a manual valve to directly guide a pipeline to equipment for analysis, and silane in the pipeline is easy to leak after sampling. Because silane is inflammable and explosive, the silane is easy to self-ignite in the air, and the leaked silane can be burnt or even exploded in the air, so that the silane has certain danger. The traditional online sampling system can not realize multi-point sampling, and the detection efficiency is low. In addition, gas chromatograph is usually adopted for analysis of silane gas phase impurities, but the sampling flow of gas chromatograph is generally smaller, and the traditional online sampling system leads to long-time silane remaining in the pipeline, so that the sampling accuracy is reduced.
Disclosure of Invention
In order to solve the problems, the utility model provides an online silane sampling system.
The technical scheme of the silane on-line sampling system provided by the utility model is as follows:
the utility model provides an online sampling system of silane, includes sweep pipeline, evacuation pipeline, sampling pipeline, advances kind analysis pipeline and bypass line, sweep the pipeline respectively with evacuation pipeline, sampling pipeline, advance kind analysis pipeline and be connected, the evacuation pipeline respectively with sampling pipeline, advance kind analysis pipeline and be connected, sampling pipeline has a plurality of sampling interfaces, advance kind analysis pipeline through bypass line with sampling pipeline connects, be equipped with the bleeder on the bypass line, be equipped with the stop valve on the bleeder.
Further, the sampling pipeline comprises a first sampling pipe and a plurality of second sampling pipes which are arranged in parallel and are respectively connected with the first sampling pipes, and a diaphragm valve and a filter are arranged on the second sampling pipes.
Further, the silane on-line sampling system comprises a tube bundle vehicle and a steel bottle pipeline, wherein the tube bundle vehicle and the steel bottle pipeline comprise a third sampling tube, one end of the third sampling tube is connected with the steel bottle and/or the tube bundle vehicle, and the other end of the third sampling tube is connected with the first sampling tube.
Further, the bypass line comprises a main line pipe, a first branch line pipe, a second branch line pipe and a metal impurity analysis pipe which are arranged in parallel, and the bleeder is arranged in parallel with the first branch line pipe.
Further, the sample injection analysis pipeline comprises a gas phase analysis pipeline and a moisture analysis pipeline, the gas phase analysis pipeline comprises a gas phase analysis sample injection pipe and a gas marking pipe, the gas outlet end of the gas marking pipe is connected to the gas phase analysis sample injection pipe, one end of the gas phase analysis sample injection pipe is connected with the first branch pipe, the other end of the gas phase analysis sample injection pipe is connected with the gas chromatograph, the moisture analysis pipeline comprises a moisture analysis sample injection pipe and a nitrogen pipe, the gas outlet end of the nitrogen pipe is connected to the moisture analysis sample injection pipe, and one end of the moisture analysis sample injection pipe is connected with the second branch pipe.
Further, the purge pipeline includes first purge pipe, second purge pipe, third purge pipe and fourth purge pipe, the second purge pipe with the third purge pipe is parallelly connected to be arranged and one end respectively with the one end of first purge pipe is connected, the other end of first purge pipe is connected with the helium bottle, the other end of second purge pipe with first sampling tube is connected, the both ends of fourth purge pipe respectively with the second purge pipe, third sampling tube is connected, the other end of third purge pipe with fourth purge pipe is connected.
Further, the vacuumizing pipeline comprises a first vacuumizing pipe, a second vacuumizing pipe and a third vacuumizing pipe, one end of the first vacuumizing pipe is connected with the vacuum pump, the other end of the first vacuumizing pipe is connected with the moisture analysis sampling pipe and the gas phase analysis sampling pipe, two ends of the second vacuumizing pipe are respectively connected with the first vacuumizing pipe and the third sampling pipe, and two ends of the third vacuumizing pipe are respectively connected with the second vacuumizing pipe and the third sampling pipe.
The utility model provides an online silane sampling system, which has the beneficial effects that:
when the silane online sampling system is used, a purging pipeline is opened to purge the system, then the purging pipeline is closed, a vacuumizing pipeline is opened, the replacement operation is repeated for 6 times, then a tube bundle vehicle, a steel pipeline or a sampling pipeline is opened, a sample is put into the system, a gas phase analysis pipeline is opened to carry out gas phase analysis, and a water fraction analysis pipeline is opened to carry out water fraction analysis. And opening the metal impurity analysis tube to perform metal impurity analysis. And meanwhile, the gas release pipe is opened to accelerate the flow rate of gas in the pipeline and the purging speed. Compared with the prior art, the silane online sampling system provided by the utility model can be used for extracting silane in each pipeline in the system through helium replacement and vacuumizing, and the problems of silane leakage and inflammability are avoided. The plurality of second sampling tubes can be connected with a plurality of sampling points, so that the utility model can sample the plurality of sampling points. The bleed may accelerate the flow rate of gas within the system to ensure that a truly representative sample is obtained.
Drawings
FIG. 1 is a schematic diagram of an on-line silane sampling system according to an embodiment of the present utility model;
FIG. 2 is a schematic portion of a silane on-line sampling system according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram of a plurality of second sampling tubes in a silane online sampling system according to an embodiment of the present utility model;
FIG. 4 is a schematic diagram of a bypass line in a silane on-line sampling system according to an embodiment of the present utility model;
FIG. 5 is a schematic diagram of a sample injection analysis line in a silane on-line sampling system according to an embodiment of the present utility model;
in the figure: 1. a purge line; 2. a vacuum line; 3. a sampling line; 4. a bypass line; 5. a sample injection analysis pipeline; 6. a helium cylinder; 7. a first purge tube; 8. a second purge tube; 9. a third purge tube; 10. a fourth purge tube; 11. a first sampling tube; 12. a second sampling tube; 13. a tube bundle vehicle; 14. a steel cylinder; 15. a third sampling tube; 16. a diaphragm valve; 17. a filter; 18. a first evacuation tube; 19. a second evacuating tube; 20. a third evacuating tube; 21. a trunk pipe; 22. a first branch pipe; 23. a second branch pipe; 24. a gas discharge tube; 25. a metal impurity analysis tube; 26. a gas phase analysis sample tube; 27. a gas marking pipe; 28. a water analysis sample tube; 29. a nitrogen pipe.
Detailed Description
The utility model is described in further detail below with reference to the attached drawings and detailed description:
the specific embodiment of the silane online sampling system of the utility model is shown in fig. 1 to 5, and comprises a purging pipeline 1, a vacuumizing pipeline 2, a sampling pipeline 3, a sample analysis pipeline 5 and a bypass pipeline 4, wherein the purging pipeline 1 is respectively connected with the vacuumizing pipeline 2, the sampling pipeline 3 and the sample analysis pipeline 5, the vacuumizing pipeline 2 is respectively connected with the sampling pipeline 3 and the sample analysis pipeline 5, the sampling pipeline 3 is provided with a plurality of sampling interfaces, the sample analysis pipeline 5 is connected with the sampling pipeline 3 through the bypass pipeline 4, a gas leakage pipe 24 is arranged on the bypass pipeline 4, and a stop valve is arranged on the gas leakage pipe 24.
In this embodiment, the sampling line 3 includes a first sampling tube 11 and a plurality of second sampling tubes 12 arranged in parallel and respectively connected to the first sampling tube 11, and a diaphragm valve 16 and a filter 17 are provided on the second sampling tube 12. The silane on-line sampling system comprises a tube bundle vehicle and a steel bottle pipeline, wherein the tube bundle vehicle and the steel bottle pipeline comprise a third sampling tube 15, one end of the third sampling tube 15 is connected with the steel bottle 14 and/or the tube bundle vehicle 13, and the other end of the third sampling tube is connected with the first sampling tube 11. The bypass line 4 includes a main pipe 21 and a first branch pipe 22 arranged in parallel, a second branch pipe 23 and a metal impurity analysis pipe 25, and a vent pipe 24 is arranged in parallel with the first branch pipe 22.
In this embodiment, the sample injection analysis pipeline 5 includes a gas phase analysis pipeline and a moisture analysis pipeline, the gas phase analysis pipeline includes a gas phase analysis sample injection pipe 26 and a gas marking pipe 27, the gas outlet end of the gas marking pipe 27 is connected to the gas phase analysis sample injection pipe 26, one end of the gas phase analysis sample injection pipe 26 is connected to the first branch pipe 22, the other end is connected to the gas chromatograph, the moisture analysis pipeline includes a moisture analysis sample injection pipe 28 and a nitrogen pipe 29, the gas outlet end of the nitrogen pipe 29 is connected to the moisture analysis sample injection pipe 28, and one end of the moisture analysis sample injection pipe 28 is connected to the second branch pipe 23. The purge pipeline 1 comprises a first purge pipe 7, a second purge pipe 8, a third purge pipe 9 and a fourth purge pipe 10, wherein the second purge pipe 8 and the third purge pipe 9 are arranged in parallel, one end of each second purge pipe is connected with one end of the first purge pipe 7, the other end of each first purge pipe 7 is connected with a helium bottle 6, the other end of each second purge pipe 8 is connected with a first sampling pipe 11, the two ends of the fourth purge pipe 10 are connected with the second purge pipe 8 and the third sampling pipe 15 respectively, and the other end of each third purge pipe 9 is connected with the fourth purge pipe 10.
In this embodiment, the vacuumizing pipeline 2 includes a first vacuumizing tube 18, a second vacuumizing tube 19 and a third vacuumizing tube 20, one end of the first vacuumizing tube 18 is connected with a vacuum pump, the other end is connected with a moisture analysis sampling tube 28 and a gas phase analysis sampling tube 26, two ends of the second vacuumizing tube 19 are respectively connected with the first vacuumizing tube 18 and the third sampling tube 15, and two ends of the third vacuumizing tube 20 are respectively connected with the second vacuumizing tube 19 and the third sampling tube 15.
When the silane online sampling system is used, a purging pipeline 1 is opened to perform system purging, then the purging pipeline is closed, a vacuumizing pipeline 2 is opened, the replacement operation is repeated for 6 times, then a tube bundle vehicle 13, a steel pipeline or a sampling pipeline 3 is opened, a sample is put into the system, a gas phase analysis pipeline is opened to perform gas phase analysis, and a water fraction analysis pipeline is opened to perform water fraction analysis. The metal impurity analysis tube 25 is opened to perform metal impurity analysis. And simultaneously, the air release pipe 24 is opened to accelerate the flow rate of the air in the pipeline and the purging speed. Compared with the prior art, the silane online sampling system provided by the utility model can be used for extracting silane in each pipeline in the system through helium replacement and vacuumizing, and the problems of silane leakage and inflammability are avoided. The plurality of second sampling tubes 12 are capable of connecting a plurality of sampling points such that the present utility model is capable of sampling a plurality of sampling points. The bleed 24 accelerates the flow rate of gas within the system to ensure that a truly representative sample is taken. The foregoing is only illustrative of the present utility model and is not to be construed as limiting thereof, but rather as various modifications, equivalent arrangements, improvements, etc., within the spirit and principles of the present utility model.
Claims (7)
1. The utility model provides a silane on-line sampling system, its characterized in that, including purge line, evacuation pipeline, sampling pipeline, advance kind analysis pipeline and bypass line, purge line respectively with evacuation pipeline, sampling pipeline, advance kind analysis pipeline and be connected, the evacuation pipeline respectively with sampling pipeline, advance kind analysis pipeline and be connected, sampling pipeline has a plurality of sampling interfaces, advance kind analysis pipeline through bypass line with sampling pipeline connects, be equipped with the bleeder on the bypass line, be equipped with the stop valve on the bleeder.
2. The silane on-line sampling system according to claim 1, wherein the sampling line comprises a first sampling tube and a plurality of second sampling tubes which are arranged in parallel and are respectively connected with the first sampling tube, and a diaphragm valve and a filter are arranged on the second sampling tube.
3. The silane on-line sampling system according to claim 2, wherein the silane on-line sampling system comprises a tube bundle truck, a steel cylinder pipeline, the tube bundle truck, the steel cylinder pipeline comprise a third sampling tube, one end of the third sampling tube is connected with a steel cylinder and/or the tube bundle truck, and the other end of the third sampling tube is connected with the first sampling tube.
4. The silane on-line sampling system of claim 3, wherein the bypass line comprises a main line pipe and a first branch line pipe, a second branch line pipe, and a metal impurity analysis pipe arranged in parallel, the vent pipe being arranged in parallel with the first branch line pipe.
5. The silane on-line sampling system according to claim 4, wherein the sample injection analysis pipeline comprises a gas phase analysis pipeline and a moisture analysis pipeline, the gas phase analysis pipeline comprises a gas phase analysis sample injection pipe and a gas marking pipe, the gas outlet end of the gas marking pipe is connected to the gas phase analysis sample injection pipe, one end of the gas phase analysis sample injection pipe is connected to the first branch pipe, the other end of the gas phase analysis sample injection pipe is connected to the gas chromatograph, the moisture analysis pipeline comprises a moisture analysis sample injection pipe and a nitrogen pipe, the gas outlet end of the nitrogen pipe is connected to the moisture analysis sample injection pipe, and one end of the moisture analysis sample injection pipe is connected to the second branch pipe.
6. The silane on-line sampling system of claim 5, wherein the purge line comprises a first purge tube, a second purge tube, a third purge tube, and a fourth purge tube, the second purge tube and the third purge tube are arranged in parallel and one end is connected with one end of the first purge tube respectively, the other end of the first purge tube is connected with a helium bottle, the other end of the second purge tube is connected with the first sampling tube, two ends of the fourth purge tube are connected with the second purge tube and the third sampling tube respectively, and the other end of the third purge tube is connected with the fourth purge tube.
7. The silane on-line sampling system according to claim 6, wherein the vacuumizing pipeline comprises a first vacuumizing pipe, a second vacuumizing pipe and a third vacuumizing pipe, one end of the first vacuumizing pipe is connected with a vacuum pump, the other end of the first vacuumizing pipe is connected with the moisture analysis sample inlet pipe and the gas phase analysis sample inlet pipe, two ends of the second vacuumizing pipe are respectively connected with the first vacuumizing pipe and the third vacuumizing pipe, and two ends of the third vacuumizing pipe are respectively connected with the second vacuumizing pipe and the third vacuumizing pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321676274.3U CN220289548U (en) | 2023-06-28 | 2023-06-28 | Silane on-line sampling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321676274.3U CN220289548U (en) | 2023-06-28 | 2023-06-28 | Silane on-line sampling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220289548U true CN220289548U (en) | 2024-01-02 |
Family
ID=89329155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321676274.3U Active CN220289548U (en) | 2023-06-28 | 2023-06-28 | Silane on-line sampling system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220289548U (en) |
-
2023
- 2023-06-28 CN CN202321676274.3U patent/CN220289548U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102338711B (en) | Sample preparation system for extracting and separating inert gas and application thereof | |
| CN205826237U (en) | The outer device for detecting leakage of a kind of heat exchanger internal hemorrhage due to trauma | |
| CN104155417A (en) | Pre-processing system and pre-processing method of trace moisture analysis in ultrahigh-purity gas | |
| CN102518577B (en) | Vacuum-pumping system for multiple-dewar interlayer and vacuum-pumping method thereof | |
| CN109838686A (en) | A kind of steel cylinder processing system and its application method and application | |
| CN108717030B (en) | Device and method for rapidly analyzing abundance of hydrogen isotope gas | |
| CN110849552A (en) | Membrane electrode assembly air tightness detection method and air tightness detection device | |
| CN112945356A (en) | Gas flow meter system and method of use | |
| CN220289548U (en) | Silane on-line sampling system | |
| CN213517012U (en) | Gas inlet device for gas analysis | |
| CN201740685U (en) | Sample preparation system for extracting and separating inert gas | |
| CN219475499U (en) | Electronic grade carbon tetrafluoride process gas and finished gas analysis pipeline system | |
| CN213875393U (en) | Electronic-grade nitrogen trifluoride finished product analysis pipeline system | |
| CN206656838U (en) | A kind of clear helium system of helium mass spectrometer leak detector | |
| CN113774354B (en) | Novel gas isolation device and magnetron sputtering continuous coating line and working method | |
| CN106932504B (en) | Cold space equivalent water content measuring device in a kind of fuel rod | |
| CN210219313U (en) | Steel bottle processing system | |
| CN111855324A (en) | Natural gas sample collection method for detecting mercury content of natural gas | |
| CN103529171B (en) | A kind of method of argon, helium, nitrogen mixed gas for welding being carried out to quality of production control | |
| CN210506516U (en) | Chemical vapor deposition reaction furnace for liquid precursor | |
| CN113252529A (en) | High-temperature gas-driven penetration testing system and method for metal pipe fitting | |
| CN113405740A (en) | Fluoride leakage detection equipment and detection method | |
| CN208348955U (en) | One kind easily liquefaction and low-vapor pressure distributes heating device | |
| CN111707499A (en) | Sampling device of high accuracy dangerous chemicals | |
| CN220795089U (en) | Vacuum storage and different partial pressure atmosphere pretreatment device for transmission electron microscope sample rod |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |