CN210266695U - Steel cylinder processing system of ultra-pure gas - Google Patents
Steel cylinder processing system of ultra-pure gas Download PDFInfo
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- CN210266695U CN210266695U CN201921286126.4U CN201921286126U CN210266695U CN 210266695 U CN210266695 U CN 210266695U CN 201921286126 U CN201921286126 U CN 201921286126U CN 210266695 U CN210266695 U CN 210266695U
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Abstract
A steel cylinder processing system of ultra-pure gas comprises a replacement gas source, a pressure reducer, an adsorber, a filter group, a steel cylinder group, a heating oven, a vacuum pump and an analysis device; the output end of the displacement air source is communicated to the input end of the pressure reducer; the output end of the pressure reducer is communicated with the input end of the absorber, and the output end of the pressure reducer is also communicated with the input end of the analysis device; the output end of the adsorber is communicated to the input end of the filter group; the steel cylinder group comprises a plurality of steel cylinders and a header pipe, the steel cylinders are communicated to the header pipe, and the steel cylinders are placed in the heating oven; the output end of the filter group is communicated to the input end of the main pipe, and the output end of the main pipe is communicated to the input end of the vacuum pump. The present invention provides a steel cylinder processing system and method for ultra-high purity gas, which makes the cleanliness inside the steel cylinder meet the requirement of electronic gas.
Description
Technical Field
The utility model relates to a steel bottle field of handling especially relates to a steel bottle processing system of super high purity gas.
Background
Gases used in the semiconductor industry are collectively referred to as electronic gases. According to the category, the gas can be divided into three categories, namely pure gas, high-purity gas and semiconductor special material gas. Special material gas is mainly used for epitaxy, doping and etching processes; high purity gases are mainly used as dilution and carrier gases. Electronic gases are an important branch of specialty gases. Electronic gases can be classified into electronic grade, LSI (large scale integrated circuit) grade, VLSI (very large scale integrated circuit) grade and ULSI (ultra large scale integrated circuit) grade according to purity grade and use occasion.
The steel cylinder for storing the electronic gas is also one of the important factors influencing the purity of the electronic gas, so the electronic gas can be stored only after the inside of the steel cylinder is subjected to impurity removal treatment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a steel bottle processing system of super high purity gas makes the inside cleanliness factor of steel bottle reach electronic gas's operation requirement.
To achieve the purpose, the utility model adopts the following technical proposal:
a steel cylinder processing system of ultra-pure gas comprises a replacement gas source, a pressure reducer, an adsorber, a filter group, a steel cylinder group, a heating oven, a vacuum pump and an analysis device;
the output end of the displacement air source is communicated to the input end of the pressure reducer;
the output end of the pressure reducer is communicated with the input end of the absorber, and the output end of the pressure reducer is also communicated with the input end of the analysis device;
the output end of the adsorber is communicated to the input end of the filter group;
the steel cylinder group comprises a plurality of steel cylinders and a header pipe, the steel cylinders are communicated to the header pipe, and the steel cylinders are placed in the heating oven;
the output end of the filter group is communicated to the input end of the main pipe, and the output end of the main pipe is communicated to the input end of the vacuum pump.
Further, the replacement gas of replacement gas source is stored in the gas cylinder of collection dress check, the quantity of collection dress check is two, is first collection dress check and second collection dress check respectively, and the replacement gas is one of nitrogen gas, argon gas or helium.
Further, the filter group comprises a first-stage filter and a second-stage filter, and the output end of the first-stage filter is communicated to the input end of the second-stage filter.
The device further comprises an emptying pipe, one end of the emptying pipe is communicated to the main pipe, and the emptying pipe is provided with an emptying valve.
And one end of the gas detection pipe is communicated to the output end of the filter group, and the other end of the gas detection pipe is communicated to the input end of the analysis device.
The gas detector further comprises a branch pipe, one end of the branch pipe is communicated to the gas detection pipe, and the other end of the branch pipe is provided with a hose union.
Further, the device also comprises a first valve, a second valve, a third valve, a fourth valve, a fifth valve, a sixth valve, a seventh valve, an eighth valve, a ninth valve and a tenth valve;
the first valve is arranged at the output end of the first packaging grid, the second valve is arranged at the output end of the second packaging grid, the third valve is arranged at the input end of the analysis device, the fourth valve is arranged at the input end of the adsorber, the fifth valve is arranged at the input end of the filter group, the sixth valve is arranged at the output end of the first filter, the seventh valve is arranged at the gas detection pipe, the eighth valve is arranged at the input end of the main pipe, the ninth valve is arranged at the branch pipe, and the tenth valve is arranged at the input end of the vacuum pump.
The pressure meter further comprises a first pressure meter, a second pressure meter, a third pressure meter, a fourth pressure meter and a fifth pressure meter;
the first pressure gauge is arranged at the output end of the pressure reducer, the second pressure gauge is arranged between the output end of the fifth valve and the input end of the first filter, the third pressure gauge is arranged between the output end of the first filter and the input end of the sixth valve, the fourth pressure gauge is arranged between the output end of the second filter and the input end of the eighth valve, and the fifth pressure gauge is arranged in the header pipe.
The present invention provides a steel cylinder processing system and method for ultra-high purity gas, which makes the cleanliness inside the steel cylinder meet the requirement of electronic gas.
The replacement gas in the replacement gas source can be one of helium, argon or nitrogen, the replacement gas in the replacement gas source is firstly introduced into a pressure reducer for pressure reduction treatment, the pressure of the replacement gas treated by the pressure reducer is controlled between 0.8 and 2MPa, and the working pressure of the gas in the pipeline is ensured to be kept in a stable state; the replacement gas processed by the pressure reducer is firstly introduced into an analysis device for component detection, the analysis device comprises a chromatograph, a moisture meter and a dust particle tester, and the analysis device detects that the purity of the replacement gas reaches more than 4N5 (99.995%) and the replacement gas is qualified.
And after the detection of the replacement gas is qualified, the replacement gas in the replacement gas source is treated by a pressure reducer, the replacement gas treated by the pressure reducer is introduced into an adsorber, the adsorber is loaded with an adsorbent, the adsorbent can be one or a mixture of more of a 3A adsorbent, a 4A adsorbent, a 5A adsorbent or a 13X adsorbent, and the adsorbent is mainly used for adsorbing oxygen and moisture in the replacement gas, so that the purity of the replacement gas is improved.
And introducing the replacement gas treated by the adsorber into a filter bank for filtering treatment, and filtering solid particles and oil in the replacement gas to further improve the purity of the replacement gas. The replacement gas treated by the filter group is introduced into the analysis device again to carry out impurity-containing analysis, the purity of the replacement gas is further ensured, the replacement gas is introduced into the main pipe only after the impurity-containing analysis is qualified, the valves of the steel cylinders are opened and the replacement gas is introduced into the steel cylinders due to the fact that the steel cylinders are communicated to the main pipe, pipelines in the whole system are all EP-grade 316L stainless steel pipes, the heating oven heats the steel cylinders to change water on the inner walls of the steel cylinders into steam, then the steel cylinders are repeatedly vacuumized and introduced with the replacement gas, finally the replacement gas and impurities in the steel cylinders are evacuated together, and finally the cleanliness of the interior of the steel cylinders meets the use requirement of electronic gas.
Drawings
Fig. 1 is a schematic structural diagram of one embodiment of the present invention.
Wherein: the device comprises a replacement gas source 1, a first packaging container 101, a second packaging container 102, a first valve 11, a second valve 12, a third valve 13, a fourth valve 14, a fifth valve 15, a sixth valve 16, a seventh valve 17, an eighth valve 18, a ninth valve 19, a tenth valve 110, a first pressure gauge 1011, a second pressure gauge 1012, a third pressure gauge 1013, a fourth pressure gauge 1014, a fifth pressure gauge 1015, a pressure reducer 2, an adsorber 3, a filter group 4, a first filter 41, a second filter 42, a steel cylinder group 5, a steel cylinder 51, a main pipe 52, a heating oven 6, a vacuum pump 7, an analysis device 8, an evacuation pipe 91, an evacuation valve 911, a gas detection pipe 92, a branch pipe 93 and a hose union 931.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
As shown in fig. 1, a cylinder processing system for ultra-high purity gas comprises a replacement gas source 1, a pressure reducer 2, an adsorber 3, a filter group 4, a cylinder group 5, a heating oven 6, a vacuum pump 7 and an analysis device 8;
the output end of the displacement gas source 1 is communicated to the input end of the pressure reducer 2;
the output end of the pressure reducer 2 is communicated with the input end of the absorber 3, and the output end of the pressure reducer 2 is also communicated with the input end of the analysis device 8;
the output end of the adsorber 4 is communicated to the input end of the filter group 4;
the steel cylinder group 5 comprises a plurality of steel cylinders 51 and a header pipe 52, the plurality of steel cylinders 51 are communicated to the header pipe 52, and the plurality of steel cylinders 51 are placed in the heating oven 6;
the output of the filter group 4 is connected to the input of a manifold 52, and the output of the manifold 52 is connected to the input of the vacuum pump 7.
The replacement gas in the replacement gas source 1 can be one of helium, argon or nitrogen, the replacement gas in the replacement gas source 1 is firstly introduced into the pressure reducer 2 for pressure reduction treatment, the pressure of the replacement gas treated by the pressure reducer 2 is ensured to be controlled between 0.8 and 2MPa, and the working pressure of the gas in the pipeline is ensured to be kept in a stable state; the replacement gas processed by the pressure reducer 2 is firstly introduced into an analysis device 8 for component detection, the analysis device 8 comprises a chromatograph, a moisture meter and a dust particle tester, and the replacement gas is qualified only when the analysis device 8 detects that the purity requirement of the replacement gas reaches more than 4N5 (99.995%).
And after the detection of the replacement gas is qualified, the replacement gas in the replacement gas source 1 is treated by the pressure reducer 2, the replacement gas treated by the pressure reducer 2 is introduced into the adsorber 3, the adsorber 3 is loaded with an adsorbent which can be one or a mixture of 3A adsorbent, 4A adsorbent, 5A adsorbent or 13X adsorbent, and the adsorbent is mainly used for adsorbing oxygen and moisture in the replacement gas, so that the purity of the replacement gas is improved.
The replacement gas treated by the adsorber 3 is introduced into a filter bank 4 for filtration treatment, so that solid particles and oil in the replacement gas are filtered, and the purity of the replacement gas is further improved. The replacement gas treated by the filter group 4 is introduced into the analysis device 8 again for impurity analysis, the purity of the replacement gas is further ensured, the replacement gas is introduced into the header pipe 52 only after the impurity analysis is qualified, the valves of the steel cylinders 51 are opened because the steel cylinders 51 are communicated with the header pipe 52, the replacement gas is introduced into the steel cylinders 51, the pipelines in the whole system are all EP-grade 316L stainless steel pipes, the heating oven 6 heats the steel cylinders 51 to change the water content on the inner walls of the steel cylinders 51 into steam, then the steel cylinders 51 are repeatedly vacuumized and introduced with the replacement gas, finally the replacement gas is evacuated together with impurities in the steel cylinders 51, and finally the cleanliness of the steel cylinders 51 can meet the use requirement of the electronic gas.
Further, the replacement gas of the replacement gas source 1 is stored in gas cylinders of packaging cells, the number of the packaging cells is two, the packaging cells are respectively a first packaging cell 101 and a second packaging cell 102, and the replacement gas is one of nitrogen, argon or helium.
The two packaging compartments are in an open-standby state, for example, in the present embodiment, the replacement gas in the first packaging compartment 101 is used first, while the first valve 11 is in an open state and the second valve 12 is in a closed state; when the replacement gas in the first container compartment 101 is used up, the second valve 12 is opened, the first valve 11 is closed, and the replacement gas in the second container compartment 102 is used; therefore, the supply of the raw material replacement gas can be ensured, the raw material replacement gas does not need to be frequently replaced, and the workload of operators is reduced.
The packaging grids are the existing packaging grids; the container grid is internally provided with a plurality of gas cylinders, the gas outlets of all the gas cylinders in the same container grid are communicated into a main gas pipe, the main gas pipe is internally provided with a main gas outlet, and gas is discharged from the main gas outlet to a pipeline for use.
Further, the filter group 4 comprises a first filter 41 and a second filter 42, and the output end of the first filter 41 is connected to the input end of the second filter 42.
The precision of the first stage filter 41 is 0.01 μm, the precision of the second stage filter 42 is 0.003 μm, and solid particles and oil with different sizes can be filtered out through the two stages of filters.
Further, the system also comprises an emptying pipe 91, one end of which is communicated to the main pipe 52, and the emptying pipe 91 is provided with an emptying valve 911.
The emptying pipe 91 is communicated to the header pipe 52, so that the steel cylinder 51 can be emptied more conveniently; since the manifold 52 is connected to the plurality of cylinders 51, if the pressure of the gas in the cylinders 51 is higher than 0.2MPa before the replacement gas is introduced into the cylinders 51, the evacuation valve 911 is opened to evacuate the gas in the cylinders 51 to 0.05 MPa.
Further, the gas detection device comprises a gas detection pipe 92, wherein one end of the gas detection pipe 92 is communicated to the output end of the filter group 4, and the other end of the gas detection pipe 92 is communicated to the input end of the analysis device 8.
Because the replacement gas treated by the filter group 4 needs to be introduced into the analysis device 8 again for impurity-containing analysis, the purity of the replacement gas is further ensured, and the replacement gas is introduced into the header pipe 52 only after the impurity-containing analysis is qualified. Therefore, the seventh valve 17 is opened, and the eighth valve 18 is closed, so that the replacement gas can be introduced into the analyzer 8.
Further, the device further comprises a branch pipe 93, one end of the branch pipe 93 is communicated to the gas detection pipe 92, and the other end of the branch pipe 93 is provided with a flexible pipe union 931.
After the steel cylinders 51 in the steel cylinder group 5 are heated, filled with the replacement gas and vacuumized, one of the steel cylinders 51 in the steel cylinder group 5 needs to be filled with the replacement gas again, the steel cylinder 51 with the replacement gas is needed to be communicated to the branch pipe 93 through the flexible pipe union 931, the ninth valve 19 is opened, the replacement gas is filled into the analysis device 8, and impurity content analysis is carried out on the replacement gas in the steel cylinder 51; if the impurity-containing analysis is qualified, the steel cylinder 51 is vacuumized, and if the impurity-containing analysis is not qualified, all the steel cylinders 51 in the steel cylinder group 5 are heated and vacuumized again, so that the cleanliness of the steel cylinders 51 in the whole steel cylinder group 5 can meet the use requirement of the electronic gas.
Further, a first valve 11, a second valve 12, a third valve 13, a fourth valve 14, a fifth valve 15, a sixth valve 16, a seventh valve 17, an eighth valve 18, a ninth valve 19 and a tenth valve 110 are included;
the first valve 11 is provided at an output end of the first packaging cell 101, the second valve 12 is provided at an output end of the second packaging cell 102, the third valve 13 is provided at an input end of the analyzer 8, the fourth valve 14 is provided at an input end of the adsorber 3, the fifth valve 15 is provided at an input end of the filter group 4, the sixth valve 16 is provided at an output end of the first filter 41, the seventh valve 17 is provided at the gas detection pipe 92, the eighth valve 18 is provided at an input end of the header pipe 52, the ninth valve 19 is provided at the branch pipe 93, and the tenth valve 110 is provided at an input end of the vacuum pump 7.
Further, a first pressure gauge 1011, a second pressure gauge 1012, a third pressure gauge 1013, a fourth pressure gauge 1014, and a fifth pressure gauge 1015 are included;
the first pressure gauge 1011 is arranged at the output end of the pressure reducer 2, the second pressure gauge 1012 is arranged between the output end of the fifth valve 15 and the input end of the first filter 41, the third pressure gauge 1013 is arranged between the output end of the first filter 41 and the input end of the sixth valve 16, the fourth pressure gauge 1014 is arranged between the output end of the second filter 41 and the input end of the eighth valve 18, and the fifth pressure gauge 1015 is arranged in the manifold 52.
Through setting up a plurality of manometer, the staff of being convenient for observes the pressure conditions everywhere of system.
The method for using the cylinder processing system of the ultra-high purity gas comprises the following steps:
step A: introducing the replacement gas of the replacement gas source 1 into a pressure reducer 2 for pressure reduction treatment; the replacement gas in the replacement gas source 1 can be one of helium, argon or nitrogen, the replacement gas in the replacement gas source 1 is firstly introduced into the pressure reducer 2 for pressure reduction treatment, the pressure of the replacement gas treated by the pressure reducer 2 is ensured to be controlled between 0.8 and 2MPa, and the working pressure of the gas in the pipeline is ensured to be kept in a stable state; the replacement gas of the replacement gas source 1 is stored in the gas cylinders of the packaging cells, and the two packaging cells are in an open-standby state, for example, in the present embodiment, the replacement gas in the first packaging cell 101 is used first, and at this time, the first valve 11 is in an open state, and the second valve 12 is in a closed state; when the replacement gas in the first container compartment 101 is used up, the second valve 12 is opened, the first valve 11 is closed, and the replacement gas in the second container compartment 102 is used; therefore, the supply of the raw material replacement gas can be ensured, the raw material replacement gas does not need to be frequently replaced, and the workload of operators is reduced. The packaging grids are the existing packaging grids; the container grid is internally provided with a plurality of gas cylinders, the gas outlets of all the gas cylinders in the same container grid are communicated into a main gas pipe, the main gas pipe is internally provided with a main gas outlet, and gas is discharged from the main gas outlet to a pipeline for use.
And B: introducing the decompressed replacement gas into an analysis device 8 for component detection, and entering the step C after the component detection is qualified; the analyzer 8 includes a chromatograph, a moisture meter, and a dust particle tester, and the analyzer 8 detects that the purity of the replacement gas is required to be 4N5 (99.995%) or more before the replacement gas is qualified, and at this time, the third valve 13 is opened and the fourth valve 14 is closed.
And C: introducing the depressurized replacement gas into the adsorber 3 to perform adsorption treatment, wherein the fourth valve 14 is opened and the third valve 13 is closed; the adsorber 3 is loaded with adsorbent, which may be one or mixture of 3A, 4A, 5A or 13X adsorbent, and mainly adsorbs oxygen and water in the displacement gas to improve the purity of the displacement gas.
Step D: introducing the displacement gas after adsorption treatment into a filter group 4 for filtration treatment; at this time, the fifth valve 15 and the sixth valve 16 are in an open state, the precision of the first filter 41 is 0.01 μm, the precision of the second filter 42 is 0.003 μm, and solid particles and oil with different sizes can be filtered by the two-stage filter.
Step E: introducing the filtered replacement gas into an analysis device 8 for impurity-containing analysis, and entering the step F after the impurity-containing analysis is qualified; the seventh valve 17 is opened, and the eighth valve 18 is closed, so that the displacement gas can be introduced into the analyzer 8.
If the replacement gas is argon or helium, the oxygen, nitrogen, moisture and granularity in the replacement gas need to be analyzed, wherein the oxygen content is required to be less than or equal to 10ppbv, the nitrogen content is required to be less than or equal to 10ppbv, the moisture content is required to be less than or equal to 50ppbv, and the gas granularity is required to be less than or equal to 3 PCS/L; if the replacement gas is nitrogen, only the oxygen, the moisture and the granularity need to be analyzed, wherein the oxygen content is less than or equal to 10ppbv, the moisture content is less than or equal to 50ppbv, and the gas granularity is less than or equal to 3 PCS/L.
Step F: starting a vacuum pump 7, opening a tenth valve 110, vacuumizing a system pipeline, closing the tenth valve 110 after the vacuum degree of the system pipeline reaches 0.03Pa, opening a valve of a steel cylinder 51 in the steel cylinder group 5, opening an evacuation valve 911 for evacuation if the pressure of gas in the steel cylinder 51 is greater than 0.2MPa, exhausting the pressure of the gas in the steel cylinder 51 to 0.05MPa, then closing the evacuation valve 911, starting a heating oven 6, and controlling the heating temperature to be 80-120 ℃; if the gas pressure in the steel cylinder 51 is too high, the heated steel cylinder may explode, and the like, so that the gas pressure in the steel cylinder 51 is greater than 0.2MPa, and the evacuation valve 911 needs to be opened for evacuation treatment; the steel cylinder 51 is heated to evaporate the water vapor in the steel cylinder 51.
Step G: opening a tenth valve 110, vacuumizing the system, and closing the tenth valve 110 when the vacuum degree of a system pipeline reaches 0.03 Pa;
step H: opening the eighth valve 18, introducing the replacement gas treated by the filter group 4 into the steel cylinder 51, controlling the pressure of the gas introduced into the steel cylinder 51 to be 0.2MPa, allowing the replacement gas to stand in the steel cylinder 51 for 20-30 minutes, then opening the tenth valve 110, and then vacuumizing the steel cylinder 51 until the vacuum degree of the system pipeline reaches 0.03 Pa;
step I: the steps H2 to H4 are repeated for several times, and after repeated operation, the impurities in the steel cylinder 51 can be pumped out, so that the cleanliness of the steel cylinder 51 can meet the use requirement of the electronic gas.
Step J: introducing replacement gas into one steel cylinder 51 closest to the input end of the manifold 52, controlling the gas pressure in the steel cylinder 51 into which the replacement gas 51 is introduced to be 0.8-1MPa, ensuring that sufficient gas pressure exists, subsequently introducing the replacement gas into the analysis device 8 through the flexible pipe union 931, closing the valves of the other steel cylinders 51, keeping the other steel cylinders 51 in a vacuum state, and detaching all the steel cylinders 51 from the heating oven 6;
step K: after the temperature of the steel cylinder 51 is reduced to room temperature, the steel cylinder 51 into which the replacement gas is introduced in the step J is connected to the flexible pipe union 931 of the branch pipe 93, the ninth valve 19 is opened, and the replacement gas is introduced into the analysis device 8 to perform impurity-containing analysis on the replacement gas in the steel cylinder 51; if the impurity-containing analysis is not acceptable, the steel cylinder 51 is vacuumized, and if the impurity-containing analysis is not acceptable, the steps F-K are performed again on the steel cylinder group 5 removed from the step J.
If the replacement gas is argon or helium, the oxygen, nitrogen, moisture and granularity in the replacement gas need to be analyzed, wherein the oxygen content is required to be less than or equal to 100ppbv, the nitrogen content is required to be less than or equal to 100ppbv, the moisture content is required to be less than or equal to 80ppbv, and the gas granularity is required to be less than or equal to 5 PCS/L; if the replacement gas is nitrogen, only the oxygen, moisture and granularity need to be analyzed, the oxygen content is less than or equal to 100ppbv, the moisture content is less than or equal to 80ppbv, and the gas granularity is less than or equal to 5 PCS/L.
The whole process can conveniently judge whether the steel cylinders 51 in the steel cylinder group 5 meet the use requirement of the electronic gas.
The technical principle of the present invention is described above with reference to specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without any inventive effort, which would fall within the scope of the present invention.
Claims (8)
1. A steel cylinder processing system of ultra-high purity gas is characterized in that: comprises a replacement gas source, a pressure reducer, an adsorber, a filter group, a steel cylinder group, a heating oven, a vacuum pump and an analysis device;
the output end of the displacement air source is communicated to the input end of the pressure reducer;
the output end of the pressure reducer is communicated with the input end of the absorber, and the output end of the pressure reducer is also communicated with the input end of the analysis device;
the output end of the adsorber is communicated to the input end of the filter group;
the steel cylinder group comprises a plurality of steel cylinders and a header pipe, the steel cylinders are communicated to the header pipe, and the steel cylinders are placed in the heating oven;
the output end of the filter group is communicated to the input end of the main pipe, and the output end of the main pipe is communicated to the input end of the vacuum pump.
2. The cylinder processing system for ultra-high purity gas of claim 1, wherein: the replacement gas of replacement gas source is stored in the gas cylinder of collection dress check, the quantity of collection dress check is two, is first collection dress check and second collection dress check respectively, and the replacement gas is one of nitrogen gas, argon gas or helium.
3. The cylinder processing system for ultra-high purity gas of claim 2, wherein: the filter group comprises a first-stage filter and a second-stage filter, and the output end of the first-stage filter is communicated to the input end of the second-stage filter.
4. The cylinder processing system for ultra-high purity gas of claim 3, wherein: the device also comprises an emptying pipe, one end of the emptying pipe is communicated to the main pipe, and the emptying pipe is provided with an emptying valve.
5. The cylinder processing system for ultra-high purity gas of claim 4, wherein: the gas detection device is characterized by further comprising a gas detection pipe, wherein one end of the gas detection pipe is communicated to the output end of the filter group, and the other end of the gas detection pipe is communicated to the input end of the analysis device.
6. The cylinder processing system for ultra-high purity gas of claim 5, wherein: the gas detector is characterized by further comprising a branch pipe, one end of the branch pipe is communicated to the gas detection pipe, and the other end of the branch pipe is provided with a flexible pipe union.
7. The cylinder processing system for ultra-high purity gas of claim 6, wherein: the first valve, the second valve, the third valve, the fourth valve, the fifth valve, the sixth valve, the seventh valve, the eighth valve, the ninth valve and the tenth valve are also included;
the first valve is arranged at the output end of the first packaging grid, the second valve is arranged at the output end of the second packaging grid, the third valve is arranged at the input end of the analysis device, the fourth valve is arranged at the input end of the adsorber, the fifth valve is arranged at the input end of the filter group, the sixth valve is arranged at the output end of the first-stage filter, the seventh valve is arranged at the gas detection pipe, the eighth valve is arranged at the input end of the main pipe, the ninth valve is arranged at the branch pipe, and the tenth valve is arranged at the input end of the vacuum pump.
8. The cylinder processing system for ultra-high purity gas of claim 7, wherein: the first pressure gauge, the second pressure gauge, the third pressure gauge, the fourth pressure gauge and the fifth pressure gauge are further included;
the first pressure gauge is arranged at the output end of the pressure reducer, the second pressure gauge is arranged between the output end of the fifth valve and the input end of the first-stage filter, the third pressure gauge is arranged between the output end of the first-stage filter and the input end of the sixth valve, the fourth pressure gauge is arranged between the output end of the second-stage filter and the input end of the eighth valve, and the fifth pressure gauge is arranged in the header pipe.
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| CN110410662A (en) * | 2019-08-08 | 2019-11-05 | 广东华特气体股份有限公司 | A kind of the steel cylinder processing system and method for ultra-pure gases |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110410662A (en) * | 2019-08-08 | 2019-11-05 | 广东华特气体股份有限公司 | A kind of the steel cylinder processing system and method for ultra-pure gases |
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