CN212457626U - Full-automatic preprocessing device of ultrapure gas cylinder - Google Patents
Full-automatic preprocessing device of ultrapure gas cylinder Download PDFInfo
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- CN212457626U CN212457626U CN201922357313.3U CN201922357313U CN212457626U CN 212457626 U CN212457626 U CN 212457626U CN 201922357313 U CN201922357313 U CN 201922357313U CN 212457626 U CN212457626 U CN 212457626U
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Abstract
The utility model discloses a full-automatic preprocessing device of ultrapure gas cylinder belongs to gas cylinder pretreatment systems field. The device comprises: the gas cylinder drying oven, the automatic emptying unit, the automatic replacement unit, the automatic evacuation unit and the gas circuit main pipe; one end of the gas path main pipe is connected with the automatic emptying unit, the other end of the gas path main pipe is connected with the automatic evacuation unit, and the automatic replacement unit is connected to the gas path main pipe; the gas cylinder in the gas cylinder oven is connected to a gas path main pipe through a pneumatic valve and is positioned between the automatic replacement unit and the automatic emptying unit, and the gas path main pipe is connected with a pressure sensor. The device is characterized in that all steel cylinders are sealed in an oven for heating, the temperature of the oven is automatically controlled, all the vacuumizing, replacement and evacuation of the gas cylinders are automatically controlled by a pneumatic valve and a program, a vacuum pump unit can be automatically controlled, all the pretreatment processes of the steel cylinders are automatically controlled in sequence, and manual operation is not needed.
Description
Technical Field
The utility model belongs to gas cylinder pretreatment systems field relates to a full-automatic preprocessing device of ultrapure gas cylinder.
Background
The very large scale integrated circuit of modern semiconductor factory needs a large amount of ultra-pure (purity is more than 99.9999%) pure gas and electronic mixed gas, and the purity requirements of the pure gas and the mixed gas are very high, which not only has high requirements on the purification technology of raw gas, but also puts higher requirements on the pretreatment system of the gas cylinder.
At present, in a gas cylinder pretreatment system for filling ultrapure gas and mixed gas, a gas cylinder vacuum drying device is a relatively common device, and the gas cylinder is vacuumized and replaced by the ultrapure gas while being heated and dried, so that the content of each impurity in the gas cylinder reaches a specified index, wherein water is the most difficult component to remove, and the times of vacuumization and replacement need to be increased.
CN 202660860U discloses a full-automatic preprocessing device of gas cylinder in ultrapure gas production. The device comprises an exposed gas cylinder oven and a gas circuit main pipe, wherein the gas circuit main pipe is respectively connected with an automatic emptying unit, an automatic replacement unit and an automatic emptying unit. The vacuum-pumping replacement of the gas cylinder is automatically controlled by a pneumatic valve and a program, the gas cylinder is continuously pumped and replaced by ultrapure gas while vacuum heating is carried out, the gas cylinder is treated while vacuum drying and gas cylinder pumping replacement are carried out, and the gas cylinder body is heated and kept at 70 ℃ by using an exposed vacuum drying device.
However, this device also has 2 disadvantages: 1) the cylinder valve of the gas cylinder is exposed in the air, the temperature of the cylinder valve is as low as 40 ℃, and the drying of the moisture in the gas cylinder is greatly influenced, so that the water removal efficiency is low; 2) the pretreatment of the ultra-pure gas cylinder has strict requirement on the vacuum degree (the requirement reaches 10)-3Pa or more), the vacuum pump units of the commonly used multi-stage vacuum pumps connected in series need to be started stage by stage. The vacuumizing operation and the replacement operation are alternately performed in the pretreatment system, and the vacuumizing operation and the replacement operation cannot be automatically switched due to the fact that the secondary vacuum pump needs to be manually started and stopped, so that the automatic operation level of the pretreatment system is seriously affected, and the semi-automatic pretreatment device is actually a semi-automatic pretreatment device.
SUMMERY OF THE UTILITY MODEL
The shortcoming to current preprocessing device dewatering inefficiency, evacuation and the unable automatic switch-over of replacement, the utility model aims at providing a full-automatic preprocessing device of ultrapure gas cylinder, the steel bottle is whole airtight to be heated in the oven, oven temperature automatic control, and gas cylinder evacuation, replacement, evacuation are whole to adopt pneumatic valve and procedure automatic control, but vacuum pump unit automatic control, and steel bottle pretreatment process is whole according to the preface automatic control, does not need dependent manual operation.
The purpose of the utility model is realized by the following technical scheme:
a full-automatic pretreatment device of an ultrapure gas cylinder comprises: the gas cylinder drying oven, the automatic emptying unit, the automatic replacement unit, the automatic evacuation unit and the gas circuit main pipe;
one end of the gas path main pipe is connected with the automatic emptying unit, the other end of the gas path main pipe is connected with the automatic evacuation unit, and the automatic replacement unit is connected to the gas path main pipe; the gas cylinder in the gas cylinder oven is connected to a gas path main pipe through a pneumatic valve and is positioned between the automatic replacement unit and the automatic emptying unit, and the gas path main pipe is connected with a pressure sensor.
The gas cylinder drying oven is closed, a heating system is arranged at the bottom in the drying oven, a metal cover plate is arranged on the heating system at intervals, and a gas cylinder to be treated is arranged above the metal cover plate.
The gas cylinder oven is provided with a thermocouple and a digital display temperature controller and is used for controlling the temperature of the gas cylinder pneumatic valve to be processed to be lower than the allowable maximum use temperature.
The automatic emptying unit comprises an emptying pneumatic valve and an emptying one-way valve which are connected.
The automatic replacement unit comprises a replacement gas cylinder, a pressure reducing valve and a replacement pneumatic valve which are connected in sequence.
The automatic evacuation unit comprises an evacuation pneumatic valve and a vacuum pump unit which are connected, and a resistance gauge is connected between the evacuation pneumatic valve and the vacuum pump unit; the vacuum pump unit comprises a backing pump and a backing pump which are connected.
The pre-stage pump, the post-stage pump, the evacuation pneumatic valve and the resistance gauge are all connected into a distributed control system (hereinafter referred to as DCS system), and the start and stop of the post-stage pump and the evacuation pneumatic valve are controlled according to the resistance gauge number.
And the evacuating pneumatic valve, the replacing pneumatic valve and the air discharging valve are all pneumatic diaphragm valves.
The automatic emptying unit, the automatic evacuation unit and the automatic replacement unit are controlled by a distributed control system and can sequentially run according to programs.
The valve and the pipeline in the gas circuit main pipe are both in an electro-polishing (EP) grade, so that the adsorbability of the valve and the pipeline is reduced, and the corrosion resistance is enhanced.
The gas in the replacement gas cylinder is ultra-pure gas (the purity is more than 99.9999 percent) so as to meet the requirements of ultra-pure gas filling and electronic mixed gas.
Advantageous effects
(1) A closed gas cylinder oven is used, the temperature of a cylinder valve is close to but lower than the highest service temperature of the cylinder valve, the gas cylinder drying effect is improved, and the processing time is reduced;
(2) the temperature of the bottom of the gas cylinder is higher than 100 ℃, the boiling point of water is greatly reduced in a vacuum environment, and the water at the bottom of the gas cylinder can be effectively vaporized.
(3) The start and stop of the fore pump and the rear pump in the vacuum pump unit, the vacuum pumping valve and the resistance gauge are all connected into the DCS, the start and stop of the rear pump and the vacuum pumping valve are determined according to the resistance gauge number, manpower is reduced, and efficiency is improved.
(4) The automatic emptying unit, the automatic emptying unit and the automatic replacement unit are controlled by the DCS system and can run according to a program in sequence, so that full automation of operation is realized, misoperation of personnel is avoided, and manpower is greatly saved.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
The system comprises a drying oven 1, a vacuum pump unit 2, a rear-stage pump 21, a front-stage pump 22, a resistance gauge 3, an air pumping valve 4, a displacement gas cylinder 5, a pressure reducing valve 6, a displacement pneumatic valve 7, a pressure sensor 8, a pneumatic valve 9, a digital display temperature controller 10, an exhaust check valve 11, an exhaust air valve 12 and an air exhaust valve 13, and an air path main pipe.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings by way of examples.
As shown in fig. 1, a full-automatic pretreatment device for an ultrapure gas cylinder comprises: the gas cylinder drying oven comprises a gas cylinder drying oven 1, an automatic emptying unit, an automatic replacement unit, an automatic evacuation unit and a gas circuit main pipe 13;
one end of the gas path main pipe 13 is connected with an automatic emptying unit, the other end of the gas path main pipe is connected with an automatic evacuation unit, and the automatic replacement unit is connected to the gas path main pipe 13; the gas cylinder in the gas cylinder oven 1 is connected to a gas path main pipe 13 through a pneumatic valve 9 and is positioned between the automatic replacement unit and the automatic emptying unit, and the gas path main pipe 13 is connected with a pressure sensor 8.
The gas cylinder drying oven 1 is closed, a heating system is arranged at the bottom in the drying oven, a metal cover plate is arranged on the heating system at intervals, and a gas cylinder to be treated is arranged above the metal cover plate.
The gas cylinder oven 1 is provided with a thermocouple and a digital display temperature controller 10 and is used for controlling the temperature of a gas cylinder valve of a gas cylinder to be processed to be lower than the highest service temperature of the gas cylinder valve, for example, the highest service temperature of a valve seat of a Polytrifluorochloroethylene (PCTFE) diaphragm valve is 65 ℃, the bottom of the gas cylinder is heated to about 140 ℃, and the temperature of the gas cylinder valve is controlled to be 60 ℃ so as to improve the removal effect of water in the gas cylinder.
The automatic emptying unit comprises an emptying pneumatic valve 12 and an emptying one-way valve 11 which are connected.
The automatic replacement unit comprises a replacement gas cylinder 5, a pressure reducing valve 6 and a replacement pneumatic valve 7 which are connected in sequence.
The automatic evacuation unit comprises an air pumping valve 4 and a vacuum pump unit 2 which are connected, and a resistance gauge 3 is connected between the air pumping valve 4 and the vacuum pump unit 2; the vacuum pump assembly 2 comprises a backing pump 21 and a backing pump 22 connected to each other.
The pre-pump 22, the post-pump 21, the air pumping valve 4 and the resistance gauge 3 are all connected to a distributed control system (hereinafter referred to as DCS system), and the post-pump 21 and the air pumping valve 4 are controlled to be started and stopped according to the indication of the resistance gauge 3.
The air pumping valve 4, the air replacement valve 7 and the air exhaust valve 12 are all pneumatic diaphragm valves.
The automatic emptying unit, the automatic evacuation unit and the automatic replacement unit are controlled by a distributed control system and can sequentially run according to programs.
And the valve and the pipeline in the gas circuit main pipe 13 are both in an electro-polishing (EP) grade, so that the adsorbability of the valve and the pipeline is reduced, and the corrosion resistance is enhanced.
The gas in the replacement gas cylinder 5 is ultra-pure gas (with the purity of more than 99.9999 percent) so as to meet the requirements of ultra-pure gas filling and electronic mixed gas.
Example 1
A cylinder was treated for filling with ultra pure helium gas of 99.9999% purity.
And (3) connecting the gas cylinder to be treated into a gas path main pipe 13 in the closed oven 1, and setting the outlet pressure of the pressure reducing valve 6 to be 0.2 MPa. The replacement gas is ultrapure helium with the purity of 99.9999 percent which is qualified through detection.
The full-automatic processing program of the gas cylinder is as follows:
(1) heating procedure: the valve seats of the 5 gas cylinders to be treated are made of PCTFE, the maximum use temperature is 65 ℃, so that the temperature range of the digital display thermometer is set to be 55-65 ℃, and the actual temperature of the cylinder valve is controlled to be below 65 ℃.
(2) And (3) vacuumizing procedure: the exhaust air valve 12, the displacement air valve 7 are closed, and the cylinder valve 9 and the extraction air valve 4 are opened. And starting the vacuum pump unit 2, automatically starting the front-stage pump 22, automatically starting the rear-stage pump 21 when the reading of the resistance gauge 3 is less than or equal to 1000Pa, vacuumizing to less than or equal to 10Pa, keeping for 30 minutes, then closing the air pumping valve 4, and stopping the rear-stage pump 21.
(3) Replacement procedure: and after the vacuumizing procedure is finished, the replacement pneumatic valve 7 is opened, and when the pressure reaches 0.15-0.2 MPa, the replacement pneumatic valve 7 is closed. Hold for 5 minutes.
(4) Evacuation procedure: and (4) after the replacement procedure is finished, opening the exhaust pneumatic valve 12, and closing the exhaust pneumatic valve 12 when the pressure sensor 8 reaches 0.1 MPa.
(5) And (3) repeating the steps (2) to (4) for 3 times, then repeating the step (2), then closing all pneumatic valves, closing the steel cylinder valves, closing the vacuum pump, and closing the oven. The total time for pre-treating the gas cylinder is 3.5 hours.
Through analysis, the impurity content of the gas cylinder treated by the method can reach the pretreatment requirement of ultra-pure gas, and the water content is less than 0.2 ppm.
In summary, the above is merely a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. The utility model provides a full-automatic preprocessing device of ultrapure gas cylinder which characterized in that includes: the gas cylinder drying oven comprises a gas cylinder drying oven (1), an automatic emptying unit, an automatic replacement unit, an automatic evacuation unit and a gas circuit main pipe (13);
one end of the gas path main pipe (13) is connected with the automatic evacuation unit, the other end of the gas path main pipe is connected with the automatic evacuation unit, and the automatic replacement unit is connected to the gas path main pipe (13); the gas cylinder in the gas cylinder oven (1) is connected to a gas path main pipe (13) through a pneumatic valve (9) and is positioned between an automatic replacement unit and an automatic emptying unit, and the gas path main pipe (13) is connected with a pressure sensor (8).
2. The full-automatic pretreatment device of the ultrapure gas cylinder according to claim 1, wherein the gas cylinder oven (1) is closed, a heating system is arranged at the bottom in the oven, a metal cover plate is arranged on the heating system at an interval, and a gas cylinder to be treated is arranged above the metal cover plate.
3. The device for the fully automatic pre-treatment of ultrapure gas cylinders according to claim 1, characterized in that the cylinder oven (1) is equipped with a thermocouple and a digital readout temperature controller (10).
4. The fully automatic pre-treatment device of an ultrapure gas cylinder according to claim 1, characterized in that the automatic evacuation unit comprises an evacuation pneumatic valve (12) and an evacuation one-way valve (11) connected.
5. The fully automatic pre-treatment device of an ultrapure gas cylinder according to claim 1, characterized in that the automatic replacement unit comprises a replacement gas cylinder (5), a pressure reducing valve (6), a replacement pneumatic valve (7) connected in sequence.
6. The fully automatic pre-treatment device of an ultrapure gas cylinder according to claim 1, characterized in that the automatic evacuation unit comprises an evacuation pneumatic valve (4) and a vacuum pump unit (2) connected, between which evacuation pneumatic valve (4) and vacuum pump unit (2) a resistance gauge (3) is connected; the vacuum pump unit (2) comprises a backing pump (21) and a backing pump (22) which are connected with each other.
7. The full-automatic pretreatment device of the ultrapure gas cylinder according to claim 6, wherein the pre-pump (22), the post-pump (21), the evacuation pneumatic valve (4) and the resistance gauge (3) are all connected into a distributed control system, and the start and stop of the post-pump (21) and the evacuation pneumatic valve (4) are controlled according to the number indication of the resistance gauge (3).
8. The fully automatic pretreatment device of the ultrapure gas cylinder according to claim 1, wherein the automatic evacuation unit, the automatic evacuation unit and the automatic replacement unit are controlled by a distributed control system and run in sequence according to a program.
9. The full-automatic pretreatment device of the ultrapure gas cylinder according to claim 1, characterized in that valves and pipelines in the gas circuit main pipe (13) adopt an electropolishing stage.
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| CN201922357313.3U CN212457626U (en) | 2019-12-25 | 2019-12-25 | Full-automatic preprocessing device of ultrapure gas cylinder |
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| CN201922357313.3U CN212457626U (en) | 2019-12-25 | 2019-12-25 | Full-automatic preprocessing device of ultrapure gas cylinder |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113970064A (en) * | 2021-10-09 | 2022-01-25 | 全椒亚格泰电子新材料科技有限公司 | Treatment device for residual disilane gas cylinders |
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2019
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113970064A (en) * | 2021-10-09 | 2022-01-25 | 全椒亚格泰电子新材料科技有限公司 | Treatment device for residual disilane gas cylinders |
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Address after: 057550 No. five Weir Road, chemical industry gathering area, Feixiang District, Handan, Hebei, 1 Patentee after: China shipbuilding (Handan) Perry Special Gas Co.,Ltd. Address before: No.1 Weiwu Road, chemical industry gathering area, Feixiang County, Handan City, Hebei Province Patentee before: PERIC SPECIAL GASES Co.,Ltd. |