CN215864581U - Novel vacuum furnace gas supply and exhaust system - Google Patents
Novel vacuum furnace gas supply and exhaust system Download PDFInfo
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- CN215864581U CN215864581U CN202121927635.8U CN202121927635U CN215864581U CN 215864581 U CN215864581 U CN 215864581U CN 202121927635 U CN202121927635 U CN 202121927635U CN 215864581 U CN215864581 U CN 215864581U
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Abstract
The utility model provides a novel vacuum furnace gas supply and exhaust system, which comprises a process gas inlet pipeline, a process gas inlet valve, a mass flowmeter, a process gas outlet valve, a first one-way valve, a first three-way joint, an inert gas inlet pipeline, an inert gas inlet valve, a pressure regulation controller, an inert gas outlet valve, a gas supply connecting pipeline, a vacuum reaction cavity, a vacuum pipeline, a vacuum gauge pipe, a pressure detection sensor, a pressure release valve, a vacuum unit, a gas exhaust pipeline, an overpressure exhaust valve and an automatic exhaust valve, and has the following beneficial effects: after the reaction cavity is vacuumized, the gas flow and the pressure can be set according to the process index requirements, the flow and the pressure can be automatically controlled during inflation, and the reaction cavity has the functions of upper pressure limit protection and pressure relief protection.
Description
Technical Field
The utility model relates to a novel vacuum furnace gas supply and exhaust system, in particular to a novel vacuum gas supply and exhaust system of a vacuum sintering furnace, a hydrogen furnace, an annealing furnace and the like.
Background
The vacuum heat treatment hydrogen furnace is suitable for vacuum sintering and annealing of magnetic materials, superconducting materials and alloy materials, and processes of dysprosium infiltration of neodymium iron boron and the like. During the technological process, the material needs to be arranged in a high-temperature resistant reaction cavity for high-temperature treatment, and the reaction cavity needs to be firstly vacuumized and then carried out under the protection of high-temperature atmosphere.
In the prior similar products in the industry, the adopted vacuum reaction cavity is inflated by manually observing the pressure in the reaction cavity, when the temperature of the atmosphere in the vacuum reaction cavity changes, the pressure changes along with the change of the temperature, and the inflation and exhaust operations are required to be continuously operated manually, so that the manual operation cost is greatly increased, the material sintering process is unstable, the performance of the product is influenced, and the qualification rate of the product is reduced.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects in the prior art, the utility model aims to provide a novel vacuum furnace gas supply and exhaust system to solve the problems in the background technology.
The technical scheme of the utility model is realized as follows: a novel vacuum furnace gas supply and exhaust system comprises a process gas inlet pipeline, a process gas inlet valve, a mass flowmeter, a process gas outlet valve, a first one-way valve, a first three-way joint, an inert gas inlet pipeline, an inert gas inlet valve, a pressure regulating controller, an inert gas outlet valve, a gas supply connecting pipeline, a vacuum reaction cavity, a vacuum pipeline, a vacuum gauge pipe, a pressure detection sensor, a pressure release valve, a vacuum unit, a gas exhaust pipeline, an overpressure exhaust valve and an automatic exhaust valve, one end of the process gas inlet pipeline is connected to one end of a process gas inlet valve, the other end of the process gas inlet valve is connected to one end of a mass flowmeter, the other end of the mass flow meter is connected with one end of a process gas outlet valve, the other end of the process gas outlet valve is connected with one end of a first one-way valve, and the other end of the first one-way valve is connected with a first connector of a first three-way connector; the second interface of the first three-way joint is connected with an inert gas outlet valve through a second one-way valve, the other end of the inert gas outlet valve is connected with a pressure regulating controller, the other end of the pressure regulating controller is connected with an inert gas inlet valve, and the other end of the inert gas inlet valve is connected with an inert gas inlet pipeline; the third interface of the first three-way joint is connected with a gas supply connecting pipeline, and the other end of the gas supply connecting pipeline is connected to the vacuum reaction cavity.
As a preferred embodiment, the vacuum reaction chamber is connected with a vacuum pipeline, the vacuum pipeline is provided with a vacuum gauge, a pressure detection sensor and a pressure release valve, and the other end of the vacuum pipeline is connected with a vacuum unit.
In a preferred embodiment, the vacuum reaction chamber is further connected with a gas exhaust pipeline, and the gas exhaust pipeline is divided into two parts through a second three-way joint and is respectively connected to the overpressure exhaust valve and the automatic exhaust valve.
The utility model has the beneficial effects that: after the reaction cavity is vacuumized, the gas flow and the pressure can be set according to the process index requirements, the flow and the pressure can be automatically controlled during inflation, and the reaction cavity has the functions of upper pressure limit protection and pressure relief protection.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic diagram of an overall structure of a camera for shooting multimedia according to the present invention.
In the figure, a process gas inlet pipeline 1, a process gas inlet valve 2, a mass flowmeter 3, a process gas outlet valve 4, a first one-way valve 5, a first three-way joint 6, an inert gas inlet pipeline 7, an inert gas inlet valve 8, a pressure regulating controller 9, an inert gas outlet valve 10, a gas supply connecting pipeline 11, a vacuum reaction chamber 12, a vacuum pipeline 13, a vacuum gauge pipe 14, a pressure detection sensor 15, a pressure release valve 16, a vacuum unit 17, a gas exhaust pipeline 18, an overpressure exhaust valve 19, an automatic exhaust valve 20, a second one-way valve 21 and a second three-way joint 22 are arranged.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the present invention provides a technical solution: a novel vacuum furnace gas supply and exhaust system comprises a process gas inlet pipeline 1, a process gas inlet valve 2, a mass flow meter 3, a process gas outlet valve 4, a first one-way valve 5, a first three-way joint 6, an inert gas inlet pipeline 7, an inert gas inlet valve 8, a pressure regulation controller 9, an inert gas outlet valve 10, a gas supply connecting pipeline 11, a vacuum reaction cavity 12, a vacuum pipeline 13, a vacuum gauge pipe 14, a pressure detection sensor 15, a pressure relief valve 16, a vacuum unit 17, a gas exhaust pipeline 18, an overpressure exhaust valve 19 and an automatic exhaust valve 20, wherein one end of the process gas inlet pipeline 1 is connected to one end of the process gas inlet valve 2, the other end of the process gas inlet pipeline 2 is connected to one end of the mass flow meter 3, the other end of the mass flow meter 3 is connected to one end of the process gas outlet valve 4, the other end of the process gas outlet valve 4 is connected to one end of the first one-way valve 5, the other end of the first one-way valve 5 is connected with a first connector of a first three-way joint 6; the second interface of the first three-way joint 6 is connected with an inert gas outlet valve 10 through a second one-way valve 5, the other end of the inert gas outlet valve 10 is connected with a pressure regulating controller 9, the other end of the pressure regulating controller 9 is connected with an inert gas inlet valve 8, and the other end of the inert gas inlet valve 8 is connected with an inert gas inlet pipeline 7; the third interface of the first three-way joint 6 is connected with a gas supply connecting pipeline 11, and the other end of the gas supply connecting pipeline 11 is connected to a vacuum reaction chamber 12.
As an embodiment of the utility model, a vacuum pipeline 13 is connected to the vacuum reaction chamber 12, a vacuum gauge 14, a pressure detection sensor 15 and a pressure relief valve 16 are installed on the vacuum pipeline 13, and a vacuum unit 17 is connected to the other end of the vacuum pipeline 13.
In one embodiment of the present invention, a gas exhaust pipe 18 is further connected to the vacuum reaction chamber 12, and the gas exhaust pipe 18 is divided into two parts by a second three-way joint 6 and is respectively connected to an overpressure exhaust valve 19 and an automatic exhaust valve 20.
As an embodiment of the present invention: the product is loaded into the vacuum reaction cavity 12, after the vacuum reaction cavity 12 is vacuumized, the process gas enters the vacuum reaction cavity 12 through the process gas inlet pipeline 1, the process gas flow and the reaction cavity pressure can be automatically detected through the mass flow meter 3 and the pressure detection sensor 15, the process gas can be discharged through the vacuum pipe 13 or the gas exhaust pipeline 18, the equipment can realize positive pressure and negative pressure processes, and the requirements of different processes are greatly met. The vacuum reaction chamber 12 is provided with a pressure detection sensor 15, has the functions of pressure upper limit protection and pressure relief protection, greatly increases the safety performance of the equipment, and simultaneously reduces the manual operation cost.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (3)
1. A novel vacuum furnace gas supply and exhaust system comprises a process gas inlet pipeline, a process gas inlet valve, a mass flowmeter, a process gas outlet valve, a first one-way valve, a first three-way joint, an inert gas inlet pipeline, an inert gas inlet valve, a pressure regulating controller, an inert gas outlet valve, a gas supply connecting pipeline, a vacuum reaction cavity, a vacuum pipeline, a vacuum gauge pipe, a pressure detection sensor, a pressure release valve, a vacuum unit, a gas exhaust pipeline, an overpressure exhaust valve and an automatic exhaust valve, it is characterized in that one end of the process gas inlet pipeline is connected to one end of the process gas inlet valve, the other end of the process gas inlet valve is connected with one end of a mass flowmeter, the other end of the mass flowmeter is connected with one end of a process gas outlet valve, the other end of the process gas outlet valve is connected with one end of a first one-way valve, and the other end of the first one-way valve is connected with a first connector of a first three-way connector; the second interface of the first three-way joint is connected with an inert gas outlet valve through a second one-way valve, the other end of the inert gas outlet valve is connected with a pressure regulating controller, the other end of the pressure regulating controller is connected with an inert gas inlet valve, and the other end of the inert gas inlet valve is connected with an inert gas inlet pipeline; the third interface of the first three-way joint is connected with a gas supply connecting pipeline, and the other end of the gas supply connecting pipeline is connected to the vacuum reaction cavity.
2. The novel vacuum furnace gas supply and exhaust system as claimed in claim 1, wherein: the vacuum reaction cavity is connected with a vacuum pipeline, the vacuum pipeline is provided with a vacuum gauge pipe, a pressure detection sensor and a pressure release valve, and the other end of the vacuum pipeline is connected with a vacuum unit.
3. The novel vacuum furnace gas supply and exhaust system as claimed in claim 1, wherein: the vacuum reaction chamber is also connected with a gas exhaust pipeline, and the gas exhaust pipeline is divided into two parts through a second tee joint and is respectively connected to an overpressure exhaust valve and an automatic exhaust valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121927635.8U CN215864581U (en) | 2021-08-17 | 2021-08-17 | Novel vacuum furnace gas supply and exhaust system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121927635.8U CN215864581U (en) | 2021-08-17 | 2021-08-17 | Novel vacuum furnace gas supply and exhaust system |
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| Publication Number | Publication Date |
|---|---|
| CN215864581U true CN215864581U (en) | 2022-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121927635.8U Active CN215864581U (en) | 2021-08-17 | 2021-08-17 | Novel vacuum furnace gas supply and exhaust system |
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| Country | Link |
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| CN (1) | CN215864581U (en) |
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2021
- 2021-08-17 CN CN202121927635.8U patent/CN215864581U/en active Active
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