CN210317718U - Mobile vacuum pump vacuum degree test system - Google Patents
Mobile vacuum pump vacuum degree test system Download PDFInfo
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- CN210317718U CN210317718U CN201921285496.6U CN201921285496U CN210317718U CN 210317718 U CN210317718 U CN 210317718U CN 201921285496 U CN201921285496 U CN 201921285496U CN 210317718 U CN210317718 U CN 210317718U
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- vacuum pump
- vacuum
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- pump
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Abstract
The utility model provides a portable vacuum pump vacuum test system, including integrated in a remove the vacuum pump on the shallow, with the water-cooling unit of vacuum pump heat dissipation pipeline intercommunication, can be connected with gas supply system and carry out the unit of blowing of clearing up and with the test unit of vacuum pump air inlet intercommunication the vacuum pump is inside, be provided with first valve between test unit and the vacuum pump. The utility model provides a portable vacuum pump vacuum test system's advantage lies in: the system is simple in structure, convenient to test and accurate in data, and can be conveniently assembled according to the position of the vacuum pump, so that the production safety is improved.
Description
Technical Field
The utility model relates to a technical field is markd to the vacuum of vacuum pump, especially relates to a portable vacuum pump vacuum test system.
Background
The high-purity special gas as a key raw material in the integrated circuit industry plays an important role in the integrated circuit industry, plays an indispensable role in solar photovoltaic, flat panel displays, compound semiconductor devices, petrochemical industry and optical fiber communication, and is widely applied to processes such as thin films, doping, etching, diffusion, vapor deposition and the like. With the development of scientific technology, the quality requirement of high-purity special gas is higher and higher, generally the purity requirement of the gas is more than 99.9999%, and the total concentration of impurities is not more than 1 ppm.
The transportation of high-purity special gas is carried out by means of pressure containers such as steel cylinders, the gas is usually conveyed through a pipeline and is contained in the steel cylinder, if the pipeline is connected or the vacuum degree in a reaction kettle in production cannot meet the requirement, the pressure of the pipeline and the pressure of the reaction kettle can be increased, so that the danger of explosion is very easy to occur in production, the vacuum degree of the reaction kettle is directly determined by the vacuum degree of a vacuum pump, and whether the vacuum degree of the vacuum pump meets the requirement or not needs to be regularly checked in order to ensure the production safety. At present, the vacuum pump in a normal use state is detected by transferring the vacuum pump into a fume hood of a production area and testing the vacuum pump by connecting an air supply pipeline.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that whether the vacuum of a measurement vacuum pump that can be convenient satisfies the requirements and is convenient for the vacuum test system who shifts is provided.
The utility model discloses a solve above-mentioned technical problem through following technical scheme:
the utility model provides a portable vacuum pump vacuum test system, is provided with first valve including integrated vacuum pump on a removal shallow, the water-cooling unit that communicates with vacuum pump heat dissipation pipeline, can be connected with air supply system and blow the unit of clearing up and communicate with the vacuum pump air inlet to vacuum pump inside, between test unit and the vacuum pump.
Preferably, the water cooling unit includes the water tank, the circulating pump be connected with the water tank, with the compressor of circulating pump intercommunication, the compressor feeds through to the vacuum pump with the heat dissipation pipeline intercommunication of vacuum pump, the play water of vacuum pump is got back to in the water tank.
Preferably, the blowing unit comprises a tail gas treatment mechanism communicated with the exhaust port of the vacuum pump and a second valve connected with the gas supply system, and a third valve is further arranged on a pipeline where the tail gas treatment mechanism is located.
Preferably, the gas supply system supplies nitrogen to the vacuum pump.
Preferably, a pressure gauge is further arranged on the pipeline where the second valve is located.
Preferably, when the air supply mechanism works, the value of the pressure gauge is 0.1MPa to 0.2 MPa.
Preferably, the test unit comprises a pirani vacuum gauge connected with a vacuum pump through an air pipe and a vacuum digital display meter in communication connection with the pirani vacuum gauge.
The utility model provides a portable vacuum pump vacuum test system's advantage lies in: the system is simple in structure, the vacuum pump can be conveniently moved to a safe position to be detected after being matched with the system, the safety of operating personnel is guaranteed, the test is convenient, the data is accurate, and the production safety is improved.
Drawings
Fig. 1 is a schematic view of a vacuum degree testing system of a mobile vacuum pump according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1, the present embodiment provides a vacuum degree testing system for a mobile vacuum pump, which includes a vacuum pump 1 integrated on a mobile cart (not shown), a water cooling unit 2 communicated with a heat dissipation pipeline of the vacuum pump 1, an air blowing unit 3 capable of being connected with an external air supply system 31 to clean the inside of the vacuum pump 1, and a testing unit 4 communicated with an air inlet of the vacuum pump 1, wherein the air blowing unit 3 blows out particles such as dust in the vacuum pump 1 when working, and a first valve 43 is disposed between the testing unit 4 and the vacuum pump 1 to protect the testing unit 4. When the vacuum degree test system is used, the whole vacuum degree test system can be transferred to a safe position to be detected through the movable trolley, the safety of a production area can be guaranteed under the conditions of air leakage and the like in time, and adverse effects on operating personnel are prevented.
The water cooling unit 2 comprises a water tank 21, a circulating pump 22 connected with the water tank 21 and a compressor 23 communicated with the circulating pump 22, the compressor 23 is connected with a heat dissipation pipeline of the vacuum pump 1 and is communicated with the vacuum pump 1 for supplying water, and the outlet water of the circulating pump 1 returns to the water tank 21 through a pipeline; the circulating pump 22 provides power for the water cooling system to achieve water circulation, the compressor 23 provides constant temperature for circulating water to ensure stable temperature of the vacuum pump 1 in the testing process, the compressor 23 is set to 23 ℃ in the preferred embodiment, the water cooling units 2 can be integrated together and water inlet and outlet pipelines are reserved for convenience in use and movement, and different vacuum pumps 1 can be replaced during testing through panel control parameters.
The blowing unit 3 comprises a tail gas treatment mechanism 32 communicated with an exhaust port of the vacuum pump 1 and a second valve 33 connected with a gas supply system 31, a third valve 34 is arranged on a pipeline of the tail gas treatment mechanism 32, the second valve 33 and the third valve 34 are closed and disconnected from the blowing unit 3 when the vacuum degree is tested, and the gas supply system 31 blows protective gas with stable performance, preferably nitrogen gas, to the vacuum pump 1; to clear up foreign matters such as dust in the vacuum pump 1, and collect blow-off gas and foreign matters through the tail gas processing mechanism 32, ensure to keep clean in the vacuum pump 1 before the test, prevent that the dust from blockking up the pipeline. The pipeline where the second valve 33 is located is also provided with a pressure gauge 35, and when the pressure gauge works, the value of the pressure gauge 35 is 0.1 MPa-0.2 MPa. When in use, if the site has no nitrogen pipeline, bottled gas can be directly used as the gas supply system 31 to purge the vacuum pump 1.
The test unit 4 comprises a pirani vacuum gauge 41 connected with an air inlet of the vacuum pump 1 and a vacuum digital display meter 42 in communication connection with the pirani vacuum gauge 41, so that the vacuum degree value is visually displayed through the vacuum digital display meter 42, and in other embodiments of the application, other vacuum gauges in the prior art can be used for measuring the vacuum degree of the vacuum pump 1.
When the vacuum pump is used, the water cooling unit 2 is firstly started, the vacuum pump 1 is in an environment with a preset temperature through cooling water, the second valve 33 is opened, the first valve 43 and the third valve 34 are kept closed, and the interior of the vacuum pump 1 is purged through the air supply system 31; after the value of the pressure gauge 35 is stabilized, the second valve 33 is kept open, and the first valve 43 and the third valve 34 are opened at the same time, so that the vacuum degree of the vacuum pump can be measured.
Claims (7)
1. The utility model provides a portable vacuum pump vacuum test system which characterized in that: the device comprises a vacuum pump integrated on a mobile cart, a water cooling unit communicated with a heat dissipation pipeline of the vacuum pump, an air blowing unit capable of being connected with an external air supply system to clean the inside of the vacuum pump, and a testing unit communicated with an air inlet of the vacuum pump, wherein a first valve is arranged between the testing unit and the vacuum pump.
2. The mobile vacuum pump vacuum level test system of claim 1, wherein: the water cooling unit comprises a water tank, a circulating pump connected with the water tank and a compressor communicated with the circulating pump, the compressor is communicated with a heat dissipation pipeline of the vacuum pump to supply water to the vacuum pump, and the water outlet of the vacuum pump returns to the water tank.
3. The mobile vacuum pump vacuum level test system of claim 1, wherein: the blowing unit comprises a tail gas treatment mechanism communicated with an exhaust port of the vacuum pump and a second valve connected with a gas supply system, and a third valve is further arranged on a pipeline where the tail gas treatment mechanism is located.
4. A mobile vacuum pump vacuum level test system as claimed in claim 3, wherein: the gas supply system supplies nitrogen to the vacuum pump.
5. The mobile vacuum pump vacuum degree test system of claim 4, wherein: and a pressure gauge is also arranged on the pipeline where the second valve is positioned.
6. The mobile vacuum pump vacuum level test system of claim 5, wherein: when the air supply mechanism works, the value of the pressure gauge is 0.1 MPa-0.2 MPa.
7. The mobile vacuum pump vacuum level test system of claim 1, wherein: the test unit comprises a Pirani vacuum gauge connected with the vacuum pump through an air pipe and a vacuum digital display meter in communication connection with the Pirani vacuum gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921285496.6U CN210317718U (en) | 2019-08-08 | 2019-08-08 | Mobile vacuum pump vacuum degree test system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921285496.6U CN210317718U (en) | 2019-08-08 | 2019-08-08 | Mobile vacuum pump vacuum degree test system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210317718U true CN210317718U (en) | 2020-04-14 |
Family
ID=70129303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921285496.6U Active CN210317718U (en) | 2019-08-08 | 2019-08-08 | Mobile vacuum pump vacuum degree test system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210317718U (en) |
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2019
- 2019-08-08 CN CN201921285496.6U patent/CN210317718U/en active Active
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