CN204647848U - A kind of automatic type special gas distributor case - Google Patents

Abstract

The utility model records an automatic special gas distribution box, which includes a box body, an acousto-optic alarm, an observation window and double doors, and a control operation unit, a gas cylinder working unit, a purge unit and Alarm unit; the control operation unit includes a controller, a control device and a control circuit; the gas cylinder working unit includes a pneumatic regulating valve, a pressure sensor, a filter and a working pipeline; meanwhile, the purging unit includes a purge gas inlet, a pneumatic blower Sweep nitrogen isolation valve, pneumatic discharge valve and vacuum pump; as for the alarm unit gas leakage sensor and sound and light alarm; the inside of the box is also equipped with a pneumatic valve. Due to the adoption of the above-mentioned technology, the utility model realizes operations such as automatic blowing before bottle change, cylinder interface leak test, and purge after bottle change by the pneumatic valve, thereby avoiding equipment damage and personal hazards caused by human misoperation.

Description

An automatic special gas distribution box

technical field

The utility model relates to the field of special gas delivery, in particular to an automatic special gas distribution box.

Background technique

Due to the vigorous development of the global electronics and photovoltaic industries, the domestic semiconductor and photovoltaic manufacturing industries have also developed rapidly. According to the 2006 China Semiconductor Industry Research Report: "At the end of 2006, there were nearly 50 wafer manufacturing plants, 112 IC packaging and IC assembly plants, and 450 IC design companies in China. In 2006, the output value of China's domestic semiconductor industry was 80.7 billion yuan. RMB, about 10 billion US dollars, including 35 billion yuan in packaging and testing, 24.2 billion yuan in wafer manufacturing, and 21.5 billion yuan in IC design. The scale of China's domestic semiconductor market exceeded 60 billion US dollars in 2006. Among them, the top 20 manufacturers accounted for 300 million yuan. The photovoltaic industry has developed rapidly in the past two years and is the main force of the new energy industry in the future.

In the commonly used processes in semiconductor and photovoltaic related industries, it is often necessary to use many special gases, some of which are toxic, corrosive, and flammable. Errors and other factors) cause gas leakage, which will threaten the safety of personnel, equipment loss and production interruption, and its harmfulness must be paid special attention to and cannot be underestimated.

Among them, the special gas distribution box is widely used in the semiconductor industry. In the early days of the development of the semiconductor industry, many accidents occurred. The data shows that special gas distribution box accidents often cause property loss, environmental pollution, casualties, explosion and death in institutions. The main cause of accidents is human error. Domestic semiconductor factories all adopt various management and hazard analysis methods to achieve appropriate risk control, but in the state of manual control by personnel, the risk still cannot be reduced.

The special gas distribution box is a kind of equipment used in the semiconductor and photovoltaic industries, mainly for the continuous distribution of process gas for process machines. Because the process is generally packaged in steel cylinders, new gas cylinders must be replaced continuously during the operation of the factory, and the empty gas cylinders on-line must be removed, that is, the cylinder replacement process. During the cylinder replacement process, in order to ensure that the toxic and harmful gas does not leak out and threaten personal safety, before removing the empty cylinder, the toxic and harmful gas in the pipeline connected to the cylinder must be replaced with high-purity nitrogen, which is called in the cylinder replacement process. Blow before bottle change. In order to ensure that the toxic and harmful gases can be completely replaced, the vent valve and purge valve must be switched on and off more than 60 times. When the empty steel cylinder is removed and replaced with a new steel cylinder, a leak test must be performed on the newly installed steel cylinder interface. For the steel cylinders that pass the leak test, we need to purge after changing the bottle to remove the air, moisture and tiny particles that may be brought into the gas pipeline during the bottle changing process. This process must continue for 3 to 4 hours.

At present, the operation of the existing special gas distribution box must be done manually. Therefore bring many unreasonable factors: 1. The operator mechanically repeats the same action continuously, and the probability of misoperation is high. 2. During the entire operation process, the operator needs to manually switch the valve, and directly faces the equipment for conveying toxic and harmful gases for a long time, which poses a high risk to personnel safety. 3. The manual special gas conveying cabinet cannot close the valve by itself in emergency situations such as gas leakage and fire alarm, and cut off the gas source to reduce hazards.

Utility model content

In order to solve the above problems, the utility model provides an automatic special gas distribution box, which can effectively ensure the normal production of the factory and the personal safety of employees, realize the on-site display of equipment status, and have the advantages of no need for operators to directly contact toxic and harmful media.

The above-mentioned automatic special gas distribution box includes a box body, an acousto-optic alarm arranged on the surface of the box body, an observation window and a double door, the double door is located at the top of the box body, and the observation window is located at the top of the box body. In the lower part, the sound and light alarm and the observation window are located on the double doors; wherein, the interior of the box includes a control operation unit, a gas cylinder working unit, a purge unit and an alarm unit;

The control operation unit includes a controller, a control device and a control circuit, the control device and the control circuit are located at the lower part of the box, and the control device is connected to the control circuit through the controller; the gas cylinder working unit includes a pneumatic regulator A valve, a pressure sensor, a filter and a working pipeline, the pneumatic regulating valve is connected with the controller;

The purge unit includes a purge gas inlet, a pneumatic purge nitrogen isolation valve, a pneumatic discharge valve and a vacuum pump. The purge gas inlets are connected to each other, the vacuum pump is located inside the box, and the outlet of the vacuum pump is connected to the outside of the box through a pipeline;

The alarm unit includes a gas leakage sensor and the acousto-optic alarm, the gas leakage sensor is located inside the box and connected to the controller; the inside of the box is also provided with a pneumatic valve.

In the above equipment, the purging unit further includes a one-way valve, and the one-way valve is located between the purge gas inlet and the pneumatic purge nitrogen isolation valve.

In the above equipment, the manipulation device is a touch screen.

In the above equipment, the observation window is an explosion-proof glass window.

In the above equipment, the pneumatic discharge valve includes a high-pressure pneumatic discharge valve, a low-pressure pneumatic discharge valve and an isolation valve.

In the above equipment, the purging unit is further provided with a micro-flow valve, the inlet end of the micro-flow valve is connected to the purge gas inlet, and the outlet end of the micro-flow valve is connected to the working pipeline.

The advantages and beneficial effects of the utility model are: the utility model provides an automatic special gas distribution box, which realizes the automatic blowing before changing the bottle, the leakage test of the steel cylinder interface, and the purge after changing the bottle by the pneumatic valve, so that Avoid equipment damage and personal hazards caused by human misoperation.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without any creative effort.

Fig. 1 is the structural representation of automatic special gas distribution box in the utility model;

Fig. 2 is the internal structural block diagram of automatic special gas distribution box in the utility model;

Fig. 3 is a circuit structure diagram of the automatic special gas distribution box in the utility model.

Detailed ways

Below in conjunction with accompanying drawing and embodiment, the specific embodiment of the utility model is further described. The following examples are only used to illustrate the technical solution of the utility model more clearly, but not to limit the protection scope of the utility model.

As shown in Figure 1, the utility model records an automatic special gas distribution box, which includes a box body 5, an acousto-optic alarm 1 arranged on its surface, an observation window 2 and a double door 3, and the double door 3 is located in the box The upper part of the body 5, and the observation window 2 is located at the bottom of the box body 5; wherein, the sound and light alarm 1 and the observation window 2 are all located on the double door 3; preferably, in order to increase safety performance, the observation window 2 in the utility model Explosion-proof glass windows are adopted.

At the same time, a pneumatic valve 15 is arranged inside the box body 5. The specific structure is shown in Fig. 2 and Fig. 3, which includes a control operation unit, a gas cylinder working unit, a purge unit and an alarm unit. Cooperate with the work to complete the automatic operation of the equipment.

Wherein, the above-mentioned control operation unit comprises a controller 16, a control device 4 and a control circuit (not marked in the figure), the control device 4 and the control circuit are all located at the bottom of the casing 5, and the control device 4 communicates with the control device 4 through the controller 16. The control circuits are connected, so that the controller 16 can be controlled by the control device 4, and then other devices can be controlled by the controller 16.

Preferably, in order to control more intuitively, the above-mentioned control device 4 may adopt a touch screen.

At the same time, the gas cylinder working unit is arranged inside the box body 5 and includes a pneumatic regulating valve 10, a pressure sensor 9, a filter 8 and a working pipeline 13. The pneumatic regulating valve 10 is connected with the controller 16, so that the controller 16 can Pneumatic regulating valve 10 is controlled; Pneumatic regulating valve 10 also connects the outlet of gas cylinder through working pipeline 13 simultaneously, and its outlet end connects filter 8, and is connected to the outside of casing 5 through working pipeline 13; As for the pressure sensor 9 The quantity is one, and it is arranged in the working pipeline 13 at the outlet end of the pneumatic control valve 10 and connected with the controller 16 .

As for the purge unit, it includes a purge gas inlet 14, a pneumatic purge nitrogen isolation valve 11, a pneumatic discharge valve 7, and a vacuum pump (not shown in the figure). The purge gas inlet 14 is located on the box body 5, and the gas purge One end of the nitrogen isolation valve 11 communicates with the purge gas inlet 14 through the above-mentioned working pipeline 13, and the vacuum pump is also located inside the box body 5, and the outlet of the vacuum pump is connected to the outside of the box body 5 through a pipeline; wherein, the pneumatic discharge The inlet of the valve 7 is arranged in the box body 5, and its outlet is connected to the outside of the box body 5 through a pipeline; the pneumatic purge nitrogen isolation valve 11, the pneumatic discharge valve 7 and the vacuum pump are controlled by the controller 16.

Preferably, a one-way valve 6 and a micro-flow valve (not shown in the figure) are also provided in the purging unit; wherein, the one-way valve 6 is located between the purge gas inlet 14 and the pneumatic purge nitrogen isolation valve 11, The inlet end of the micro-flow valve is connected with the purge gas inlet 14 , and the outlet end is connected with the working pipeline 13 . At the same time, the above-mentioned pneumatic discharge valve 7 includes a high-pressure pneumatic discharge valve, a low-pressure pneumatic discharge valve and an isolation valve 12. The above-mentioned pneumatic purge nitrogen isolation valve 11 is respectively connected to the working pipeline 13 at both ends of the pneumatic regulating valve 10, and the high-pressure pneumatic discharge valve. One end is connected to the working pipeline 13 between the gas source port and the starting pressure regulating valve, the connection point is close to the gas source port, the other end is connected to the outside of the box body 5 through the pipeline, and one end of the low-pressure pneumatic discharge valve is close to the pneumatic regulating valve The other end of the working pipeline 13 at the outlet of 10 is connected to the outside of the box body 5 through the pipeline; as for the isolation valve 12, it is arranged at the inlet or outlet of the pneumatic control valve 10; at the same time, the high-pressure pneumatic discharge valve and the low-pressure pneumatic discharge valve And the isolation valve 12 is controlled by the controller 16;

Preferably, the purging unit is also provided with a micro-flow valve, the inlet end of the micro-flow valve is connected to the purge gas inlet 14 , and the outlet end of the micro-flow valve is connected to the working pipeline 13 .

Further, the above alarm unit includes a gas leakage sensor 17 and an audible and visual alarm 1 , and the gas leakage sensor 17 is located inside the box body 5 and connected to the controller 16 .

In actual work, the special gas distribution box in the utility model can realize the automation of the box purge process, specifically: by replacing the purge or discharge valve in the existing manual gas cabinet with the pneumatic valve 15 . At the same time, the pressure gauge of the existing manual box is replaced by a pressure sensor 9 (4-20mA signal output). Then the controller 16 controls the pneumatic valve 15 according to the signal of the pressure sensor 9, thereby completing actions such as blowing before automatic bottle change, leak test of the steel cylinder interface, and purge after bottle change.

In addition, in addition to the passage of small-flow positive pressure nitrogen to maintain the cleanliness of the pipeline, additional facilities such as exhaust detection, over-flow protection switch, vacuum generator test VPS, gas leakage sensor 17, smoke detectors, and flame detectors are added to Ensure the normal operation of the equipment, and can immediately send out an alarm and cut off the gas source in case of abnormal conditions.

The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present utility model shall be included in the Within the protection scope of the present utility model.

Claims (6)

1. an automatic type special gas distributor case, comprise casing and be arranged at the audible-visual annunciator of tank surface, viewing window and double door, described double door is positioned at the top of casing, and described viewing window is positioned at the bottom of casing, and described audible-visual annunciator and viewing window are all positioned on double door; It is characterized in that, the inside of described casing comprises control operation unit, gas cylinder working cell, purges unit and alarm unit;

Described control operation unit comprises controller, control device and control circuit, and described control device and control circuit are all positioned at the bottom of casing, and described control device is connected with control circuit by controller; Described gas cylinder working cell comprises pneumatic control valve, pressure transducer, filter and working line, and described pneumatic control valve is connected with controller;

Described purging unit comprises purge gas inlet, pneumatic purging nitrogen separating valve, pneumatic escape cock and vacuum pump, described purge gas inlet is positioned on casing, one end of described gas purging nitrogen separating valve is interconnected by working line and purge gas inlet, described vacuum pump is positioned at the inside of casing, and described vacuum delivery side of pump is connected to outside described casing by pipeline;

Described alarm unit comprises gas leakage sensor and described audible-visual annunciator, and described gas leakage sensor is positioned at the inside of casing and is connected with controller; The inside of described casing is also provided with pneumatic valve.

2. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described purging unit also comprises one-way valve, and described one-way valve is between purge gas inlet and pneumatic purging nitrogen separating valve.

3. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described control device is touch screen.

4. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described viewing window is implosion guard window.

5. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described pneumatic escape cock comprises high-pressure pneumatic escape cock, low-pressure pneumatic escape cock and separating valve.

6. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described purging unit is also provided with microfluidic valve, and the entrance point of described microfluidic valve is connected with purge gas inlet, and the outlet end of described microfluidic valve is connected with working line.