CN204647848U - A kind of automatic type special gas distributor case - Google Patents
A kind of automatic type special gas distributor case Download PDFInfo
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- CN204647848U CN204647848U CN201520253663.4U CN201520253663U CN204647848U CN 204647848 U CN204647848 U CN 204647848U CN 201520253663 U CN201520253663 U CN 201520253663U CN 204647848 U CN204647848 U CN 204647848U
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Abstract
The utility model describes a kind of automatic type special gas distributor case, comprises casing, audible-visual annunciator, viewing window and double door, and is provided with control operation unit, gas cylinder working cell, purging unit and alarm unit in the inside of casing; This control operation unit comprises controller, control device and control circuit; And gas cylinder working cell comprises pneumatic control valve, pressure transducer, filter and working line; Meanwhile, purge unit and comprise purge gas inlet, pneumatic purging nitrogen separating valve, pneumatic escape cock and vacuum pump; As for alarm unit gas leakage sensor and audible-visual annunciator; The inside of casing is also provided with pneumatic valve.Owing to have employed above-mentioned technology, the utility model changes a bottle fore blow, the test of steel cylinder interface leak automatically by achieving pneumatic valve and changes the operations such as bottle post-purge, thus avoids the equipment damage because people causes for misoperation and hazard to person.
Description
Technical field
The utility model relates to special gas transportation art, particularly relates to a kind of automatic type special gas distributor case.
Background technique
Flourish due to global electronic and photovoltaic industry, domestic semiconductor and photovoltaic manufacturing industry have also been obtained swift and violent development.Point out according to Chinese semiconductor industry research report in 2006: " in the end of the year 2006, China has nearly 50 wafer fabrications, 112 IC encapsulation and IC assembly plant, 450 IC Chevron Research Company (CRC)s.The China semiconductor industry output value 80,700,000,000 yuans in 2006, is approximately 10,000,000,000 dollars, and wherein seal survey 35,000,000,000 yuan, wafer manufactures 24,200,000,000 yuan, and IC designs 21,500,000,000 yuan.The scale of China semi-conductor market in 2006 more than 60,000,000,000 dollars.Wherein front 20 large producers just occupy more than 30,000,000,000 dollars." photovoltaic industry is fast-developing at nearly 2 years, is the main force of Future New Energy Source industry.
And in the conventional processing procedure of semiconductor and photovoltaic related industry, often need to use many special gas, the gas harmfulness that some of them are poisonous, burn into is flammable is quite high, once these gas supply system generation valve members suitably damage (as corroded or the factor such as human operational error) cause Leakage Gas, to threaten human life's safety, equipment loss and produce and interrupt, its harmfulness is that let us Bitsoft does not pay attention to and not to be sneezed at.
Wherein, special gas distributor case uses widely in semiconductor industry.Once there is many accidents at the initial stage of semiconductor industry development.Data show, and the contingency of special gas distributor case often causes public institution's property loss, environmental pollution, casualties, blast and problem of death.And cause the main cause of contingency to be human error.Domestic semiconductor factory all adopts various management and hazard analysis method to reach the suitable control of risk, but under the state of personnel's Non-follow control, still cannot reduce risk.
Special gas distributor case is a kind of equipment be used in semiconductor and photovoltaic industry, mainly for technique board is provided and delivered process gas continuously.Because technique is generally steel cylinder packaging, the gas cylinder that must constantly more renew in plant operation process, remove the online gas cylinder with sky, namely flow process changed by steel cylinder.For ensureing that toxic and harmful does not leak outside and threatens personal safety in steel cylinder Renewal process, before the steel cylinder of dismountings sky, must replace the toxic and harmful in the pipeline that is connected with steel cylinder with high pure nitrogen, this is referred to as to change a bottle fore blow in steel cylinder replacing flow process.For guaranteeing that toxic and harmful can be replaced totally, must repeat switch exhaust-valve and blow down valve more than 60 times.Leak-testing must be done to the steel cylinder interface newly installed after empty steel cylinder dismounting installs new steel cylinder.The steel cylinder that leak-testing is passed through we to change a bottle post-purge, to remove the air, moisture and the small particle that change and likely bring gas line in bottle process into.This process must continue 3 to 4 hours continuously.
At present, the operation of existing special gas distributor case must complete manually.Therefore bring many unreasonable factors: 1, operator's machinery repeats same action continuously, misoperation probability is high.2, operator is because of needs hand switch valve in whole operating process, and directly long in the face of the conveying toxic and harmful equipment time, personal security has a big risk.3, manual special gas conveying cabinet is cannot oneself throttle down there being the urgency such as Leakage Gas, fire alarm, cuts off source of the gas and reduces harm.
Model utility content
In order to solve the problem, the utility model provides a kind of automatic type special gas distributor case, effectively can guarantee that factory normally produces and safety of employees, realize the display of status of equipment scene to possess operator without the need to directly contacting the advantages such as poisonous, hazardous medium simultaneously.
Above-mentioned a kind of automatic type special gas distributor case, comprise casing and be arranged at the audible-visual annunciator of tank surface, viewing window and double door, described double door is positioned at the top of casing, and described viewing window is positioned at the bottom of casing, and described audible-visual annunciator and viewing window are all positioned on double door; Wherein, the inside of described casing comprises control operation unit, gas cylinder working cell, purges unit and alarm unit;
Described control operation unit comprises controller, control device and control circuit, and described control device and control circuit are all positioned at the bottom of casing, and described control device is connected with control circuit by controller; Described gas cylinder working cell comprises pneumatic control valve, pressure transducer, filter and working line, and described pneumatic control valve is connected with controller;
Described purging unit comprises purge gas inlet, pneumatic purging nitrogen separating valve, pneumatic escape cock and vacuum pump, described purge gas inlet is positioned on casing, one end of described gas purging nitrogen separating valve is interconnected by working line and purge gas inlet, described vacuum pump is positioned at the inside of casing, and described vacuum delivery side of pump is connected to outside described casing by pipeline;
Described alarm unit comprises gas leakage sensor and described audible-visual annunciator, and described gas leakage sensor is positioned at the inside of casing and is connected with controller; The inside of described casing is also provided with pneumatic valve.
In the said equipment, described purging unit also comprises one-way valve, and described one-way valve is between purge gas inlet and pneumatic purging nitrogen separating valve.
In the said equipment, described control device is touch screen.
In the said equipment, described viewing window is implosion guard window.
In the said equipment, described pneumatic escape cock comprises high-pressure pneumatic escape cock, low-pressure pneumatic escape cock and separating valve.
In the said equipment, described purging unit is also provided with microfluidic valve, and the entrance point of described microfluidic valve is connected with purge gas inlet, and the outlet end of described microfluidic valve is connected with working line.
Advantage of the present utility model and beneficial effect are: the utility model provides a kind of automatic type special gas distributor case, change a bottle fore blow, the test of steel cylinder interface leak automatically by achieving pneumatic valve and change the operations such as bottle post-purge, thus avoiding the equipment damage because people causes for misoperation and hazard to person.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technological scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of automatic type special gas distributor case in the utility model;
Fig. 2 is the internal structure block diagram of automatic type special gas distributor case in the utility model;
Fig. 3 is the circuit structure diagram of automatic type special gas distributor case in the utility model.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is further described.Following examples only for clearly the technical solution of the utility model being described, and can not limit protection domain of the present utility model with this.
As shown in Figure 1, the utility model describes a kind of automatic type special gas distributor case, comprise casing 5 and be arranged at the audible-visual annunciator 1 on its surface, viewing window 2 and double door 3, and double door 3 is positioned at the top of casing 5, and viewing window 2 is positioned at the bottom of casing 5; Wherein, audible-visual annunciator 1 and viewing window 2 are all positioned on double door 3; Preferably, in order to increase Safety performance, the viewing window 2 in the utility model have employed implosion guard window.
Simultaneously, the inside of casing 5 is provided with pneumatic valve 15, concrete structure as shown in Figures 2 and 3, comprises control operation unit, gas cylinder working cell altogether, purges unit and alarm unit, is got final product the automatic type operation of finishing equipment by the work that cooperatively interacts of these 4 unit.
Wherein, above-mentioned control operation unit comprises controller 16, control device 4 and control circuit (not marking in the drawings), this control device 4 and control circuit are all positioned at the bottom of casing 5, and control device 4 is connected with control circuit by controller 16, thus can be controlled by control device 4 pairs of controllers 16, then by controller 16, other equipment are controlled.
Preferably, in order to control more intuitively, above-mentioned control device 4 can adopt touch screen.
Simultaneously, gas cylinder working cell is arranged at the inside of casing 5 and comprises pneumatic control valve 10, pressure transducer 9, filter 8 and working line 13, pneumatic control valve 10 is connected with controller 16, thus can be controlled by controller 16 pairs of pneumatic control valves 10; Pneumatic control valve 10 also connects the outlet of gas cylinder by working line 13 simultaneously, and its outlet end connects filter 8, and is connected to outside casing 5 by working line 13; Quantity as pressure transducer 9 is 1, and is arranged in the working line 13 of pneumatic control valve 10 exit end, and is connected with controller 16.
Purge gas inlet 14, pneumatic purging nitrogen separating valve 11, pneumatic escape cock 7 and vacuum pump (not marking in the drawings) is then comprised as purging unit, this purge gas inlet 14 is positioned on casing 5, and one end of gas purging nitrogen separating valve 11 is interconnected with purge gas inlet 14 by above-mentioned working line 13, and vacuum pump is positioned at the inside of casing 5 equally, this vacuum delivery side of pump is connected to the outside of casing 5 by pipeline; Wherein, the import of pneumatic escape cock 7 is arranged in casing 5, and its outlet is connected to outside casing 5 by pipeline; This pneumatic purging nitrogen separating valve 11, pneumatic escape cock 7 and vacuum pump are controlled by controller 16.
Preferably, in purging unit, one-way valve 6 and microfluidic valve (not marking in the drawings) is also provided with; Wherein, one-way valve 6 is between purge gas inlet 14 and pneumatic purging nitrogen separating valve 11, and the entrance point of microfluidic valve is connected with purge gas inlet 14, and its outlet end is connected with working line 13.Simultaneously, above-mentioned pneumatic escape cock 7 comprises high-pressure pneumatic escape cock, low-pressure pneumatic escape cock and separating valve 12, above-mentioned pneumatic purging nitrogen separating valve 11 is communicated with the working line 13 at pneumatic control valve 10 two ends respectively, one end of high-pressure pneumatic escape cock is communicated with the working line 13 between port and startup pressure regulator valve, connectivity points is near port, its the other end is by the outside of pipeline connection to casing 5, and one end of low-pressure pneumatic escape cock is near the working line 13 of the outlet end of pneumatic control valve 10, the other end is by the outside of pipeline connection to casing 5; Entrance point or the outlet end of pneumatic control valve 10 is arranged on as separating valve 12; High-pressure pneumatic escape cock, low-pressure pneumatic escape cock and separating valve 12 are all controlled by controller 16 simultaneously;
Preferably, described purging unit is also provided with microfluidic valve, and the entrance point of described microfluidic valve is connected with purge gas inlet 14, and the outlet end of described microfluidic valve is connected with working line 13.
Further, above-mentioned alarm unit comprises gas leakage sensor 17 and audible-visual annunciator 1, and gas leakage sensor 17 is positioned at the inside of casing 5 and is connected with controller 16.
In real work, the special gas distributor case in the utility model can realize the automation of casing sweeping process, is specially: by purging or vent valves in existing manual gas holder are replaced with pneumatic valve 15.The pressure gauge of existing manual casing is replaced with pressure transducer 9 (output of 4 ~ 20mA signal) simultaneously.Control pneumatic valve 15 by controller 16 according to the signal of pressure transducer 9 again, thus complete automatic decanting fore blow, the test of steel cylinder interface leak and change the actions such as bottle post-purge.
In addition; apart from small flow positive nitrogen by maintaining the cleanliness of pipeline; the facility such as also newly-increased air draft detection, inflow-rate of water turbine protective switch, vacuum generator test VPS, gas leakage sensor 17, smoke detector, flame detector ensures that equipment runs well, and immediately can send warning in abnormal cases and cut off source of the gas.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (6)
1. an automatic type special gas distributor case, comprise casing and be arranged at the audible-visual annunciator of tank surface, viewing window and double door, described double door is positioned at the top of casing, and described viewing window is positioned at the bottom of casing, and described audible-visual annunciator and viewing window are all positioned on double door; It is characterized in that, the inside of described casing comprises control operation unit, gas cylinder working cell, purges unit and alarm unit;
Described control operation unit comprises controller, control device and control circuit, and described control device and control circuit are all positioned at the bottom of casing, and described control device is connected with control circuit by controller; Described gas cylinder working cell comprises pneumatic control valve, pressure transducer, filter and working line, and described pneumatic control valve is connected with controller;
Described purging unit comprises purge gas inlet, pneumatic purging nitrogen separating valve, pneumatic escape cock and vacuum pump, described purge gas inlet is positioned on casing, one end of described gas purging nitrogen separating valve is interconnected by working line and purge gas inlet, described vacuum pump is positioned at the inside of casing, and described vacuum delivery side of pump is connected to outside described casing by pipeline;
Described alarm unit comprises gas leakage sensor and described audible-visual annunciator, and described gas leakage sensor is positioned at the inside of casing and is connected with controller; The inside of described casing is also provided with pneumatic valve.
2. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described purging unit also comprises one-way valve, and described one-way valve is between purge gas inlet and pneumatic purging nitrogen separating valve.
3. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described control device is touch screen.
4. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described viewing window is implosion guard window.
5. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described pneumatic escape cock comprises high-pressure pneumatic escape cock, low-pressure pneumatic escape cock and separating valve.
6. a kind of automatic type special gas distributor case as claimed in claim 1, it is characterized in that, described purging unit is also provided with microfluidic valve, and the entrance point of described microfluidic valve is connected with purge gas inlet, and the outlet end of described microfluidic valve is connected with working line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520253663.4U CN204647848U (en) | 2015-04-23 | 2015-04-23 | A kind of automatic type special gas distributor case |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520253663.4U CN204647848U (en) | 2015-04-23 | 2015-04-23 | A kind of automatic type special gas distributor case |
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| CN204647848U true CN204647848U (en) | 2015-09-16 |
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| CN201520253663.4U Active CN204647848U (en) | 2015-04-23 | 2015-04-23 | A kind of automatic type special gas distributor case |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106206775A (en) * | 2016-07-08 | 2016-12-07 | 林业城 | Store including gas based on adsorbent and the gas cabinet assembly of induction system |
| CN110207010A (en) * | 2019-07-08 | 2019-09-06 | 深圳融科半导体装备有限公司 | A kind of movable type air tower |
| CN110307468A (en) * | 2019-07-08 | 2019-10-08 | 深圳融科半导体装备有限公司 | A kind of inflammable and explosive fried gas safety conveying device |
-
2015
- 2015-04-23 CN CN201520253663.4U patent/CN204647848U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106206775A (en) * | 2016-07-08 | 2016-12-07 | 林业城 | Store including gas based on adsorbent and the gas cabinet assembly of induction system |
| CN106206775B (en) * | 2016-07-08 | 2018-01-30 | 李光艺 | Include the gas cabinet assembly of the gas storage and delivery system based on adsorbent |
| CN110207010A (en) * | 2019-07-08 | 2019-09-06 | 深圳融科半导体装备有限公司 | A kind of movable type air tower |
| CN110307468A (en) * | 2019-07-08 | 2019-10-08 | 深圳融科半导体装备有限公司 | A kind of inflammable and explosive fried gas safety conveying device |
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