CN101093056A - Special gas storage tank - Google Patents
Special gas storage tank Download PDFInfo
- Publication number
- CN101093056A CN101093056A CN 200710036608 CN200710036608A CN101093056A CN 101093056 A CN101093056 A CN 101093056A CN 200710036608 CN200710036608 CN 200710036608 CN 200710036608 A CN200710036608 A CN 200710036608A CN 101093056 A CN101093056 A CN 101093056A
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- Prior art keywords
- valve
- pipeline
- pressure
- vacuum
- supply air
- Prior art date
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- 238000003860 storage Methods 0.000 title claims description 22
- 239000007789 gas Substances 0.000 claims abstract description 56
- 239000012528 membrane Substances 0.000 claims abstract description 18
- 238000005086 pumping Methods 0.000 claims abstract description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000011045 prefiltration Methods 0.000 claims abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 28
- 239000010959 steel Substances 0.000 claims description 28
- 238000005516 engineering process Methods 0.000 claims description 19
- 238000010926 purge Methods 0.000 claims description 16
- 230000009467 reduction Effects 0.000 claims description 15
- 230000002000 scavenging effect Effects 0.000 claims description 13
- 230000008676 import Effects 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 2
- 238000010408 sweeping Methods 0.000 abstract 3
- 238000002955 isolation Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 231100000614 poison Toxicity 0.000 description 2
- 230000007096 poisonous effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 208000036142 Viral infection Diseases 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000009970 fire resistant effect Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
This invention discloses a specific gas cabin including a cabin and a valve set disk composed of a gas-supply loop, a sweeping loop and a vacuum-pumping loop, said gas supply loop is formed by a cut-off valve of the outlet of a technical cylinder connected with a pneumatic membrane valve, a high pressure cut-off membrane valve, a pre-filter, a pressure-reduction valve, a low pressure cut-off membrane valve, a precise filter and a gas supply pipeline orderly by pipelines, the sweeping loop is formed by a cut-off valve of the outlet of the cylinder connected with a high pressure cut-off membrane valve, a pre-filter, a pressure-reduction valve, a single-way valve, a high-pressure cut-off valve by pipelines to the gas supply loop via the single-way valve and the sweeping isolation valve, said vacuum-pumping loop is formed by the input orifice of nitrogen connected with a pin hole valve, a check valve and a vacuum generator to a vent orderly by pipeline, and the vacuum end of the generator is connected to the gas supply loop via high and low pressure vent valves.
Description
Technical field
The present invention relates to a kind of air feeder of gas, particularly a kind ofly be applied in that the only steel cylinders of special gas such as use in the manufacturing process in the industries such as semiconductor, microelectronic, photoelectricity inflammable and explosive, poisonous and harmful, corrosivity store, the special gas storage tank of safety and stability air feed.
Background technique
Science and technology is constantly being advanced, and technology is constantly reformed, so semiconductor and new energy industry are also flourish thereupon, as the blood vessels gas of industry, has obtained utilizing widely.
Gas has also been followed very high danger because itself physics and chemical property have determined it to be widely used simultaneously in industry; Gas is virose, corrosive, flammable, it is anyly all can cause fatal harm to the people, therefore for the storage of gas cylinder, use and carry and just proposed very high requirement. be not only reliability in safety for the use of gas, also having is exactly requirement how to satisfy technology when being transported to manufacturing equipment.
Therefore need a kind of special gas storage tank that meets above-mentioned requirements especially.
Summary of the invention
The purpose of this invention is to provide a kind of special gas storage tank, this device has the safety of safety to operator, gas delivery and in use to the safety of manufacturing equipment.
Purpose of the present invention can be achieved through the following technical solutions:
A kind of special gas storage tank, it comprises cabinet and valve group face, described valve group face is made of at least one road supply air line, scavenging pipeline and vacuum-pumping pipeline; It is characterized in that, described supply air line by the stop valve I of technology steel cylinder outlet by pipeline connect pneumatic diaphragm valve I successively, high pressure inserts supply air line by membrane valve I, prefilter I, reduction valve I, low pressure by membrane valve I, accurate filter I; Described scavenging pipeline connects high pressure by membrane valve II, prefilter II, reduction valve II, one-way valve I, high-pressure stop valve I by the stop valve II of purge gas steel cylinder outlet successively by pipeline, inserts described supply air line by one-way valve II, purging separating valve I; Described vacuum-pumping tube route nitrogen inlet opening connects needle valve I, safety check I, vacuum generator to relief opening successively by pipeline, and the vacuum end of vacuum generator is connected in the above-mentioned supply air line by the high and low pressure outlet valve by pipeline.
Import and export at the reduction valve I of described supply air line are respectively equipped with pressure checking device, are used to show the force value and the supply gas pressure value of technology steel cylinder.
Import and export at the reduction valve II of described scavenging pipeline are respectively equipped with pressure checking device, are used for showing purging steel cylinder end pressure value and purging force value.
Vacuum end ingress at the vacuum generator of described vacuum-pumping pipeline is provided with pressure checking device, the negative pressure value when being used to indicate vacuum generator work.
Described cabinet is the square cabinet that the outside exhausting of needs forms an explosion-proof band door of negative pressure device, it mainly is made up of steel plate, implosion guard and other parts of certain intensity, make that technology steel cylinder, valve group face with malicious harmful gas are in a negative pressure, in the explosion-proof microhabitat of isolating with the work overall situation, guarantee the safety of operator and cabinet external environmemt to greatest extent.
Special gas storage tank of the present invention is the type hand device, and wherein said valve is a manually operated valve, and described pressure-detecting device is a pressure gauge.
Special gas storage tank of the present invention is full-automatic type device, and it also comprises one by sensor acquisition air feeder state signal, is used for the controller of control valve action, and sensor is connected with the signal input part of described controller; Wherein said valve is a pneumatic valve, and described pressure-detecting device is a pressure transducer.
Special gas storage tank of the present invention comprises that also one is used for the gas sensing device that detected gas is leaked, it is connected with the signal input part of described controller, to possess the emergency cut-off function, promptly when betiding similar gas leakage, can automatically shut down the pneumatic valve of described supply air line outlet by controller, guarantee the safety of gas delivery.
The principle of special gas storage tank of the present invention is as follows:
By described supply air line gas feeding apparatus in the technology steel cylinder is used; By described vacuum-pumping pipeline and scavenging pipeline, the toxic and harmful in the supply air line is removed, to carry out the replacing of technology steel cylinder; Simultaneously by all kinds of safety that are provided with in the connecting pipeline, the sensor and the controller of process aspect, working state and working environment in the monitoring special gas storage tank, make air feeder of the present invention be in safety, steady state and satisfy technological requirement, realize purpose of the present invention.
Description of drawings
Further specify the present invention below in conjunction with the drawings and specific embodiments.
Fig. 1 is the cabinet body structure schematic representation of special gas storage tank of the present invention.
Fig. 2 is the structure principle chart of special gas storage tank of the present invention.
Embodiment
As shown in Figure 1, the cabinet of special gas storage tank, by gas holder air draft suction opeing 1 ', explosion-proof type operational observations window 2 ', valve group face 3 ', steel cylinder bracket 4 ', steel bottle rack 5 ', the intake opening 6 ' of band filter screen and the controller 7 ' that is arranged on cabinet top are formed; Cabinet is a cold bundle steel plate (Q236), and steel plate is thick to be 3mm, and cabinet is hermetically sealed, and seam crossing is welding, and it is explosion-proof corrosion-resistant, fire-resistant that cabinet is designed to; Make that technology steel cylinder 1, valve group face 3 ' with malicious harmful gas are in a negative pressure, in the explosion-proof microhabitat of isolating with the work overall situation, guarantee the safety of operator and cabinet external environmemt to greatest extent.
As shown in Figure 2, the valve group card 3 ' of the inside of special gas storage tank, it comprises that supply air line 2, scavenging pipeline 3 and vacuum-pumping pipeline 4 constitute.
Described supply air line 2 by the stop valve 12 of technology steel cylinder 1 outlet by pipeline connect pneumatic diaphragm valve ESOV (L) successively, high pressure inserts air supply opening 21 by membrane valve HPI (L), prefilter CF (L), reduction valve REG (L), low pressure by membrane valve LPI (L), accurate filter LF; Be provided with pressure gauge LPG (L) in the outlet port of reduction valve REG (L), output terminal at stop valve 12 is provided with pressure gauge HPG (L), be used to show the force value of technology steel cylinder 1 output terminal, reduction valve REG (L) output terminal is provided with pressure gauge LPG (L), is used to show the supply gas pressure value.
Described scavenging pipeline 3 connects high pressure by membrane valve HPI (P), prefilter CF (P), reduction valve REG (P), one-way valve CV (P), high-pressure stop valve PHI (P) by the stop valve 52 of purging steel cylinder 5 outlets successively by pipeline, ends between the membrane valve HPI (L) by one-way valve CVP (L), the pneumatic diaphragm valve ESOV (L) that purges the described supply air line 2 of separating valve PGI (L) access and high pressure; Be provided with pressure gauge LPG (P) at reduction valve REG (P) output terminal, output terminal at stop valve 52 is provided with pressure gauge HPG (P), be used to show the force value that purges steel cylinder 5 output terminals, reduction valve REG (P) output terminal is provided with pressure gauge LPG (P), is used to show the purging force value of scavenging pipeline.
Described scavenging pipeline 3, the alternation switch by purging gas cylinder stop valve 52 and high pressure air exhaust valve HPV (P) is undertaken from purging by the pipeline between the membrane valve HPI (P) stop valve 52 and high pressure in the scavenging pipeline 3 more than 5 times.
Described vacuum-pumping pipeline 4 connects needle valve GNBV, safety check CV (L), vacuum generator VG to relief opening 42 by nitrogen inlet opening 41 successively by pipeline, and the vacuum end of vacuum generator VG is ended between the membrane valve HPI (L) by pneumatic diaphragm valve ESOV (L) and the high pressure that high pressure air exhaust valve HPV (L) is connected in the described supply air line 2 by pipeline; End between the membrane valve LPI (L) by reduction valve REG (L) and low pressure that one-way valve LCV (L), low pressure exhaust valve LPV (L) are connected in the described supply air line 2; Vacuum end input end at vacuum generator VG is provided with pressure gauge VPG, the negative pressure value when being used to indicate vacuum generator VG work.
Under the normal state, gas by in the technology steel cylinder 1 by supply air line 2, by air supply opening 21 to the manufacturing equipment air feed; When needs are changed technology steel cylinder 1, because these gases are poisonous and hazardous, must be earlier by vacuum-pumping pipeline 4, by high pressure air exhaust valve HPV (L), or low pressure exhaust valve LPV (L) and one-way valve LCV (L) vacuumize supply air line 2, purge by 3 pairs of supply air lines 2 of scavenging pipeline again; More than 60 times, the toxic and harmful in the pipeline that is connected with technology steel cylinder 1 in the supply air line 2 is removed fully so repeatedly, could be changed technology steel cylinder 1 then.
Special gas storage tank of the present invention comprises that also one is used for the gas sensing device that detected gas is leaked, to possess the emergency cut-off function, promptly when betiding similar gas leakage, can automatically shut down the pneumatic valve of described supply air line outlet, guarantee the safety of gas delivery by controller.
When the needed gas of manufacturing equipment was without interruption, one group of supply air line of described supply air line 2 other corresponding again increases was connected to air supply opening 21 after the output terminal of two groups of supply air lines confluxes simultaneously, and used independently that membrane valve carries out switching controls; When the gas in the technology steel cylinder 1 uses up, can replenish and replace like this, keep this air supply system to be in lasting, normal, stable working state by the technology steel cylinder of another supply air line.
Simultaneously, in special gas storage tank of the present invention, but also the working pressure sensor replaces pressure gauge, replaces common manually operated valve by pneumatic valve, realizes automatic purging, automaticallyes switch and control by controller 7; Also can install the sensor of other safety equipment simultaneously additional, as UV sensor, pyrostat, smoke sensor etc., be connected with described controller 7, control each pneumatic valve, make special gas storage tank when storage, air feed, be in safety, reliable, stable status; Install the first-class fire gear of spray additional, when abnormal conditions such as breaking out of fire, automatic spray, the security and stability of raising gas holder.
More than show and described basic principle and the major character and the advantage thereof of the present invention-special gas storage tank.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in the foregoing description and the specification just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (4)
1, a kind of special gas storage tank, it comprises cabinet and valve group face, described valve group face is made of at least one road supply air line, scavenging pipeline and vacuum-pumping pipeline; It is characterized in that, described supply air line by the stop valve I of technology steel cylinder outlet by pipeline connect pneumatic diaphragm valve I successively, high pressure inserts supply air line by membrane valve I, prefilter I, reduction valve I, low pressure by membrane valve I, accurate filter I; Described scavenging pipeline connects high pressure by membrane valve II, prefilter II, reduction valve II, one-way valve I, high-pressure stop valve I by the stop valve II that purges the outlet of nitrogen steel cylinder successively by pipeline, inserts described supply air line by one-way valve II, purging separating valve I; Described vacuum-pumping tube route nitrogen inlet opening connects needle valve I, safety check I, vacuum generator to relief opening successively by pipeline, and the vacuum end of vacuum generator is connected in the described supply air line by the high and low pressure outlet valve by pipeline.
2, air feeder according to claim 1 is characterized in that: the import and export at the reduction valve I of described supply air line are respectively equipped with pressure checking device, are used to show the force value and the supply gas pressure value of technology steel cylinder; Import and export at the reduction valve II of described scavenging pipeline are respectively equipped with pressure checking device, are used for showing purging steel cylinder end pressure value and purging force value; Vacuum end ingress at the vacuum generator of described vacuum-pumping pipeline is provided with pressure checking device, the negative pressure value when being used to indicate vacuum generator work.
3, air feeder according to claim 1 is characterized in that: described air feeder also comprises one by sensor acquisition air feeder state signal, is used for the controller of control valve action, and sensor is connected with the signal input part of described controller.
4, air feeder according to claim 3 is characterized in that: described air feeder comprises that also one is used for the gas sensing device that detected gas is leaked, and it is connected with the signal input part of described controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710036608 CN101093056A (en) | 2007-01-18 | 2007-01-18 | Special gas storage tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710036608 CN101093056A (en) | 2007-01-18 | 2007-01-18 | Special gas storage tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101093056A true CN101093056A (en) | 2007-12-26 |
Family
ID=38991443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710036608 Pending CN101093056A (en) | 2007-01-18 | 2007-01-18 | Special gas storage tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101093056A (en) |
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680649A (en) * | 2012-05-04 | 2012-09-19 | 上海华力微电子有限公司 | Method for testing high-purity pipeline purging effect |
| CN102791359A (en) * | 2010-01-14 | 2012-11-21 | 高级技术材料公司 | Ventilation gas management systems and methods |
| CN102853263A (en) * | 2012-08-31 | 2013-01-02 | 成都爱德工程有限公司 | Special gas cabinet control system and method for detecting steel cylinder exchange in special gas cabinet |
| CN102853257A (en) * | 2012-08-31 | 2013-01-02 | 成都爱德工程有限公司 | High-purity and safe special gas cabinet system |
| CN102853252A (en) * | 2012-08-31 | 2013-01-02 | 成都爱德工程有限公司 | Method of replacing steel cylinder for high-purity safe special gas |
| CN103574281A (en) * | 2012-07-26 | 2014-02-12 | 北大方正集团有限公司 | Special gas bottle holder, special gas bottle holder monitoring method and special gas bottle holder monitoring apparatus |
| CN104373811A (en) * | 2013-08-14 | 2015-02-25 | 上海聚鼎半导体设备有限公司 | Homogeny gas conveying system |
| US9062829B2 (en) | 2002-12-09 | 2015-06-23 | Entegris, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
| CN105318193A (en) * | 2014-07-31 | 2016-02-10 | 宝山钢铁股份有限公司 | Low-pressure nitrogen gas header pipe system and control method |
| CN106764436A (en) * | 2016-12-15 | 2017-05-31 | 武汉新芯集成电路制造有限公司 | A kind of special gas distributor box and its part exchanging method |
| CN107815330A (en) * | 2017-08-11 | 2018-03-20 | 新疆国利衡清洁能源科技有限公司 | Skid-mounted gas fuel ignition device and ignition method thereof |
| CN108050390A (en) * | 2018-01-25 | 2018-05-18 | 上海正帆科技股份有限公司 | Gas divides clack box and gas transportation facilities |
| CN110187067A (en) * | 2019-06-21 | 2019-08-30 | 至砾机电设备（上海）有限公司 | A kind of water oxygen particle automatic analysis system and its analysis method |
| CN110187066A (en) * | 2019-06-21 | 2019-08-30 | 至砾机电设备（上海）有限公司 | A kind of water oxygen grading analysis detection system and its detection method |
| CN110207010A (en) * | 2019-07-08 | 2019-09-06 | 深圳融科半导体装备有限公司 | A kind of movable type air tower |
| CN111649235A (en) * | 2020-07-13 | 2020-09-11 | 阁壹系统集成设备(滁州)有限公司 | Special gas cabinet system and vacuumizing method thereof |
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN114636101A (en) * | 2022-03-16 | 2022-06-17 | 江苏正帆半导体设备有限公司 | Gas delivery device |
| CN114804029A (en) * | 2022-05-13 | 2022-07-29 | 中环领先半导体材料有限公司 | Secondary purifier for HCL |
| CN114871223A (en) * | 2022-04-02 | 2022-08-09 | 普乐新能源科技(徐州)有限公司 | Reliable cavity purging method |
| CN116464912A (en) * | 2023-05-19 | 2023-07-21 | 大唐南京环保科技有限责任公司 | A laboratory special gas supply system |
| CN117515419A (en) * | 2023-11-30 | 2024-02-06 | 上海韩科建设工程有限公司 | A BSGS gas cabinet |
-
2007
- 2007-01-18 CN CN 200710036608 patent/CN101093056A/en active Pending
Cited By (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9062829B2 (en) | 2002-12-09 | 2015-06-23 | Entegris, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
| US9636626B2 (en) | 2002-12-09 | 2017-05-02 | Entegris, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
| CN102791359A (en) * | 2010-01-14 | 2012-11-21 | 高级技术材料公司 | Ventilation gas management systems and methods |
| US9383064B2 (en) | 2010-01-14 | 2016-07-05 | Entegris, Inc. | Ventilation gas management systems and processes |
| CN102791359B (en) * | 2010-01-14 | 2015-11-25 | 诚实公司 | Ventilation gas management systems and methods |
| CN102680649A (en) * | 2012-05-04 | 2012-09-19 | 上海华力微电子有限公司 | Method for testing high-purity pipeline purging effect |
| CN102680649B (en) * | 2012-05-04 | 2015-01-07 | 上海华力微电子有限公司 | Method for testing high-purity pipeline purging effect |
| CN103574281A (en) * | 2012-07-26 | 2014-02-12 | 北大方正集团有限公司 | Special gas bottle holder, special gas bottle holder monitoring method and special gas bottle holder monitoring apparatus |
| CN103574281B (en) * | 2012-07-26 | 2016-01-06 | 北大方正集团有限公司 | A kind of special gas frame, the method monitoring special gas frame and device |
| CN102853252A (en) * | 2012-08-31 | 2013-01-02 | 成都爱德工程有限公司 | Method of replacing steel cylinder for high-purity safe special gas |
| CN102853252B (en) * | 2012-08-31 | 2015-08-12 | 成都爱德工程有限公司 | For the steel cylinder replacing options of high-purity Special safety gas |
| CN102853263B (en) * | 2012-08-31 | 2014-04-02 | 成都爱德工程有限公司 | Special gas cabinet control system and method for detecting steel cylinder exchange in special gas cabinet |
| CN102853257A (en) * | 2012-08-31 | 2013-01-02 | 成都爱德工程有限公司 | High-purity and safe special gas cabinet system |
| CN102853263A (en) * | 2012-08-31 | 2013-01-02 | 成都爱德工程有限公司 | Special gas cabinet control system and method for detecting steel cylinder exchange in special gas cabinet |
| CN104373811A (en) * | 2013-08-14 | 2015-02-25 | 上海聚鼎半导体设备有限公司 | Homogeny gas conveying system |
| CN105318193A (en) * | 2014-07-31 | 2016-02-10 | 宝山钢铁股份有限公司 | Low-pressure nitrogen gas header pipe system and control method |
| CN105318193B (en) * | 2014-07-31 | 2018-01-30 | 宝山钢铁股份有限公司 | A kind of low-pressure nitrogen manifold system and control method |
| CN106764436B (en) * | 2016-12-15 | 2018-09-07 | 武汉新芯集成电路制造有限公司 | A kind of spy's gas distributor box and its part exchanging method |
| CN106764436A (en) * | 2016-12-15 | 2017-05-31 | 武汉新芯集成电路制造有限公司 | A kind of special gas distributor box and its part exchanging method |
| CN107815330A (en) * | 2017-08-11 | 2018-03-20 | 新疆国利衡清洁能源科技有限公司 | Skid-mounted gas fuel ignition device and ignition method thereof |
| CN108050390B (en) * | 2018-01-25 | 2024-03-26 | 上海正帆科技股份有限公司 | Gas valve separating box and gas conveying equipment |
| CN108050390A (en) * | 2018-01-25 | 2018-05-18 | 上海正帆科技股份有限公司 | Gas divides clack box and gas transportation facilities |
| CN110187067A (en) * | 2019-06-21 | 2019-08-30 | 至砾机电设备（上海）有限公司 | A kind of water oxygen particle automatic analysis system and its analysis method |
| CN110187066A (en) * | 2019-06-21 | 2019-08-30 | 至砾机电设备（上海）有限公司 | A kind of water oxygen grading analysis detection system and its detection method |
| CN110187066B (en) * | 2019-06-21 | 2024-03-19 | 上海至纯系统集成有限公司 | A water oxygen particle analysis and detection system and its detection method |
| CN110187067B (en) * | 2019-06-21 | 2024-03-22 | 上海至纯系统集成有限公司 | Water-oxygen particle automatic analysis system and analysis method thereof |
| CN110207010A (en) * | 2019-07-08 | 2019-09-06 | 深圳融科半导体装备有限公司 | A kind of movable type air tower |
| CN111649235B (en) * | 2020-07-13 | 2022-04-12 | 阁壹系统集成设备(滁州)有限公司 | Special gas cabinet system and vacuumizing method thereof |
| CN111649235A (en) * | 2020-07-13 | 2020-09-11 | 阁壹系统集成设备(滁州)有限公司 | Special gas cabinet system and vacuumizing method thereof |
| CN113432038B (en) * | 2021-06-10 | 2023-01-17 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN114636101A (en) * | 2022-03-16 | 2022-06-17 | 江苏正帆半导体设备有限公司 | Gas delivery device |
| CN114636101B (en) * | 2022-03-16 | 2024-06-25 | 江苏正帆半导体设备有限公司 | Gas delivery device |
| CN114871223B (en) * | 2022-04-02 | 2023-08-01 | 普乐新能源科技(泰兴)有限公司 | A Reliable Method for Chamber Purging |
| CN114871223A (en) * | 2022-04-02 | 2022-08-09 | 普乐新能源科技(徐州)有限公司 | Reliable cavity purging method |
| CN114804029A (en) * | 2022-05-13 | 2022-07-29 | 中环领先半导体材料有限公司 | Secondary purifier for HCL |
| CN116464912A (en) * | 2023-05-19 | 2023-07-21 | 大唐南京环保科技有限责任公司 | A laboratory special gas supply system |
| CN117515419A (en) * | 2023-11-30 | 2024-02-06 | 上海韩科建设工程有限公司 | A BSGS gas cabinet |
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