CN104455722A - Installing construction method for semiconductor manufacture procedure gas conveying pipelines - Google Patents
Installing construction method for semiconductor manufacture procedure gas conveying pipelines Download PDFInfo
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- CN104455722A CN104455722A CN201410667366.4A CN201410667366A CN104455722A CN 104455722 A CN104455722 A CN 104455722A CN 201410667366 A CN201410667366 A CN 201410667366A CN 104455722 A CN104455722 A CN 104455722A
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 40
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 34
- 238000009434 installation Methods 0.000 claims description 29
- 239000010935 stainless steel Substances 0.000 claims description 21
- 229910001220 stainless steel Inorganic materials 0.000 claims description 21
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- 238000007789 sealing Methods 0.000 claims description 18
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- APTZNLHMIGJTEW-UHFFFAOYSA-N pyraflufen-ethyl Chemical compound C1=C(Cl)C(OCC(=O)OCC)=CC(C=2C(=C(OC(F)F)N(C)N=2)Cl)=C1F APTZNLHMIGJTEW-UHFFFAOYSA-N 0.000 claims description 3
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L1/00—Laying or reclaiming pipes; Repairing or joining pipes on or under water
- F16L1/024—Laying or reclaiming pipes on land, e.g. above the ground
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pipeline Systems (AREA)
Abstract
The invention discloses an installing construction method for semiconductor manufacture procedure gas conveying pipelines. The installing construction method includes the following steps that (1), a clean region is preset on a construction site, and a clean space is constructed; (2), all apparatuses used for construction are retested and sealed to prevent contamination; (3), the pipeline is cleanly machined in a sealed mode unit by unit in the clean space, and pipe orifices are sealed immediately after machining is completed; (4), the conveying pipeline is installed, protective gas is continuously injected in the pipeline in the installing process and at the operation intervals; (5), the tail gas pipeline is installed according to the structure of a plasma and washing processing system; (6), a gas device is installed, and the pipelines are connected with the gas device in a radial face seal connecting mode; (7), an electrostatic grounding system and an outdoor anti-thunder electric induction grounding system are installed; (8), pressure detection, helium mass spectrum leakage detection, moisture detection, cleanliness detection and oxygen detection are carried out until all results are qualified; (9), a tail gas treatment test is carried out until a test result is qualified.
Description
Technical field
The present invention relates to a kind of Pipe installing technique, specifically, relate to a kind of manufacture of semiconductor gas transmission pipeline construction method of installation.
Background technique
High-purity special gas is as requisite special gas of manufacture of semiconductor such as e-factory doping, extension, ion implantation, etchings, as silane SiH4, AsH3, arsine AsH3 etc., having the high-risk characteristics such as pyrophorisity, combustibility, toxicity, is the important source material of precise electronic components and parts, the manufacture of new energy photovoltaic.If gas delivery system occur in running leak or exhaust collection process not in place, very serious security incident will be caused.The pyrophorisity of SiH4, as long as one leaks and will play vigorous reaction with the oxygen in air, takes fire; The hypertoxicity of AsH3, any trickle leakage part may cause the harm of human life, the gas pipage control of multiple types is also the key that system is normally run simultaneously, so how to ensure high-purity special gas transporting system installation quality, guarantee that gas pipage control meets technological requirement and just seems abnormal important.
Summary of the invention
The object of the present invention is to provide a kind of manufacture of semiconductor gas transmission pipeline construction method of installation, technical barrier in the processes such as the pipeline existed in solution prior art and equipment connection, tube metal burn into vent gas treatment, Pipe installing, ensures the safety and stability of gas delivery system.
To achieve these goals, the technical solution used in the present invention is as follows:
Manufacture of semiconductor gas transmission pipeline construction method of installation, comprises the following steps:
(1) preset clean area at the construction field (site), and build clean room;
(2) construction equipment is reviewed, and contamination seal is carried out to all equipment seal up for safekeeping;
(3) in clean room, the airtight processing of subdivision clean type is carried out to pipeline, and machine sealing orifice immediately;
(4) conveyance conduit is installed, and continues to pass into shielding gas in installation process He during operation gap;
(5) the structure installment exhaust pipe of water washing treating system is added according to plasma;
(6) installing gas device, and adopt the sagittal plane mode of being tightly connected to carry out the connection of pipeline, gas device;
(7) electrostatic grounding and the installation of outdoor resisting the inductive thunderbolt grounded system is carried out respectively;
(8) carry out Pressure testing, helium mass spectrum leak detection, moisture detection respectively, cleanliness detects and oxygen part is detected, until all qualified;
(9) vent gas treatment test is carried out, until qualified.
Further, in described step (1), go along with sb. to guard him with the thick plastic film of antistatic and form clean area; Adopt FFU or high efficiency particulate air filter and fan with low voltage airduct to be communicated with, modulating valve is set, completes the air-conditioning system of air-supply, downside surrounding air draft, and keep indoor, clean area to be in barotropic state all the time.
Further, in described step (2), first all construction equipment of bilayer film bag package encapsulation are adopted, and use plastic sealing cover to close tube end face, then adopt the intensity of potable metal optical spectrum analyzers inspection construction equipment, seal, impurity and chemical intergranular corrosion in clean area, it is stand-by that eligible is stored in clean area.
Further, in described step (3), first mouth of pipe processing is carried out: bilayer film bag and the plastic sealing cover of taking tubing apart, continue to pass into nitrogen along MEDIA FLOW in tubing immediately, otch is carried out to tubing simultaneously, re-use beveler and remove pipe orifice burr, then clean the mouth of pipe with anhydrous alcohol immediately, rush blowpipe core until without visible with high pure nitrogen again, finally use sealed cap sealed tube two ends;
Then bend pipe processing is carried out: adopt bender to bend pipe with small pipe diameter bend pipe; When making double-deck bend pipe, between inner and outer pipes, first overlap the stainless steel fillet of screw support, re-use rubber material and make bending device processing wheel, finally use bending device to carry out bend pipe.
Again further, in described step (4), before carrying out pipeline welding, the mode reduced gradually according to Throughput passes into high-purity argon gas and purges at least 2 minutes in pipeline, then welded pipe line, continue in welding process to pass into high-purity argon gas, the mode increased gradually according to Throughput again after having welded passes into high-purity argon gas and purges at least 60 minutes in pipeline, then uses sealed cap closed conduit port.
Preferably, in described step (4), for prefabricated double-skin duct, first increase short sleeve in each welded joint position, then welding assembly is carried out, on double-layer pipeline support cover, customize the stainless steel fillet of screw to support simultaneously, and in Pipe installing welding process, continue to pass into high pure nitrogen and purge.
Again further, in described step (5), pipeline is aided with elastic rubber sealing ring with KF quick-release clamp flange and connects, and access exhaust gas processing device by pipeline.This exhaust gas processing device specifically comprises acid mist scrubber tower and vacuum pump.
Again further, in described step (6), use stainless steel supporting frame fixed valve and instrument, adopt plastic-blasting section steel manufacture gas cylinder valve and case dish in the bearing of one, resin saddle type or door type isolation pad are set between bearing and pipeline, or stainless steel gasket, uses the perpendicularity deviation of infrared rays plumb aligner regulating valve case dish in installation process simultaneously.
Preferably, in described step (6), be first aided with high pure nitrogen with filter and purge rapid pipe joint, then on O RunddichtringO, add oiling agent, adopt sagittal plane sealing means to be aided with the connection that flexible nickel alloy pad carries out instrument, pipe fitting.
Further, before carrying out described step (7), mounted pipeline is indicated according to different gas, harmfulness and the flow direction.
The present invention mainly adopts and arranges clean construction area, vacuum seal is adopted to connect to system equipment and connection valve member, pass to high pure nitrogen to pipeline to purge, guarantee that system reaches clean requirement, adopt plasma washing process tail gas, connect in conjunction with KF vacuum caliper type pipeline, to meet the handling characteristics of vent gas treatment pipeline quick-detachment; Adopt hanger system, instrument valve supporting element metallic shim is set, ensure the stability of conveyance conduit; Coordinate default computer controlled system to complete the pipage control of special gas again, effectively ensure that the safety and stability of system cloud gray model.
Compared with prior art, the present invention has following beneficial effect:
(1) the present invention is by uninterruptedly passing into high pure nitrogen in pipeline welding process, effectively prevent pipeline oxidization, ensure that the welding quality of pipeline; And sagittal plane seals, flexible metal pad coordinates with rubber seal, then not only substantially increase the sealing between pipe fitting, prevent the distortion of pipeline to reveal.
(2) the present invention is provided with corresponding support to all pipe fittings, instrument, equipment; and protected by the resin shape of a saddle, door type isolation pad and stainless steel gasket; not only ensure that the convenience of installation process, improve installation efficiency, also improve the stability in system operation.
(3) the present invention adopts KF vacuum caliper type flange to carry out the connection of vent gas treatment pipeline, effectively solves the fast assembling-disassembling usage requirement repeatedly of special gas tail gas recycle process pipeline, further ensures the safety and stability that reclaiming system is run.
(4) in the present invention, whole work progress all completes in clean area; and be configured with perfect air cleaning and conditioning system; also pretreatment and ending purging is carried out by shielding gas before and after the welding of pipe fitting; make whole work progress completely pollution-free; effectively prevent pipe corrosion; ensure that the service life of system, reduce follow-up maintenance workload and maintenance cost.
(5) the present invention efficiently solves the technical barrier in special gas transporting system in the technique such as pipeline and equipment connection, tube metal burn into vent gas treatment, Pipe installing, and compared with prior art, have obvious technical advantage, technique effect is very remarkable.
Accompanying drawing explanation
Fig. 1 is construction technology process schematic diagram of the present invention.
Fig. 2 is the structural representation of saddle type isolation pad in the present invention.
Fig. 3 is the structural representation of door type isolation pad in the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described, and embodiments of the present invention include but not limited to the following example.
Embodiment
As shown in Figure 1, the present invention mainly comprises following step: preparation of construction, clean area, pipeline processing, Pipe installing are set, gas device is installed, pipeline is connected with gas device, grounded system is installed, systematic function detection and computer controlled system are debugged.Below above-mentioned steps is described in detail one by one.
(1) preparation of construction
According to the different qualities of manufacture of semiconductor gas, corresponding gas holder, valve box dish, pipe fitting, valve must carry out purchasing and adopting packing in specially-designated factories.Adopt potable metal optical spectrum analyzers that pipeline, pipe fitting, valve are carried out to sampling and review, the relevant parameters such as detected intensity, seal, impurity and chemical intergranular corrosion, material is through dropping into construction after the assay was approved.All material should have bilayer film to pack, and ensures that material is from reception, is not polluted.The inspection of exterior package fine status, carries out at non-clean area, but should move in clean room or prefabricated processing clean room immediately after folding is except exterior package; The Kaifeng of interior package must be carried out, to guarantee that material is not contaminated in cleanroom or prefabricated processing clean room.After having checked, should again use bilayer film bag package encapsulation immediately to temporary no material, and be placed in clean area and keep properly.
(2) clean area is set
Go along with sb. to guard him into clean area with the thick plastic film of antistatic at the scene, the thick plastic film of antistatic is advisable so that 0.3mm is thick, and adopts FFU or high efficiency particulate air filter and fan with low voltage airduct to be communicated with, modulating valve is set, complete the air-conditioning system of air-supply, downside surrounding air draft, keep clean room indoor positive pressure.Indoor are equipped with sufficient illumination, and for guaranteeing pipe fitting cleanliness, personnel enter cleanroom must dress clean garment, clean cap, clean footwear, cleaning gloves.Establishing dust collector dedicated in cleanroom, as produced dust in operation, should thoroughly clean, the complete rear comprehensive cleaning of operation.
(3) pipeline processing
Pipeline processing personnel must wear clean PVC glove, must not touch internal layer 316L EP inner tube wall, prevent hydrocarbon pollution.Prepare the end face seal lid of the different size of q.s, after pipeline processing completes, use pipe cap shutoff in time.Employing compensator level, plumb aligner are accurately measured yard piping, and subdivision processing is prefabricated.Pipeline processing comprises mouth of pipe processing and bend pipe processing.
(1) mouth of pipe processing
The processing of the mouth of pipe is the key of Pipe installing, pipe cutting, prefabricatedly should to carry out in clean area, guarantees that pipe cutting front surface is without harmful vestige, breakage simultaneously.Pipeline should carry out in pipe the preparatory work of rushing nitrogen before Kaifeng.Pipeline, after taking down two layers of plastic thin films exterior package, takes off the plastic sealing cover at two ends, and fills nitrogen immediately, prevent atmospheric pollution.Pipe cutter is used for pipe with small pipe diameter (φ 6 ~ 12.7mm) Stainless Steel Tube; Large Diameter Pipeline (being greater than φ 12.7m) Stainless Steel Tube first adopts special mounting fixture to fix, and re-uses stainless steel pipe cutting machine and cuts off.When pipe fitting cutting and end face processing thereof, put high pure nitrogen with the cleanliness in holding tube along MEDIA FLOW to punching.
The processing of pipe fitting section uses special end face flat head machine, the end surfaces after processing should with its axes normal, working surface is smooth, impulse-free robustness, if pipe internal orifice is jagged, then uses beveler removing, and keeps clean.After machining, rapidly with anhydrous alcohol surface cleaning position, time seriously polluted, acetone can be used.At the end of pipe fitting, 5 μ filters are installed again, rush in pipe fitting with high pure nitrogen and blow at least 1 minute, then filter is disassembled, whether the filter core windward side observing filter exists visible, if there is visible, be then mounted to again on pipe fitting, again blow with high pure nitrogen punching, and extend punching and blow the time, so repeatedly until without visible on the filter core windward side of filter.Finally, the clean sealed cap in the two ends of pipe fitting is sealed protection.
(2) bend pipe processing
Pipe with small pipe diameter pipe arrangement (φ 6 ~ 12.7mm) uses special bender to bend, but must adopt finished product elbow to the place of scene rising, decline pipe bending difficulty.Bore is greater than the pipe arrangement of φ 12.7mm, directly adopts finished product elbow.
When making the elbow of special double-skin duct, 316LEP stainless steel spring circle on first overlapping between inner and outer pipes, as inner and outer pipes power transmission thing, then adopts special bending device to carry out elbow-making.
Described special bending device adopts the technology shown in patent No. ZL201020299284.6, and bending device processing wheel adopts rubber material to make, and to avoid damaging tube wall in course of working, guarantees the out of roughness of inner and outer pipes in bend pipe process simultaneously.
(4) Pipe installing
Pipe installing relates to the supply of welding protection gas, pipeline welding preparation and the several link of Pipe installing, and Pipe installing is specifically divided into, and double-skin duct is installed, yard piping is installed, support of pipelines is installed and exhaust pipe is installed.
Wherein, high-purity argon gas is selected in the supply of welding protection gas, the purity that its purity index must not require lower than pipe-line system, and the supply of argon gas adopts low-temperature liquid gas container or the bottled argon gas of high pressure.
Supply header installs hygroscopic water meter, to confirm, to record the supply purity of gas.After shielding gas supply starts, keep ventilating continuously, to guarantee the purity in pipe arrangement.Before welding, first adopt the mode reduced gradually to pass into high-purity argon gas at least 2 minutes in pipe fitting, after welding completes, continue to pass into high-purity argon gas at least 60 minutes according to the mode increased gradually, and in welding process, also need to continue to pass into high-purity argon gas.Further, if in weld job process interruption operation, during such as night's rest, also need to continue to pass into high-purity argon gas, intake can remain 1/4 of high purity argon tolerance in welding process.
Specifically, first should make welded sample before welding, when start in the morning, make one piece of sample, one piece of sample need be made again when continuing welding after nooning, and then following situations need make sample for the moment again:
A) heat (batch) number of tubing is changed;
B) size of tubing is changed;
When c) welding board power-off;
D) electrode holder is changed or is welded the change of welding machine data in way;
E) replacing of tungsten electrode.
Welding record chart filled in by the sample made, and need write date, system, welding person ID No., CI, CM or CO, pipe grade.
Before beginning welding system, first do spot welding steady job by another a group of people, also need the punching of access high-purity argon gas to blow during spot welding, be oxidized to prevent pipe fitting.
Specifically, the pipe fitting that spot welding is fixing, need rush fully with high-purity argon gas when welding and blow interior pipe, and flow control, at 2L/min ~ 15L/min, first mixes up the gas flow with electrode holder in pipe before welding.Connect the gas line employing EP level pipe fitting that interior pipe is blown in punching.
Soldering group is in process, external clamp is assisted to be fixed pipeline by stainless steel, card pipe box is tentatively arranged on a work pipe fitting, levelling, then puts into the flared section of card pipe box, adjusts the gap to the pipe mouth of pipe by the mouth of pipe of another work pipe fitting, fastening coarse adjustment nut, check relative elevation, the coordinate of two work pipe fittings, then intense adjustment fine-tuning nut, complete positioning welding.
After having welded, every a bite welding bead indicates time, date, the numbering of welding person and the numbering of welding bead.The pipe-line system connected at the scene must keep constantly punching to blow state.If weld unsuccessfully in operation, when do Pipe Cutting action, all must be connected to gas punching and blow and just can implement Pipe Cutting action in two ends.The pipe fitting scaled off, must blow with gas punching when must do end face processing, avoid iron filings to fall in pipe or valve member, in order to avoid the damage that surface bright in scratch pipe and valve member make up.Welding be suitable for rush blowpipe wire terminal must be suitable for cutting ferrule connection joint, needle-valve selected by pressure regulator valve.
After pipeline section has welded, seal pipe cap immediately, reduce dust pollution in pipe.
For the installation of double-skin duct, first increase short sleeve in each welded joint position, then on double-layer pipeline support cover, stainless steel special screw thread coil support is installed, then carries out welding assembly, so can guarantee the seal of position while welding.In double-skin duct erecting and welding work progress, pass to high pure nitrogen continuously and purge, guarantee the cleanliness of pipe interior.
For the installation of yard piping, measure according to accurate before prefabricated, and subdivision number-of-fragments makes.Adopt carbon steel plastic-blasting support of pipelines in conjunction with stainless steel gasket isolation in installation, clip for pipeline adopts stainless steel pipe clip.Arrange prefabricated stainless steel sleeve pipe at pipeline through-wall position and fill fire proofing material, the thick corrosion resistant plate shutoff of diameter 100mm × 1.0mm is adopted in wall both sides.
For the installation of support of pipelines, saddle type is set between support and pipeline or door type resin sheet is isolated, prevents from causing corrosive pipeline because of carburizing and potential difference.During through walls the or floor of Stainless Steel Tube, all should add tubing, the gap between sleeve pipe and pipeline is not less than 10mm, and sleeve pipe position bimetallic tube should avoid weld seam, and inside space, dose asbestos rope insulating material.
For single pipeline, the present invention adopts the adjustable L-type silk clamping of patent No. ZL201220049463.3 to connect, and can form the suspension bracket of complete set easily and fast in construction and installation process kind with internal thread EXPANSION ANCHOR BOLTS, harness cord screw rod and pipe clamp.
For the installation of exhaust pipe, in order to meet the user demand of the frequent disassembly, cleaning of vent gas treatment pipeline, using plasma of the present invention adds water washing treating system as exhaust pipe system, accesses acid mist scrubber tower and vacuum pump in pipe fitting, and adopts each pipe fitting of KF quick-release clamp Flange joint.KF quick-release clamp flange adopts elastic rubber sealing ring sealing, and when bolt screws time, the clamp of outside can tighten up inwards, make the flange screw on both sides, and elastic rubber sealing ring is understood compressive strain and then played the effect of sealing.So, Pipe installing effect just Absorbable organic halogens, safe, durable.
(5) gas device installation and the connection with pipeline
In this technique, gas device mainly comprises gas cabinet, valve box dish, exhaust gas processing device etc.Wherein, the installation foundation of exhaust gas processing device must be firm smooth, and the levelness of equipment must not be greater than 3 ‰.The top of gas cabinet arranges suction opeing, arranges adjustable air filter screen intake grill below cabinet door, and the pipeline of being drawn by gas cylinder and valve member interface special pipe cap and plug carry out shutoff.The stainless steel supporting frame that is fitted through of valve, instrument is fixed, and shows at the enterprising rower of panel.The bearing of valve box dish adopts plastic-blasting shaped steel to make, and adopts infrared rays plumb aligner by perpendicularity deviation within 1.5 ‰, in fabrication and installation process to card Deviation Control in column within 5mm.
After gas device installs, need to be connected with pipeline.For the pipeline of inflammable, the hypertoxic special gas of conveying, itself and valve, instrument and equipment connection adopt sagittal plane to be tightly connected, and metallic shim adopts flexible nickel alloy pad.Before use rapid pipe joint; first pass into high pure nitrogen filter to carry out blowing breaking through filter; and the body disconnected and pipe fitting should install dustproof protecting cover before use; body and tubular joint is kept point-blank in the process connected or disconnect; leak to prevent the firmly excessive distortion caused; on O RunddichtringO, add special oiling agent during connection, guarantee the seal of joint.
(6) channel indicating
Mounted pipeline should identify gas title, main hazard characteristic and the flow direction with different colours, font etc.,
The description identified, order and spacing can adjust according to actual conditions, describe and are preferably content chemical molecular formula, Chinese name, main hazard characteristic, flow direction.
(7) grounded system is installed
In the present invention, transporting system ground connection comprises electrostatic grounding and outdoor resisting the inductive thunderbolt ground connection.For interior conduit and device, adopt stainless steel harness cord spiro rod support to be fastenedly connected the ground terminal of equipment and pipeline, and be connected to ground connection band iron, adopt the cross-over connection of stainless steel double card ring in piping flange position.For yard piping, every 25m ground connection once, makes earth resistance be less than 20 Ω.
(8) systematic function detects
Systematic function detects and is mainly used in judging pipeline welding and instrument, whether the installation of equipment puts in place, and whether Safety performance is up to standard.System performance testing mainly comprises the following aspects:
(1) pressure test
Tested media is except dangerous, combustible gas pipeline (as oxygen, hydrogen) adopt high pure nitrogen, and other medium pipeline (as nitrogen, argon gas, dry air etc.) available system supply gas or high pure nitrogen are tested.Before test starts, drawing marks the pipeline that will carry out pressure test, and pressurize meter should be positioned at the suction port side of pressure regulator valve, and should be greater than the pressure of test through the pressure that pressure regulator valve is gone out.Test separately different gas, provision for sealing joint, common series connection pressure testing once.
The separating valve of pressurize meter and system is allowed to be in "Off" state, the pipeline branch pressure of pressurize meter is increased to 20 PSIG, open separating valve, each increase 10PSIG, slowly system pressure is increased to 50% of final test pressure, observe pressurize meter 10 to 15 minutes, check system has No leakage.As pressurize meter display system has leakage, then reduce system pressure and process leak source.Repeat aforesaid operations, confirm that system is without after any leakage, increase system pressure gradually to test value, disconnect source of the gas, minimum observation pressure gauge 30 minutes, check system has No leakage.
Test time continues 24 hours, and test pressure can not be less than 1.5 times of design pressure, and the authorized pressure after temperature is corrected is reduced to and is not more than 1% of initiation pressure.
Pressure change formula
P2=test terminates force value (PSIG)
P1=tests initiation pressure value (PSIG)
T2=tests end temp value (DEG C)
T1=test starts temperature value (DEG C)
P
ta=consider the change value of pressure that temperature affects
By the earth pressure release of system after having tested, carrying out carrying out continuing to purge to system by purified gases before helium leaks hunting.When reconnecting the system accessories dismantled, new pad must be used, and pressure gauge is at least observed 30 minutes in piping once road, tie point No leakage when the system of guarantee is full of pressure.The pipeline of pressure test is removed, carrys out sealing system with plug and use new pad.After by leak source isolation and reparation, need retest.
(2) blowing process helium mass spectrum leak detection
Utilize helium mass analyzer to sense the micro-helium bled in system to realize leaking hunting, and determine leak rate according to the amount of helium detected.
System is by after Pressure testing, and the gas in delivery system, opens leak detector valve, is vacuumized by the pipeline between leak detector and pipe-line system separating valve, and leak detector leak rate is lower than 1 × 10
-9after mbar.l/s, helium winding-up is carried out to welding beads all on connecting pipeline and mechanical connection place.For the outer tube of Double layer pipeline system, only could weld after interior pipe installs and be qualified after testing.
(3) moisture detection
Pipe-line system first just will can carry out dew point analysis test after seal detects and purges a period of time continuously.
During test, mounting filter, keep air compressor to run well, gas is in liberal supply, and during test, pipeline ensures that pressure is between 0.3MPa ~ 0.8MPa, and under the prerequisite that pipeline cleanliness is qualified, gas sampled flow should at 0.5-5L/min testing conduit gas dew point.
(4) pipeline cleanliness detects
Will in the clean gas access test pipeline filtered, adjust flux, guarantees that flow is no more than the rated flow of filter, guarantees to treat that valve in examining system and pressure regulator valve are in enable possition.Gas flow rate in check system, guarantees that flow system flow meets the minimum speed requirement of particle test.Choose worst gas point in each system to test, or connect gas pipeline sampling with airborne particle counter.
Airborne particle counter carries out on-line monitoring measurement, after observing reading and meet the demands and stablizing a period of time, namely stops test.Dust particle is measured and is stopped measuring after continuous ten cycles are qualified, and each test period is one minute.
(5) oxygen part is detected
Connect Tracer gas to micro-oxygen analyzer, adjustment gas pressure is between 10-60psig, be connected to the sampling cock at pipeline test section most upstream place, sampling cock from pipeline test section most downstream place connects sample pipeline to micro-oxygen analyzer and adjusts gas pressure between 10-60psig, treats that value stabilization read by instrument qualified.
Said system Performance Detection instrument used, equipment are prior art, no longer describe in detail herein.
(9) computer controlled system debugging
Data capture and supervisor control, being called for short SCADA, is routine techniques, by this system, can carry out monitoring and controlling, realize the functions such as data capture, equipment control, measurement to the equipment that scene is run.
The control room of SCADA system and the requirement of operating room are higher than the central control chamber of conventional instrument, and it has strict requirement to room temperature, humidity, turbidity test.In a pre-installation to the civil engineering of control room and operating room, installation, electrically, fitting-out work checks, guarantee to meet designing requirement.Enable air-conditioning, and be equipped with vacuum cleaner.The degree of purification of its ambient temperature, humidity, illumination and air must meet SCADA system operating conditions, installation of just can unpacking.
The erection sequence of machine, cabinet, dish is identical with conventional instrument case erection sequence, and configured slot steel base.SCADA system control room has antistatic, the moisture-proof floor of about 500mm usually, and therefore the height of base will ensure its stability and intensity.Channel steel base will polish, and eliminates burr and corner angle, should effectively eliminate rust and perform preservative treatment; And then with welding process (having embedded iron) or be fixed on floor by EXPANSION ANCHOR BOLTS.Dish, cabinet, operating table M10 are bolted in channel steel base.
(10) vent gas treatment test
After system performance testing is qualified, to the high-risk manufacture of semiconductor gas of vent gas treatment end transport portion, check its treatment effeciency, guarantee that vent gas treatment discharge meets the requirements.
So far, whole pipeline mounting construction is complete, can formally come into operation afterwards.
Above-described embodiment is only the preferred embodiments of the present invention, not limiting the scope of the invention, as long as adopt design principle of the present invention, and the change carried out non-creativeness work on this basis and make, all should belong within protection scope of the present invention.
Claims (10)
1. manufacture of semiconductor gas transmission pipeline construction method of installation, is characterized in that, comprises the following steps:
(1) preset clean area at the construction field (site), and build clean room;
(2) construction equipment is reviewed, and contamination seal is carried out to all equipment seal up for safekeeping;
(3) in clean room, the airtight processing of subdivision clean type is carried out to pipeline, and machine sealing orifice immediately;
(4) conveyance conduit is installed, and continues to pass into shielding gas in installation process He during operation gap;
(5) the structure installment exhaust pipe of water washing treating system is added according to plasma;
(6) installing gas device, and adopt the sagittal plane mode of being tightly connected to carry out the connection of pipeline, gas device;
(7) electrostatic grounding and the installation of outdoor resisting the inductive thunderbolt grounded system is carried out respectively;
(8) carry out Pressure testing, helium mass spectrum leak detection, moisture detection respectively, cleanliness detects and oxygen part is detected, until all qualified;
(9) vent gas treatment test is carried out, until qualified.
2. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, is characterized in that, in described step (1), goes along with sb. to guard him form clean area with the thick plastic film of antistatic; Adopt FFU or high efficiency particulate air filter and fan with low voltage airduct to be communicated with, modulating valve is set, completes the air-conditioning system of air-supply, downside surrounding air draft, and keep indoor, clean area to be in barotropic state all the time.
3. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, it is characterized in that, in described step (2), first all construction equipment of bilayer film bag package encapsulation are adopted, and use plastic sealing cover to close tube end face, then adopt the intensity of potable metal optical spectrum analyzers inspection construction equipment, seal, impurity and chemical intergranular corrosion in clean area, it is stand-by that eligible is stored in clean area.
4. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, is characterized in that, in described step (3),
First mouth of pipe processing is carried out:
Take bilayer film bag and the plastic sealing cover of tubing apart, continue to pass into high pure nitrogen along MEDIA FLOW in tubing immediately, otch is carried out to tubing simultaneously, re-use beveler and remove pipe orifice burr, then the mouth of pipe is cleaned with anhydrous alcohol immediately, rush blowpipe core until without visible with high pure nitrogen again, finally use sealed cap sealed tube two ends;
Then bend pipe processing is carried out:
Bender is adopted to bend pipe with small pipe diameter bend pipe; When making double-deck bend pipe, between inner and outer pipes, first overlap the stainless steel fillet of screw support, re-use rubber material and make bending device processing wheel, finally use bending device to carry out bend pipe.
5. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, it is characterized in that, in described step (4), before carrying out pipeline welding, the mode reduced gradually according to Throughput passes into high-purity argon gas and purges at least 2 minutes in pipeline, and then welded pipe line, continues in welding process to pass into high-purity argon gas, the mode increased gradually according to Throughput again after having welded passes into high-purity argon gas and purges at least 60 minutes in pipeline, then uses sealed cap closed conduit port.
6. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, it is characterized in that, in described step (4), for prefabricated double-skin duct, first increase short sleeve in each welded joint position, then carry out welding assembly, spacer sleeve customizes stainless steel fillet of screw support between double-skin duct simultaneously, and in Pipe installing welding process, continue to pass into high pure nitrogen and purge.
7. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, is characterized in that, in described step (5), pipeline is aided with elastic rubber sealing ring with KF quick-release clamp flange and connects, and access exhaust gas processing device by pipeline.
8. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, it is characterized in that, in described step (6), use stainless steel supporting frame fixed valve and instrument, adopt plastic-blasting section steel manufacture gas cylinder valve and case dish in the bearing of one, resin saddle type or door type isolation pad are set between bearing and pipeline, in installation process, use the perpendicularity deviation of infrared rays plumb aligner regulating valve case dish simultaneously.
9. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, it is characterized in that, in described step (6), first be aided with high pure nitrogen with filter and purge rapid pipe joint, then on O RunddichtringO, add oiling agent, adopt sagittal plane sealing means to be aided with the connection that flexible nickel alloy pad carries out instrument, pipe fitting.
10. manufacture of semiconductor gas transmission pipeline construction method of installation according to claim 1, is characterized in that, before carrying out described step (7), indicates according to different gas, harmfulness and the flow direction mounted pipeline.
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| CN104455722B (en) | 2017-02-22 |
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