CN211232413U - Be used for large-traffic gaseous supply equipment - Google Patents
Be used for large-traffic gaseous supply equipment Download PDFInfo
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- CN211232413U CN211232413U CN201921509033.3U CN201921509033U CN211232413U CN 211232413 U CN211232413 U CN 211232413U CN 201921509033 U CN201921509033 U CN 201921509033U CN 211232413 U CN211232413 U CN 211232413U
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Abstract
A gas supply apparatus for high flow rates, comprising: the device comprises a Pigtail-Box body, a control display operation unit, a process gas supply unit, a vacuum discharge unit, a purging unit, an alarm unit, a bar code scanning gun, a deep purging Box and a Pigtail unit. Compared with the prior art, the utility model, through a whole set of pipeline of redesign and control system, avoid manual operation's hidden danger, carry out comprehensive guarantee to the security in the supply process, to the special needs of gas cylinder supply, carry out the protection of pertinence and security promotion simultaneously.
Description
Technical Field
The utility model relates to a special gas transport technical field, concretely relates to be used for large-traffic gas supply equipment.
Background
Due to the vigorous development of global electronic and photovoltaic industries and the strong promotion of science and technology by our government, the semiconductor and photovoltaic manufacturing industries in China develop rapidly. According to the research report of the semiconductor industry in 2006, the method comprises the following steps: in 2006, there were nearly 50 wafer fabrication plants, 112 IC packaging and IC assembly plants, and 450 IC design companies in china. In 2006, the semiconductor industry in China has a production value of 807 million yuan, which is about 100 million dollars, wherein the package is 350 million yuan, the wafer is manufactured into 242 million yuan, and the IC design is 215 million yuan. The semiconductor market in china is over 600 billion dollars in 2006. With the first 20 plants occupying over 300 billion dollars. The photovoltaic industry develops rapidly in the last two years and is the leading force of the new energy industry in the future.
In the conventional manufacturing process of semiconductor and photovoltaic related industries, many special gases are required, some of which are toxic, corrosive and flammable gases with high harmfulness, and once the gas leakage caused by proper damage of the valve parts of these gas supply systems, such as corrosion or human misoperation, threatens the life safety of personnel, equipment loss and production interruption, and the harmfulness is regarded as a special value and cannot be seen. Of which special gas distribution boxes are widely used in the semiconductor industry. In the early stage of the development of the semiconductor industry, a number of accidents have occurred. Data shows that accidents of special gas distribution boxes often cause property loss, environmental pollution, casualties, explosion and death problems of public institutions. The main reason for the accidents is human error. In the domestic semiconductor factories, various management and hazard analysis methods are adopted to achieve proper control of risks, but the risks cannot be reduced under the condition of manual control of personnel.
The BSGS equipment is mainly used for continuously distributing process gas for a process machine in the semiconductor and photovoltaic industries. Because the flow required by some machines is large, the general special gas delivery cabinet GC is difficult to meet the flow requirement.
In order to solve the above problems, we have made a series of improvements.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a be used for large-traffic gas supply equipment to overcome the above-mentioned shortcoming and not enough that prior art exists.
A gas supply apparatus for high flow rates, comprising: the device comprises a Pigtail-Box body, a control display operation unit, a process gas supply unit, a vacuum discharge unit, a purging unit, an alarm unit, a bar code scanning gun, a deep purging Box and a Pigtail unit, wherein the control display operation unit is connected with the Pigtail-Box body, the process gas supply unit is arranged in the Pigtail-Box body, the vacuum discharge unit is connected with the process gas supply unit, the purging unit is connected with the process gas supply unit, the alarm unit is connected with the Pigtail-Box body, the bar code scanning gun is connected with the Pigtail-Box body, the deep purging Box is connected with the inside of the Pigtail-Box body, and the Pigtail unit is connected with the deep purging Box;
wherein the process gas supply unit includes: the device comprises a primary filter, a secondary filter, a primary heating module, a secondary heating module, a primary pressure regulating valve, a secondary pressure regulating valve, a pressure regulating pneumatic isolation valve, a mass flow meter, a low pressure isolation valve, a gas discharge valve, a test valve, a vacuum isolation valve, a vacuum generator, a pressure sensor and a working pipeline, wherein the rear end of the primary filter is connected with the primary heating module, the front end of the secondary filter is connected with the mass flow meter, the rear end of the secondary filter is connected with the low pressure isolation valve, the rear end of the primary heating module is connected with the primary pressure regulating valve, the front end of the secondary heating module is connected with the primary pressure regulating valve through the working pipeline, the rear ends of the secondary heating module and the primary pressure regulating valve are provided with the pressure sensor, the rear end of the secondary heating module is connected with the secondary pressure regulating valve, and the rear end of the secondary pressure regulating, the branch connection of the working pipeline in the middle of gas discharge valve and second grade air-vent valve and the pneumatic isolating valve of pressure regulating, be equipped with pressure sensor in the middle of second grade air-vent valve and the pneumatic isolating valve of pressure regulating, the rear end and the mass flow meter of the pneumatic isolating valve of pressure regulating are connected, the rear end and the gas isolating valve of low pressure isolating valve are connected, the rear end of gas discharge valve passes through the working pipeline and is connected with the test valve, be equipped with pressure sensor on the working pipeline in the middle of gas discharge valve and the test valve, the working pipeline in the middle of gas discharge valve and the test valve is located to the vacuum isolating valve, the vacuum isolating valve is connected with vacuum generator, the pneumatic isolating valve of pressure regulating, low pressure isolating valve, gas discharge valve, vacuum isolating valve and vacuum generator are connected with control display operation unit.
Wherein the Pigtail unit comprises: the high-pressure pneumatic isolation valve is a three-way valve, one end of two straight-through interfaces of the high-pressure pneumatic isolation valve is connected with an air inlet pipeline, the other interface of the high-pressure pneumatic isolation valve is connected with the outlet pneumatic isolation valve, the air inlet pipeline is connected with an air cylinder through a Pigtail pipeline, a third interface of the high-pressure pneumatic isolation valve is connected with the pressure regulating valve, the rear end of the pressure regulating valve is connected with a fourth pipeline of the main cabinet body through a pipeline, the front end of the outlet pneumatic isolation valve is connected with the high-pressure pneumatic isolation valve, the rear end of the outlet pneumatic isolation valve is connected with the outlet isolation valve through a pipeline, the rear end of the outlet isolation valve is connected with a first pipeline of the main cabinet body through a pipeline, and the front end of the micro-leak valve is connected with a branch isolation valve through a pipeline, the rear end of the microleakage valve is connected with the purging pneumatic isolation valve, the front end of the purging pneumatic isolation valve is connected with the outlet pneumatic isolation valve, the purging pneumatic isolation valve is connected with the microprocessor, the Pigtail unit pressure sensor is connected with the high-pressure pneumatic isolation valve and the connecting pipeline of the purging pneumatic isolation valve through pipelines, and the protection device is connected with the Pigtail unit pressure sensor and the gas cylinder.
Further, the working line includes: the first pipeline, the second pipeline, the third pipeline, the fourth pipeline, the fifth pipeline, the discharge pipe, the seventh pipeline, the eighth pipeline and the ninth pipeline, the first pipeline is connected with a primary filter and a Pigtail unit, the second pipeline is connected with a secondary heating module, a primary pressure regulating valve and a pressure sensor, the third pipeline is connected with a secondary pressure regulating valve, a pressure regulating pneumatic isolation valve and a pressure sensor, a branch of the third pipeline is connected with the fourth pipeline, the fourth pipeline is connected with a gas discharge valve, a test valve, a vacuum isolation valve and a Pigtail unit, the fifth pipeline is connected with the rear end of the vacuum isolation valve and the suction opening of the vacuum generator, the discharge pipe is connected with the discharge opening of the vacuum generator and the vacuum discharge unit, and the seventh pipeline, the eighth pipeline and the ninth pipeline are connected with the vacuum discharge unit.
Further, the pressure sensor includes: the pressure sensor comprises a third pressure sensor, a fourth pressure sensor and a fifth pressure sensor, wherein the third pressure sensor is connected with a second pipeline, the fourth pressure sensor is connected with a third pipeline, and the fifth pressure sensor is connected with a fourth pipeline.
Further, the Pigtail-Box includes: the novel explosion-proof glass door comprises a main cabinet body, a door, an observation window, a small glass door, a main door, a Box body, a front door, a flip cover and an adjusting seat, wherein the door is connected with the left side of the main cabinet body, the observation window is arranged on the door, the main door and the small glass door are connected with a Pigtail-Box body, the Box body is connected with the inner side of the main cabinet body, the front door is connected with one side of the main cabinet body, the observation window is arranged on the front door, the flip cover and the adjusting seat are connected with the rear part of the Box body, and the observation window is.
Further, the control display operation unit includes: the microprocessor is connected with the front door, and the microprocessor is connected with the touch screen.
Further, the vacuum discharge unit includes: the vacuum-pumping isolation valve comprises a vacuum-pumping isolation valve, a third-level pressure regulating valve, a vacuum gauge isolation valve, a pump inlet isolation valve, a pump outlet isolation valve, an N2 isolation valve, a fourth-level pressure regulating valve, a flow meter and a vacuum pump, wherein the front end of the vacuum-pumping isolation valve is connected with a fourth pipeline, the rear end of the vacuum-pumping isolation valve is connected with a seventh pipeline, the vacuum-pumping isolation valve is connected with the third-level pressure regulating valve through the seventh pipeline, the rear end of the third-level pressure regulating valve is connected with the pump inlet isolation valve through an eighth pipeline, the vacuum gauge isolation valve is connected with a branch arranged in the eighth pipeline, the front end of the vacuum gauge isolation valve is connected with the third-level pressure regulating valve and the eighth pipeline, the rear end of the vacuum gauge isolation valve is connected with the vacuum gauge, the front end of the pump outlet isolation valve is connected with an outlet of the vacuum pump, the rear end of the pump outlet isolation valve is connected with a collecting discharge pipe, and the, the rear end of the N2 isolating valve is connected with a fourth-level pressure regulating valve, the rear end of the fourth-level pressure regulating valve is connected with a flowmeter through a ninth pipeline, an N2 inlet of the vacuum pump is connected with an outlet of the ninth pipeline through a pipeline, the vacuum pump is connected with the bottom of the Pigtail-Box Box body, and the vacuumizing isolating valve, the vacuum gauge isolating valve, the pump inlet isolating valve and the vacuum pump are connected with the microprocessor.
Further, the purge unit includes: the device comprises a low-pressure N2 inlet isolation valve, a purifier, a pneumatic isolation valve, a high-pressure N2 inlet isolation valve and a branch isolation valve, wherein the front end of the low-pressure N2 inlet isolation valve is connected with a low-pressure N2 pipeline outside the device through a pipeline, the rear end of the low-pressure N2 inlet isolation valve is connected with the purifier, the rear end of the purifier is connected with the pneumatic isolation valve, the rear end of the pneumatic isolation valve is connected with the branch isolation valve through a pneumatic isolation valve pipeline branch, the front end of the high-pressure N2 inlet isolation valve is connected with a high-pressure N2 pipeline outside the device through a pipeline, the rear end of the high-pressure N2 inlet isolation valve is connected with a pneumatic isolation valve pipeline at the rear end of the pneumatic isolation valve, the front end of the branch isolation valve is connected with the pneumatic isolation valve and the high-pressure N2 inlet isolation valve through a pneumatic isolation valve pipeline, and the rear end of the branch isolation valve is connected with Pigtail units in left and right deep sweeping units through a branch isolation valve pipeline, and a pressure sensor is arranged on the branch isolating valve pipeline, and the pneumatic isolating valve, the high-pressure N2 inlet isolating valve and the branch isolating valve are connected with the microprocessor.
Further, the alarm unit includes: the gas leakage detection device comprises a gas leakage sensor, a flame detector and an audible and visual alarm, wherein the gas leakage sensor is arranged inside a Pigtail-Box body, the gas leakage sensor is connected with a microprocessor, the audible and visual alarm is arranged on a front door of an electric cabinet of a main cabinet body, the audible and visual alarm is arranged inside a small glass door, the audible and visual alarm is connected with the microprocessor, and the flame detector is connected with the inside of the main cabinet body.
Further, the bar code scanning gun is arranged on a front door of a control box of the main cabinet body and connected with the touch screen; a local emergency stop button is arranged on the front door and is arranged above the touch screen; the process gas supply unit is also provided with a supply one-way valve, and the supply one-way valve is connected with the rear end of the gas discharge valve; the vacuum discharge unit is also provided with a vacuum discharge one-way valve, and the vacuum discharge one-way valve is connected with a pipeline at the rear end of the flowmeter; the purging unit is also provided with a first purging one-way valve and a second purging one-way valve, the first purging one-way valve is arranged between the purifier and the pneumatic isolating valve, and the second purging one-way valve is arranged at the front end of the high-pressure N2 inlet isolating valve; the Pigtail unit is also provided with a first Pigtail one-way valve and a second Pigtail one-way valve, the first Pigtail one-way valve is arranged between the micro-leakage valve and the blowing pneumatic isolation valve, and the second Pigtail one-way valve is arranged at the rear end of the pressure regulating valve.
The utility model has the advantages that:
compared with the prior art, the utility model, through a whole set of pipeline of redesign and control system, avoid manual operation's hidden danger, carry out comprehensive guarantee to the security in the supply process, to the special needs of gas cylinder supply, carry out the protection of pertinence and security promotion simultaneously.
Description of the drawings:
fig. 1 is a schematic view of the internal structure of the present invention.
Fig. 2 is a side view of the present invention.
Fig. 3 is a schematic diagram of the external structure of the present invention.
Fig. 4 is a schematic structural diagram of the present invention.
Fig. 5 is a schematic diagram of the control logic of the present invention.
Reference numerals:
the Pigtail-Box 100, the main cabinet 110, the door 120, the observation window 130, the small glass door 140, the front door 150, the Box 160, the front door 170, the flip cover 180 and the adjusting seat 190.
Controls the display operation unit 200, the microprocessor 210, and the touch screen 220.
A process gas supply unit 300, a primary filter 310, a secondary filter 320, a primary heating module 330, a secondary heating module 340, a primary pressure regulating valve 350, a secondary pressure regulating valve 360, a pressure regulating pneumatic isolation valve 370, a mass flow meter 380, a low pressure isolation valve 390, a gas isolation valve 3100, a gas vent valve 3200, a test valve 3300, a vacuum isolation valve 3400, a vacuum generator 3500, and a supply check valve 3001.
Pressure sensor 3600, third pressure sensor 3630, fourth pressure sensor 3640, and fifth pressure sensor 3650.
A working line 3700, a first line 3710, a second line 3720, a third line 3730, a fourth line 3740, a fifth line 3750, a discharge line 3760, a seventh line 3770, an eighth line 3780, and a ninth line 3790.
A vacuum discharge unit 400, a vacuum isolation valve 410, a pressure regulating valve 420, a gauge isolation valve 430, a gauge 431, a pump inlet isolation valve 440, a pump outlet isolation valve 450, an N2 isolation valve 460, a pressure regulating valve 470, a flow meter 480, a vacuum pump 490, and a vacuum discharge check valve 4001.
An alarm unit 600, a gas leak sensor 610, a flame detector 620 and an audible and visual alarm 630.
A barcode scanning gun 700, a deep purge bin 800, and a local emergency stop button 1000.
A Pigtail cell pressure sensor 970, a guard 980, and a gas bottle 4000.
Detailed Description
The present invention will be further described with reference to the following examples. It should be understood that the following examples are illustrative only and are not intended to limit the scope of the present invention.
Example 1
Fig. 1 is a schematic view of the internal structure of the present invention. Fig. 2 is a side view of the present invention.
Fig. 3 is a schematic diagram of the external structure of the present invention. Fig. 4 is a schematic structural diagram of the present invention. Fig. 5 is a schematic diagram of the control logic of the present invention.
As shown in fig. 1 to 5, a gas supply apparatus for large flow rate, comprising: the device comprises a Pigtail-Box 100, a control display operation unit 200, a process gas supply unit 300, a vacuum discharge unit 400, a purge unit 500, an alarm unit 600, a bar code scanning gun 700, a deep purge Box 800 and a Pigtail unit 900, wherein the control display operation unit 200 is connected with the Pigtail-Box 100, the process gas supply unit 300 is arranged inside the Pigtail-Box 100, the vacuum discharge unit 400 is connected with the process gas supply unit 300, the purge unit 500 is connected with the process gas supply unit 300, the alarm unit 600 is connected with the Pigtail-Box 100, the bar code scanning gun 700 is connected with the Pigtail-Box 100, the deep purge Box 800 is connected with the Pigtail-Box 100, and the Pigtail unit 900 is connected with the deep purge Box 800.
Wherein the process gas supply unit 300 includes: the heating system comprises a primary filter 310, a secondary filter 320, a primary heating module 330, a secondary heating module 340, a primary pressure regulating valve 350, a secondary pressure regulating valve 360, a pressure regulating pneumatic isolation valve 370, a mass flow meter 380, a low pressure isolation valve 390, a gas isolation valve 3100, a gas discharge valve 3200, a test valve 3300, a vacuum isolation valve 3400, a vacuum generator 3500, a pressure sensor 3600 and a working pipeline 3700, wherein the rear end of the primary filter 310 is connected with the primary heating module 330, the front end of the secondary filter 320 is connected with the mass flow meter 380, the rear end of the secondary filter 320 is connected with the low pressure isolation valve 390, the rear end of the primary heating module 330 is connected with the primary pressure regulating valve 350, the front end of the secondary heating module 340 is connected with the primary pressure regulating valve 350 through the working pipeline 3700, the rear ends of the secondary heating module 340 and the primary pressure regulating valve 350 are provided with the pressure sensor 3600, and the, the rear end of the secondary pressure regulating valve 360 is connected with the pressure regulating pneumatic isolation valve 370 through a working pipeline 3700, the gas discharge valve 3200 is connected with a branch of the working pipeline 3700 between the secondary pressure regulating valve 360 and the pressure regulating pneumatic isolation valve 370, a pressure sensor 3600 is arranged between the secondary pressure regulating valve 360 and the pressure regulating pneumatic isolation valve 370, the rear end of the pressure regulating pneumatic isolation valve 370 is connected with a mass flow meter 380, the rear end of the low pressure isolation valve 390 is connected with a gas isolation valve 3100, the rear end of the gas discharge valve 3200 is connected with a test valve 3300 through a working pipeline 3700, the working pipeline 3700 between the gas discharge valve 3200 and the test valve 3300 is provided with the pressure sensor 3600, the vacuum isolation valve 3400 is arranged on the working pipeline 3700 between the gas discharge valve 3200 and the test valve 3300, and the vacuum isolation valve 3400 is connected with a vacuum generator 3500, the pressure-regulating pneumatic isolation valve 370, the low pressure isolation valve 390, the gas discharge valve 3200, the vacuum isolation valve 3400 and the vacuum generator 3500 are connected to the control display operation unit 200.
Working line 3700 includes: a first 3710, a second 3720, a third 3730, a fourth 3740, a fifth 3750, a drain 3760, a seventh 3770, an eighth 3780 and a ninth 3790, the first pipe 3710 is connected to the primary filter 310 and the Pigtail unit 900, the second pipe 3720 is connected to the secondary heating module 340, the primary pressure regulating valve 350 and the pressure sensor 3600, the third pipe 3730 is connected to the secondary pressure regulating valve 360, the pressure regulating pneumatic isolating valve 370 and the pressure sensor 3600, the branch of the third pipe 3730 is connected to the fourth pipe 3740, the fourth pipe 3740 is connected to the gas exhaust valve 3200, the test valve 3300, the vacuum isolating valve 3400 and the Pigtail unit 900, the fifth pipe 3750 is connected to the rear end of the vacuum isolating valve 3400 and the suction port of the vacuum generator 3500, the exhaust pipe 3760 is connected to the discharge port of the vacuum generator 3500 and the vacuum exhaust unit 400, and the seventh pipe 3770, the eighth pipe 3780 and the ninth pipe 3790 are connected to the vacuum exhaust unit 400.
The pressure sensor 3600 includes: a third pressure sensor 3630, a fourth pressure sensor 3640 and a fifth pressure sensor 3650, wherein the third pressure sensor 3630 is connected with the second pipeline 3720, the fourth pressure sensor 3640 is connected with the third pipeline 3730, and the fifth pressure sensor 3650 is connected with the fourth pipeline 3740.
Pigtail-Box 100 includes: the main cabinet body 110, the door 120, the observation window 130, the small glass door 140, the front door 150, the Box body 160, the front door 170, the flip cover 180 and the adjusting seat 190, wherein the door 120 is connected with the left side of the main cabinet body 110, the observation window 130 is arranged on the door 120, the front door 150 and the small glass door 140 are connected with the Pigtail-Box Box body 100, the Box body 160 is connected with the inner side of the main cabinet body 110, the front door 170 is connected with one side of the main cabinet body 110, the observation window 130 is arranged on the front door 170, the flip cover 180 and the adjusting seat 190 are connected with the rear part of the Box body 160, and the observation window 130 is an.
The control display operation unit 200 includes: microprocessor 210 and touch-sensitive screen 220, microprocessor 210 is connected with front door 150, and microprocessor 210 is connected with touch-sensitive screen 220.
The vacuum discharge unit 400 includes: a vacuum isolation valve 410, a third-stage pressure regulating valve 420, a vacuum gauge isolation valve 430, a pump inlet isolation valve 440, a pump outlet isolation valve 450, an N2 isolation valve 460, a fourth-stage pressure regulating valve 470, a flow meter 480 and a vacuum pump 490, wherein the front end of the vacuum isolation valve 410 is connected with a fourth pipe 3740, the rear end of the vacuum isolation valve 410 is connected with a seventh pipe 3770, the vacuum isolation valve 410 is connected with the third-stage pressure regulating valve 420 through a seventh pipe 3770, the rear end of the third-stage pressure regulating valve 420 is connected with the pump inlet isolation valve 440 through an eighth pipe 3780, the vacuum gauge isolation valve 430 is connected with a branch provided in the eighth pipe 3780, the front end of the vacuum gauge isolation valve 430 is connected with the third-stage pressure regulating valve 420 and the eighth pipe 3780, the rear end of the vacuum gauge isolation valve 430 is connected with a vacuum gauge 431, the front end of the pump outlet isolation valve 450 is connected with an outlet of the vacuum pump outlet 490, the rear end of the pump outlet, the front end of the N2 isolation valve 460 is connected with an N2 pipeline outside the equipment through a pipeline, the rear end of the N2 isolation valve 460 is connected with a four-stage pressure regulating valve 470, the rear end of the four-stage pressure regulating valve 470 is connected with a flow meter 480 through a ninth pipeline 3790, the inlet of an N2 of a vacuum pump 490 is connected with the outlet of a ninth pipeline 3790 through a pipeline, the vacuum pump 490 is connected with the bottom of the Pigtail-Box 100, and the vacuumizing isolation valve 410, the vacuum gauge isolation valve 430, the pump inlet isolation valve 440 and the vacuum pump 490 are connected with the microprocessor 210.
The purge unit 500 includes: the front end of the low-pressure N2 inlet isolation valve 510, the purifier 520, the pneumatic isolation valve 530, the high-pressure N2 inlet isolation valve 540 and the branch isolation valve 550 are connected, the front end of the low-pressure N2 inlet isolation valve 510 is connected with a low-pressure N2 pipeline outside the equipment through a pipeline, the rear end of the low-pressure N2 inlet isolation valve 510 is connected with the purifier 520, the rear end of the purifier 520 is connected with the pneumatic isolation valve 530, the rear end of the pneumatic isolation valve 530 is connected with the branch isolation valve 550 through a pneumatic isolation valve pipeline 531 branch, the front end of the high-pressure N2 inlet isolation valve 540 is connected with a high-pressure N2 pipeline outside the equipment through a pipeline, the rear end of the high-pressure N2 inlet isolation valve 540 is connected with a pneumatic isolation valve pipeline 531 at the rear end of the pneumatic isolation valve 530, the front end of the branch isolation valve 550 is connected with the pneumatic isolation valve 530 and the high-pressure N2 inlet isolation valve 540 through a pneumatic isolation valve pipeline 531, the rear end of the branch isolation valve 550 is connected with a Pigtail unit 900 in a left-, the bypass isolation valve line 551 is provided with a pressure sensor 3600, and pneumatic isolation valve 530, high pressure N2 inlet isolation valve 540 and bypass isolation valve 550 are connected to the microprocessor 210.
Pigtail cell 900 includes: the high-pressure pneumatic isolation valve 910, the pressure regulating valve 920, the outlet pneumatic isolation valve 930, the outlet isolation valve 940, the micro-leakage valve 950 and the purge pneumatic isolation valve 960, wherein the high-pressure pneumatic isolation valve 910 is a three-way valve, one end of two straight-through interfaces of the high-pressure pneumatic isolation valve 910 is connected with an air inlet pipeline 911, the other interface of the high-pressure pneumatic isolation valve 910 is connected with the outlet pneumatic isolation valve 930, the air inlet pipeline 911 is connected with an air bottle 4000 through a Pigtail pipeline, a third interface of the high-pressure pneumatic isolation valve 910 is connected with the pressure regulating valve 920, the rear end of the pressure regulating valve 920 is connected with a fourth pipeline 3740 of the main cabinet body through a pipeline, the front end of the outlet pneumatic isolation valve 930 is connected with the high-pressure pneumatic isolation valve 910, the rear end of the outlet pneumatic isolation valve 930 is connected with the outlet isolation valve 940 through a pipeline, the rear end of the outlet isolation valve 940 is connected with a first pipeline 3710 of the main cabinet body through a pipeline, and the, the back end of the microleakage valve 950 is connected to the purge pneumatic isolation valve 960, the front end of the purge pneumatic isolation valve 960 is connected to the outlet pneumatic isolation valve 930, and the purge pneumatic isolation valve 960 is connected to the microprocessor 210.
The alarm unit 600 includes: the gas leakage detection device comprises a gas leakage sensor 610, a flame detector 620 and an audible and visual alarm 630, wherein the gas leakage sensor 610 is arranged inside the Pigtail-Box 100, the gas leakage sensor 610 is connected with the microprocessor 210, the audible and visual alarm 630 is arranged on a front door 150 of an electric cabinet of the main cabinet body, the audible and visual alarm 630 is arranged inside the small glass door 140, the audible and visual alarm 630 is connected with the microprocessor 210, and the flame detector 620 is connected with the inside of the main cabinet body 110.
The barcode scanning gun 700 is disposed on the front door 150 of the control box of the main cabinet 110, and the barcode scanning gun 700 is connected to the touch screen 220.
The main door 150 is provided with a local emergency stop button 1000, and the local emergency stop button 1000 is provided above the touch screen 220.
The process gas supply unit 300 further has a supply check valve 3001, and the supply check valve 3001 is connected to the rear end of the gas exhaust valve 3200.
The vacuum discharging unit 400 further has a vacuum discharging check valve 4001, and the vacuum discharging check valve 4001 is connected to a pipe at the rear end of the flow meter 480.
The Pigtail unit 900 further has a first Pigtail check valve 9001 and a second Pigtail check valve 9002, the first Pigtail check valve 9001 is disposed between the microleakage valve 950 and the purge pneumatic isolation valve 960, and the second Pigtail check valve 9002 is disposed at the rear end of the pressure regulating valve 920.
The working principle of the utility model is that, for realizing the full automatization that Pigtail-Box swept the flow, we had manual, the sweeping of semi-automatic equipment, discharge valve replacement for the gas accuse valve to process gas supply unit 300 originally, the manometer replacement for manual, semi-automatic Pigtail-Box is pressure sensor 3600PT (4 ~ 20mA signal output), the system is through collecting pressure sensor 3600's signal, the automatic actions such as accomplishing automatic switch-over gas cylinder 4000 of control gas accuse valve, blow before changing the bottle, gas cylinder 4000 interface leak testing, sweep after changing the bottle. In addition to maintaining the cleanliness of the pipeline by passing low-flow positive-pressure nitrogen, facilities such as an exhaust detector, a vacuum generator 3500, vacuum pump gas, a gas leakage sensor 610, a flame detector 620, an audible and visual alarm 630 are additionally arranged to ensure that alarm information can be sent out immediately under normal operation and abnormal conditions of the equipment, the gas is cut off, and a bar code scanning gun 700 is additionally arranged, so that the harm caused by replacing a wrong process gas cylinder 4000 is prevented; the touch screen 220 is used as a human-computer interface, so that an operator does not need to directly operate the valve of the process gas supply unit 300, and the action of the valve can be controlled through the touch screen 220; the running state of the equipment can be observed through the double-layer explosion-proof glass.
In addition to the above complete system structure, the present invention is directed to the safety problem of the gas cylinder 4000, and the principle is to add the Pigtail unit pressure sensor 970 and the protection device 980. The Pigtail unit pressure sensor 970 which is directly connected with the pipeline of the gas cylinder 4000 is connected with two regulating valves at the same time, and the pressure monitoring is carried out to match with the protection device 980 for safety protection.
On the other hand, a flip cover shell 180 and an adjusting seat 190 are added, the flip cover shell 180 is used for covering the interface of the gas cylinder 4000, the gas leakage condition of the gas cylinder 4000 is monitored in real time, and misoperation can be prevented; the adjusting seat 190 serves to adjust the height of the flip cover 180 according to the heights of the gas cylinders 4000.
The above description has been made of the embodiments of the present invention, but the present invention is not limited thereto, and various changes may be made without departing from the spirit of the present invention.
Claims (9)
1. An apparatus for high flow gas supply, comprising: the device comprises a Pigtail-Box body (100), a control display operation unit (200), a process gas supply unit (300), a vacuum discharge unit (400), a purging unit (500), an alarm unit (600), a bar code scanning gun (700), a deep purging Box (800) and a Pigtail unit (900), wherein the control display operation unit (200) is connected with the Pigtail-Box body (100), the process gas supply unit (300) is arranged in the Pigtail-Box body (100), the vacuum discharge unit (400) is connected with the process gas supply unit (300), the purging unit (500) is connected with the process gas supply unit (300), the alarm unit (600) is connected with the Pigtail-Box body (100), the bar code scanning gun (700) is connected with the Pigtail-Box body (100), and the deep purging Box (800) is connected with the Pigtail-Box body (100), the Pigtail unit (900) is connected with the deep purging box (800);
wherein the process gas supply unit (300) comprises: the heating system comprises a primary filter (310), a secondary filter (320), a primary heating module (330), a secondary heating module (340), a primary pressure regulating valve (350), a secondary pressure regulating valve (360), a pressure regulating pneumatic isolation valve (370), a mass flow meter (380), a low pressure isolation valve (390), a gas isolation valve (3100), a gas discharge valve (3200), a test valve (3300), a vacuum isolation valve (3400), a vacuum generator (3500), a pressure sensor (3600) and a working pipeline (3700), wherein the rear end of the primary filter (310) is connected with the primary heating module (330), the front end of the secondary filter (320) is connected with the mass flow meter (380), the rear end of the secondary filter (320) is connected with the low pressure isolation valve (390), the rear end of the primary heating module (330) is connected with the primary pressure regulating valve (350), the front end of the secondary heating module (340) is connected with the primary pressure regulating valve (350) through the working pipeline (3700), the rear ends of the secondary heating module (340) and the primary pressure regulating valve (350) are provided with pressure sensors (3600), the rear end of the secondary heating module (340) is connected with the secondary pressure regulating valve (360), the rear end of the secondary pressure regulating valve (360) is connected with a pressure regulating pneumatic isolation valve (370) through a working pipeline (3700), a gas discharge valve (3200) is connected with a branch of the working pipeline (3700) between the secondary pressure regulating valve (360) and the pressure regulating pneumatic isolation valve (370), the pressure sensors (3600) are arranged between the secondary pressure regulating valve (360) and the pressure regulating pneumatic isolation valve (370), the rear end of the pressure regulating pneumatic isolation valve (370) is connected with a mass flow meter (380), the rear end of the low pressure isolation valve (390) is connected with the gas isolation valve (3100), the rear end of the gas discharge valve (3200) is connected with a test valve (3300) through the working pipeline (3700), a pressure sensor (3600) is arranged on a working pipeline (3700) between the gas discharge valve (3200) and the test valve (3300), the vacuum isolation valve (3400) is arranged on the working pipeline (3700) between the gas discharge valve (3200) and the test valve (3300), the vacuum isolation valve (3400) is connected with the vacuum generator (3500), and the pressure regulating pneumatic isolation valve (370), the low pressure isolation valve (390), the gas discharge valve (3200), the vacuum isolation valve (3400) and the vacuum generator (3500) are connected with the control display operation unit (200);
wherein the Pigtail unit (900) comprises: the high-pressure pneumatic isolation valve (910), the pressure regulating valve (920), the outlet pneumatic isolation valve (930), the outlet isolation valve (940), the micro-leakage valve (950), the purging pneumatic isolation valve (960), the Pigtail unit pressure sensor (970) and the protection device (980), wherein the high-pressure pneumatic isolation valve (910) is a three-way valve, one end of two straight-through interfaces of the high-pressure pneumatic isolation valve (910) is connected with an air inlet pipeline (911), the other interface of the high-pressure pneumatic isolation valve (910) is connected with the outlet pneumatic isolation valve (930), the air inlet pipeline (911) is connected with an air bottle (4000) through a Pigtail pipeline, a third interface of the high-pressure pneumatic isolation valve (910) is connected with the pressure regulating valve (920), the rear end of the pressure regulating valve (920) is connected with a fourth pipeline (3740) of the main cabinet body through a pipeline, and the front end of the outlet pneumatic isolation valve (930) is connected with the high-pressure pneumatic isolation valve (910), the rear end of the outlet pneumatic isolation valve (930) is connected with the outlet isolation valve (940) through a pipeline, the rear end of the outlet isolation valve (940) is connected with a first pipeline (3710) of the main cabinet body through a pipeline, the front end of the microleak valve (950) is connected with the branch isolation valve (550) through a pipeline, the rear end of the microleak valve (950) is connected with the purging pneumatic isolation valve (960), the front end of the purging pneumatic isolation valve (960) is connected with the outlet pneumatic isolation valve (930), the purging pneumatic isolation valve (960) is connected with the microprocessor (210), the Pigtail unit pressure sensor (970) is connected with connecting pipelines of the high-pressure pneumatic isolation valve (910) and the purging pneumatic isolation valve (960) through pipelines, and the protection device (980) is connected with the Pigtail unit pressure sensor (970) and the gas cylinder (4000).
2. A device for high flow gas supply according to claim 1, characterized in that: the working line (3700) comprises: a first pipeline (3710), a second pipeline (3720), a third pipeline (3730), a fourth pipeline (3740), a fifth pipeline (3750), a discharge pipe (3760), a seventh pipeline (3770), an eighth pipeline (3780) and a ninth pipeline (3790), wherein the first pipeline (3710) is connected with a primary filter (310) and a Pigtail unit (900), the second pipeline (3720) is connected with a secondary heating module (340), a primary pressure regulating valve (350) and a pressure sensor (3600), the third pipeline (3730) is connected with a secondary pressure regulating valve (360), a pressure regulating pneumatic isolation valve (370) and a pressure sensor (3600), a branch of the third pipeline (3730) is connected with the fourth pipeline (3740), the fourth pipeline (3740) is connected with a gas discharge valve (3200), a test valve (3300), a vacuum isolation valve (3400) and a Pigtail unit (900), the fifth pipeline (3750) is connected with a vacuum generating port of a vacuum isolation valve (3500) and a vacuum generating port (3500), the exhaust pipe (3760) is connected to an exhaust port of the vacuum generator (3500) and the vacuum exhaust unit (400), and the seventh pipe (3770), the eighth pipe (3780) and the ninth pipe (3790) are connected to the vacuum exhaust unit (400).
3. A device for high flow gas supply according to claim 2, characterized in that: the pressure sensor (3600) comprises: the pressure sensor comprises a third pressure sensor (3630), a fourth pressure sensor (3640) and a fifth pressure sensor (3650), wherein the third pressure sensor (3630) is connected with a second pipeline (3720), the fourth pressure sensor (3640) is connected with a third pipeline (3730), and the fifth pressure sensor (3650) is connected with a fourth pipeline (3740).
4. A device for high flow gas supply according to claim 3, characterized in that: the Pigtail-Box (100) includes: main cabinet body (110), door (120), observation window (130), little glass door (140), main door (150), Box (160), qianmen (170), flip cover (180) and regulation seat (190), door (120) are connected with main cabinet body (110) left side, be equipped with observation window (130) on door (120), main door (150) and little glass door (140) are connected with Pigtail-Box Box (100), Box (160) are connected with main cabinet body (110) inboard, qianmen (170) are connected with main cabinet body (110) one side, be equipped with observation window (130) on qianmen (170), flip cover (180) and regulation seat (190) are connected with Box (160) rear portion, observation window (130) are explosion-proof glass observation window.
5. A device for high flow gas supply according to claim 4, characterized in that: the control display operation unit (200) includes: the front door control device comprises a microprocessor (210) and a touch screen (220), wherein the microprocessor (210) is connected with the front door (150), and the microprocessor (210) is connected with the touch screen (220).
6. A device for high flow gas supply according to claim 5, characterized in that: the vacuum discharge unit (400) includes: the vacuum-pumping isolation valve comprises a vacuum-pumping isolation valve (410), a third-stage pressure regulating valve (420), a vacuum gauge isolation valve (430), a pump inlet isolation valve (440), a pump outlet isolation valve (450), an N2 isolation valve (460), a fourth-stage pressure regulating valve (470), a flow meter (480) and a vacuum pump (490), wherein the front end of the vacuum-pumping isolation valve (410) is connected with a fourth pipeline (3740), the rear end of the vacuum-pumping isolation valve (410) is connected with a seventh pipeline (3770), the vacuum-pumping isolation valve (410) is connected with the third-stage pressure regulating valve (420) through the seventh pipeline (3770), the rear end of the third-stage pressure regulating valve (420) is connected with the pump inlet isolation valve (440) through an eighth pipeline (3780), the vacuum gauge isolation valve (430) is connected with a branch arranged in the eighth pipeline (3780), and the front end of the vacuum gauge isolation valve (430) is connected with the third-stage pressure regulating valve (420) and the eighth pipeline (3780), the back end of the vacuum gauge isolation valve (430) is connected with a vacuum gauge (431), the front end of the pump outlet isolation valve (450) is connected with the outlet of a vacuum pump (490), the rear end of the pump outlet isolation valve (450) is connected to a collective discharge pipe (3760), the front end of the N2 isolation valve (460) is connected with an N2 pipeline outside the equipment through a pipeline, the back end of the N2 isolation valve (460) is connected with a four-stage pressure regulating valve (470), the back end of the four-stage pressure regulating valve (470) is connected with a flowmeter (480) through a ninth pipeline (3790), the inlet of N2 of the vacuum pump (490) is connected with the outlet of a ninth pipeline (3790) through a pipeline, the vacuum pump (490) is connected with the bottom of the Pigtail-Box body (100), the vacuumizing isolation valve (410), the vacuum gauge isolation valve (430), the pump inlet isolation valve (440) and the vacuum pump (490) are connected with the microprocessor (210).
7. A device for high flow gas supply according to claim 5 or 6, characterized in that: the purge unit (500) comprises: low pressure N2 entry isolation valve (510), clarifier (520), pneumatic isolation valve (530), high pressure N2 entry isolation valve (540) and branch isolation valve (550), the front end of low pressure N2 entry isolation valve (510) passes through the pipeline and is connected with the outside low pressure N2 pipeline of equipment, the rear end and the clarifier (520) of low pressure N2 entry isolation valve (510) are connected, the rear end and the pneumatic isolation valve (530) of clarifier (520) are connected, the rear end of pneumatic isolation valve (530) is connected with branch isolation valve (550) through pneumatic isolation valve pipeline (531) branch, the front end of high pressure N2 entry isolation valve (540) passes through the pipeline and is connected with the outside high pressure N2 pipeline of equipment, the rear end and the pneumatic isolation valve pipeline (531) of pneumatic isolation valve (530) rear end of high pressure N2 entry isolation valve (540) are connected, the front end and the pneumatic isolation valve pipeline (39531) and isolation valve (530) and branch isolation valve (550) are connected through pneumatic isolation valve (530), the front end and pneumatic isolation valve (550) and pneumatic isolation valve (39531) and high pressure N2) and branch isolation valve (530) are connected (540) The rear end of the branch isolation valve (550) is connected with a Pigtail unit (900) in the left and right deep purging boxes through a branch isolation valve pipeline (551), a pressure sensor (3600) is arranged on the branch isolation valve pipeline (551), and the pneumatic isolation valve (530), the high-pressure N2 inlet isolation valve (540) and the branch isolation valve (550) are connected with the microprocessor (210).
8. A device for high flow gas supply according to claim 5, characterized in that: the alarm unit (600) comprises: gas leakage sensor (610), flame detector (620) and audible-visual annunciator (630), Pigtail-Box Box (100) is located inside gas leakage sensor (610), gas leakage sensor (610) is connected with microprocessor (210), audible-visual annunciator (630) are located on main cabinet body electric cabinet's main door (150), audible-visual annunciator (630) are located inside little glass door (140), audible-visual annunciator (630) are connected with microprocessor (210), flame detector (620) and main cabinet body (110) internal connection.
9. A device for high flow gas supply according to claim 7, characterized in that: the bar code scanning gun (700) is arranged on a front door (150) of a control box of the main cabinet body (110), and the bar code scanning gun (700) is connected with the touch screen (220); a local emergency stop button (1000) is arranged on the front door (150), and the local emergency stop button (1000) is arranged above the touch screen (220); the process gas supply unit (300) further has a supply check valve (3001), the supply check valve (3001) being connected to a rear end of the gas exhaust valve (3200); the vacuum discharge unit (400) is also provided with a vacuum discharge one-way valve (4001), and the vacuum discharge one-way valve (4001) is connected with a pipeline at the rear end of the flowmeter (480); the purging unit (500) is also provided with a first purging one-way valve (5001) and a second purging one-way valve (5002), wherein the first purging one-way valve (5001) is arranged between the purifier (520) and the pneumatic isolating valve (530), and the second purging one-way valve (5002) is arranged at the front end of the high-pressure N2 inlet isolating valve (540); the Pigtail unit (900) is further provided with a first Pigtail one-way valve (9001) and a second Pigtail one-way valve (9002), the first Pigtail one-way valve (9001) is arranged between the micro-leakage valve (950) and the purging pneumatic isolation valve (960), and the second Pigtail one-way valve (9002) is arranged at the rear end of the pressure regulating valve (920).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921509033.3U CN211232413U (en) | 2019-09-11 | 2019-09-11 | Be used for large-traffic gaseous supply equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921509033.3U CN211232413U (en) | 2019-09-11 | 2019-09-11 | Be used for large-traffic gaseous supply equipment |
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| Publication Number | Publication Date |
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| CN211232413U true CN211232413U (en) | 2020-08-11 |
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| CN201921509033.3U Active CN211232413U (en) | 2019-09-11 | 2019-09-11 | Be used for large-traffic gaseous supply equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas transportation and supply device, system, method and semiconductor process system |
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2019
- 2019-09-11 CN CN201921509033.3U patent/CN211232413U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas transportation and supply device, system, method and semiconductor process system |
| CN117450423B (en) * | 2023-09-20 | 2024-07-09 | 上海良薇机电工程有限公司 | A special gas transmission and supply device, system, method and semiconductor process system |
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