CN209822004U - Special gas manufacturing system - Google Patents
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- CN209822004U CN209822004U CN201920233187.8U CN201920233187U CN209822004U CN 209822004 U CN209822004 U CN 209822004U CN 201920233187 U CN201920233187 U CN 201920233187U CN 209822004 U CN209822004 U CN 209822004U
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Abstract
The utility model relates to a special gas manufacturing system, which comprises a first closed space and a second closed space, wherein the first closed space is arranged in the second closed space, the first closed space comprises special gas manufacturing equipment, and the second closed space outside the first closed space comprises an operation end for arranging the special gas manufacturing equipment; the first closed space comprises a first negative pressure maintaining device, and the first negative pressure maintaining device is used for enabling the first closed space to be in a first negative pressure state; the second sealed space is internally provided with a second negative pressure maintaining device, the second negative pressure maintaining device is used for enabling the second sealed space to be in a second negative pressure state, and the value of the second negative pressure state is larger than that of the first negative pressure state. The system can reduce the risk of leakage of the special gas of the operator and ensure the safety of the operator.
Description
Technical Field
The utility model relates to a gaseous preparation field especially relates to a special gas manufacturing system.
Background
Special gas, i.e. special gas. In recent years, high-tech industries such as semiconductors, microelectronics, and related solar cells have been rapidly developed. Due to special electronic gases, i.e. special electronic gases, e.g. Arsine (ASH)3) Chlorine (Cl)2) Phosphine (PH)3) And the like, as a necessity for the development of the industry, are widely applied to film deposition, etching, doping, passivation and cleaning, or used as carrier gas, protective atmosphere and the like, and the electronic special gas industry is rapidly developed in recent years. However, many special gases are highly toxic, flammable and explosive and corrosive gases, the site selection of the manufacturing plant of the special gases needs to be selected to be rare in human smoke, and the manufacturing plant needs high construction requirements, particularly arsenic hydride (ASH)3) Chlorine (Cl)2) Phosphine (PH)3) And the like, extremely toxic and inflammable gases can affect the heart, the respiratory system, the kidney, the intestines and stomach, the nervous system and the liver after being inhaled, and the toxicity is extremely difficult to eradicate, and can immediately cause death if the inhalation is overdose. Therefore, a high level of safety is required for specialty gas production.
SUMMERY OF THE UTILITY MODEL
Objects of the invention
The utility model provides a special gas manufacturing system can reduce the risk that causes self injury when taking place special gas and leaking of operating personnel, the assurance operating personnel's of bigger degree safety.
(II) technical scheme
In order to achieve the above object, the present invention provides a special gas manufacturing system comprising:
the special gas production device comprises a first closed space and a second closed space, wherein the first closed space is arranged in the second closed space, special gas production equipment is arranged in the first closed space, and an operation end for arranging the special gas production equipment is arranged in the second closed space outside the first closed space; the first closed space comprises a first negative pressure maintaining device, and the first negative pressure maintaining device is used for enabling the first closed space to be in a first negative pressure state; the second closed space comprises a second negative pressure maintaining device, the second negative pressure maintaining device is used for enabling the second closed space to be in a second negative pressure state, and the value of the second negative pressure state is larger than that of the first negative pressure state.
The special gas manufacturing equipment for producing and manufacturing special gas is positioned in the closed cavity, and the value of the second negative pressure state is constantly kept to be larger than that of the first negative pressure state by the first negative pressure holding device and the second negative pressure holding device. The gas is caused to flow into the first closed space, and if the gas leaks, the gas leaks into the first closed space.
The first negative pressure holding device includes: the variable frequency fan I, the variable frequency fan II and the controllable butterfly valve I are arranged on the base;
the first variable frequency fan and the first controllable butterfly valve are connected in series through a first pipeline and used for feeding air into the first closed space; the first pipeline comprises a gas inlet and a gas outlet, the gas outlet of the first pipeline is communicated with the first closed space, and the gas inlet is communicated with a protective gas source or atmosphere;
the variable frequency fan is connected with a tail gas treatment system of the special gas manufacturing equipment in series through a second pipeline, the second pipeline comprises a gas inlet and a gas outlet, the gas inlet of the second pipeline is communicated with the first closed space, and the gas outlet is communicated with the atmosphere;
the protective gas source is positioned in the second closed space or outside the second closed space.
The second negative pressure holding device includes: a third variable frequency fan, a fourth variable frequency fan and a second controllable butterfly valve;
the third variable frequency fan and the controllable butterfly valve are connected in series through a third pipeline, the third pipeline comprises an air inlet and an air outlet, the air outlet of the third pipeline is communicated with the second closed space, and the air inlet is communicated with a protective gas source or atmosphere;
the fourth variable frequency fan exhausts the gas in the second closed space out of the second closed space through an exhaust pipeline, the exhaust pipeline comprises a gas inlet and a gas outlet, the gas inlet of the exhaust pipeline is communicated with the second closed space, and the gas outlet of the exhaust pipeline is communicated with the atmosphere;
the protective gas source is positioned in the second closed space or outside the second closed space.
In another alternative, at least one special gas detecting device is further disposed in each of the first enclosed space and the second enclosed space of the special gas manufacturing system.
The special gas detection device in the first closed space comprises: the special gas detector I is arranged on the inner wall of the first closed space, and the special gas detector II is arranged outside the special gas manufacturing pipeline;
the special gas detection device in the second closed space comprises: at least one special gas detector III arranged on the inner wall of the closed space and a special gas detector IV carried by an operator in the closed space and used for monitoring special gas.
The special gas leakage in the first closed space and the second closed space is monitored through the special gas detection device, if special gas manufacturing equipment leaks, the first closed space and the second closed space are exhausted and fed air through the first negative pressure retaining device and the second negative pressure retaining device under the control of the controller, and therefore the purposes of reducing the risk of special gas leakage and guaranteeing the safety of operators are achieved.
Optionally, the second enclosed space is a container or a fixedly arranged production workshop, and the container is arranged on a movable device.
The protective gas source is nitrogen.
The first closed space is one of a glove box and a container.
In a preferred embodiment, the specialty gas manufacturing system further comprises at least a first differential pressure gauge and a second differential pressure gauge;
the first detection end of the first differential pressure meter is arranged in the second closed space, and the second detection end of the first differential pressure meter is arranged in the first closed space, so that the differential pressure between the first closed space and the second closed space is determined through the first differential pressure meter;
the first detection end of the second differential pressure meter is arranged at the atmosphere end, and the second detection end of the second differential pressure meter is arranged in the second enclosed space, so that the pressure difference between the second enclosed space and the atmosphere is determined through the second differential pressure meter.
And detecting the pressure difference inside and outside the closed cavity and inside and outside the closed space through a differential pressure gauge, and keeping the pressure of-10 mbar in the closed cavity and in the closed space.
In another alternative, the specialty gas manufacturing system further comprises: the video monitoring system is used for acquiring image information in the closed space;
the video monitoring system comprises an image acquisition device arranged in the closed space and a server remotely connected with the image acquisition device, and the server is connected with the controller.
(III) advantageous effects
The utility model has the advantages that: the air pressure state in the closed cavity is kept through the first negative pressure keeping device and the second negative pressure keeping device, the air pressure in the first closed space is kept smaller than the air pressure in the second closed space and smaller than the air pressure outside the second closed space, if air leaks, the air can leak towards the first closed space, and the safety of operators is guaranteed.
The special gas leakage in the closed cavity and the closed space is monitored by the special gas detection device, the risk of leakage of the special gas of an operator can be further reduced, and the safety of the operator is ensured.
Drawings
Fig. 1 is a structural diagram of a special gas manufacturing system of the present invention.
[ description of reference ]
1. A first enclosed space; 2. a second enclosed space; 3. a controller; 4. a video monitoring system; 5. a server; 6. manufacturing special gas equipment; 7. special gas using equipment; 11. a first variable frequency fan; 12. a first controllable butterfly valve; 13. a second variable frequency fan; 14. a tail gas treatment system; 15. a special gas detector I; 16. a second special gas detector; 17. a first differential pressure gauge; 19. nitrogen gas; 21. a third variable frequency fan; 22. a second controllable butterfly valve; 23. a fourth variable frequency fan; 25. a third special gas detector; 26. a special gas detector IV; 27. a second differential pressure gauge; 28. a smoke detector.
Detailed Description
For better explanation of the present invention, the following detailed description of the present invention is provided for understanding.
As shown in fig. 1, the special gas manufacturing system of the present embodiment includes:
a first closed space 1 for placing equipment for producing and manufacturing special gas;
a second closed space 2 for housing the first closed space 1; the second enclosed space 2 outside the first enclosed space 1 includes an operation end where the special gas manufacturing apparatus is disposed;
a first negative pressure maintaining means for maintaining the state of the air pressure in the first closed space 1; the first closed space is in a first negative pressure state.
Second negative pressure maintaining means for maintaining the state of the air pressure in the second closed space 2; and enabling the second closed space to be in a second negative pressure state.
The special gas detection device is used for respectively monitoring the special gas leaked in the first closed space 1 and the second closed space 2;
and a controller 3 connected with the special gas detecting device, the first negative pressure maintaining device and the second negative pressure maintaining device.
The special gas manufacturing equipment 6 for producing the special gas is positioned in the first closed space 1, and in practical application, part of pipelines or ports in the first closed space 1 are arranged in the closed space 2. The operator operates in the closed space 2, monitors the operation condition of the special gas manufacturing equipment 6, controls the special gas manufacturing equipment 6 in the first closed space 1, and carries out operations such as feeding, starting and the like on the special gas manufacturing equipment 6.
In the normal special air manufacturing process, the first negative pressure maintaining device and the second negative pressure maintaining device control the air exhaust and air intake of the first closed space 1 and the closed space 2, so that the value of the second negative pressure state is larger than that of the first negative pressure state.
The first negative pressure holding means and the second negative pressure holding means hold the pressure difference between the sealed space 2 and the first sealed space 1, thereby reducing the possibility that the leak gas in the first sealed space flows into the second sealed space. Thereby achieving the purpose of improving the safety of personnel when gas leaks.
If the special gas making equipment 6 leaks, the special gas and the special gas making gas can be firstly leaked into the first closed space 1, and at the moment, the special gas detecting device can detect a special gas signal and feed the special gas signal back to the controller 3.
The controller 3 cuts off the power supply of the special gas manufacturing equipment 6 and increases the exhaust air volume and the intake air volume of the first negative pressure holding device and the second negative pressure holding device.
The first negative pressure holding device includes: the variable frequency fan I11, the variable frequency fan II 13 and the controllable butterfly valve I12;
the variable frequency fan I11 and the controllable butterfly valve I12 are connected in series through a first pipeline and used for introducing air into the first closed space 1; the first pipeline comprises a gas inlet and a gas outlet, the gas outlet of the first pipeline is communicated with the first closed space 1, and the gas inlet is communicated with a protective gas source or atmosphere.
The first variable frequency fan 11 and the first controllable butterfly valve 12 are positioned outside the first closed space 1, and in the second closed space 2, air is introduced into the first closed space 1 through a first pipeline; the protective gas source is positioned in the second closed space 2 or outside the second closed space 2 and is connected between the first variable frequency fan 11 and the first controllable butterfly valve 12 through a protective gas pipeline.
The second variable frequency fan 13 is connected with a tail gas treatment system 14 of the special gas manufacturing equipment in series through a second pipeline, the second pipeline comprises a gas inlet and a gas outlet, the gas inlet of the second pipeline is communicated with the first closed space 1, and the gas outlet is communicated with the atmosphere.
The second variable frequency fan 13 is located in the first enclosed space 1, and exhausts the gas in the first enclosed space 1 to the outside of the second enclosed space 2 through a pipeline of the tail gas treatment system 14.
The pressure is adjusted through the first controllable butterfly valve 12, the first variable frequency fan 11 and the first controllable butterfly valve 12 serve as air inlet of the whole first closed space 1, and the second variable frequency fan 13 conducts air draft and serves as air exhaust of the whole first closed space 1. And when gas leaks, the frequencies of the first variable frequency fan 11 and the second variable frequency fan 13 are increased.
The second negative pressure holding device includes: a third variable frequency fan 21, a fourth variable frequency fan 23 and a second controllable butterfly valve 22;
the third variable frequency fan 21 and the second controllable butterfly valve 22 are connected in series through a third pipeline, the third pipeline comprises an air inlet and an air outlet, the air outlet of the third pipeline is communicated with the second closed space 2, and the air inlet is communicated with a protective gas source or atmosphere.
The third variable frequency fan 21 and the second controllable butterfly valve 22 are positioned outside the second closed space 2 and used for introducing air into the closed air through a third pipeline; the protective gas source is positioned outside the closed space 2; and the protective gas pipeline is connected between the third variable frequency fan 21 and the second controllable butterfly valve 22. The fourth variable frequency fan 23 is located in the second enclosed space 2, and exhausts the gas in the second enclosed space 2 to the outside of the second enclosed space 2 through an exhaust pipeline in the second enclosed space 2.
The pressure is adjusted by the second controllable butterfly valve 22, the third variable frequency fan 21 and the second controllable butterfly valve 22 are used as air inlet of the whole second closed space 2, and the fourth variable frequency fan 23 is used for air exhaust and is used as air exhaust of the whole second closed space 2. And blowing air into the second closed space in three directions through a variable frequency fan to constantly form negative pressure in the second closed space. And when gas leaks, increasing the frequency of the third variable frequency fan 21 and the fourth variable frequency fan 23.
In a preferred embodiment, the special gas manufacturing system of this embodiment further includes at least one first differential pressure gauge 17 and a second differential pressure gauge 27;
the first differential pressure gauge 17 and the second differential pressure gauge 27 are provided in the first sealed space 1 and the sealed space 2, respectively, and are connected to the controller 3.
A first detection end of the first differential pressure gauge 17 is arranged in the second enclosed space 2, and a second detection end of the first differential pressure gauge 17 is arranged in the first enclosed space 1, so that the differential pressure between the first enclosed space 1 and the second enclosed space 2 is determined through the first differential pressure gauge 17;
a first detection end of the second differential pressure gauge 18 is disposed at the atmosphere end, and a second detection end of the second differential pressure gauge 18 is disposed in the second closed space 2, so that the pressure difference between the second closed space 2 and the atmosphere is determined by the second differential pressure gauge 17.
The pressure difference in the first closed space 1 and in the second closed space 2 is obtained in real time by means of a differential pressure gauge, preferably the first closed space 1 is kept at a pressure of-10 mbar during normal experiments. A first variable frequency fan 11 and a controllable butterfly valve 12 which are positioned at the top of the whole first closed space 1 are used as air inlet of the whole first closed space 1, and a second variable frequency fan 13 and a tail gas treatment system 14 which are positioned at the lower part of the first closed space 1 are used as an air exhaust system of the first closed space 1 and exhausted out of the second closed space 2. The whole second closed space 2 is also kept at a pressure of-10 mbar, which is detected by a second differential pressure gauge 27. The third variable frequency fan 21 and the second controllable butterfly valve 22 which are positioned at the top of the whole second closed space 2 are used as air inlet of the whole second closed space 2, and the fourth variable frequency fan 23 and the exhaust pipeline which are positioned at the lower part of the second closed space 2 are used as an exhaust system of the second closed space 2 and are exhausted out of the second closed space 2.
If the special gas manufacturing equipment 6 leaks, the special gas detection device detects a special gas signal and feeds the special gas signal back to the controller 3.
The controller 3 cuts off the power supply to the special gas producing apparatus 6 to stop the special gas production. The frequency of the first variable frequency fan 11 is increased to increase the air inlet amount of the first closed space, the frequency of the second variable frequency fan 13 is increased to increase the air exhaust amount of the first closed space, the pressure of the first controllable butterfly valve 12 is adjusted, and the pressure of the first differential pressure gauge 17 is kept at-10 mbar pressure. The third frequency conversion fan 21 increases the frequency to increase the air inlet volume of the second closed space 2, the fourth frequency conversion fan 23 increases the frequency to increase the air outlet volume of the second closed space 2, the pressure of the second controllable butterfly valve 22 is adjusted, and the pressure of the second differential pressure gauge 27 is kept at-20 mbar.
The special gas detection device in the first closed space 1 includes: the special gas detector I15 is arranged on the inner wall of the first closed space 1, and the special gas detector II 16 is arranged outside a pipeline of the special gas manufacturing equipment 6;
the device for detecting the special gas in the second closed space 2 comprises: a third special gas detector 25 arranged on the inner wall of the second closed space 2 and a fourth special gas detector 26 carried by an operator in the closed space for monitoring special gas.
In order to guarantee operating personnel's safety more, operating personnel need dress personal protective equipment and spontaneous respirator when second airtight space 2 operates, do not breathe the air in the second airtight space 2 during the operation to operating personnel carries detector four 26, when special gas leaks second airtight space 2, can directly not endanger operating personnel.
The first special gas detector 15 and the second special gas detector 16 are different types of detectors, such as different types of arsine detectors.
In practical applications, the special gas detection device of the special gas manufacturing system further includes a smoke detector 28 and the like.
If the first special gas detector 15 or the second special gas detector 16 gives an alarm, and the third special gas detector 25 and the fourth special gas detector 26 do not give an alarm, the controller 3 cuts off the power supply of the special gas manufacturing equipment 6 and stops the special gas manufacturing. The frequency of the first variable frequency fan 11 is increased to increase the air inlet volume of the first closed space, the frequency of the second variable frequency fan 13 is increased to increase the air exhaust volume of the first closed space, the pressure of the first controllable butterfly valve 12 is adjusted, and the pressure of the first differential pressure gauge 17 is kept at-10 mbar pressure for 1 hour.
If the third special gas detector 25 gives an alarm or the fourth special gas detector 26, the controller 3 cuts off the power supply of the special gas manufacturing equipment 6 and stops the special gas manufacturing. The frequency conversion fan I11 increases the frequency and makes first airtight space 1 increase the intake, frequency conversion fan II 13 increases the frequency, increase the volume of airing exhaust of first airtight space 1, adjust the pressure of controllable butterfly valve I12, keep the pressure of first pressure differential gauge 17 at-10 mbar pressure, simultaneously, frequency conversion fan three 21 increases the frequency and makes second airtight space 2 increase the intake, frequency conversion fan four 23 increases the frequency, increase the volume of airing exhaust of second airtight space 2, adjust the pressure of controllable butterfly valve II 22, keep the pressure of second pressure differential gauge 27 at-20 mbar pressure, last 1 hour.
If the third special gas detector 25 alarms, and the first special gas detector 15 or the second special gas detector 16 does not alarm, the special gas detection device feeds back to the controller 3, and the first special gas detector 15 or the second special gas detector 16 has faults and needs to be maintained or replaced.
Alternatively, the second enclosed space 2 is a movable container, or a fixedly arranged production shop.
In the semiconductor production, the movable container can be installed near the semiconductor processing production equipment which needs to use special gas, the special gas is produced on line, and the produced special gas directly carries out the semiconductor processing production. The storage and the transportation are reduced, and the cost of customers is greatly reduced. The risk of storing special gas is also reduced. When the demand of special gas is very large or various special gases are needed, a plurality of container devices can be connected in parallel, the installation and the hoisting are convenient, and a factory building does not need to be separately established.
Optionally, the shielding gas source is nitrogen gas 19.
If the first special gas detector 15 or the second special gas detector 16 alarms or the smoke detector 28 detects smoke or special gas or fire, the first negative pressure maintaining device opens the nitrogen 19 electric valve to fill the closed space 2 with nitrogen, so as to prevent fire.
Alternatively, the first enclosed space 1 is one of a glove box and a container.
In another alternative, the special gas manufacturing system further includes: the video monitoring system 4 is used for acquiring image information in the second closed space 2;
the video monitoring system 4 comprises an image acquisition device arranged in the second closed space 2 and a server 5 remotely connected with the image acquisition device, and the server 5 is connected with the controller 3.
The server 5 may send an alarm over the network.
During the special gas production process, the communication can be established between the server 5 connected remotely and the special gas using equipment 7 of the semiconductor processing production needing to use the special gas, and the special gas is produced according to the production process demand of the semiconductor processing production equipment. If the alarm signal appears, the special gas supply signal is stopped, and the special gas using equipment 7 is informed to stop supplying the special gas signal through the server 5.
Finally, it should be noted that: the above-mentioned embodiments are only used for illustrating the technical solution of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (9)
1. A specialty gas production system, comprising: the special gas production device comprises a first closed space and a second closed space, wherein the first closed space is arranged in the second closed space, special gas production equipment is arranged in the first closed space, and an operation end for arranging the special gas production equipment is arranged in the second closed space outside the first closed space; the first closed space comprises a first negative pressure maintaining device, and the first negative pressure maintaining device is used for enabling the first closed space to be in a first negative pressure state; the second closed space comprises a second negative pressure maintaining device, the second negative pressure maintaining device is used for enabling the second closed space to be in a second negative pressure state, and the value of the second negative pressure state is larger than that of the first negative pressure state.
2. The special gas manufacturing system according to claim 1, wherein the first negative pressure maintaining device comprises: the variable frequency fan I, the variable frequency fan II and the controllable butterfly valve I are arranged on the base;
the first variable frequency fan and the first controllable butterfly valve are connected in series through a first pipeline; the first pipeline comprises a gas inlet and a gas outlet, the gas outlet of the first pipeline is communicated with the first closed space, and the gas inlet is communicated with a protective gas source or atmosphere;
the variable frequency fan is connected with a tail gas treatment system of the special gas manufacturing equipment in series through a second pipeline, the second pipeline comprises a gas inlet and a gas outlet, the gas inlet of the second pipeline is communicated with the first closed space, and the gas outlet is communicated with the atmosphere;
the protective gas source is positioned in the second closed space or outside the second closed space.
3. The specialty gas manufacturing system according to claim 1, wherein said second negative pressure maintaining means comprises: a third variable frequency fan, a fourth variable frequency fan and a second controllable butterfly valve;
the third variable frequency fan and the controllable butterfly valve are connected in series through a third pipeline, the third pipeline comprises an air inlet and an air outlet, the air outlet of the third pipeline is communicated with the second closed space, and the air inlet is communicated with a protective gas source or atmosphere;
the fourth variable frequency fan exhausts the gas in the second closed space out of the second closed space through an exhaust pipeline, the exhaust pipeline comprises a gas inlet and a gas outlet, the gas inlet of the exhaust pipeline is communicated with the second closed space, and the gas outlet of the exhaust pipeline is communicated with the atmosphere;
the protective gas source is positioned in the second closed space or outside the second closed space.
4. The special gas manufacturing system according to claim 1, wherein at least one special gas detecting device is further disposed in each of the first enclosed space and the second enclosed space of the special gas manufacturing system.
5. The special gas manufacturing system according to claim 1, wherein the second enclosed space is a container or a fixedly installed manufacturing shop, and the container is installed on a movable facility.
6. The specialty gas production system according to claim 2 or 3, wherein the shielding gas source is nitrogen.
7. The specialty gas manufacturing system according to claim 1, further comprising at least a first differential pressure gauge and a second differential pressure gauge;
the first detection end of the first differential pressure meter is arranged in the second closed space, and the second detection end of the first differential pressure meter is arranged in the first closed space, so that the differential pressure between the first closed space and the second closed space is determined through the first differential pressure meter;
the first detection end of the second differential pressure meter is arranged at the atmosphere end, and the second detection end of the second differential pressure meter is arranged in the second enclosed space, so that the pressure difference between the second enclosed space and the atmosphere is determined through the second differential pressure meter.
8. The specialty gas production system according to claim 1, further comprising: the video monitoring system is used for acquiring image information in the closed space;
the video monitoring system comprises an image acquisition device arranged in the closed space and a server remotely connected with the image acquisition device, and the server is connected with the controller.
9. The special gas manufacturing system according to claim 1, wherein the first enclosed space is one of a glove box and a container.
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| CN201920233187.8U CN209822004U (en) | 2019-02-22 | 2019-02-22 | Special gas manufacturing system |
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| CN201920233187.8U CN209822004U (en) | 2019-02-22 | 2019-02-22 | Special gas manufacturing system |
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| CN209822004U true CN209822004U (en) | 2019-12-20 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114241722A (en) * | 2021-12-06 | 2022-03-25 | 福建钰融科技有限公司 | Waste liquid transportation safety early warning method and device |
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2019
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114241722A (en) * | 2021-12-06 | 2022-03-25 | 福建钰融科技有限公司 | Waste liquid transportation safety early warning method and device |
| CN114241722B (en) * | 2021-12-06 | 2024-01-16 | 福建钰融科技有限公司 | Waste liquid transportation safety early warning method and device |
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Effective date of registration: 20210125 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |