CN212565317U - Full-automatic special gas supply control equipment - Google Patents
Full-automatic special gas supply control equipment Download PDFInfo
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- CN212565317U CN212565317U CN202021190665.0U CN202021190665U CN212565317U CN 212565317 U CN212565317 U CN 212565317U CN 202021190665 U CN202021190665 U CN 202021190665U CN 212565317 U CN212565317 U CN 212565317U
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Abstract
The utility model discloses a full-automatic special gas supply control device, which comprises a process gas supply module, a purging and vacuumizing module and a high-pressure leakage detection module; the process gas supply module is used for supplying special gas to the process gas output pipeline; the purging and vacuumizing module is used for performing replacement treatment when the steel cylinder is replaced; the high-pressure leakage detection module is used for detecting whether the air supply system leaks or not before air supply. The utility model discloses can also realize high pressure leak hunting before gas supply steel bottle safety replacement and the gas supply when controlling special gaseous safe gas supply, set up a plurality of pressure sensor and read pressure everywhere to PLC control to and the accessible PLC controller is opened or the control of closed condition to everywhere pneumatic diaphragm valve, can realize the incessant air feed of full-automatic 24 hours, effectively ensure special gaseous with gas safety.
Description
Technical Field
The utility model relates to a special gas air feed technical field, in particular to full-automatic air feed controlgear of special gas.
Background
The special gases such as hydrogen (H2), acetylene (C2H2), methane (CH4), ethylene (C2H4) and the like belong to flammable and explosive gases, the high-risk special gases such as silane (SiH4), phosphane (PH3) and the like are spontaneous flammable gases, and ammonia (NH3), hydrogen chloride (HCl), laughing gas (nitrogen O), chlorine (Cl2) and the like are toxic and corrosive gases. More and more special gases are used in IC chips, new energy, materials, microelectronics, photovoltaics, biomedical and other related hot spot industries, and the gas use safety of the special gases is increasingly emphasized.
At present, some factories, laboratories and production workshops do not understand the rationality of the use of special gas deeply, and even the special gas steel cylinder is directly used for gas supply, so that hidden dangers can be buried under the safety of places. In addition, most of the existing special gas supply equipment is manually controlled, the requirement on operators is high, on one hand, the personnel need to be trained for a long time on duty, and on the other hand, if the personnel have misoperation, the special gas leaks, the special gas can cause great harm to the environment and the operators, and even the life safety is influenced.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem that there is the potential safety hazard in the supply and the use of current colleges and universities scientific research laboratory, workshop etc. to special gas, the utility model provides a full-automatic air feed controlgear of special gas combines the complicated dangerous nature of special gas, and full-automatic 24 hours incessant air supplies are realized to the accessible control panel for safe in utilization high-efficient to special gas.
Specifically, the utility model provides a full-automatic air feed controlgear of special gas, include: the device comprises a process gas supply module, a purging and vacuumizing module and a high-pressure leakage detection module; the process gas supply module comprises a first gas supply elbow, a first filter, a first high-pressure pneumatic diaphragm valve, a first pressure regulating valve, a first low-pressure pneumatic diaphragm valve, a low-pressure manual diaphragm valve and a process gas output pipeline which are connected in sequence; the purge vacuum pumping module comprises: the second air supply elbow, the second filter, the high-pressure manual diaphragm valve, the second pressure regulating valve, the second low-pressure pneumatic diaphragm valve, the first check valve, the second check valve and the second high-pressure pneumatic diaphragm valve are sequentially connected, a third high-pressure pneumatic diaphragm valve, a vacuum generator and a functional gas output pipeline are connected with the outlet end of the first filter and are sequentially connected, and a fourth high-pressure pneumatic diaphragm valve is connected with the vacuum generator and the inlet end of the second check valve; the high-pressure leak hunting module is with sweep the evacuation module sharing the second air feed return bend, the second filter, the manual diaphragm valve of high pressure and on the basis of the pneumatic diaphragm valve of second high pressure, still including connecting the exit end of the manual diaphragm valve of high pressure with the fifth high-pressure pneumatic diaphragm valve of the exit end of second check valve.
Furthermore, a first high-pressure sensor is arranged at the outlet end of the first air supply elbow, a low-pressure sensor is arranged at the inlet end of the low-pressure manual diaphragm valve, and a second high-pressure sensor is arranged on the second pressure regulating valve; the first high-pressure pneumatic diaphragm valve, the first low-pressure pneumatic diaphragm valve, the second high-pressure pneumatic diaphragm valve, the third high-pressure pneumatic diaphragm valve, the vacuum generator, the fourth high-pressure pneumatic diaphragm valve, the fifth high-pressure pneumatic diaphragm valve, the first high-pressure sensor, the low-pressure sensor and the second high-pressure sensor are all connected with a PLC (programmable logic controller).
Further, the inlet end of the first gas supply elbow is connected with a special gas steel cylinder.
Furthermore, the inlet end of the second gas supply elbow is connected with a high-purity nitrogen gas steel cylinder.
Further, the first pressure regulating valve and the second pressure regulating valve are both manual pressure regulating valves.
The beneficial effects of the utility model reside in that:
the process gas supply module, the purging and vacuumizing module and the high-pressure leakage detection module are integrated, so that safe replacement of a gas supply steel cylinder and high-pressure leakage detection before gas supply can be realized while safe gas supply of special gas is controlled, and the gas use safety of the special gas is effectively guaranteed; the high-pressure leakage detection module and the purging and vacuumizing module share the same gas source, high-pressure gas is branched from the steel cylinder, and a separate external gas source is not needed, so that the device is convenient and efficient, and meanwhile, the equipment cost is saved; the device is provided with a plurality of pressure sensors for reading the pressure at each position to be controlled by a PLC (programmable logic controller), and the pneumatic diaphragm valves at each position can be controlled to be opened or closed by the PLC, so that full-automatic 24-hour uninterrupted gas supply can be realized, and technicians after simple training can use the device quickly and conveniently; the gas supply control equipment can be linked with an external gas detection system through the PLC, and gas supply safety is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
The objects, features and advantages of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments, not all embodiments, of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Examples
Referring to fig. 1, the utility model provides a full-automatic air feed controlgear embodiment of special gas, include: the device comprises a process gas supply module, a purging and vacuumizing module and a high-pressure leakage detection module; the process gas supply module comprises a first gas supply elbow 1, a first filter 2, a first high-pressure pneumatic diaphragm valve 3, a first pressure regulating valve 4, a first low-pressure pneumatic diaphragm valve 5, a low-pressure manual diaphragm valve 6 and a process gas output pipeline 7 which are connected in sequence; the purging and vacuumizing module comprises: the second air supply elbow 8, the second filter 9, the high-pressure manual diaphragm valve 10, the second pressure regulating valve 11, the first low-pressure pneumatic diaphragm valve 12, the first check valve 13, the second check valve 14 and the second high-pressure pneumatic diaphragm valve 15 are connected in sequence, the third high-pressure pneumatic diaphragm valve 16, the vacuum generator 17 and the functional gas output pipeline 19 are connected to the outlet end of the first filter 2 and connected in sequence, and the fourth high-pressure pneumatic diaphragm valve 18 is connected to the inlet ends of the vacuum generator 17 and the second check valve 14; the high-pressure leak detection module further comprises a fifth high-pressure pneumatic diaphragm valve 20 which is connected with the outlet end of the high-pressure manual diaphragm valve 10 and the outlet end of the second one-way valve 14 on the basis that the high-pressure leak detection module and the sweeping and vacuumizing module share the second air supply elbow 8, the second filter 9, the high-pressure manual diaphragm valve 10 and the second high-pressure pneumatic diaphragm valve 15.
Specifically, the process gas supply module is used for supplying special gas to the process gas output pipeline 7, and when the first high-pressure pneumatic diaphragm valve 3, the first low-pressure pneumatic diaphragm valve 5 and the low-pressure manual diaphragm valve 6 are all in an open state, the special gas can be supplied to the process gas output pipeline 7. The purging and vacuumizing module is used for replacement treatment when a steel cylinder is replaced, high-purity nitrogen is used for diluting and purging the gas supply system through the second gas supply bent pipe 8, the second filter 9, the high-pressure manual diaphragm valve 10, the second pressure regulating valve 11, the second low-pressure pneumatic diaphragm valve 12, the first check valve 13, the second check valve 14 and the second high-pressure pneumatic diaphragm valve 15 before the steel cylinder is replaced, then safe ventilation can be performed, and nitrogen in the gas supply system is pumped away through the third high-pressure pneumatic diaphragm valve 16 and the fourth high-pressure pneumatic diaphragm valve 18 by the vacuum generator 17 after the steel cylinder is replaced, so that the cleanliness of process gas is guaranteed. The high-pressure leakage detection module is used for detecting whether the air supply system leaks or not before air supply, high-pressure inert gas is put into the air supply system through the second air supply bent pipe 8, the second filter 9, the high-pressure manual diaphragm valve 10, the fifth high-pressure pneumatic diaphragm valve 20 and the second high-pressure pneumatic diaphragm valve 15 before air supply, whether the pressure of the system fluctuates or not is detected after the system is kept for a period of time, and the air supply process can be continued if the pressure does not fluctuate. The high-pressure leakage detection module and the purging and vacuumizing module share the same air source, high-pressure gas is branched from the steel cylinder, and the high-pressure leakage detection module is convenient and efficient without being connected with an external air source independently.
Further, referring to fig. 1, the outlet end of the first air supply elbow 1 is provided with a first high pressure sensor 21, the inlet end of the low pressure manual diaphragm valve 6 is provided with a low pressure sensor 22, and the second pressure regulating valve 11 is provided with a second high pressure sensor 23; the first high-pressure pneumatic diaphragm valve 3, the first low-pressure pneumatic diaphragm valve 5, the second low-pressure pneumatic diaphragm valve 12, the second high-pressure pneumatic diaphragm valve 15, the third high-pressure pneumatic diaphragm valve 16, the vacuum generator 17, the fourth high-pressure pneumatic diaphragm valve 18, the fifth high-pressure pneumatic diaphragm valve 20, the first high-pressure sensor 21, the low-pressure sensor 22 and the second high-pressure sensor 23 are all connected with the PLC.
Specifically, each pressure sensor is used for reading the pressure everywhere in the air supply system in real time and goes to the PLC controller in order to carry out other operations, and the user also can be further through the display device who connects in the PLC controller sees the pressure numerical value. The pneumatic diaphragm valves at all positions can be controlled to be opened or closed through a PLC controller, so that manual operation is separated, and automatic control is realized. In addition, the external gas detection system can be linked to the PLC, and when the gas detection system detects gas leakage, the PLC can be used for controlling the pneumatic diaphragm valves at all positions to stop gas supply so as to improve safety.
Further, referring to fig. 1, the inlet end of the first gas supply elbow 1 is connected to a special gas cylinder 24.
Further, referring to fig. 1, the inlet end of the second gas supply elbow 8 is connected to a cylinder 25 of high purity nitrogen gas.
Further, referring to fig. 1, the first and second pressure regulating valves 4 and 11 are both manual pressure regulating valves. The first pressure regulating valve 4 is used for regulating the supply air pressure of the process gas, the second pressure regulating valve 11 is used for regulating the supply air pressure of the high-purity nitrogen, a user can regulate the air supply pressure according to actual requirements, and the first pressure regulating valve 4 and the second pressure regulating valve 11 are provided with pressure gauges so that the user can see the real-time pressure when the operation is facilitated.
To sum up, the embodiment of the full-automatic special gas supply control device provided by the utility model integrates the process gas supply module, the purging and vacuumizing module and the high-pressure leakage detection module, and can realize safe replacement of the gas supply steel cylinder and high-pressure leakage detection before gas supply while controlling the safe gas supply of the special gas, thereby effectively ensuring the gas safety of the special gas; the high-pressure leakage detection module and the purging and vacuumizing module share the same gas source, high-pressure gas is branched from the steel cylinder, and a separate external gas source is not needed, so that the device is convenient and efficient, and meanwhile, the equipment cost is saved; the device is provided with a plurality of pressure sensors for reading the pressure at each position to be controlled by a PLC (programmable logic controller), and the pneumatic diaphragm valves at each position can be controlled to be opened or closed by the PLC, so that full-automatic 24-hour uninterrupted gas supply can be realized, and technicians after simple training can use the device quickly and conveniently; the gas supply control equipment can be linked with an external gas detection system through the PLC, and gas supply safety is improved.
The utility model discloses powerful, easy operation can extensively quote in industries such as laboratory, medical treatment, scientific research, semiconductor, photovoltaic solar energy, new forms of energy, lets the supply of hazardous gas be in a state simple, high-efficient, stable, safe, and it brings very big facility to develop for the obstetrical department.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: it is to be understood that modifications may be made to the above-described arrangements in the embodiments or equivalents may be substituted for some of the features of the embodiments without departing from the spirit or scope of the present invention.
Claims (5)
1. The utility model provides a full-automatic gas supply controlgear of special gas which characterized in that includes: the device comprises a process gas supply module, a purging and vacuumizing module and a high-pressure leakage detection module; the process gas supply module comprises a first gas supply elbow (1), a first filter (2), a first high-pressure pneumatic diaphragm valve (3), a first pressure regulating valve (4), a first low-pressure pneumatic diaphragm valve (5), a low-pressure manual diaphragm valve (6) and a process gas output pipeline (7) which are connected in sequence; the purge vacuum pumping module comprises: the device comprises a second air supply elbow (8), a second filter (9), a high-pressure manual diaphragm valve (10), a second pressure regulating valve (11), a second low-pressure pneumatic diaphragm valve (12), a first one-way valve (13), a second one-way valve (14) and a second high-pressure pneumatic diaphragm valve (15) which are sequentially connected, a third high-pressure pneumatic diaphragm valve (16), a vacuum generator (17) and a functional gas output pipeline (19) which are connected with the outlet end of the first filter (2) and are sequentially connected, and a fourth high-pressure pneumatic diaphragm valve (18) which is connected with the vacuum generator (17) and the inlet end of the second one-way valve (14); the high-pressure leak hunting module with sweep the share of evacuation module second air feed return bend (8), second filter (9) manual diaphragm valve of high pressure (10) with on the basis of the pneumatic diaphragm valve of second high pressure (15), still including connecting the exit end of the manual diaphragm valve of high pressure (10) with the pneumatic diaphragm valve of fifth high pressure (20) of the exit end of second check valve (14).
2. A full-automatic special gas supply control device according to claim 1, wherein the outlet end of the first gas supply elbow (1) is provided with a first high pressure sensor (21), the inlet end of the low pressure manual diaphragm valve (6) is provided with a low pressure sensor (22), and the second pressure regulating valve (11) is provided with a second high pressure sensor (23); the first high-pressure pneumatic diaphragm valve (3), the first low-pressure pneumatic diaphragm valve (5), the second low-pressure pneumatic diaphragm valve (12), the second high-pressure pneumatic diaphragm valve (15), the third high-pressure pneumatic diaphragm valve (16), the vacuum generator (17), the fourth high-pressure pneumatic diaphragm valve (18), the fifth high-pressure pneumatic diaphragm valve (20), the first high-pressure sensor (21), the low-pressure sensor (22) and the second high-pressure sensor (23) are all connected with a PLC (programmable logic controller).
3. A full automatic special gas supply control device as claimed in claim 2, characterized in that the inlet end of the first gas supply elbow (1) is connected with a special gas cylinder (24).
4. The full-automatic special gas supply control device as claimed in claim 2, wherein the inlet end of the second gas supply elbow (8) is connected with a high-purity nitrogen gas cylinder (25).
5. A full automatic special gas supply control device as claimed in claim 2, characterized in that said first pressure regulating valve (4) and said second pressure regulating valve (11) are manual pressure regulating valves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021190665.0U CN212565317U (en) | 2020-06-24 | 2020-06-24 | Full-automatic special gas supply control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021190665.0U CN212565317U (en) | 2020-06-24 | 2020-06-24 | Full-automatic special gas supply control equipment |
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| Publication Number | Publication Date |
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| CN212565317U true CN212565317U (en) | 2021-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202021190665.0U Active CN212565317U (en) | 2020-06-24 | 2020-06-24 | Full-automatic special gas supply control equipment |
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| CN (1) | CN212565317U (en) |
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