CN218409526U - Carbon dioxide fills dress device - Google Patents
Carbon dioxide fills dress device Download PDFInfo
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- CN218409526U CN218409526U CN202222985185.9U CN202222985185U CN218409526U CN 218409526 U CN218409526 U CN 218409526U CN 202222985185 U CN202222985185 U CN 202222985185U CN 218409526 U CN218409526 U CN 218409526U
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Abstract
The utility model provides a carbon dioxide filling device, which comprises a storage tank, a cryogenic liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuum-pumping pipeline, a second vacuum-pumping pipeline and a purifying vacuum pump; the first vacuum-pumping pipeline is communicated with the first pipeline, and a third control valve for controlling the on-off of the first vacuum-pumping pipeline is arranged on the first vacuum-pumping pipeline; the second vacuum-pumping pipeline is communicated with the third pipeline, and a fourth control valve for controlling the second vacuum-pumping pipeline to be switched on and off is arranged on the second vacuum-pumping pipeline; and the air suction port of the purification vacuum pump is communicated with the first vacuumizing pipeline and the second vacuumizing pipeline. Compared with the prior art, the utility model provides a carbon dioxide fills dress device, guarantee that can be better fills the purity that fills dress back carbon dioxide, satisfies high-purity carbon dioxide and fills the dress demand.
Description
Technical Field
The utility model relates to a carbon dioxide fills dress technical field, especially relates to a carbon dioxide fills dress device.
Background
High purity carbon dioxide is usually stored in a liquid state, and in the prior art, the liquid carbon dioxide is usually stored in a large storage tank in a centralized manner, and when the carbon dioxide is filled, the liquid carbon dioxide is filled into a small gas cylinder through a pipeline by a filling pump.
However, in the prior art, residual gas is easily present in the pipe. During filling, under the driving of the filling pump, liquid carbon dioxide in the storage tank and residual gas in the pipeline are filled into the gas cylinder together, so that the purity of the carbon dioxide in the gas cylinder is influenced, and the purity of the carbon dioxide in the gas cylinder cannot meet the requirement.
SUMMERY OF THE UTILITY MODEL
The technical problem that in the prior art, when carbon dioxide is filled, residual gas in a pipeline can be filled into a gas cylinder together, so that the purity of the carbon dioxide is influenced is solved. The utility model provides a carbon dioxide fills dress device, it is provided with the evacuation structure, can be with remaining gas outgoing in the pipeline in filling dress preparation earlier stage, more effectual clean-up pipeline environment to the carbon dioxide purity after the guarantee that can be better fills the dress satisfies high-purity carbon dioxide and fills the dress demand.
A carbon dioxide filling device comprises a storage tank, a cryogenic liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuumizing pipeline, a second vacuumizing pipeline and a purifying vacuum pump;
one end of the first pipeline is communicated with a liquid phase port of the storage tank, the other end of the first pipeline is communicated with a liquid inlet of the cryogenic liquid pump, and a first control valve for controlling the on-off of the first pipeline is arranged on the first pipeline;
one end of the second pipeline is communicated with a liquid outlet of the low-temperature liquid pump; a first pressure gauge for detecting the internal pressure of the second pipeline is arranged on the second pipeline;
one end of the third pipeline is communicated with the other end of the second pipeline, and the other end of the third pipeline is communicated with a liquid phase inlet of the gas cylinder; a second control valve for controlling the on-off of the third pipeline is arranged on the third pipeline, a second pressure gauge for detecting the internal pressure of the third pipeline is also arranged on the third pipeline, and the second pressure gauge is positioned at one end, far away from the second pipeline, of the second control valve;
the first vacuum-pumping pipeline is communicated with the first pipeline, and a third control valve for controlling the on-off of the first vacuum-pumping pipeline is arranged on the first vacuum-pumping pipeline;
the second vacuum-pumping pipeline is communicated with the third pipeline, and a fourth control valve for controlling the second vacuum-pumping pipeline to be switched on and off is arranged on the second vacuum-pumping pipeline;
and the air suction port of the purification vacuum pump is communicated with the first vacuumizing pipeline and the second vacuumizing pipeline.
Preferably, the helium detection device further comprises a helium detection pipeline, wherein the helium detection pipeline is communicated with the first vacuumizing pipeline and the second vacuumizing pipeline and is used for filling helium for helium detection.
Preferably, the gas cylinder further comprises a gas outlet pipe, wherein the gas outlet pipe is used for communicating with a gas phase outlet of the gas cylinder; and a fifth control valve for controlling the on-off of the exhaust pipeline is arranged on the exhaust pipeline.
Preferably, the device also comprises a pressure relief pipeline, wherein the pressure relief pipeline is communicated with the other end of the second pipeline; a sixth control valve for controlling the on-off of the pressure relief pipeline is arranged on the pressure relief pipeline;
the exhaust duct is in communication with the pressure relief duct.
Preferably, the gas storage tank further comprises a gas phase pipeline, one end of the gas phase pipeline is communicated with the gas phase port of the storage tank, and the other end of the gas phase pipeline is communicated with the third pipeline; and the gas phase pipeline is provided with a seventh control valve and an eighth control valve for controlling the gas phase pipeline to be switched on and off, the seventh control valve is positioned at one end close to the storage tank, and the eighth control valve is positioned at one end close to the third pipeline.
Preferably, the system further comprises a first analysis pipeline, wherein the first analysis pipeline is communicated with the storage tank and is used for analyzing the raw materials in the storage tank; and a ninth control valve for controlling the on-off of the first analysis pipeline is arranged on the first analysis pipeline.
Preferably, the gas cylinder further comprises a second analysis pipeline, wherein the second analysis pipeline is communicated with the third pipeline and is used for analyzing the raw materials filled in the gas cylinder; and a tenth control valve for controlling the on-off of the second analysis pipeline is arranged on the second analysis pipeline.
Preferably, the gas cylinder weighing device further comprises a weighing instrument used for weighing the gas cylinder, and the weighing instrument is electrically connected with the second control valve and used for controlling the second control valve.
Compared with the prior art, the utility model provides a carbon dioxide fills dress device, it includes storage tank, cryogenic liquid pump, first pipeline, second pipeline, third pipeline, first evacuation pipeline, second evacuation pipeline and purification vacuum pump; one end of the first pipeline is communicated with a liquid phase port of the storage tank, the other end of the first pipeline is communicated with a liquid inlet of the cryogenic liquid pump, and a first control valve for controlling the on-off of the first pipeline is arranged on the first pipeline; one end of the second pipeline is communicated with a liquid outlet of the low-temperature liquid pump; a first pressure gauge for detecting the internal pressure of the second pipeline is arranged on the second pipeline; one end of the third pipeline is communicated with the other end of the second pipeline, and the other end of the third pipeline is communicated with a liquid phase inlet of the gas cylinder; a second control valve for controlling the on-off of the third pipeline is arranged on the third pipeline, a second pressure gauge for detecting the internal pressure of the third pipeline is also arranged on the third pipeline, and the second pressure gauge is positioned at one end, far away from the second pipeline, of the second control valve; the first vacuum-pumping pipeline is communicated with the first pipeline, and a third control valve for controlling the on-off of the first vacuum-pumping pipeline is arranged on the first vacuum-pumping pipeline; the second vacuum-pumping pipeline is communicated with the third pipeline, and a fourth control valve for controlling the second vacuum-pumping pipeline to be switched on and off is arranged on the second vacuum-pumping pipeline; and the air suction port of the purification vacuum pump is communicated with the first vacuumizing pipeline and the second vacuumizing pipeline. The first vacuum-pumping pipeline, the second vacuum-pumping pipeline and the purification vacuum pump are arranged in the carbon dioxide filling device, so that residual gas in the pipelines can be pumped out through the purification vacuum pump through the first vacuum-pumping pipeline and the second vacuum-pumping pipeline before carbon dioxide is filled, the carbon dioxide filling device can be vacuumized, the pipeline environment can be purified more effectively, the purity of filled carbon dioxide can be better guaranteed, and the filling requirement of high-purity carbon dioxide can be met.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural view of a carbon dioxide charging device according to an embodiment
Detailed Description
In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It will be understood that when an element is referred to as being "secured to", "mounted to" or "disposed on" another element, it can be directly on the other element or be indirectly disposed on the other element; when an element is "connected" to another element, or is referred to as being "connected" to another element, it can be directly connected or indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "plurality" or "a plurality" means two or more unless specifically limited otherwise.
It should be understood that the structures, ratios, sizes, and the like shown in the drawings are only used for matching the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions that the present application can be implemented, so that the present application has no technical significance.
The utility model provides a carbon dioxide filling device, which comprises a storage tank, a cryogenic liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuum-pumping pipeline, a second vacuum-pumping pipeline and a purifying vacuum pump; one end of the first pipeline is communicated with a liquid phase port of the storage tank, the other end of the first pipeline is communicated with a liquid inlet of the cryogenic liquid pump, and a first control valve for controlling the on-off of the first pipeline is arranged on the first pipeline; one end of the second pipeline is communicated with a liquid outlet of the low-temperature liquid pump; a first pressure gauge for detecting the internal pressure of the second pipeline is arranged on the second pipeline; one end of the third pipeline is communicated with the other end of the second pipeline, and the other end of the third pipeline is communicated with a liquid phase inlet of the gas cylinder; a second control valve for controlling the on-off of the third pipeline is arranged on the third pipeline, a second pressure gauge for detecting the internal pressure of the third pipeline is also arranged on the third pipeline, and the second pressure gauge is positioned at one end, far away from the second pipeline, of the second control valve; the first vacuum-pumping pipeline is communicated with the first pipeline, and a third control valve for controlling the on-off of the first vacuum-pumping pipeline is arranged on the first vacuum-pumping pipeline; the second vacuum-pumping pipeline is communicated with the third pipeline, and a fourth control valve for controlling the second vacuum-pumping pipeline to be switched on and off is arranged on the second vacuum-pumping pipeline; and the air suction port of the purification vacuum pump is communicated with the first vacuumizing pipeline and the second vacuumizing pipeline. The first vacuum-pumping pipeline, the second vacuum-pumping pipeline and the purification vacuum pump are arranged in the carbon dioxide filling device, so that residual gas in the pipelines can be pumped out through the purification vacuum pump through the first vacuum-pumping pipeline and the second vacuum-pumping pipeline before carbon dioxide is filled, the carbon dioxide filling device can be vacuumized, the pipeline environment can be purified more effectively, the purity of filled carbon dioxide can be better guaranteed, and the filling requirement of high-purity carbon dioxide can be met.
Please refer to fig. 1. The present embodiment provides a carbon dioxide filling apparatus 100 for filling a Y-TANK with 99.999% carbon dioxide in liquid form. Specifically, the carbon dioxide filling device 100 provided by this embodiment is used for filling an industrial high-purity-level (metal ion detection limit requirement) carbon dioxide Y-TANK in a carbon dioxide storage TANK, and the fully filled product Y-TANK is applied to high and new fields such as chip pipeline environment purging. In this embodiment, the Y-TANK TANK is specifically of 440L specification, but of course, in other embodiments, the Y-TANK TANK may also have other specification parameters.
The carbon dioxide filling device 100 comprises a storage tank 1, a cryogenic liquid pump 2, a first pipeline 3, a second pipeline 4, a third pipeline 5, a first vacuum-pumping pipeline 6, a second vacuum-pumping pipeline 7 and a purification vacuum pump.
One end of the first pipeline 3 is communicated with a liquid phase port of the storage tank 1, the other end of the first pipeline is communicated with a liquid inlet of the low-temperature liquid pump 2, and a first control valve 301 for controlling the on-off of the first pipeline 3 is arranged on the first pipeline.
One end of the second pipeline 4 is communicated with a liquid outlet of the low-temperature liquid pump 2, and a first pressure gauge 401 for detecting the internal pressure of the second pipeline 4 is arranged on the second pipeline 4.
One end of the third pipeline 5 is communicated with the other end of the second pipeline 4, and the other end of the third pipeline 5 is used for communicating a liquid phase inlet of a gas cylinder 200, in this embodiment, the gas cylinder 200 is specifically a Y-TANK. A second control valve 501 for controlling the on-off of the third pipeline 5 is arranged on the third pipeline 5, a second pressure gauge 502 for detecting the internal pressure of the third pipeline 5 is further arranged on the third pipeline 5, and the second pressure gauge 502 is located at one end, far away from the second pipeline 4, of the second control valve 501.
The first vacuum-pumping pipeline 6 is communicated with the first pipeline 3, and a third control valve 601 for controlling the on-off of the first vacuum-pumping pipeline 6 is arranged on the first vacuum-pumping pipeline.
The second vacuum-pumping pipeline 7 is communicated with the third pipeline 5, and a fourth control valve 701 for controlling the second vacuum-pumping pipeline 7 to be switched on and off is arranged on the second vacuum-pumping pipeline 7.
And the air suction port of the purification vacuum pump is communicated with the first vacuumizing pipeline 6 and the second vacuumizing pipeline 7.
By arranging the first vacuum-pumping pipeline 6 and the second vacuum-pumping pipeline 7, before filling carbon dioxide, the purifying vacuum pump can provide adsorption force to pump out residual gas in the pipelines. So that when carbon dioxide is filled, residual gas in the pipeline does not influence the purity of the carbon dioxide filled in the gas cylinder 200.
It will be appreciated that gas production filling enterprises are currently most developed with a simple "production + storage tank + tank transport + gas cylinder" filling model. While newly developed ISO-TANK (tankers) filling, and Y-TANK filling, which are less flexible, are not achieved. With the development of times, the development space of industrial gas markets in China is continuously expanded, and various global gas companies list China as key development areas, and enterprises are set up in joint or exclusive manner. In contrast, gas filling enterprises in China are influenced by a plurality of reasons such as scale, equipment, technology and talents, and cannot well meet the filling requirements of Y-TANK TANKs.
The carbon dioxide filling device 100 provided by the embodiment can empty the pipeline before filling, so that the purity of the carbon dioxide filled in the gas cylinder 200 can be better guaranteed, and the filling requirement of filling the high-purity carbon dioxide in the Y-TANK can be better met.
Preferably, the carbon dioxide filling device 100 further comprises a helium detection pipeline 8, and the helium detection pipeline 8 is communicated with the first vacuum-pumping pipeline 6 and the second vacuum-pumping pipeline 7 and is used for filling helium gas for helium detection. Specifically, when the first pressure gauge 401 shows that the vacuum degree is not qualified, the helium detection pipeline 8 can be conducted by opening the control valve on the helium detection pipeline 8, so that helium can be introduced into the helium detection pipeline 8 through the helium detection pipeline 8 to perform helium detection, and the air tightness can be better checked.
Preferably, the carbon dioxide filling device 100 further comprises an exhaust pipeline 9, the exhaust pipeline 9 is used for communicating with a gas phase outlet of the gas cylinder 200, and a fifth control valve 901 for controlling on-off of the exhaust pipeline 9 is arranged on the exhaust pipeline 9. Therefore, before the carbon dioxide is filled, the residues (residual liquid and residual gas) in the gas cylinder 200 can be discharged through the exhaust pipeline 9, and the purity of the carbon dioxide filled in the gas cylinder 200 is further ensured.
Preferably, the carbon dioxide filling device 100 further comprises a pressure relief pipeline 10, the pressure relief pipeline 10 is communicated with the other end of the second pipeline 4, a sixth control valve 1001 for controlling on and off of the pressure relief pipeline 10 is arranged on the pressure relief pipeline 10, and the exhaust pipeline 9 is communicated with the pressure relief pipeline 10. Therefore, before carbon dioxide is filled, the pipeline can be subjected to pressure relief through the pressure relief pipeline 10, and safety is better guaranteed.
Preferably, the carbon dioxide filling device 100 further comprises a gas phase pipeline 11, one end of the gas phase pipeline 11 is communicated with the gas phase port of the storage tank 1, and the other end of the gas phase pipeline 11 is communicated with the third pipeline 5. The gas phase pipeline 11 is provided with a seventh control valve 1101 and an eighth control valve 1102 for controlling the on-off of the gas phase pipeline, the seventh control valve 1101 is positioned at one end close to the storage tank 1, and the eighth control valve 1102 is positioned at one end close to the third pipeline 5. Therefore, the residue in the gas cylinder 200 can be replaced through the gas phase pipeline 11, and the residue in the gas cylinder 200 can be discharged better.
Preferably, the carbon dioxide filling apparatus 100 further includes a first analyzing pipeline 12, the first analyzing pipeline 12 is communicated with the storage tank 1 for analyzing the raw material in the storage tank 1, and a ninth control valve 1201 for controlling on-off of the first analyzing pipeline 12 is disposed on the first analyzing pipeline 12. Specifically, one end of the first analysis pipeline 12 is communicated with the storage tank 1, and the other end is communicated to an analysis chamber, so that the raw materials in the storage tank 1 can be analyzed on line. By arranging the first analysis pipeline 12, the carbon dioxide in the storage tank 1 can be analyzed before the carbon dioxide is filled, and the quality of the carbon dioxide filled in the gas cylinder 200 is ensured.
Preferably, the carbon dioxide charging device 100 further includes a second analysis pipeline 13, the second analysis pipeline 13 is communicated with the third pipeline 5 to analyze the raw material filled in the gas cylinder 200, and the second analysis pipeline 13 is provided with a tenth control valve 1301 for controlling the on-off state of the second analysis pipeline 13. Specifically, one end of the second analysis pipeline 13 is communicated with the third pipeline 5, and the other end is communicated to an analysis chamber, so that the raw material charged in the gas cylinder 200 can be analyzed on line. By providing the second analysis line 13 so that a certain amount of carbon dioxide gas can be previously charged into the gas cylinder 200 for on-line analysis, the quality of the carbon dioxide charged into the gas cylinder 200 can be further ensured.
Preferably, the carbon dioxide filling apparatus 100 further comprises a weighing device 14 for weighing the gas cylinder 200, and the weighing device 14 is electrically connected to the second control valve 501 for controlling the second control valve 501. Therefore, when carbon dioxide is filled, the second control valve 501 can be controlled by the weighing instrument 14 according to the weight of the gas cylinder 200, and further over-filling is avoided. The weighing instrument 14 is specifically a Y-cylindeder (horizontal gas CYLINDER) weighing instrument.
Preferably, the carbon dioxide filling device 100 further comprises an air return pipeline 15, one end of the air return pipeline 15 is communicated with the storage tank 1, the other end of the air return pipeline is communicated with the exhaust pipeline 9, and an eleventh control valve 1501 for controlling the on-off of the air return pipeline 15 is arranged on the air return pipeline 15. So that during filling, when the pressure in the gas cylinder 200 is too high, the carbon dioxide gas can be returned to the storage tank 1 through the gas return pipe 15.
The embodiment also provides a carbon dioxide filling method, which comprises the following steps:
providing the carbon dioxide charging device 100;
installing a gas cylinder: the third conduit 5 is in communication with the liquid phase inlet of the gas cylinder 200.
In this embodiment, the gas cylinder 200 is a Y-TANK having a liquid phase inlet and a gas phase outlet. During this step, the gas phase outlet of the gas cylinder 200 is also connected to the gas discharge line 9.
Specifically, in this embodiment, the gas cylinder 200 is placed on the weighing instrument 14, and then the liquid-phase filling pigtail and the gas-phase pigtail are connected, so as to communicate the third pipeline 5 and the exhaust pipeline 9 with the gas cylinder 200, and then it is confirmed that the liquid-phase valve and the gas-phase valve of the gas cylinder 200 are closed.
And (3) checking air tightness: and starting the purification vacuum pump, starting the third control valve 601 and the fourth control valve 701, performing vacuum pumping treatment on the filling pipeline and the low-temperature liquid pump 2 until the vacuum degree is qualified, and closing the purification vacuum pump, the third control valve 601 and the fourth control valve 701.
Preferably, the filling line pressure is observed via said first pressure gauge 401, said second pressure gauge 502, before being pumped by said purification vacuum pump. If the pressure exists, the airflow control valve 1001 is opened to release the pressure until the pressure is released to less than or equal to 2PSI.
In this embodiment, the vacuum degree is qualified until the first pressure gauge 401 indicates-14 PSI by pumping through the purification vacuum pump. If the vacuum degree is unqualified, a control valve on the helium detection pipeline 8 can be opened, helium gas is filled into the pipeline for helium detection, and the system air tightness is qualified.
Filling a gas cylinder: the first control valve 301 is opened, the low-temperature liquid pump 2 is opened, and the second control valve 501 and the liquid phase valve of the gas cylinder 200 are opened, so that the liquid carbon dioxide in the storage tank 1 is filled into the gas cylinder 200.
In this embodiment, the gas cylinder filling step specifically includes: and (4) checking the equipment condition, checking the sensitivity of the pressure gauge, the instrument gas source and the weighing scale and checking whether the safety valve is normal and intact, and immediately repairing or replacing the safety valve if the safety valve is abnormal. The scale 14 is zeroed. And confirming the weight, the volume and the like of the gas cylinder 200. Then the filling amount is calculated according to the carbon dioxide filling coefficient, and the filling is carried out by a scale.
The first control valve 301 is opened to introduce liquid carbon dioxide. And starting the cryogenic liquid pump 2, and observing the running condition of the cryogenic liquid pump 2. And opening the second control valve 501, and opening a liquid phase valve and a gas phase valve of the gas cylinder 200. The cylinder 200 begins to fill with liquid carbon dioxide. The filling pressure of the second pressure gauge 502 is observed when the filling pressure is greater than the pressure of the tank 1. The eleventh control valve 1501 is opened so that the carbon dioxide gas flows back to the storage tank 1 through the gas return pipe 15.
During filling, the second pressure gauge 502 is closely monitored and the filling pressure is controlled to be in the range of 2.2-4 MPa. The filling coefficient of the gas cylinder 200 is not more than 0.6kg/L. When the filling weight reaches the set value, the weighing instrument 14 controls the second control valve 501 to be closed in an interlocking manner. The gas cylinder 200 gas phase valve and liquid phase valve are closed rapidly by the field operator. The screen operator shuts down the cryogenic liquid pump 2 and opens the second control valve 501. And closing the first control valve 301, opening a pilot valve of a pilot pipeline communicated with the second pipeline 4 and discharging residual liquid in the filling pipeline by a field operator. And (5) observing the pressure of the second pressure gauge 502, closing the pilot shower valve after the pressure is less than 30PSI, and disassembling the liquid phase filling pipe.
The eleventh control valve 1501 is closed, the fifth control valve 901 is opened, and the residual pressure in the gas phase pipe is discharged. After the discharge is completed, the gas tube of the gas cylinder 200 is disassembled. By this point, the filling of the gas cylinder 200 is completed.
It should be noted that in other embodiments, when the gas cylinder 200 has only a liquid phase inlet, no gas phase outlet. The filling is started by filling 1.2-1.8MPA carbon dioxide gas in the early stage of filling, then starting the low-temperature liquid pump 2 to introduce the low-temperature liquid carbon dioxide into the filling pipe, and opening the filling valve to start filling. And (4) paying attention to filling pressure control, if the filling pressure is too high, opening a liquid phase return valve, and controlling the filling pressure to be not more than 4MPA.
Preferably, the method further comprises the following steps between the air tightness detection and the gas cylinder filling:
treatment of residue in the bottle: opening a gas phase valve of the gas cylinder 200, and opening a control valve on a gas exhaust pipeline communicated with a gas phase outlet of the gas cylinder 200 in the carbon dioxide filling device 100 to exhaust residual gas in the gas cylinder 200; filling carbon dioxide gas into the gas cylinder 200 through a gas phase pipeline in the carbon dioxide filling device 100, performing displacement discharge, and closing all valves after the displacement discharge is completed;
in this embodiment, the treatment of the residue in the bottle is specifically: and opening a gas phase valve of the gas cylinder 200, opening the fifth control valve 901, and discharging residual gas in the cylinder. After observing that the pressure of the second pressure gauge 502 reaches 2PSI, the fifth control valve 901 is closed. Then, the gas-phase hand valve (in this embodiment, the seventh control valve 1101) and the eighth control valve 1102 of the storage tank 1 are opened, and the liquid-phase valve of the gas cylinder 200 is opened, so as to fill carbon dioxide gas into the gas cylinder 200 for replacement discharge. Finally, all valves are closed.
Of course, in other embodiments, the fifth control valve 901 may be closed, the gas cylinder 200 is pressurized to about 2MPA, the gas phase hand valve of the storage tank 1 is closed, and then the fifth control valve 901 is opened to perform the periodic pressurization and the discharge, which is repeated many times.
Vacuumizing and purifying the gas cylinder, namely opening a liquid phase valve of the gas cylinder 200, opening the purifying vacuum pump, opening the fourth control valve 701, vacuumizing the gas cylinder 200, and closing the purifying vacuum pump, the fourth control valve 701 and the liquid phase valve of the gas cylinder 200 after the vacuum degree is qualified;
in this embodiment, the vacuum-pumping and purifying process of the gas cylinder specifically comprises: and opening a liquid phase valve of the gas cylinder 200, observing the pressure of the second pressure gauge 502, if the pressure is greater than 2PSI, opening the fifth control valve 901 and a gas phase valve of the gas cylinder 200 to release the pressure to less than or equal to 2PSI, and then closing the fifth control valve 901 and the gas phase valve of the gas cylinder 200. And (3) confirming that the purification vacuum pump is started, starting the fourth control valve 701 to vacuumize until the second pressure gauge 502 is-14 PSI. And closing the fourth control valve 701, and closing a liquid phase valve of the gas cylinder 200, so that the gas cylinder 200 is vacuumized and purified.
Therefore, through the steps, the purity of the carbon dioxide filled into the gas cylinder 200 can be better guaranteed.
And (3) analysis: analyzing the raw material gas in the storage tank 1, and analyzing the raw material gas filled in the gas cylinder 200;
in this embodiment, the analysis specifically includes: and opening an analysis hand valve (namely the ninth control valve 1201 in the embodiment) of the storage tank 1, and performing online analysis on the raw material gas in connection with quality control. After the analysis is qualified, the seventh control valve 1101 and the eighth control valve 1102 are opened, the liquid phase valve of the gas cylinder 200 is opened, and carbon dioxide gas is filled into the gas cylinder 200. Observing that the pressure of the second pressure gauge 502 is about 1.8MPA, the eighth control valve 1102 is closed. Then, the tenth control valve 1301 is opened, and online analysis of the carbon dioxide gas in the gas cylinder 200 is performed through contact control. And after the analysis is qualified, preparing to enter a filling procedure. Through the step, the carbon dioxide finally filled into the gas cylinder 200 is better ensured to meet the required requirements.
Preferably, the method further comprises the following steps after the gas cylinder is filled:
analysis after filling: detecting metal ions in the carbon dioxide filled in the gas cylinder 200;
by detecting metal ions in the filled gas cylinder 200, the micro metal ion content of the gas in the gas cylinder 200 can be ensured to meet the required requirements.
And (3) checking after filling: the gas cylinder 200 is repeatedly weighed, and the tightness of the gas cylinder 200 is detected.
It will be appreciated that the filling process is carried out on a Y-cylinder filling scale, and to ensure the accuracy of the filling quantity, the cylinder 200 is sent to a carbon dioxide TANK after filling and is electronically weighed again.
It will be appreciated that in general, if carbon dioxide leaks in the air, which is typically a fogging condition, the bottle valve and its seal with the mouth of the bottle are visually inspected for good sealing. And (4) after filling, leakage detection is carried out, and leakage detection test is carried out on the joint of the cylinder valve by using special leakage detection liquid. And (4) checking whether the temperature of the bottle body has the sign of abnormal rise or not, and whether the bottle body has serious defects such as bulge deformation or leakage and the like. Once overfilling is found, it is disposed of and the overfilled liquid is drained off properly.
The carbon dioxide filling device 100 provided by the embodiment is provided with a vacuumizing structure, so that the filling preparation can effectively purify the pipeline environment in the earlier stage, and the filling of higher-purity gas is met. And metal ion detection is designed, SO that the micro-amount metal ions Br, cl, NO2, NO3, SO4, al, ca and the like in the gas filled in the Y-TANK can be detected, and the purposes of purging the protective gas of chips and integrated circuits and the like in high-end semiconductor enterprises are met.
The above embodiments of the present invention are only described, and it should be noted that, for those skilled in the art, modifications can be made without departing from the inventive concept, but these all fall into the protection scope of the present invention.
Claims (8)
1. A carbon dioxide filling device is characterized by comprising a storage tank, a cryogenic liquid pump, a first pipeline, a second pipeline, a third pipeline, a first vacuum-pumping pipeline, a second vacuum-pumping pipeline and a purification vacuum pump;
one end of the first pipeline is communicated with a liquid phase port of the storage tank, the other end of the first pipeline is communicated with a liquid inlet of the cryogenic liquid pump, and a first control valve for controlling the on-off of the first pipeline is arranged on the first pipeline;
one end of the second pipeline is communicated with a liquid outlet of the low-temperature liquid pump; a first pressure gauge for detecting the internal pressure of the second pipeline is arranged on the second pipeline;
one end of the third pipeline is communicated with the other end of the second pipeline, and the other end of the third pipeline is communicated with a liquid phase inlet of the gas cylinder; a second control valve for controlling the on-off of the third pipeline is arranged on the third pipeline, a second pressure gauge for detecting the internal pressure of the third pipeline is also arranged on the third pipeline, and the second pressure gauge is positioned at one end, far away from the second pipeline, of the second control valve;
the first vacuum-pumping pipeline is communicated with the first pipeline, and a third control valve for controlling the on-off of the first vacuum-pumping pipeline is arranged on the first vacuum-pumping pipeline;
the second vacuum-pumping pipeline is communicated with the third pipeline, and a fourth control valve for controlling the second vacuum-pumping pipeline to be switched on and off is arranged on the second vacuum-pumping pipeline;
and the air suction port of the purification vacuum pump is communicated with the first vacuumizing pipeline and the second vacuumizing pipeline.
2. The carbon dioxide filling apparatus according to claim 1, further comprising a helium detection pipeline, wherein the helium detection pipeline is communicated with the first vacuum-pumping pipeline and the second vacuum-pumping pipeline and is filled with helium gas for helium detection.
3. The carbon dioxide charging device according to claim 1, further comprising an exhaust conduit for communicating with a gas phase outlet of the gas cylinder; and a fifth control valve for controlling the on-off of the exhaust pipeline is arranged on the exhaust pipeline.
4. The carbon dioxide charging device according to claim 3, further comprising a pressure relief conduit in communication with the other end of the second conduit; a sixth control valve for controlling the on-off of the pressure relief pipeline is arranged on the pressure relief pipeline;
the exhaust pipeline is communicated with the pressure relief pipeline.
5. The carbon dioxide filling device according to claim 3, further comprising a gas phase pipe, one end of which is communicated with the gas phase port of the storage tank, and the other end of which is communicated with the third pipe; and the gas phase pipeline is provided with a seventh control valve and an eighth control valve for controlling the gas phase pipeline to be switched on and off, the seventh control valve is positioned at one end close to the storage tank, and the eighth control valve is positioned at one end close to the third pipeline.
6. The carbon dioxide filling apparatus according to claim 1, further comprising a first analysis line in communication with the storage tank for analyzing the feedstock in the storage tank; and a ninth control valve for controlling the on-off of the first analysis pipeline is arranged on the first analysis pipeline.
7. The carbon dioxide charging device according to claim 6, further comprising a second analysis line in communication with the third conduit for analyzing the raw material charged in the gas cylinder; and a tenth control valve for controlling the on-off of the second analysis pipeline is arranged on the second analysis pipeline.
8. The carbon dioxide filling device according to claim 1, further comprising a weighing instrument for weighing the gas cylinder, the weighing instrument being electrically connected to the second control valve for controlling the second control valve.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222985185.9U CN218409526U (en) | 2022-11-09 | 2022-11-09 | Carbon dioxide fills dress device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222985185.9U CN218409526U (en) | 2022-11-09 | 2022-11-09 | Carbon dioxide fills dress device |
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| CN218409526U true CN218409526U (en) | 2023-01-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222985185.9U Active CN218409526U (en) | 2022-11-09 | 2022-11-09 | Carbon dioxide fills dress device |
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| CN (1) | CN218409526U (en) |
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