CN113970064A - Treatment device for residual disilane gas cylinders - Google Patents
Treatment device for residual disilane gas cylinders Download PDFInfo
- Publication number
- CN113970064A CN113970064A CN202111176231.4A CN202111176231A CN113970064A CN 113970064 A CN113970064 A CN 113970064A CN 202111176231 A CN202111176231 A CN 202111176231A CN 113970064 A CN113970064 A CN 113970064A
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- Prior art keywords
- gas
- valve
- steel
- bottle
- main pipeline
- Prior art date
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- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 13
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 46
- 239000010959 steel Substances 0.000 claims abstract description 46
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- 230000002000 scavenging effect Effects 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 45
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- 239000001307 helium Substances 0.000 claims description 12
- 229910052734 helium Inorganic materials 0.000 claims description 12
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 238000005086 pumping Methods 0.000 claims description 11
- 230000006837 decompression Effects 0.000 claims description 3
- 239000007791 liquid phase Substances 0.000 abstract description 5
- 239000012071 phase Substances 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
- F17C7/02—Discharging liquefied gases
- F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/065—Arrangements for producing propulsion of gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
- F17C2223/0153—Liquefied gas, e.g. LPG, GPL
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
- F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
- F17C2225/0107—Single phase
- F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/01—Propulsion of the fluid
- F17C2227/0128—Propulsion of the fluid with pumps or compressors
- F17C2227/0135—Pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0302—Heat exchange with the fluid by heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/04—Methods for emptying or filling
- F17C2227/045—Methods for emptying or filling by vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/04—Reducing risks and environmental impact
- F17C2260/044—Avoiding pollution or contamination
Abstract
The invention provides a disilane residual gas bottle treatment device which comprises a steel bottle, wherein a main pipeline is connected onto the steel bottle, a heating belt is arranged on the outer side of the steel bottle, the outer end of the main pipeline is connected with a vacuum pump, a left branch is connected to the left side of the main pipeline, the outer end of the left branch is respectively connected with a scavenging canister, a right branch is connected to the right side of the main pipeline, and the outer end of the right branch is a discharge port. The heating belt is arranged on the outer side of the steel cylinder for heating, so that liquid phase gas in the cylinder is quickly converted into gas phase, the replacement treatment is convenient, the adding times of replacement gas are reduced, the energy consumption is reduced, the treatment time is shortened, the structure is simple, and the use is convenient.
Description
Technical Field
The invention relates to the technical field of gas preparation, in particular to a disilane residual gas cylinder treatment device.
Background
The steel cylinder is a main packaging container of disilane liquefied gas, and disilane is a low-pressure liquefied gas melting point: -132.5 ℃, boiling point: -14.2 ℃, saturation vapor pressure (kPa): the (21.1 ℃) 33.6psig is filled with disilane with certain mass and is in a gas-liquid mixed phase in the steel cylinder, the gas in the specified cylinder in the gas cylinder safety technical supervision rule is not used up, and no less than 0.5 to 1 percent of residual gas of the specified charging is left in the liquefied gas, the low-temperature liquefied gas and the low-temperature liquid gas cylinder, so that the treatment of the residual disilane gas cylinder brings certain difficulty, the treatment time is long and the waste of replacement gas is high.
Patent No. CN202708594U discloses a gas cylinder residual gas processing apparatus, improve application range through setting up inflammable residual gas cylinder connecting line and poisonous residual gas cylinder connecting line, it handles the branch road and constitutes residual gas processing line with second residual gas processing branch road through parallelly connected first residual gas together, it discharges to make gas flow through the pressure effect, thereby be convenient for handle residual gas fast, but the device is to liquefied gas, when low temperature liquefied gas and low temperature liquid gas cylinder handle, because the reason of gas liquefaction, can lead to gas replacement discharge efficiency comparatively low, consequently, it just becomes very important to solve this problem.
Disclosure of Invention
The invention aims to provide a disilane residual gas bottle treatment device, which is characterized in that a heating belt is arranged on the outer side of a steel bottle for heating, so that liquid phase gas in the bottle is quickly converted into gas phase, the rapid replacement treatment is facilitated, and the treatment efficiency is improved; the problem of low efficiency of liquid phase gas treatment in the background art is solved.
The invention provides a disilane residual gas bottle treatment device which comprises a steel bottle, wherein a main pipeline is connected onto the steel bottle, a heating belt is arranged on the outer side of the steel bottle, the outer end of the main pipeline is connected with a vacuum pump, a left branch is connected to the left side of the main pipeline, the outer end of the left branch is respectively connected with a scavenging canister, a right branch is connected to the right side of the main pipeline, and the outer end of the right branch is a discharge port.
The further improvement lies in that: the connecting end of the steel cylinder and the main pipeline is provided with a switch valve, and the connecting end of the vacuum pump and the main pipeline is provided with a vacuum pumping valve.
The further improvement lies in that: the jar of taking a breath stores nitrogen gas and helium respectively including being equipped with two in, and the jar of taking a breath connects in parallel on the left branch road, all is equipped with the supply valve on the jar of taking a breath.
The further improvement lies in that: the main pipeline is also provided with a pressure gauge.
The further improvement lies in that: the right branch is connected in parallel with a discharge valve and a decompression discharge valve.
The further improvement lies in that: the heating band is an automatic temperature control heating band, the heating band is detachably connected with the steel cylinder, and the heating band is wrapped outside the steel cylinder.
The invention has the beneficial effects that: through being equipped with the heating band in the steel bottle outside, heat the steel bottle through the heating band to make the gaseous form of liquid phase in the steel bottle turn into gaseous phase form, be convenient for to the residual gas in the steel bottle replace the processing, reduce the gaseous joining number of times of replacement, thereby reduce the required energy consumption of gaseous replacement, shorten replacement processing time, great improvement production efficiency. And the heating band adopts automatic temperature control type, and the heating temperature to the steel bottle remains stable to stabilize effectual messenger's steel bottle liquid phase gas and convert, improve the stability of gas form conversion, and the heating band adopts detachably, and convenient to use and carry the change, has improved the convenience of using.
The high-purity nitrogen and the high-purity helium are used for gas replacement, so that secondary pollution caused by gas replacement is effectively avoided, the environmental protection performance is greatly improved, the pollution is reduced, and the environment is more green and environment-friendly.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a process flow diagram of a residual gas bottle.
Wherein: 1-steel cylinder, 2-main pipeline, 3-heating belt, 4-vacuum pump, 5-vacuum-pumping valve, 6-left branch, 7-scavenging tank, 8-right branch, 9-switch valve, 10-supply valve, 11-pressure gauge, 12-discharge valve and 13-decompression discharge valve.
Detailed Description
For the purpose of enhancing understanding of the present invention, the present invention will be further described in detail with reference to the following examples, which are provided for illustration only and are not to be construed as limiting the scope of the present invention.
As shown in FIG. 1, this embodiment provides a silane residual gas bottle processing apparatus, including steel bottle 1, the 1 outside of steel bottle is provided with heating tape 3, and heating tape 3 is automatic temperature control heating tape, can dismantle between heating tape 3 and the steel bottle 1 and be connected, and heating tape 3 parcel is in the 1 outside of steel bottle.
Be connected with main line 2 on the steel bottle 1, steel bottle 1 is equipped with ooff valve 9 with the 2 links of main line, 2 outer ends of main line are connected with vacuum pump 4, vacuum pump 4 is equipped with evacuation valve 5 with the main line link, 2 left sides of main line are connected with left branch road 6, 6 outer ends of left branch road are connected with jar 7 of taking a breath, jar 7 of taking a breath is including being equipped with two, jar 7 of taking a breath connects in parallel on left branch road 6, high-purity nitrogen gas and high-purity helium are stored respectively in jar 7 of taking a breath, carry out gas replacement through the high-purity nitrogen gas of taking a breath in jar 7 and high-purity helium and handle, all be equipped with supply valve 10 on jar 7 of taking a breath, supply valve 10 controls the gas emission of jar 7 of taking a breath.
The right side of the main pipeline 2 is connected with a right branch 8, the outer end of the right branch 8 is a discharge port, a discharge valve 12 and a decompression discharge valve 13 are connected in parallel on the right branch 2, a pressure gauge 11 is arranged at the joint of the right branch 2 and the main pipeline 1, and the pressure value in the pipeline is detected by the pressure gauge 11.
As shown in fig. 2, the operation includes the following steps:
step 1, checking a steel cylinder 1, opening a cap of a disilane steel cylinder to be treated, checking whether a valve is closed tightly, after the valve is confirmed to be closed, carefully opening a valve plug, checking whether the valve is intact, and checking whether a valve outlet is dry and clean, and after the checking is finished, connecting the steel cylinder 1 with a main pipeline 2; wrapping the heating belt 3 outside the steel cylinder 1, and heating the steel cylinder 1 through the heating belt 3, wherein the heating temperature is set to 80 ℃;
step 2, opening the switch valve 9, opening the supply valve 10 of the scavenging tank 7 with high-purity nitrogen gas, and adding high-purity nitrogen gas12Mpa, closing the high-purity nitrogen supply valve 10, maintaining the pressure for 10min, recording and observing the degree change of the pressure gauge 11, and determining whether the degree is changedChecking and managing whether leakage exists;
step 3, opening the discharge valve 12, and closing the discharge valve 12 when the reading of the pressure gauge 11 is reduced to be below 0.1 Mpa;
step 4, opening a supply valve 3 of a scavenging tank in which high-purity nitrogen exists, introducing the high-purity nitrogen at 2Mpa, closing the supply valve 3 of the high-purity nitrogen, opening a discharge valve 12, and closing the discharge valve 12 when the reading of a pressure gauge 11 is reduced to be below 0.05 Mpa;
step 5, starting a vacuum pump 4, opening a vacuum pumping valve 5, vacuumizing the pipeline, keeping for 1min after the vacuum pressure reaches-0.10 Mpa, and closing the vacuum pumping valve 5;
step 7, opening a cylinder valve of the steel cylinder 1 to be processed in sequence, opening a high-purity nitrogen supply valve 10, filling high-pressure high-purity nitrogen into the steel cylinder, and closing the high-purity nitrogen supply valve 10; calculating the amount of the high-purity nitrogen according to the residual pressure in the disilane residual gas cylinder;
step 8, opening the pressure reducing discharge valve 13, slowly controlling the discharge speed, closing the pressure reducing discharge valve 13 when the pressure reading is reduced to be below 1bar, and repeating the operation of adding nitrogen until the tail gas is free from ignition and smoke generation when being discharged;
step 9, opening the vacuum pumping valve 5 to pump the steel cylinder 1 to vacuum, and closing the vacuum pumping valve 5 after continuously pumping for 30min when the vacuum pressure reaches-0.100 Mpa;
step 11, opening a vacuum pumping valve 5, vacuumizing the steel cylinder 1, and closing the vacuum pumping valve 5 after continuously pumping for 60min after the pressure in the steel cylinder 1 is reduced to-0.100 Mpa;
and step 12, opening the supply valve 10 of the high-purity helium, closing the supply valve of the high-purity helium after introducing 3bar of the high-purity helium, closing the cylinder valve of the steel cylinder 1, closing the switch valve 9, detaching the steel cylinder 1 from the main pipeline 2, and analyzing for standby.
Claims (6)
1. The utility model provides a disilane residual gas bottle processing apparatus, includes steel bottle (1), is connected with main line (2) on steel bottle (1), its characterized in that, steel bottle (1) outside is provided with heat band (3), and main line (2) outer end is connected with vacuum pump (4), and main line (2) left side is connected with left branch road (6), and left branch road (6) outer end is connected with scavenging air jar (7), and main line (2) right side is connected with right branch road (8), and right branch road (8) outer end is the discharge port.
2. The apparatus of claim 1, wherein the apparatus comprises: the connection end of the steel cylinder (1) and the main pipeline (2) is provided with a switch valve (9), and the connection end of the vacuum pump (4) and the main pipeline (2) is provided with a vacuum pumping valve (5).
3. The apparatus of claim 1, wherein the apparatus comprises: the two air exchanging tanks (7) are arranged, the air exchanging tanks (7) are connected on the left branch (6) in parallel, high-purity nitrogen and high-purity helium are respectively stored in the air exchanging tanks (7), and the air exchanging tanks (7) are provided with supply valves (10).
4. The apparatus of claim 1, wherein the apparatus comprises: the right branch (2) is connected with a discharge valve (12) and a decompression discharge valve (13) in parallel.
5. The apparatus of claim 1, wherein the apparatus comprises: and a pressure gauge (11) is also arranged on the right branch (2).
6. The apparatus of claim 1, wherein the apparatus comprises: the heating belt (3) is an automatic temperature control heating belt, the heating belt (3) is detachably connected with the steel cylinder (1), and the heating belt (3) is wrapped outside the steel cylinder (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111176231.4A CN113970064A (en) | 2021-10-09 | 2021-10-09 | Treatment device for residual disilane gas cylinders |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111176231.4A CN113970064A (en) | 2021-10-09 | 2021-10-09 | Treatment device for residual disilane gas cylinders |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113970064A true CN113970064A (en) | 2022-01-25 |
Family
ID=79587183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111176231.4A Pending CN113970064A (en) | 2021-10-09 | 2021-10-09 | Treatment device for residual disilane gas cylinders |
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| Country | Link |
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| CN (1) | CN113970064A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115264365A (en) * | 2022-07-29 | 2022-11-01 | 苏州金宏气体股份有限公司 | Steel cylinder treatment method for tetramethylsilane |
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| CN113137567A (en) * | 2020-01-16 | 2021-07-20 | 蔡孟学 | Residual gas recovery method for high-purity inorganic compound dichlorosilane subpackaging storage container |
| CN113007593A (en) * | 2021-02-19 | 2021-06-22 | 福建德尔科技有限公司 | Steel cylinder recovery device, method and application thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115264365A (en) * | 2022-07-29 | 2022-11-01 | 苏州金宏气体股份有限公司 | Steel cylinder treatment method for tetramethylsilane |
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Application publication date: 20220125 |