CN220395934U - High-efficiency low-energy-consumption vacuumizing system - Google Patents
High-efficiency low-energy-consumption vacuumizing system Download PDFInfo
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- CN220395934U CN220395934U CN202321804062.9U CN202321804062U CN220395934U CN 220395934 U CN220395934 U CN 220395934U CN 202321804062 U CN202321804062 U CN 202321804062U CN 220395934 U CN220395934 U CN 220395934U
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- 238000005265 energy consumption Methods 0.000 title claims abstract description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 94
- 229910052757 nitrogen Inorganic materials 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 29
- 238000005086 pumping Methods 0.000 claims description 29
- 230000008569 process Effects 0.000 claims description 26
- 238000012423 maintenance Methods 0.000 claims description 18
- 230000009467 reduction Effects 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000004458 analytical method Methods 0.000 description 9
- 238000004364 calculation method Methods 0.000 description 8
- 230000010354 integration Effects 0.000 description 8
- 238000006467 substitution reaction Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013211 curve analysis Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Abstract
The utility model relates to a high-efficiency low-energy-consumption vacuumizing system which comprises a vacuumizing pipeline assembly, a vacuumizing unit assembly and a vacuumizing station assembly, wherein the vacuumizing pipeline assembly comprises at least two vacuum pipelines of a plurality of low vacuum pipelines, medium vacuum pipelines and high vacuum pipelines, and the vacuumizing unit assembly comprises at least two vacuum units of a plurality of low vacuum units, medium vacuum units and high vacuum units corresponding to the vacuumizing pipeline assembly; the low vacuum pipeline is connected with a plurality of low vacuum pumps and is connected to a workpiece evacuation interface through a low vacuum switching valve; the middle vacuum pipeline is connected with a plurality of middle vacuum pumps, and is connected to a workpiece evacuation interface through a middle vacuum switching valve; the high vacuum pipeline is connected with a plurality of high vacuum pumps, and is connected to the workpiece evacuation interface through a high vacuum switching valve. The utility model improves the utilization rate and production efficiency of equipment and reduces the energy consumption and the operation cost.
Description
Technical Field
The utility model relates to the technical field of vacuumizing, in particular to a high-efficiency low-energy-consumption vacuumizing system.
Background
At present, the vacuum pumping operation is implemented on a workpiece or a group of workpieces by adopting a dispersed independent vacuum pumping unit, and the operation mode is characterized in that: the vacuum units are operated respectively, and no connection exists between the vacuum units; the following drawbacks therefore exist: (1) When the unit component fails, the unit production is interrupted, or the unit is waited for maintenance and debugging, or other spare units are hoisted and replaced; (2) When long-term vacuumizing is needed, the unit needs to run for a long time, which is not beneficial to equipment maintenance; (3) The scattered operation has large artificial factors, is easy to have misjudgment, missed judgment and high labor intensity, and cannot uniformly and automatically treat temporary emergency accidents such as water cut, power failure and the like; (4) The vacuum operation efficiency of the equipment for scattered use is low, the equipment occupancy is high, the total energy consumption is high, and high-cost equipment, materials, energy sources, management and operation are also caused.
Disclosure of Invention
The utility model aims to overcome the defects, and provides a high-efficiency low-energy-consumption vacuumizing system which implements vacuumizing automation operation, improves equipment utilization rate and production efficiency, and reduces energy consumption and operation cost.
The purpose of the utility model is realized in the following way:
the vacuum pumping system comprises a vacuum pumping pipeline assembly, a vacuum unit assembly, a vacuum pumping station assembly and a control system, wherein the vacuum pumping pipeline assembly comprises a low vacuum pipeline, a medium vacuum pipeline and a high vacuum pipeline, and the vacuum unit assembly comprises a plurality of low vacuum units, a medium vacuum unit and a high vacuum unit;
the low vacuum pipeline is uniformly and alternately connected with a plurality of rough suction valves and is connected with a low vacuum pump through the rough suction valves, the low vacuum pipeline is connected with a workpiece evacuation interface through a low vacuum switching valve, and the workpiece evacuation interface is connected with a workpiece; the medium vacuum pipeline is uniformly and alternately connected with a plurality of medium vacuum control valves, and is connected with a medium vacuum pump through the medium vacuum control valves; the middle vacuum pipeline is connected with a workpiece evacuating interface through a middle vacuum switching valve, and the workpiece evacuating interface is connected with a workpiece; the high vacuum pipeline is uniformly and alternately connected with a plurality of high vacuum control valves and is connected with a high vacuum pump through the high vacuum control valves, the high vacuum pipeline is connected with a workpiece evacuation interface through a high vacuum switching valve, and the workpiece evacuation interface is connected with a workpiece;
the low vacuum unit comprises a plurality of low vacuum pumps, a second vacuum gauge is arranged on an air inlet pipeline of each low vacuum pump, and an exhaust port of each low vacuum pump is connected to an exhaust pipe; the medium vacuum unit comprises a plurality of medium vacuum pumps and a medium vacuum pump front-stage maintaining pump, a third vacuum gauge is arranged on an air inlet pipeline of the medium vacuum pump, an air outlet of the medium vacuum pump is connected with an air inlet of the medium vacuum pump front-stage maintaining pump, and an air outlet of the medium vacuum pump front-stage maintaining pump is connected to an exhaust pipe; the high vacuum unit comprises a plurality of high vacuum pumps and a high vacuum pump front-stage maintaining pump, a fourth vacuum gauge is arranged on an air inlet pipeline of the high vacuum pump, an exhaust port of the high vacuum pump is connected with an air inlet of the high vacuum pump front-stage maintaining pump, and an exhaust port of the high vacuum pump front-stage maintaining pump is connected to an exhaust pipe;
the vacuum station assembly comprises a plurality of vacuum stations, wherein the vacuum stations are connected to a workpiece through a workpiece vacuum interface, the workpiece vacuum interface is connected to a high-vacuum pipeline in parallel through a high-vacuum switching valve, connected to a medium-vacuum pipeline in parallel through a medium-vacuum switching valve, and connected to a low-vacuum pipeline in parallel through a low-vacuum switching valve; and a first vacuum gauge is connected in parallel between the workpiece evacuation interface and the high vacuum switching valve, between the workpiece evacuation interface and between the workpiece evacuation interface and the high vacuum switching valve.
Further, the low vacuum pipeline is connected with the high vacuum pipeline through the first bypass valve, and the low vacuum pipeline is connected with the medium vacuum pipeline through the second bypass valve to provide starting vacuum conditions for the high vacuum pipeline and the medium vacuum pipeline.
Further, the medium vacuum pipeline is connected with the high vacuum pipeline through a third bypass valve, and a starting vacuum condition is provided for the high vacuum pipeline.
Further, the vacuum unit is installed in a noise reduction machine room with sound insulation and noise reduction functions.
Further, still include hot nitrogen gas replacement device, hot nitrogen gas replacement device includes heater, nitrogen replacement pipe, nitrogen storage tank and nitrogen thermal controller, the heater sets up on the work piece, the work piece evacuates the interface through nitrogen replacement valve connection nitrogen replacement pipe, nitrogen replacement pipe passes through nitrogen thermal controller and connects the nitrogen storage tank.
Further, the high vacuum unit further comprises a high vacuum pump foreline maintenance pump, an exhaust port of the high vacuum pump is connected with an air inlet of the high vacuum pump foreline maintenance pump, and an exhaust port of the high vacuum pump foreline maintenance pump is connected to the exhaust pipe.
Further, the control system comprises an evacuation process bus, an evacuation control bus, a unit control bus and a control console, wherein the rough pumping valve, the medium vacuum control valve and the high vacuum control valve are connected to the control console through the evacuation control bus, the low vacuum pump, the medium vacuum pump front-stage maintenance pump, the high vacuum pump and the high vacuum pump front-stage maintenance pump are connected to the control console through the unit control bus, and the nitrogen substitution valve, the high vacuum switching valve, the medium vacuum switching valve and the low vacuum switching valve are connected to the control console through the evacuation process bus.
Compared with the prior art, the utility model has the beneficial effects that:
the high-efficiency low-energy-consumption vacuumizing system consists of vacuumizing pipeline integration, vacuum unit integration, vacuumizing station integration and hot nitrogen replacement devices, a control system of a technological process consists of a control console and a vacuum unit integration and vacuumizing station integration integrated control device through a control bus, the control system identifies a technological node where each workpiece is located through dynamic data comparison of each workpiece to be vacuumized, analyzes and calculates the technological process coincidence degree of the workpiece, determines the technological process progress and judges the alarm prompt which does not accord with technological indexes, and realizes optimal automatic coordination among equipment operation.
The vacuum pumping system realizes the optimal matching between vacuum units, and the control bus and the vacuum pumping station are integrated to form a process analysis control subsystem, so that the automatic processing of the vacuum pumping process of the workpiece and the process record of each workpiece can be carried out; the automatic judgment of the online quality qualification level of the workpiece can be realized through statistics and analysis of big data in the process, and an abnormal processing alarm and a characteristic data result report of the workpiece are given, so that unmanned automatic vacuumizing operation is completed.
The utility model adopts the technical process control method of data identification and analysis to implement the automatic operation of vacuumizing, and replaces manual work by computer identification, judgment and operation, thereby reducing human errors, improving the utilization rate and production efficiency of equipment and reducing energy consumption and operation cost.
Drawings
Fig. 1 is a schematic structural diagram of a high-efficiency low-energy-consumption vacuumizing system of the utility model.
Wherein:
the vacuum processing system comprises a workpiece 1, a heater 2, a first vacuum gauge 3, a nitrogen replacement pipe 4, a high vacuum pipeline 5, a middle vacuum pipeline 6, a low vacuum pipeline 7, an exhaust pipe 8, a noise reduction machine room 9, a second vacuum gauge 10, a third vacuum gauge 11, a fourth vacuum gauge 12, a nitrogen replacement valve 13, a workpiece evacuation interface 14, a high vacuum switching valve 15, a middle vacuum switching valve 16, a low vacuum switching valve 17, a first bypass valve 18, a second bypass valve 19, an evacuation station 20, a third bypass valve 21, a low vacuum pump 22, a rough evacuation valve 23, a middle vacuum pump 24, a middle vacuum control valve 25, a middle vacuum pump foreline maintenance pump 26, a high vacuum pump 27, a high vacuum control valve 28, a high vacuum pump foreline maintenance pump 29, a nitrogen storage tank 30, a nitrogen thermal controller 31, an evacuation process bus 32, an evacuation control bus 33, a unit control bus 34 and a control console 35.
Description of the embodiments
In order to better understand the technical solution of the present utility model, the following detailed description will be made with reference to the accompanying drawings. It should be understood that the following embodiments are not intended to limit the embodiments of the present utility model, but are merely examples of embodiments that may be employed by the present utility model. It should be noted that, the description herein of the positional relationship of the components, such as the component a being located above the component B, is based on the description of the relative positions of the components in the drawings, and is not intended to limit the actual positional relationship of the components.
Example 1
Referring to fig. 1, fig. 1 depicts a schematic structural diagram of the efficient and low-energy-consumption evacuation system of the present utility model. As shown in the figure, the high-efficiency low-energy-consumption vacuumizing system comprises a vacuumizing pipeline assembly, a vacuum unit assembly, a vacuumizing station assembly, a hot nitrogen replacement device and a control system, wherein the vacuumizing pipeline assembly comprises a low vacuum pipeline 7, a medium vacuum pipeline 6 and a high vacuum pipeline 5, and the vacuum unit assembly comprises a plurality of low vacuum units, medium vacuum units and high vacuum units.
The low vacuum pipeline 7 is uniformly and alternately connected with a plurality of rough suction valves 23, and is connected with a low vacuum pump 22 through the rough suction valves 23, and the low vacuum pump 22 can suck the low vacuum pipeline 7 to a low vacuum of 1000Pa or lower; the low vacuum pipeline 7 is connected with the workpiece evacuation interface 14 through the low vacuum switching valve 17, the workpiece evacuation interface 14 is connected with the workpiece 1, the workpiece evacuation interface 14 is opened, and the workpiece 1 can be evacuated from the atmosphere to low vacuum through the low vacuum switching valve 17;
the middle vacuum pipeline 6 is uniformly and alternately connected with a plurality of middle vacuum control valves 25, and is connected with a middle vacuum pump 24 through the middle vacuum control valves 25, and the middle vacuum pump 24 can vacuumize the middle vacuum pipeline 6 to a middle vacuum of about 1 Pa; the medium vacuum pipeline 6 is connected with the workpiece evacuation interface 14 through the medium vacuum switching valve 16, the workpiece evacuation interface 14 is connected with the workpiece 1, the workpiece evacuation interface 14 is opened, and the workpiece 1 can be evacuated from low vacuum to medium vacuum of about 1Pa through the medium vacuum switching valve 16;
the high vacuum pipeline 5 is uniformly and alternately connected with a plurality of high vacuum control valves 28, and is connected with a high vacuum pump 27 through the high vacuum control valves 28, and the high vacuum pump 27 can pump the high vacuum pipeline 5 to 10 -2 High vacuum of Pa or more; the high vacuum pipeline 5 is connected with a workpiece evacuating interface 14 through a high vacuum switching valve 15, the workpiece evacuating interface 14 is connected with the workpiece 1, the workpiece evacuating interface 14 is opened, and the workpiece 1 can be evacuated from medium vacuum to 10 through the high vacuum switching valve 15 -2 High vacuum of Pa or more;
the low vacuum pipeline 7 is connected with the high vacuum pipeline 5 through a first bypass valve 18, and the low vacuum pipeline 7 is connected with the medium vacuum pipeline 6 through a second bypass valve 19 to provide starting vacuum conditions for the high vacuum pipeline 5 and the medium vacuum pipeline 6; the middle vacuum pipeline 6 is connected with the high vacuum pipeline 5 through a third bypass valve 21 to provide starting vacuum conditions for the high vacuum pipeline 5;
the low vacuum pipeline 7 can be made of stainless steel pipes with the drift diameters ranging from 30 mm to 50mm, the medium vacuum pipeline 6 can be made of stainless steel pipes with the drift diameters ranging from 50mm to 100mm, and the high vacuum pipeline 5 can be made of stainless steel pipes with the drift diameters ranging from 150 mm to 200 mm.
The low vacuum unit comprises a plurality of low vacuum pumps 22, wherein the air inlet ends of the low vacuum pumps 22 are connected to the low vacuum pipeline 7 through rough suction valves 23, and low vacuum of 1000Pa or below is provided for the low vacuum pipeline 7; the air inlet pipeline of the low vacuum pump 22 is provided with a second vacuum gauge 10 for monitoring the working vacuum degree of the low vacuum pump; the exhaust port of the low vacuum pump 22 is connected to the exhaust pipe 8 to exhaust the exhaust gas out of the workplace; the number of the low vacuum pumps 22 can be determined according to the length of the low vacuum pipeline 7 and the gas load of the maximum production batch plus redundancy calculation;
the middle vacuum unit comprises a plurality of middle vacuum pumps 24 and a middle vacuum pump front stage maintaining pump 26, wherein the air inlet ends of the plurality of middle vacuum pumps 24 are connected to the middle vacuum pipeline 6 through a middle vacuum control valve 25 to provide middle vacuum of about 1Pa for the middle vacuum pipeline 6; a third vacuum gauge 11 is arranged on an air inlet pipeline of the middle vacuum pump 24 and is used for monitoring the working vacuum degree of the middle vacuum pump; the exhaust port of the middle vacuum pump 24 is connected with the air inlet of the middle vacuum pump front-stage maintaining pump 26, the exhaust port of the middle vacuum pump front-stage maintaining pump 26 is connected to the exhaust pipe 8, and the exhaust gas is discharged out of the workplace; the number of the medium vacuum units can be determined by adding redundancy calculation according to the length of the medium vacuum pipeline 6 and the gas load of the maximum production batch;
the high vacuum unit comprises a plurality of high vacuum pumps 27 and a high vacuum pump front stage maintaining pump 29, wherein the air inlet ends of the high vacuum pumps 27 are connected to the high vacuum pipeline 5 through high vacuum control valves 28 to provide about 10 for the high vacuum pipeline 5 -2 High vacuum of Pa or more; a fourth vacuum gauge 12 is arranged on an air inlet pipeline of the high vacuum pump 27 and is used for monitoring the working vacuum degree of the high vacuum pump; the exhaust port of the high vacuum pump 27 is connected with the air inlet of the high vacuum pump front-stage maintaining pump 29, the exhaust port of the high vacuum pump front-stage maintaining pump 29 is connected to the exhaust pipe 8, and the exhaust gas is discharged out of the workplace; the number of the high vacuum units can be determined according to the length of the high vacuum pipeline 5 and the gas load of the maximum production batch plus redundancy calculation;
the vacuum units can be uniformly arranged in a noise reduction machine room 9 with the functions of sound insulation and noise reduction;
the vacuum unit is integrated with the vacuum pump with corresponding application and specification according to the requirement of the pumped workpiece on the vacuum performance, and the vacuum unit is not required to be provided with a primary pump and only required to be provided with a primary maintenance pump, so that the primary pump with higher power can be omitted, and the energy consumption can be reduced.
The vacuumizing station assembly comprises a plurality of vacuumizing stations 20, wherein the vacuumizing stations 20 are uniformly arranged on vacuumizing pipelines according to the size of a workpiece 1, the workpiece 1 is connected to the vacuumizing stations 20 through a workpiece vacuumizing interface 14, the workpiece vacuumizing interface 14 is connected to a high-vacuum pipeline 5 in parallel through a high-vacuum switching valve 15, is connected to a medium-vacuum pipeline 6 in parallel through a medium-vacuum switching valve 16, and is connected to a low-vacuum pipeline 7 in parallel through a low-vacuum switching valve 17; the first vacuum gauge 3 is connected in parallel between the workpiece evacuation interface 14 and the high vacuum switching valve 15, the medium vacuum switching valve 16 and the low vacuum switching valve 17; the workpiece 1 is pumped to a vacuum degree of 1000Pa below by a low vacuum switching valve 17, the workpiece 1 is pumped to a vacuum degree of about 1Pa by a medium vacuum switching valve 16, and after the circularly set replacement times, the workpiece 1 is pumped to a vacuum degree of less than 10 by a high vacuum switching valve 15 -2 Vacuum degree of Pa or more.
The hot nitrogen replacement device comprises a heater 2, a nitrogen replacement pipe 4, a nitrogen storage tank 30 and a nitrogen thermal controller 31, wherein the heater 2 is arranged on a workpiece 1, the nitrogen replacement pipe 4 is connected with a workpiece evacuation interface 14 through a nitrogen replacement valve 13, the nitrogen replacement pipe 4 is connected with the nitrogen storage tank 30 through the nitrogen thermal controller 31, the nitrogen storage tank 30 supplies replacement pure nitrogen to the workpiece 1 through the nitrogen replacement pipe 4, the nitrogen thermal controller 31 heats the pure nitrogen to a required temperature, and the heater 2 maintains a heating temperature required by vacuum for the workpiece 1;
the workpiece evacuation interface 14 is connected to the nitrogen substitution pipe 4 in parallel through the nitrogen substitution valve 13, the workpiece 1 is subjected to nitrogen substitution through the nitrogen substitution valve 13, and the substituted nitrogen of the workpiece 1 is discharged through the low vacuum switching valve 17; in the whole nitrogen replacement and vacuumizing process, the heater 2 heats, keeps warm and stops heating treatment on the workpiece 1; the first vacuum gauge 3 monitors the whole vacuum degree of the workpiece 1 and provides control parameters for conversion of each stage.
The control system comprises an evacuation process bus 32, an evacuation control bus 33, a unit control bus 34 and a control console 35, the rough evacuation valve 23, the medium vacuum control valve 25 and the high vacuum control valve 28 are connected to the control console 35 through the evacuation control bus 33, the low vacuum pump 22, the medium vacuum pump 24, the medium vacuum pump foreline maintenance pump 26, the high vacuum pump 27 and the high vacuum pump foreline maintenance pump 29 are connected to the control console 35 through the unit control bus 34, the nitrogen substitution valve 13, the high vacuum switching valve 15, the medium vacuum switching valve 16 and the low vacuum switching valve 17 are connected to the control console 35 through the evacuation process bus 32, the control console 35 controls the opening and closing of each vacuum pump, the control valve, the maintenance pump and the substitution valve, and the temperature, vacuum degree data and real-time curves of the process are measured and recorded through the heater 2 and the first vacuum gauge 3, the stage conversion of the process is recognized, the process result and report of the statistics and the calculation work piece 1 are judged, and the abnormal conditions are warned and the treatment advice is presented.
Operation and maintenance implementation of the vacuum pump and the unit:
the high-efficiency low-energy-consumption vacuumizing system is controlled by the control console 35 to run according to running programs, all vacuum valves in an initial state are closed, and all equipment is in a power-off state;
after the system operation is started, the control console 35 controls all equipment to be powered on, the low vacuum pump 22 is started, and then the rough pumping valve 23, the first bypass valve 18 and the second bypass valve 19 are opened; after a few minutes, the second vacuum gauge 10 is started, the control console 35 monitors the second vacuum gauge 10, after the vacuum degree value is less than 1000Pa, the middle vacuum pump foreline maintaining pump 26 and the high vacuum pump foreline maintaining pump 29 are started, the third vacuum gauge 11 and the fourth vacuum gauge 12 are monitored, after the vacuum degree value is less than 1000Pa, the middle vacuum pump 24 is started, and the first bypass valve 18 and the second bypass valve 19 are closed;
after the vacuum degree value of the third vacuum gauge 11 and the fourth vacuum gauge 12 is less than 10Pa, starting the high vacuum pump 27, and closing the third bypass valve 21; the control console 35 can regulate and control the increase, decrease, rotation, abnormal shutdown or normal shutdown of each vacuum pump according to preset and suction loads of each section of vacuum;
the total pumping load can be determined by the statistical calculation of the characteristic parameters contained in the communicated pumping station 20 and the workpiece number, and the pumping load of each section of vacuum range can be determined by the statistical calculation of the opening quantity of each section of vacuum switching valve and the characteristic parameters contained in the workpiece number;
when all the low vacuum switching valves 17 are in a closed state, the low vacuum pump 22 is shut down, and meanwhile, the rough pumping valve 23 where the low vacuum pump 22 is positioned is closed; when all the middle vacuum switching valves 16 are in a closed state, the middle vacuum pump 24 and the middle vacuum pump foreline maintaining pump 26 are shut down, and meanwhile, the middle vacuum switching valve 16 where the middle vacuum pump 24 is positioned is closed; when all the high vacuum switching valves 15 are in the closed state, the console 35 determines that the high vacuum pump 27 and the high vacuum pump foreline maintenance pump 29 are in the hold, standby and shut-off states according to the presence or absence of workpiece connection at the online station.
And (3) implementing a workpiece heating replacement process:
after the pumped workpiece is connected to the pumping station, the workpiece number is input into the corresponding station number dialogue column, the workpiece pumping interface 14 is opened, and the control console 35 determines the workpiece heating temperature and the nitrogen replacement times according to the process database corresponding to the workpiece number;
the control console 35 opens the low vacuum switching valve 17 through the control bus to draw low vacuum on the workpiece 1, and then closes the low vacuum switching valve 17; the nitrogen replacement valve 13 is opened, when nitrogen flows, the nitrogen thermal controller 31 starts heating, and heating power is adjusted according to flow; after the pressure of the nitrogen is balanced, closing the nitrogen replacement valve 13, starting the heater 2, after the heat preservation is carried out for a set time, opening the low vacuum switching valve 17 to pump low vacuum to the workpiece 1, closing the low vacuum switching valve 17 and opening the medium vacuum switching valve 16 when the vacuum degree value of the first vacuum gauge 3 is smaller than 1000 Pa; when the vacuum degree value of the first vacuum gauge 3 is smaller than 10Pa, the middle vacuum switching valve 16 is closed, the second nitrogen replacement cycle is performed, the number of replacement-vacuumizing cycles and the vacuum degree reached each time are preset by the control console, and the vacuum process is started after the number of cycles is up to the set number.
And (3) implementing a vacuum pumping process of the workpiece:
the control console 35 sets a workpiece vacuum degree value according to a process database corresponding to the number of the workpiece 1, the control console 35 starts the heater 2 through a control bus, the heating temperature is set, and after the set temperature is reached, the low vacuum switching valve 17 is opened to pump low vacuum to the workpiece 1;
when the vacuum degree value of the first vacuum gauge 3 is smaller than 1000Pa, closing the low vacuum switching valve 17 and opening the medium vacuum switching valve 16; when the vacuum degree value of the first vacuum gauge 3 is close to 1Pa, closing the middle vacuum switching valve 16, opening the high vacuum switching valve 15, and entering a high vacuum evacuation stage; when the first vacuum gauge 3 reaches the set vacuum degree, the control console 35 sends out a prompt to generate a workpiece vacuumizing result report, and the workpiece is in offline waiting; after the operator closes the workpiece evacuation interface 14, the high vacuum switching valve 15 is closed and the workpiece 1 is taken off line.
Implementation of control analysis and exception handling in the workpiece vacuumizing process:
after the workpiece 1 is connected to the workpiece evacuation interface 14, the control console 35 starts low vacuum evacuation first, and when the workpiece 1 is leaked greatly or is not connected, the control console 35 closes the vacuum switching valve and prompts reinstallation; after the workpiece 1 is installed normally, the control console 35 records the temperature data of the heater 2 and the dynamic vacuum degree data of the first vacuum gauge 3 in real time, and simultaneously generates a curve of the vacuum degree and the temperature corresponding to time; when the change of the vacuum degree curve exceeds the average change range of the workpiece 1, the control console 35 can perform dynamic and static analysis, and the dynamic analysis compares the vacuum degree which is calculated according to the actual pumping speed of the workpiece pumping interface 14 and the actual vacuum degree, so as to estimate the leakage and gas release rate;
static analysis, namely, estimating an air leakage rate component and an air release rate component according to a vacuum degree change curve of the first vacuum gauge 3 by closing the vacuum switching valve which is being opened; when certain data exceeds the specified index, the control console 35 prompts the analysis result of the corresponding numbered workpiece and prompts the processing suggestion;
when the vacuum degree curve is within the average variation range, the control console 35 will perform the normal process flow, and automatically perform dynamic vacuum degree analysis calculation and static vacuum degree variation curve analysis calculation after reaching the specified vacuum degree, and give out the calculated values of the air leakage rate, the air release rate and the air leakage release rate;
when an abnormal condition such as water cut-off, power cut-off and the like occurs, the control console 35 starts a predetermined abnormal treatment program and gives an alarm prompt.
Example 2
The vacuum pumping system of this embodiment 2 is different from embodiment 1 in that:
when the workpiece 1 needs a higher vacuum range, stainless steel pipes with the specification of 150-200 mm can be additionally arranged as ultra-high vacuum pipelines in the vacuum pipeline integration, and corresponding ultra-high vacuum units are additionally arranged and connected to the ultra-high vacuum pipelines through ultra-high vacuum control valves;
when the workpiece 1 needs a higher vacuum range, an ultra-high vacuum switching valve connected in parallel can be additionally arranged on the workpiece 1 through the workpiece evacuating interface 14, and the ultra-high vacuum switching valve is connected in parallel to an ultra-high vacuum pipeline.
The vacuumizing pipeline integration comprises a low vacuum pipeline, a medium vacuum pipeline and a high vacuum pipeline, and the diameters of the pipelines give recommended values, but the vacuumizing pipeline integration is not limited to the recommended values; the vacuum pumping pipeline is not limited to the low, medium and high pipelines, and can be expanded or combined according to the working range of the vacuum unit and the actual requirement of the workpiece on the vacuum degree, such as an ultra-high vacuum pipeline, or a low and medium vacuum pipeline.
The distribution of the low vacuum pipeline, the medium vacuum pipeline and the high vacuum pipeline shown in the figure 1 is generally planar, but is not limited to one distribution, and each vacuum pipeline can be distributed according to the size, the volume and the shape of a workpiece to be pumped, namely, the distribution of a single longitudinal plane can be realized, and the distribution of multiple longitudinal planes can be realized; the vertical space can be expanded into stereoscopic single-longitudinal distribution or stereoscopic multi-longitudinal distribution.
The vacuum unit comprises a low vacuum pump, a medium vacuum unit and a high vacuum unit, the number and the specification of the low vacuum pump and the vacuum unit are not limited, and the method that the front-stage maintenance pump replaces the front-stage pump before the combination of the vacuum units is provided, but the method is not limited to the combination; any currently available vacuum unit or vacuum pump may be used depending on the workpiece requirements for the vacuum environment.
The vacuum gauge in the vacuumizing station is selected according to the pressure range of the workpiece vacuumizing process, and a full-range gauge, a compound gauge or a multi-range discrete vacuum gauge can be selected.
The vacuum pumping station comprises a combination of low, medium and high multi-path vacuum switching valves and replacement switching valves, and the vacuum pumping station can increase and decrease the vacuum switching valves in different ranges according to the requirement of a workpiece on the vacuum degree, or does not select the replacement switching valves.
The foregoing is merely a specific application example of the present utility model, and the protection scope of the present utility model is not limited in any way. All technical schemes formed by equivalent transformation or equivalent substitution fall within the protection scope of the utility model.
Claims (6)
1. A high-efficient low energy consumption vacuum pumping system, its characterized in that: the vacuum pumping system comprises a vacuum pumping pipeline assembly, a vacuum unit assembly, a vacuum pumping station assembly and a control system, wherein the vacuum pumping pipeline assembly comprises a low vacuum pipeline (7), a medium vacuum pipeline (6) and a high vacuum pipeline (5), and the vacuum unit assembly comprises a plurality of low vacuum units, medium vacuum units and high vacuum units;
a plurality of rough suction valves (23) are uniformly and alternately connected to the low vacuum pipeline (7), the low vacuum pipeline (7) is connected with a low vacuum pump (22) through the rough suction valves (23), the low vacuum pipeline (7) is connected with a workpiece evacuation interface (14) through a low vacuum switching valve (17), and the workpiece evacuation interface (14) is connected with a workpiece (1); a plurality of middle vacuum control valves (25) are uniformly connected to the middle vacuum pipeline (6) at intervals, and the middle vacuum pipeline is connected with a middle vacuum pump (24) through the middle vacuum control valves (25); the middle vacuum pipeline (6) is connected with a workpiece evacuating interface (14) through a middle vacuum switching valve (16), and the workpiece evacuating interface (14) is connected with the workpiece (1); a plurality of high vacuum control valves (28) are uniformly connected to the high vacuum pipeline (5) at intervals, the high vacuum pipeline (5) is connected with a high vacuum pump (27) through the high vacuum control valves (28), the high vacuum pipeline (5) is connected with a workpiece evacuation interface (14) through a high vacuum switching valve (15), and the workpiece evacuation interface (14) is connected with a workpiece (1);
the low vacuum unit comprises a plurality of low vacuum pumps (22), a second vacuum gauge (10) is arranged on an air inlet pipeline of each low vacuum pump (22), and an exhaust port of each low vacuum pump (22) is connected to an exhaust pipe (8); the medium vacuum unit comprises a plurality of medium vacuum pumps (24) and a medium vacuum pump foreline maintaining pump (26), a third vacuum gauge (11) is arranged on an air inlet pipeline of the medium vacuum pumps (24), an air outlet of the medium vacuum pumps (24) is connected with an air inlet of the medium vacuum pump foreline maintaining pump (26), and an air outlet of the medium vacuum pump foreline maintaining pump (26) is connected to an exhaust pipe (8); the high vacuum unit comprises a plurality of high vacuum pumps (27) and a high vacuum pump foreline maintaining pump (29), a fourth vacuum gauge (12) is arranged on an air inlet pipeline of the high vacuum pumps (27), an air outlet of the high vacuum pumps (27) is connected with an air inlet of the high vacuum pump foreline maintaining pump (29), and an air outlet of the high vacuum pump foreline maintaining pump (29) is connected to an exhaust pipe (8);
the vacuum station assembly comprises a plurality of vacuum stations (20), wherein the vacuum stations (20) are connected to a workpiece (1) through a workpiece vacuum interface (14), the workpiece vacuum interface (14) is connected to a high-vacuum pipeline (5) in parallel through a high-vacuum switching valve (15), is connected to a medium-vacuum pipeline (6) in parallel through a medium-vacuum switching valve (16), and is connected to a low-vacuum pipeline (7) in parallel through a low-vacuum switching valve (17); the first vacuum gauge (3) is connected in parallel between the workpiece evacuation interface (14) and the high vacuum switching valve (15), the medium vacuum switching valve (16) and the low vacuum switching valve (17).
2. The efficient and low-energy-consumption vacuumizing system according to claim 1, wherein: the low vacuum pipeline (7) is connected with the high vacuum pipeline (5) through a first bypass valve (18), and the low vacuum pipeline (7) is connected with the medium vacuum pipeline (6) through a second bypass valve (19) to provide starting vacuum conditions for the high vacuum pipeline (5) and the medium vacuum pipeline (6).
3. The efficient and low-energy-consumption vacuumizing system according to claim 1, wherein: the middle vacuum pipeline (6) is connected with the high vacuum pipeline (5) through a third bypass valve (21) to provide starting vacuum conditions for the high vacuum pipeline (5).
4. The efficient and low-energy-consumption vacuumizing system according to claim 1, wherein: the vacuum unit is arranged in a noise reduction machine room (9) with the functions of sound insulation and noise reduction.
5. The efficient and low-energy-consumption vacuumizing system according to claim 1, wherein: still include, hot nitrogen gas replacement device includes heater (2), nitrogen replacement pipe (4), nitrogen gas holding vessel (30) and nitrogen thermal controller (31), heater (2) set up on work piece (1), work piece interface (14) are evacuated through nitrogen replacement valve (13) connection to nitrogen replacement pipe (4), nitrogen gas holding vessel (30) are connected through nitrogen thermal controller (31).
6. The efficient and low-energy-consumption vacuumizing system according to claim 1, wherein: the control system comprises an evacuation process bus (32), an evacuation control bus (33), a unit control bus (34) and a control console (35), wherein the rough evacuation valve (23), the medium vacuum control valve (25) and the high vacuum control valve (28) are connected to the control console (35) through the evacuation control bus (33), the low vacuum pump (22), the medium vacuum pump (24), the medium vacuum pump foreline maintenance pump (26), the high vacuum pump (27) and the high vacuum pump foreline maintenance pump (29) are connected to the control console (35) through the unit control bus (34), and the high vacuum switching valve (15), the medium vacuum switching valve (16) and the low vacuum switching valve (17) are connected to the control console (35) through the evacuation process bus (32).
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| CN202321804062.9U CN220395934U (en) | 2023-07-11 | 2023-07-11 | High-efficiency low-energy-consumption vacuumizing system |
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| CN202321804062.9U CN220395934U (en) | 2023-07-11 | 2023-07-11 | High-efficiency low-energy-consumption vacuumizing system |
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