CN220016508U - Special gas quick access device - Google Patents
Special gas quick access device Download PDFInfo
- Publication number
- CN220016508U CN220016508U CN202321388233.4U CN202321388233U CN220016508U CN 220016508 U CN220016508 U CN 220016508U CN 202321388233 U CN202321388233 U CN 202321388233U CN 220016508 U CN220016508 U CN 220016508U
- Authority
- CN
- China
- Prior art keywords
- special gas
- process chamber
- hole
- upper cover
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 claims abstract description 80
- 230000008569 process Effects 0.000 claims abstract description 75
- 210000001503 joint Anatomy 0.000 claims abstract description 21
- 230000005484 gravity Effects 0.000 claims abstract description 5
- 238000003032 molecular docking Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 4
- 238000012423 maintenance Methods 0.000 abstract description 16
- 230000008901 benefit Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 85
- 229920001973 fluoroelastomer Polymers 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910000085 borane Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Abstract
The utility model discloses a rapid access device for special gas, which comprises: the device comprises a process chamber upper cover, a lower process chamber and a special gas inlet pipeline, wherein a first through hole is formed in the upper surface of the process chamber upper cover, a special gas outlet pipeline is arranged at the position, connected with the first through hole, of the upper surface of the process chamber upper cover, a special gas butt joint module is arranged at the position, connected with the first through hole, of the lower surface of the process chamber upper cover, the special gas butt joint module is provided with a special gas process hole, the special gas process hole is communicated with the first through hole, the device further comprises the lower process chamber, and the process chamber upper cover is pressed on the lower process chamber through self gravity, so that a special gas passage is formed among the special gas inlet pipeline, the special gas butt joint module and the special gas outlet pipeline. The utility model has the advantages that: the upper cavity which needs to be moved in the maintenance process is avoided from being directly connected with the special gas pipeline of the bulk gas station, safety, convenience and rapidness are achieved, the maintenance efficiency is improved, and the maintenance cost is saved.
Description
Technical Field
The utility model relates to the technical field of gas circuit structures, in particular to a special gas quick access device.
Background
The introduction of specialty gases, i.e., specialty gases such as silane, hydrogen, borane, argon, nitrogen, carbon dioxide, etc., is a common process flow for many manufacturing industries. Under certain conditions, the special gases enter the process cavity according to a certain air inlet route, one or more special gases participate in the process reaction so as to meet the process requirements, and different production processes have different requirements on parameters such as the air inlet route of the special gases. Due to the special nature of the special qi: inflammable, explosive, toxic, corrosive, etc. The slight leakage of the extra gas brings great threat to the safety of the human body, so that the use of the extra gas needs to be very careful, taking the solar panel manufacturing process as an example, in the film coating process, the extra gas for the process needs to be transmitted from the upper cover plate of the process chamber to be introduced into the gas path design of the existing equipment in the vacuum chamber, and the chamber is pumped out by the vacuum pump after ionization reaction. Special treatment, pressure maintaining, leakage detecting and the like are needed for the special gas pipeline.
Three problems exist in the existing special gas circuit: first: because of the process requirement, for the through process cavity, special gas is generally introduced from an upper cavity, a special gas pipeline is generally made of 316L seamless steel pipes, the special gas pipeline connected with a large amount of gas needs to be disassembled in the maintenance process, an upper cover can be opened, and the special gas pipeline enters the cavity for maintenance, is complex in process and has potential safety hazards. Second,: after the special gas pipeline is disassembled, the O-shaped ring of the special gas pipeline needs to be replaced again, so that the cost is increased. Third,: in the reinstallation process, the special gas is used for leak detection, pressure maintaining and the like again, so that the workload is increased, and the working hours are wasted.
Disclosure of Invention
The utility model provides a rapid access device for extra-gas, which solves the technical problems existing in the prior art.
According to one aspect of the present utility model, there is provided a rapid access device for extra-gas, comprising: the device comprises a process chamber upper cover, a lower process chamber, a special gas butt joint module and a special gas passageway, wherein a first through hole is formed in the upper surface of the process chamber upper cover, a special gas outlet pipeline is arranged at the position, connected with the first through hole, of the upper surface of the process chamber upper cover, a special gas butt joint module is arranged at the position, connected with the first through hole, of the lower surface of the process chamber upper cover, the special gas butt joint module is communicated with the first through hole, the special gas butt joint module is arranged in the lower process chamber, a second through hole is formed in the side surface of the lower process chamber, a special gas inlet pipeline is arranged at the position, connected with the second through hole, of the side surface of the lower process chamber, and the process chamber upper cover is pressed on the lower process chamber through self gravity, so that the special gas inlet pipeline, the special gas butt joint module and the special gas outlet pipeline form the special gas passageway.
Further, a module support box is arranged in the lower process chamber, and the special gas docking module is arranged in the module support box.
Further, the side surface of the module supporting case is provided with a third through hole, and the third through hole is communicated with the second through hole.
Further, the extra-gas outlet pipe penetrates through the first supporting part to be connected with the first through hole.
Further, the special gas inlet pipeline passes through the second supporting part to be connected with the second through hole.
Further, a first O-fluororubber seal is disposed in the mounting gap between the upper cover of the process chamber and the lower process chamber.
Further, a second O-shaped fluororubber sealing ring is arranged in an installation gap between the special gas butt joint module and the module supporting box.
Further, the side face of the module supporting box is provided with a supporting lug part.
According to the technical scheme provided by the utility model, the special gas quick access device provided by the utility model can be used for avoiding the situation that the special gas pipeline of a large number of gas stations is directly connected to the upper cavity which needs to be moved in the maintenance process, so that the safety, convenience and quickness are realized. The maintenance efficiency is improved, and the maintenance cost is saved. The problem of how to follow the special gas pipeline of bulk gas station and not directly insert the cavity on, thereby accomplish the quick opening of cavity maintenance in-process, practice thrift the maintenance time is solved.
The foregoing description is only an overview of the technical utility model, and it is to be understood that the technical means of the utility model may be embodied in accordance with the contents of the specification, and the following specific embodiments of the utility model may be set forth in order to make the above and other objects, features and advantages of the utility model more apparent.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the utility model. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
FIG. 1 is a schematic view of an exploded status structure of a quick access device for extra-gas according to the present utility model;
fig. 2 is a schematic structural diagram of an operating state of the extra-gas docking module.
Reference numerals indicate
1-special gas outlet pipeline 2-process chamber upper cover 4-special gas butt joint module
5-special gas inlet pipeline 6-lower process chamber 8-special gas process hole
9-Module support Box 11-first through-hole 12-first support section
21-second through hole 22-second support portion 31-third through hole
34-first O-shaped fluororubber sealing ring 35-supporting lug part
Detailed Description
Exemplary embodiments of the present utility model will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present utility model are shown in the drawings, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.
The following describes a specific gas quick access device provided by the utility model in detail. What is not described in detail in the embodiments of the present utility model belongs to the prior art known to those skilled in the art. The specific conditions are not noted in the examples of the present utility model and are carried out according to the conditions conventional in the art or suggested by the manufacturer.
Referring to fig. 1 and 2, a fast access device for extra gas according to the present utility model includes: the process chamber upper cover 2 is provided with a first through hole 11, a special gas outlet pipeline 1 is arranged at the position where the upper surface of the process chamber upper cover 2 is connected with the first through hole 11, a special gas butt joint module 4 is arranged at the position where the lower surface of the process chamber upper cover 2 is connected with the first through hole 11, the special gas butt joint module 4 is provided with a special gas process hole 8, the special gas process hole 8 is communicated with the first through hole 11, the process chamber upper cover further comprises a lower process chamber 6, the special gas butt joint module 4 is arranged inside the lower process chamber 6, a second through hole 21 is arranged on the side surface of the lower process chamber 6, a special gas inlet pipeline 5 is arranged at the position where the side surface of the lower process chamber 6 is connected with the second through hole 21, and the process chamber upper cover 2 is pressed on the lower process chamber 6 through self gravity, so that a special gas passage is formed among the special gas inlet pipeline 5, the special gas butt joint module 4 and the special gas outlet pipeline 1.
Further, a module support box 9 is arranged inside the lower process chamber 6, and the special gas docking module 4 is installed inside the module support box 9.
Further, the side of the module supporting case 9 has a third through hole 31, and the third through hole 31 communicates with the second through hole 21.
Further, the extra-gas outlet duct 1 is connected to the first through hole 11 through a first support 12.
Further, the extra-gas introducing pipe 5 is connected to the second through hole 21 through a second support 22.
Further, a first O-ring seal 34 is provided in the installation gap between the process chamber upper cover 2 and the lower process chamber 6.
Further, a second O-type fluororubber seal (not shown) is provided in the installation gap between the special gas docking module 4 and the module support case 9. The O-shaped ring of the special gas butt joint module is sealed by fluororubber, so that quick maintenance is realized.
Further, a supporting lug 35 is provided on the side of the module supporting case 9.
As a specific embodiment, the special gas of the bulk gas station is abutted against the static process lower cavity, then the special gas is reintroduced into the upper cavity through the special gas abutting module, an upper cavity which needs to be moved in the maintenance process is omitted, the special gas pipeline of the bulk gas station is directly connected into the static lower cavity instead of the upper cavity, the special gas abutting module is pressed through the gravity of the upper cavity, and therefore the special gas of the bulk gas station is led into the process cavity through the special gas abutting module and the special gas outlet pipeline of the upper cavity. The upper cavity which needs to be moved in the maintenance process is further avoided from being directly connected with the special gas pipeline of the bulk gas station, safety, convenience and rapidness are achieved, the maintenance efficiency is improved, and the maintenance cost is saved.
As a specific embodiment, the lower process chamber comprises a vacuum cavity, the vacuum cavity comprises a cavity frame and a cavity door assembly, the cavity door assembly is connected with the cavity frame through a connecting mechanism, and the cavity door assembly is of a multi-cavity door structure.
As a specific embodiment, the cavity frame is provided with a beam frame, a plurality of butt flanges are arranged on the beam frame, and the cavity door assembly is connected with the cavity frame in a hinged mode.
As a specific embodiment, the lower process chamber is sequentially provided with a heat source, a special air spraying device, a transmission structure and a heater along the direction from the central line of the vacuum cavity to the outside of the vacuum cavity.
According to the utility model, the special gas of a large number of gas stations is abutted against the static process lower cavity, and then is led into the upper cavity through the special gas abutting module, so that the method is rapid, efficient and safe. And particularly, the special gas butt joint module is adopted, so that the structure is simple, the maintenance is convenient, and the popularization in the industry is facilitated.
It should be understood that the utility model is not limited to the particular arrangements and instrumentality described above and shown in the drawings. For the sake of brevity, a detailed description of known methods is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method processes of the present utility model are not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between steps, after appreciating the spirit of the present utility model.
Claims (8)
1. A rapid access device for a biogas, comprising: the device comprises a process chamber upper cover, a lower process chamber, a special gas butt joint module and a special gas passageway, wherein a first through hole is formed in the upper surface of the process chamber upper cover, a special gas outlet pipeline is arranged at the position, connected with the first through hole, of the upper surface of the process chamber upper cover, a special gas butt joint module is arranged at the position, connected with the first through hole, of the lower surface of the process chamber upper cover, the special gas butt joint module is communicated with the first through hole, the special gas butt joint module is arranged in the lower process chamber, a second through hole is formed in the side surface of the lower process chamber, a special gas inlet pipeline is arranged at the position, connected with the second through hole, of the side surface of the lower process chamber, and the process chamber upper cover is pressed on the lower process chamber through self gravity, so that the special gas inlet pipeline, the special gas butt joint module and the special gas outlet pipeline form the special gas passageway.
2. The quick access device of claim 1, wherein a module support box is disposed within the lower process chamber, the turbo docking module being mounted within the module support box.
3. The quick access device of claim 2, wherein the side of the module support case has a third through hole, the third through hole communicating with the second through hole.
4. The extra-gas quick access device of claim 1 wherein the extra-gas outlet conduit is connected to the first throughbore through a first support.
5. The quick access device of claim 1, wherein the extra-gas inlet conduit is connected to the second through-hole through a second support.
6. The quick access device of claim 1, wherein a first O-ring is disposed in an installation gap between the upper cover of the process chamber and the lower process chamber.
7. The extra-gas quick access device of claim 2 wherein a second O-ring is provided in the mounting gap between the extra-gas docking module and the module support box.
8. The rapid attachment device according to claim 3, wherein the module support case is provided with a support lug on a side surface thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321388233.4U CN220016508U (en) | 2023-06-02 | 2023-06-02 | Special gas quick access device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321388233.4U CN220016508U (en) | 2023-06-02 | 2023-06-02 | Special gas quick access device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220016508U true CN220016508U (en) | 2023-11-14 |
Family
ID=88691858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321388233.4U Active CN220016508U (en) | 2023-06-02 | 2023-06-02 | Special gas quick access device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220016508U (en) |
-
2023
- 2023-06-02 CN CN202321388233.4U patent/CN220016508U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |