CN111135877B - Double-layer specified flow passage sealing structure and sealing method of sealing box chamber - Google Patents
Double-layer specified flow passage sealing structure and sealing method of sealing box chamber Download PDFInfo
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- CN111135877B CN111135877B CN202010060996.0A CN202010060996A CN111135877B CN 111135877 B CN111135877 B CN 111135877B CN 202010060996 A CN202010060996 A CN 202010060996A CN 111135877 B CN111135877 B CN 111135877B
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- G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
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Abstract
The invention provides a double-layer specified flow passage sealing structure of a sealing box chamber, which comprises a sealing shell (1), a circulating purification system (2), a connecting piece (3), a control and detection device (4), a flow guide structure (5) and an air control structure (6), wherein the sealing shell (1) is octahedron, the circulating purification system (2) comprises an inner box body circulating purification system and a jacket circulating purification system, and the connecting piece (3) comprises an inner connecting piece (31), an outer connecting piece (32) and an inner connecting piece; the gas control structure (6) is used for controlling the gas inlet and outlet. The sealing grade of the whole body meeting the requirement can be realized under the condition that the sealing grade of the inner and outer shell bodies does not meet the requirement, and the internal gas dead zone is less.
Description
Technical Field
The invention relates to the technical field of sealing, in particular to a sealing structure and a sealing method of a double-layer specified flow passage of a sealed box chamber.
Technical Field
Compared with the existing foreign and domestic sealed cabinets, the sealing cabinet rarely meets the requirement of high-grade or even super-high-grade sealing, and the sealing grade is difficult to realize by simply improving the manufacturing level, so that the problem is caused.
For the sealed chambers, each sealed chamber has a special environment inside, specific internal environment indexes need to be kept to reach a constant requirement value, if the sealing grade of the sealed chambers does not reach the requirement grade, foreign gas outside the sealed chambers for the sealed chamber internal environment can enter the inside of the box body in various modes, the content of the foreign gas at leakage points is high, the content of other foreign gas is relatively low, the entering amount exceeds the allowable bearing amount inside the sealed chambers, the work inside the sealed chambers can be influenced to a great extent, in order to ensure the working environment, atmosphere and jacket uniformity inside the sealed chambers, the sealing grade of the sealed chambers must be improved, and the jacket gas uniformity of the sealed chambers must be ensured.
Disclosure of Invention
The invention aims to improve the sealing performance of a sealed box chamber and the uniformity of jacket gas, reduce the amount of foreign gas entering the sealed box chamber from the outside in unit time and reduce the amount of internal gas leaking to the outside of the sealed box chamber in unit time.
The technical scheme of the invention provides a double-layer specified flow passage sealing structure of a sealing box chamber, which comprises a sealing shell, a circulating purification system, a connecting piece, a control and detection device, a flow guide structure and a gas control structure, and is characterized in that:
the sealing shell is an octahedron, each surface of the octahedron is provided with an inner layer steel plate and an outer layer steel plate, and the inner layer steel plate and the outer layer steel plate are formed by welding small steel plates in a splicing manner;
the circulating purification system comprises an inner box body circulating purification system and a jacket circulating purification system, and gas in the inner sealed shell flows circularly through the inner box body circulating purification system; the gas in the jacket circularly flows through the jacket circulating purification system;
the connecting piece comprises an inner connecting piece, an outer connecting piece and a connecting piece, wherein the inner connecting piece penetrates through the inner sealing shell and the outer sealing shell and is fixedly connected with the inner sealing shell and the outer sealing shell respectively, and the outer connecting piece only penetrates through the outer sealing shell and is fixedly connected with the outer sealing shell;
the flow guide structure is used for guiding the flow of gas;
the gas control structure is used for controlling the gas to enter and discharge.
The invention also provides a sealing method of the double-layer specified flow passage sealing structure, which comprises the following steps:
step 1: opening a first access hole and a second access hole in the inner box body circulating and purifying system and the jacket circulating and purifying system, respectively introducing a first gas with the concentration of 99.99 percent and a second gas with the concentration of 99.99 percent, and simultaneously operating a first fan and a second fan to start the gas washing operation of the inner box body and the jacket;
step 2: opening an inner box gas pressure control device, a jacket gas pressure control device, an inner box gas detection device and a jacket gas detection device while washing gas, detecting the internal gas pressure, concentration and temperature of the inner box and the jacket, adjusting the inner box gas pressure control device and the jacket gas pressure control device according to detected data, and setting a pressure gradient;
and step 3: after the inner box gas detection device and the jacket gas detection device detect that the concentration of gas reaches a specified value, the access hole is closed, and the gas washing work is stopped, so that the gas inside the sealed box chamber and the gas inside the jacket are respectively purified in a self-circulation mode under the action of the first fan.
And 4, step 4: after the inner box body gas detection device or the jacket gas detection device detects that the concentration of the target gas is lower than the index value, the access hole is opened, high-concentration target gas is introduced, and after the concentration of the target gas is higher than the index value, the access hole is closed to allow the circulation purification system to self-circulate;
and 5: when the local jacket gas detection device detects that the concentration of the target gas is lower than the index value, closing the module outlet valve plate, opening the gas control exhaust port valve plate, discharging the target gas with the concentration lower than the index value from the gas control exhaust port, simultaneously closing the flow guide port valve plate, opening the gas control gas inlet valve plate, and introducing high-concentration target gas from the gas control gas inlet to the next module;
step 6: when the concentration of the target gas in the jacket is higher than the index value, opening the valve plate of the module outlet of the previous module, and closing the valve plate of the gas control exhaust port of the previous module; closing the module inlet valve plate of the module, opening the diversion port valve plate of the module, and closing the module outlet valve plate of the module; and opening the flow guide port valve plate of the next module, opening the module inlet valve plate of the next module, and closing the air control inlet valve plate of the next module, so that the air entering from the inlet of the previous module flows out of the flow guide port of the next module, and then the current module and the next module are communicated.
And 7: the target gas concentration and uniformity inside the cabinet and the jacket are controlled by passing from step to step a plurality of times according to the target gas concentration.
The invention has the beneficial effects that:
the invention adopts a double-layer specified flow passage structure, realizes the integral required sealing grade under the condition that the sealing grade of the inner and outer layer shells can not meet the requirement by the transition action of a gap between the inner and outer layer shells and a jacket, the uniform gas action of a flow guide structure and the gas flow direction guide action of pressure gradient, and has less internal gas dead zone.
Drawings
FIG. 1 is a schematic view of the gas environment of a sealed enclosure in an embodiment of the present invention.
Fig. 2 is a schematic diagram (front view) illustrating a two-layer designated flow passage sealing chamber structure according to an embodiment of the present invention.
Fig. 3 is a schematic diagram (axial view) of a two-layer specified flow channel sealed box structure according to an embodiment of the invention.
Fig. 4 is a schematic view of a flow guiding structure of a single module specified flow channel in an embodiment of the invention.
Fig. 5 is a schematic view of a single-module specified flow channel guide structure (an axonometric view with an outer plate removed) in an embodiment of the invention.
FIG. 6 is a schematic view of the two module axes in the embodiment of the present invention.
FIG. 7 is a schematic view of a gas control structure between two modules according to an embodiment of the present invention.
Wherein: 1-sealing the shell; 2-a circulating purification system; 3-a connector; 4-control and detection means; 5-a flow guide structure; 6-gas control structure. 11-inner layer sealing shell; 12-outer layer sealing shell; 21-air inlet of the inner box body; 22-a first access opening; 23-connecting a pipe; 24-a first flow valve; 25-a first fan; 26-a first gas purification device; 27-inner box exhaust port; 28-jacket gas inlet; 29-a second access opening; 210-a second flow valve; 211-a second fan; 212-a second gas purification device; 213-jacket vent; 31-inner and outer connectors; 32-external connection; 41-jacket gas detection device; 42-inner box gas detection device; 43-inner box gas pressure control device, 44 jacket gas pressure control device; 51-a flow-guiding connecting plate; 52-diversion holes; 53-a draft tube; 61-a gas control exhaust port valve plate; 62-air control exhaust port; 63-a module outlet valve plate; 64-a flow guide port; 65 diversion port valve plates; 66-a module inlet valve plate; 67-gas control inlet; 68 air control inlet valve plate;
Detailed Description
The contents and advantages of the present invention will be described in further detail with reference to the following detailed description and the accompanying drawings, but the present invention is not limited thereto.
As shown in fig. 2-7, this embodiment provides a double-layer specified flow passage sealing structure of a sealed box chamber, which comprises a sealed housing 1, a circulation purification system 2, a connecting piece 3, a control and detection device 4, a flow guide structure 5 and a gas control structure 6.
Whole sealed housing 1 is the octahedron, look down and see to be regular hexagon, every has inlayer and outer steel sheet, inlayer and outer steel sheet all are formed by little steel sheet tailor welding, because the space of pressing from both sides cover itself is less, the sealing performance of the sealed housing of inlayer is preferentially guaranteed, the welding seam quality of inner panel is satisfied to the priority when the construction, consequently when the welding, the inner panel adopts two-sided welding seam, the planking adopts single face welding seam, the welding form is interior platelet and interior platelet welding, outer platelet and outer platelet welding, welding between the planking is single face groove weld, welding between the planking is two-sided groove weld.
As shown in fig. 2, the circulation purification system 2 comprises an inner box circulation purification system and a jacket circulation purification system, wherein gas in the inner sealed shell circularly flows through the inner box circulation purification system; the gas in the jacket circularly flows through the jacket circulating purification system.
The inner box body circulation purification system comprises: an inner box body air inlet 21, a first access hole 22, a connecting pipeline 23, a first flow valve 24, a first fan 25, a first gas purification device 26 and an inner box body air outlet 27;
the inner box body air inlet 21 is communicated with the inner box body through the inner layer sealing shell 11 and the outer layer sealing shell 12, the inner box body air inlet 21 is connected with the inner layer sealing shell 11 through a double-sided fillet weld, and the inner box body air inlet 21 is connected with the outer layer sealing shell 12 through a single-sided fillet weld; the inner box body exhaust port 27 penetrates through the outer layer sealed shell 12 and the inner layer sealed shell 11 and is communicated with the jacket, the jacket is a space between the inner layer shell and the outer layer shell, the inner box body exhaust port 27 is connected with the inner layer sealed shell 11 in a double-sided fillet weld mode, and the inner box body exhaust port 27 is connected with the outer layer sealed shell 12 in a single-sided fillet weld mode. The inner box air inlet 21 is connected with the inner box air outlet 27 through a connecting pipeline 23, the connecting pipeline 23 is provided with a first access hole 22, a first flow valve 24, a first fan 25 and a first gas purifying device 26, and the installation mode is welding.
As shown in fig. 2, the jacket circulation purification system comprises a jacket air inlet 28, a second access port 29, a connecting pipeline 23, a second flow valve 210, a second fan 211, a second gas purification device 212 and a jacket exhaust port 213, wherein the jacket air inlet 28 is communicated with the jacket only through the outer sealed shell 12, the jacket air inlet 28 is connected with the outer sealed shell 12 in a single-sided fillet weld manner, and the length of the extension in the jacket is 1/4 of the thickness of the jacket; the jacket exhaust port 213 passes through the outer sealed shell 12 to be communicated with the jacket, and the jacket exhaust port 29 is connected with the outer sealed shell 12 in a single-sided fillet welding mode. The jacket air inlet 28 and the jacket air outlet 213 are connected through a connecting pipeline 23, and the connecting pipeline 23 is provided with a second access port 29, a second flow valve 210, a second fan 211 and a second gas purification device 212 which are welded.
As shown in fig. 2, the connecting member 3 includes an inner and outer connecting member 31 and an outer connecting member 32, the inner and outer connecting member 31 penetrates through the inner and outer sealing housings 11 and 12 and is fixedly connected to the inner and outer sealing housings 11 and 12, respectively, the connecting manner is welding, signal lines and cables led out from the inner box gas detector 42 and the inner box gas pressure controller 43 penetrate out of the inner and outer connecting members 31 and the reading and control are performed outside the sealing housing 1. The external connecting piece 32 only penetrates through the outer sealed shell 12 and is fixedly connected with the outer sealed shell 12 in a welding mode, signal wires and cables led out from the jacket gas detection device 41 and the jacket gas pressure control device 44 penetrate out of the outer sealed shell 12 from the external connecting piece 31, and reading and control are carried out outside the sealed shell 1.
When the box chamber is sealed, the pipeline is sealed after the communication, gas can only be leaked to the outside from the access hole, the access hole is normally closed when the gas is not washed and the gas in the interior is replaced, and the gas is opened only when the gas is washed and replaced, so that the gas cannot be leaked out after the communication.
The connection between the outer shell and the inner shell is by a flow guiding connection plate 51, the height of which is the distance between the inner and outer shells.
The control and detection device 4 comprises a jacket gas detection device 41, an inner box gas detection device 42, an inner box gas pressure control device 43 and a jacket gas pressure control device 44, the inner box gas detection device 42 and the inner box gas pressure control device 43 are installed inside the inner-layer sealed shell 11, the inner box gas detection device 42 detects the temperature, the concentration and the pressure of inner box gas, the inner box gas pressure control device 43 adjusts the inner box gas pressure to a target value according to data detected by the inner box gas detection device 42 and keeps the target value, the jacket gas detection device 41 and the jacket gas pressure control device 44 are installed inside a jacket, and the jacket gas detection device 41 detects the temperature, the concentration and the pressure of jacket gas.
As shown in fig. 2, the jacket gas pressure control means 44 adjusts the jacket gas pressure to a target value and maintains it according to the data from the jacket gas detection means 41.
As shown in fig. 4-6, the flow guiding structure 5 comprises a flow guiding connection plate 51, a flow guiding hole 52, and a flow guiding pipe 53, wherein the flow guiding connection plate 51 is installed in a jacket of a single module and connects an inner shell and an outer shell of the module, the connection is welding, a plurality of modules are spliced to form one surface of a sealed box body, the sealed box body is composed of eight surfaces, each surface is provided with an inner shell, an outer shell and a jacket, each module is provided with an air inlet and an air outlet, the surface is only a part of the shell and is provided with eight surfaces which are components of the shell, each surface is composed of a plurality of modules, one module is listed in fig. 5, wherein the flow guiding hole 52 is opened at a specific position of the flow guiding plate to achieve the function of a designated flow passage of the single module, gas coming from the air inlet of the single module flows to the air outlet of the module through the passage of fig. 4, and each module can be more looked at each place of the module during washing and circulation after the flow, the fluid dead zone of a single module is reduced, the gas circulation replacement rate is increased, the guide pipe 53 is arranged between the two modules, the guide opening of the previous module is communicated with the guide opening of the previous module, the installation mode is welding, gas introduced into the module under a specific condition of the specific module can be directly introduced into the next module through the guide pipe 53 without passing through the module, and the gas washing and replacement efficiency is greatly improved.
The specific module is a place where leakage occurs, such as no welding seam or no connector is installed on the inner and outer shells of the module, and the data such as air pressure, concentration, temperature and the like detected by the jacket gas detection device 41 in the jacket of the module meet the specified target values.
As shown in fig. 6-7, the air control structure 6 includes an air control exhaust port valve plate 61, an air control exhaust port 62, a module outlet valve plate 63, a diversion port 64, a diversion port valve plate 65, a module inlet valve plate 66, an air control inlet 67, and an air control inlet valve plate 68.
The air control exhaust port 62 is arranged above the module outlet in a welding mode;
the diversion port 64 is arranged above the module inlet in a welding mode;
the air control inlet 67 is arranged above the module inlet in a welding mode;
the air control exhaust port valve plate 61 is arranged on the air control exhaust port 62 and can be used for telescopically closing and opening the air control exhaust port;
a module outlet valve plate 63 is mounted on the module outlet and telescopically closes and opens the module outlet;
the diversion port valve plate 65 is installed on the diversion port 64 and can telescopically close and open the diversion port 64;
a module inlet valve plate 66 is mounted on the module inlet and telescopically closes and opens the module inlet;
the air control inlet valve plate 68 is mounted on the air control inlet 67, and telescopically closes and opens the air control inlet.
As shown in fig. 2, the bottom plate of the outer sealing shell 12 bears the weight of the whole sealing shell 1, a thickening plate needs to be added, if the volume requirement of the sealing box is large, a whole large steel plate does not exist in the actual production, so that the small steel plates need to be spliced, the inner sealing shell 11 and the outer sealing shell 12 are welded and fixed with the flow guide connecting plate through a connecting piece, and a jacket is formed in the gap between the inner sealing shell 11 and the inner sealing shell 12.
The mounting heights of the air inlet and the air outlet of the inner box body and the jacket are changed according to the mass of the target gas, if the mass of the target gas is larger than that of air, the air inlet is arranged at the height close to the bottom surface, and the air outlet is arranged at the height close to the top surface; if the mass of the target gas is less than that of the air, an air inlet is arranged at the height close to the top surface, and an air outlet is arranged at the height close to the bottom surface. If the box chamber is used for a target gas with a mass higher/lower than that of air in the early stage and another target gas with a mass lower/higher than that of air in the later stage, the same effect can be achieved by using a blower for back blowing. If the target gas is too heavy, the air inlet is required to be arranged at a position close to the lower part of the box chamber, the air outlet is required to be arranged at a position close to the upper part of the box chamber, the original air in the box chamber is extruded out from the air outlet at the higher part by the heavier target gas in the gas washing stage, and when the target gas is very light, the installation heights of the air inlet and the air outlet are exchanged, and the air is extruded out from the air outlet at the lower part. If the installation heights of the air inlet and the air outlet are not adjusted, the same effect can be achieved by directly blowing back by the fan.
On the basis, the invention provides a sealing method for a sealed box chamber, which comprises the following steps:
step 1: opening a first access hole 22 and a second access hole 29 in the inner box body circulating purification system and the jacket circulating purification system, respectively introducing a first gas with the concentration of 99.99 percent and a second gas with the concentration of 99.99 percent, simultaneously operating a first fan 25 and a second fan 211, and starting the gas washing operation of the inner box body and the jacket;
step 2: and opening an inner box gas pressure control device 43, a jacket gas pressure control device 44, an inner box gas detection device 42 and a jacket gas detection device 41 at the same time of gas washing, detecting the internal gas pressure, concentration and temperature of the inner box and the jacket, adjusting the inner box gas pressure control device 43 and the jacket gas pressure control device 44 according to the detected data, and setting a pressure gradient.
And (3) adjusting the magnitude relation among P1, P2 and P3 by using a gas pressure control device to form a pressure gradient, wherein P1 is the pressure intensity in the sealed box, P2 is the pressure intensity in the jacket, and P3 is the pressure intensity outside the sealed box.
And step 3: after the inner box gas detection device 42 and the jacket gas detection device 41 detect that the concentration of the gas reaches a specified value, the access opening 22 is closed, and the gas washing operation is stopped, so that the gas in the sealed box chamber and the gas in the jacket are respectively purified in a self-circulation manner under the action of the fan 25.
And 4, step 4: if the target gas concentration detected by the inner box gas detection device 42 or the jacket gas detection device 41 is lower than the index value, the access opening 22 is opened, high-concentration target gas is introduced, and the access opening 22 is closed to allow the circulation purification system to self-circulate after the target gas concentration is higher than the index value.
And 5: if the local jacket gas detection device 41 detects that the target gas concentration is lower than the index value, the module outlet valve plate 63 is closed, the gas control exhaust port valve plate 61 is opened, the target gas with the concentration lower than the index value is exhausted from the gas control exhaust port 62, the diversion port valve plate 65 is closed, the gas control gas inlet valve plate 68 is opened, and the high-concentration target gas is introduced into the next module from the gas control gas inlet 67.
Step 6: if the connecting piece 3 and the plate splicing part are not arranged in a single module and the target gas concentration in the jacket is higher than an index value, the module outlet valve plate 63 of the previous module is opened, and the gas control exhaust port valve plate 61 of the previous module is closed; closing the module inlet valve plate 66 of the module, opening the diversion port valve plate 65 thereof, and closing the module outlet valve plate 63 of the module; the diversion port valve plate 65 of the next module is opened, the module inlet valve plate 66 of the next module is opened, and the air control inlet valve plate 68 of the next module is closed, so that the air from the inlet of the previous module flows out of the diversion port 64 of the next module to communicate the next module with the diversion port 64 of the next module.
And 7: according to different target gas concentrations, the fourth, fifth and sixth steps can be used for controlling the target gas concentrations and the uniformity of the target gas concentrations in the box chamber and the jacket. When the sealing performance requirements cannot be met after the fourth, fifth and sixth steps of use, the first flow valve 24 and the second flow valve 210 can be adjusted, the flow is increased, the wind speeds of the first fan 25 and the second fan 211 are increased, and the gas washing and replacement speed is increased. When the target gas concentration in the inner box body and the jacket is far higher than the index value, the economic principle is considered, and the rates of gas washing and replacement are preferentially reduced.
The gas pressure gradient of the sealed chamber is set as follows:
optionally, the gas pressure intensity is adjusted to P2> P3> P1 by the inner box gas pressure control device 43 and the jacket gas pressure control device 44, where P1 is the gas pressure intensity inside the sealed box chamber, P2 is the gas pressure intensity inside the jacket, and P3 is the gas pressure intensity outside the sealed box; the second gas in the jacket diffuses to the third gas outside the sealed box chamber and to the first gas in the sealed box chamber due to the strength of the gas pressure. The first gas inside the chamber cannot leak out of the sealed chamber, and the third gas outside the sealed chamber cannot leak into the sealed chamber.
Optionally, the gas pressure intensity is adjusted to P2 ═ P3> P1 by the inner box gas pressure control device 43 and the jacket gas pressure control device 44, and then the third gas and the second gas are mixed with each other, the second gas carries the third gas to leak into the first gas together, but the internal first gas does not leak into the third gas.
Optionally, the gas pressure intensity is adjusted to P3> P2> P1 by the inner box gas pressure control device 43 and the jacket gas pressure control device 44, the third gas will be diffused to the second gas first, and then the third gas and the second gas will be diffused to the first gas together, but the inner first gas will not leak to the third gas.
Optionally, the gas pressure intensity is adjusted to P3> P1 > P2 by the inner box gas pressure control device 43 and the jacket gas pressure control device 44, and then the third gas and the first gas are both diffused to the second gas, so that the first gas inside cannot leak out of the sealed box, and the third gas outside the sealed box cannot leak into the sealed box.
In the above modes, the circulation purification system 2 is operated, and the inner box circulation purification system and the jacket circulation purification system respectively control the gas circulation flow in the inner box and the jacket at the same time. The generation of gas dead zones is avoided through the action of the continuous gas supply, flow guide structure 5 and gas control structure 6 of the gas circulation purification system 2. The composition of the second gas can be changed in the modes, and the gas of the jacket where the second gas is located is also set as the first gas, so that the effect that the target first gas cannot be leaked to the third gas and the target first gas cannot be leaked to the third gas in the inner box body is further enhanced.
It should be noted that the above-mentioned embodiments illustrate only preferred embodiments of the present invention, and therefore, the present invention is not limited thereto, and although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and equivalents can be made in the technical solutions described in the foregoing embodiments, or some technical features of the present invention can be replaced with equivalents. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The utility model provides a double-deck appointed runner seal structure of sealed boxroom, includes seal shell (1), circulation clean system (2), connecting piece (3), control and detection device (4), water conservancy diversion structure (5), accuse gas structure (6), its characterized in that:
the sealing shell (1) is an octahedron, each surface of the octahedron is provided with an inner layer steel plate and an outer layer steel plate, and the inner layer steel plate and the outer layer steel plate are formed by welding small steel plates in a splicing manner;
the circulating purification system (2) comprises an inner box body circulating purification system and a jacket circulating purification system, and gas in the inner sealed shell flows circularly through the inner box body circulating purification system; the gas in the jacket circularly flows through the jacket circulating purification system;
the connecting piece (3) comprises an inner connecting piece, an outer connecting piece (31) and an outer connecting piece (32), the inner connecting piece and the outer connecting piece (31) penetrate through the inner sealing shell (11) and the outer sealing shell (12) and are fixedly connected with the inner sealing shell (11) and the outer sealing shell (12) respectively, and the outer connecting piece (32) only penetrates through the outer sealing shell (12) and is fixedly connected with the outer sealing shell (12);
the control and detection device (4) comprises a jacket gas detection device (41), an inner box gas detection device (42), an inner box gas pressure control device (43) and a jacket gas pressure control device (44), the inner box gas detection device (42) and the inner box gas pressure control device (43) are installed inside the inner-layer sealed shell (11), the inner box gas detection device (42) detects the temperature, the concentration and the pressure of the inner box gas, the inner box gas pressure control device (43) adjusts the inner box gas pressure to a target value according to the data detected by the inner box gas detection device (42) and keeps the target value, the jacket gas detection device (41) and the jacket gas pressure control device (44) are installed inside the jacket, the jacket gas detection device (41) detects the temperature, the concentration and the pressure of the jacket gas, and the jacket gas pressure control device (44) adjusts the jacket gas pressure to the target value according to the data detected by the jacket gas detection device (41) The value is maintained;
the flow guide structure (5) is used for guiding the flow of gas;
the flow guide structure (5) comprises a flow guide connecting plate (51) and a flow guide pipe (53), wherein the flow guide connecting plate (51) is arranged in a jacket of a single module and is connected with an inner shell and an outer shell of the corresponding module; the guide pipe (53) is arranged between the two modules and is communicated with the guide port of the previous module and the guide port of the previous module;
the gas control structure (6) is used for controlling the gas to enter and discharge;
the air control structure (6) comprises an air control exhaust port valve plate (61), an air control exhaust port (62), a module outlet valve plate (63), a flow guide port (64), a flow guide port valve plate (65), a module inlet valve plate (66), an air control air inlet (67) and an air control air inlet valve plate (68);
the air control exhaust port (62) is arranged above the module outlet in a welding mode;
the flow guide port (64) is arranged above the module inlet in a welding mode;
the air control inlet (67) is arranged above the module inlet in a welding mode;
the air control exhaust port valve plate (61) is arranged on the air control exhaust port (62) and can be opened and closed in a telescopic mode;
the module outlet valve plate (63) is arranged on the module outlet and can telescopically close and open the module outlet;
the diversion port valve plate (65) is arranged on the diversion port (64) and can telescopically close and open the diversion port (64);
the module inlet valve plate (66) is arranged on the module inlet and can telescopically close and open the module inlet;
the air control air inlet valve plate (68) is arranged on the air control air inlet (67) and can be used for telescopically closing and opening the air control air inlet.
2. The double-deck specified flow path sealing structure of a sealed cabinet according to claim 1, wherein: the inner box body circulating purification system comprises an inner box body air inlet (21), a first access hole (22), a connecting pipeline (23), a first flow valve (24), a first fan (25), a first gas purification device (26) and an inner box body exhaust port (27); the inner box body air inlet (21) is communicated with the inner box body through the inner layer sealing shell (11) and the outer layer sealing shell (12), the inner box body air inlet (21) is connected with the inner layer sealing shell (11), and the inner box body air inlet (21) is connected with the outer layer sealing shell (12); an inner box body exhaust port (27) penetrates through the outer layer sealed shell (12) and the inner layer sealed shell (11) and is communicated with the jacket, the inner box body exhaust port (27) is connected with the inner layer sealed shell (11), and the inner box body exhaust port (27) is connected with the outer layer sealed shell (12); the inner box body air inlet (21) is connected with the inner box body air outlet (27) through a connecting pipeline (23), and a first access hole (22), a first flow valve (24), a first fan (25) and a first gas purification device (26) are installed on the connecting pipeline (23).
3. The double-deck specified flow path sealing structure of a sealed cabinet according to claim 2, wherein: the jacket circulating purification system comprises a jacket air inlet (28), a second access hole (29), a connecting pipeline (23), a second flow valve (210), a second fan (211), a second gas purification device (212) and a jacket exhaust port (213), wherein the jacket air inlet (28) is communicated with the jacket only through the outer-layer sealed shell (12), and the jacket air inlet (28) is connected with the outer-layer sealed shell (12); the jacket exhaust port (213) penetrates through the outer layer sealed shell (12) to be communicated with the jacket, and the jacket exhaust port (213) is connected with the outer layer sealed shell; the jacket air inlet (28) is connected with the jacket air outlet (213) through a connecting pipeline (23), and a second access hole (29), a second flow valve (210), a second fan (211) and a second gas purification device (212) are installed on the connecting pipeline (23).
4. A double-deck specified flow path sealing structure for a sealed cabinet according to claim 3, wherein: a signal wire and a cable wire led out from the inner box gas detection device (42) and the inner box gas pressure control device (43) penetrate out of the inner layer sealed shell (11) and the outer layer sealed shell (12) from the inner and outer connecting pieces (31); and signal wires and cables led out from the jacket gas detection device (41) and the jacket gas pressure control device (44) penetrate out of the outer sealing shell (12) from the external connecting piece (31).
5. A sealing method of the double-layer specified flow path sealing structure according to claim 4, characterized in that: the method comprises the following steps:
step 1: opening a first access hole (22) and a second access hole (29) in the inner box body circulating and purifying system and the jacket circulating and purifying system, respectively introducing a first gas with the concentration of 99.99% and a second gas with the concentration of 99.99%, and simultaneously operating a first fan (25) and a second fan (211) to start the gas washing operation of the inner box body and the jacket;
step 2: opening an inner box gas pressure control device (43), a jacket gas pressure control device (44), an inner box gas detection device (42) and a jacket gas detection device (41) while washing gas, detecting the internal gas pressure, concentration and temperature of the inner box and the jacket, adjusting the inner box gas pressure control device (43) and the jacket gas pressure control device (44) according to detected data, and setting a pressure gradient;
and step 3: after the inner box gas detection device (42) and the jacket gas detection device (41) detect that the concentration of the gas reaches a specified value, the access hole (22) is closed, and the gas washing work is stopped, so that the gas in the sealed box chamber and the gas in the jacket are respectively purified in a self-circulation manner under the action of the first fan (25);
and 4, step 4: after an inner box body gas detection device (42) or a jacket gas detection device (41) detects that the concentration of the target gas is lower than an index value, an access hole (22) is opened, high-concentration target gas is introduced, and the access hole (22) is closed to enable the circulation purification system to self-circulate after the concentration of the target gas is higher than the index value;
and 5: when the local jacket gas detection device (41) detects that the concentration of the target gas is lower than the index value, closing the module outlet valve plate (63), opening the gas control exhaust port valve plate (61), discharging the target gas with the concentration lower than the index value from the gas control exhaust port (62), simultaneously closing the flow guide port valve plate (65), opening the gas control gas inlet valve plate (68), and introducing the high-concentration target gas from the gas control gas inlet (67) to the next module;
step 6: when the target gas concentration in the jacket is higher than the index value, opening a module outlet valve plate (63) of the previous module, and closing a gas control and exhaust port valve plate (61) of the previous module; closing the module inlet valve plate (66) of the module, opening the diversion port valve plate (65) thereof, and closing the module outlet valve plate (63) of the module; opening the diversion port valve plate (65) of the next module, opening the module inlet valve plate (66) of the next module, closing the air control inlet valve plate (68) of the next module, and enabling air from the inlet of the previous module to flow out of the diversion port (64) of the next module, so as to communicate the current module with the next module;
and 7: and (4) controlling the target gas concentration inside the box chamber and the jacket and the uniformity of the target gas concentration through the steps (4) to (6) for multiple times according to different target gas concentrations.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010060996.0A CN111135877B (en) | 2020-01-19 | 2020-01-19 | Double-layer specified flow passage sealing structure and sealing method of sealing box chamber |
| PCT/CN2020/128631 WO2021143332A1 (en) | 2020-01-19 | 2020-11-13 | Double-layer specified flow channel sealing structure for sealed box chamber and sealing method |
| JP2022567699A JP7428437B2 (en) | 2020-01-19 | 2020-11-13 | Two-layer sealed structure with designated flow path in sealed box chamber and its sealing method |
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| CN202010060996.0A CN111135877B (en) | 2020-01-19 | 2020-01-19 | Double-layer specified flow passage sealing structure and sealing method of sealing box chamber |
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| CN111135877B true CN111135877B (en) | 2021-03-16 |
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| CN111135877B (en) * | 2020-01-19 | 2021-03-16 | 湖南大学 | Double-layer specified flow passage sealing structure and sealing method of sealing box chamber |
| CN113710063B (en) * | 2021-08-25 | 2024-01-30 | 淮南师范学院 | Artificial intelligence security control equipment |
| CN114225974A (en) * | 2022-01-18 | 2022-03-25 | 东莞市升微机电设备科技有限公司 | Clean anaerobic box |
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- 2020-01-19 CN CN202010060996.0A patent/CN111135877B/en active Active
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| Publication number | Publication date |
|---|---|
| WO2021143332A1 (en) | 2021-07-22 |
| JP7428437B2 (en) | 2024-02-06 |
| CN111135877A (en) | 2020-05-12 |
| JP2023510652A (en) | 2023-03-14 |
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