JP2023510652A - Two-layer sealed structure with designated flow path of sealed box chamber and its sealing method - Google Patents

Abstract

The present invention is a closed box comprising a closed housing (1), a circulation purification system (2), a connection part (3), a control and detection device (4), an air flow guide structure (5) and a gas control structure (6). Providing a two-layer closed structure with a designated flow path of the chamber, the closed housing (1) is octahedral, and the circulation purification system (2) includes an inner box body circulation purification system and a jacket circulation purification system. , the connection part (3) includes a connection part (31) and an external connection part (32) that connect the inside and the outside, and the gas control structure (6) is used to control the inflow and outflow of gas. be. If the sealing level of the inner layer housing and the outer layer housing do not meet the requirements, it can be realized to achieve the required sealing level as a whole, and the gas dead zone inside is small. [Selection diagram] Fig. 2

Description

TECHNICAL FIELD The present invention relates to the field of sealing technology, and more particularly to a two-layer sealing structure with a designated channel of a sealed box chamber and a sealing method thereof.

[Related Application]
This application claims the priority of Chinese Invention Patent Application No. 202010060996.0, filed on January 19, 2020, entitled "Two-layer Sealing Structure with Designated Channel of Sealed Box Chamber and Sealing Method Therefor" .

Currently, conventional enclosures rarely meet the requirements of high or ultra-high sealing, and it is difficult and problematic to achieve improved sealing levels at the manufacturing level alone.

For closed box chambers, there is a special environment inside each closed box chamber, and the specific environmental indicators inside must be maintained to reach a certain demand value, and the sealing level of the closed box chamber depends on the demand. If the level is not reached, relative to the internal environment of the closed box room, the impurity gas outside the closed box room will enter the inside of the box in various ways, the impurity gas content at the leakage point will be high, and other Because the content of impurity gas in the part is relatively small, the amount of entering will exceed the allowable load in the closed box, which will greatly affect the work inside the closed box, and affect the working environment and atmosphere in the closed box, as well as the jacket. In order to ensure uniformity, it is necessary to improve the sealing level of the closed box and ensure the uniformity of the gas within the jacket of the closed box.

The purpose of the present invention is to improve the sealing performance of the closed box chamber and the uniformity of the jacket gas, reduce the amount of external impurity gas entering the closed box chamber per unit time, and To reduce the amount of internal gas leaking, the present invention provides a two-layer sealing structure with a designated flow path of the sealed box chamber and a sealing method thereof.

The technical solution of the present invention provides a two-layer closed structure with a designated flow path of closed box chamber, including closed housing, circulation purification system, connecting parts, control and detection device, airflow guide structure and gas control structure. The characteristics are as follows.

The closed housing is an octahedron, each face of the octahedron has an inner layer steel plate and an outer layer steel plate, both the inner layer steel plate and the outer layer steel plate are butt-welded with small steel plates,
The circulation purification system includes an inner box body circulation purification system and a jacket circulation purification system, the gas in the inner layer sealed housing circulates through the inner box body circulation purification system, and the gas in the jacket flows through the jacket circulation purification system. circulating through the system,
The connection part includes a connection part and an external connection part that connect the inside and the outside, and the connection part that connects the inside and the outside passes through the inner-layer sealed housing and the outer-layer sealed housing and is fixed to the inner-layer sealed housing and the outer-layer sealed housing, respectively. is connected, and the external connection part is fixedly connected to the outer layer sealed housing through only the outer layer sealed housing,
The airflow guide structure is used to guide gas flow,
The gas control structure is used to control gas inflow and outflow.

The present invention further provides a sealing method for a two-layer sealing structure with a designated flow path, including the following steps.

Step 1: Open the first inspection port and the second inspection port in the inner box body circulation purification system and the jacket circulation purification system, and introduce the first gas with a concentration of 99.99% and the second gas with a concentration of 99.99%, respectively. At the same time, the first fan and the second fan are operated to start the gas cleaning work of the inner casing and the jacket.

Step 2: While cleaning the gas, open the inner housing gas pressure control device, the jacket gas pressure control device, the inner housing gas detection device, and the jacket gas detection device, and the pressure of the gas in the inner housing and the jacket, The concentration and temperature are detected, the inner casing gas pressure controller and the jacket gas pressure controller are adjusted according to the detected data, and the pressure gradient is set.

Step 3: After the inner box body gas detection device and jacket gas detection device detect that the gas concentration reaches the specified value, the inspection door is closed and the gas cleaning operation is stopped, thereby The gas inside is purified by self-circulation under the action of the first fan respectively.

Step 4: After the inner box body gas detector or jacket gas detector detects that the target gas concentration is lower than the index value, open the inspection door, introduce the high-concentration target gas, and set the target gas concentration to the index value. After reaching higher than , close the inspection door and allow the circulation purification system to self-circulate.

Step 5: After the local jacket gas detection device detects that the target gas concentration is lower than the index value, close the module outlet valve plate, open the gas control outlet valve plate, and detect the target gas concentration lower than the index value. At the same time as discharging from the gas control exhaust port, the airflow guide port valve plate is closed, the gas control inlet valve plate is opened, and the high concentration target gas is introduced from the gas control inlet port to the next module.

Step 6: If the target gas concentration in the jacket is higher than the index value, open the module outlet valve plate of the previous module, close the gas control outlet valve plate of the previous module, and close the module inlet valve plate of this module. close, open its airflow guide port valve plate, close this module's module outlet valve plate, open the next module's airflow guide port valve plate, open the next module's module inlet valve plate, open the next module's gas control Close the inlet valve plate, let the gas entering from the inlet of the previous module flow out from the airflow guide port of this module to the airflow guide port of the next module, and then communicate the current module with the next module.

Step 7: Use Steps 4 to 6 to control the target gas concentration and its uniformity in the chamber and jacket for different target gas concentrations.

Beneficial effects of the present invention are as follows.

The present invention adopts a two-layer structure with a designated flow path, the transition effect of the gap (jacket) between the inner layer housing and the outer layer housing, the uniform gas action of the airflow guide structure, and the gas flow direction guiding action of the pressure gradient. Through, if the sealing level of the inner layer housing and the outer layer housing do not meet the requirements, it can be realized to achieve the required sealing level as a whole, and the internal gas dead zone is small.

FIG. 3 is a schematic diagram of the gas environment of a closed box chamber in a specific embodiment of the invention; FIG. 2 is a schematic diagram of a structural diagram (front view) of a two-layer sealed box chamber having designated channels in a specific embodiment of the present invention; FIG. 2 is a schematic diagram of a structural diagram (axonometric view) of a two-layer closed box chamber with designated channels in a specific embodiment of the present invention; FIG. 4 is a schematic diagram of the airflow guide structure of a single module designated channel in a specific embodiment of the present invention; FIG. 2 is a schematic diagram of a single module directed channel airflow guide structure (axonometric view with the skin removed) in a specific embodiment of the present invention; Fig. 3 is a schematic axonometric view of two modules in an exemplary embodiment of the invention; FIG. 4 is a schematic diagram of a gas control structure between two modules in a specific embodiment of the invention;

The contents and advantages of the present invention will be described in more detail below with reference to specific embodiments and drawings of the specification, but the specific embodiments of the present invention are not limited thereto.

As shown in FIGS. 2-7, this embodiment comprises a closed housing 1, a circulation purification system 2, a connecting piece 3, a control and detection device 4, an airflow guide structure 5, and a gas control structure 6. It provides a two-layer hermetic structure with designated flow paths.

The entire sealed housing 1 is a regular hexagonal octahedron when viewed from above, and each surface has an inner layer steel plate and an outer layer steel plate. Due to the narrowness, the sealing performance of the inner layer sealed housing is prioritized, and during construction, the quality of the weld seam of the inner layer steel plate is preferentially met. , Adopt single-sided welded seam, the welding form is to weld the inner layer small steel plate to the inner layer small steel plate, and the outer layer small steel plate to the outer layer small steel plate to weld, the welding between the outer layer steel plates is single-sided open This is pre-welding, and the welding between the inner layer steel plates is double-sided groove welding.

As shown in FIG. 2, the circulation purification system 2 includes an inner box body circulation purification system and a jacket circulation purification system, and the gas in the inner layer closed housing circulates through the inner box body circulation purification system and flows through the jacket. The gas inside circulates through the jacket circulation purification system.

The inner casing circulation purification system includes an inner casing intake port 21, a first inspection port 22, a connection pipe 23, a first flow valve 24, a first fan 25, a first gas purification device 26, and an inner casing exhaust port. 27.

Here, the inner box body inlet port 21 communicates with the inner box body through the inner layer sealed housing 11 and the outer layer sealed housing 12, and the inner box body inlet port 21 and the inner layer sealed housing 11 are formed by double-sided fillet welding. The inner box body intake port 21 and the outer layer sealed housing 12 are connected in the form of fillet welding on one side, and the inner box body exhaust port 27 connects the outer layer sealed housing 12 and the inner layer sealed housing 11 together. It passes through and communicates with the jacket, which is the space between the inner and outer housings, and the connection between the inner box body exhaust port 27 and the inner closed housing 11 is in the form of a double-sided fillet weld. , the inner box body exhaust port 27 and the outer layer sealing housing 12 are connected in the form of single-sided fillet welding. A connecting pipe 23 connects between the inner box body intake port 21 and the inner box body exhaust port 27. The connecting pipe 23 includes a first inspection port 22, a first flow valve 24, a first fan 25, and A first gas purifying device 26 is attached, and the method of attachment is welding.

As shown in FIG. 2, the jacket circulation purification system includes a jacket intake port 28, a second inspection port 29, a connecting pipe 23, a second flow valve 210, a second fan 211, a second gas purification device 212, and a jacket exhaust port. 213, the jacket inlet 28 communicates with the jacket only through the outer layer closed housing 12, the connection between the jacket inlet 28 and the outer layer closed housing 12 is in the form of a single-sided fillet weld, and the The jacket exhaust port 213 passes through the outer layer closed housing 12 and communicates with the jacket, and between the jacket exhaust port 29 and the outer layer closed housing 12, there is a single-sided Connected in the form of a fillet weld. A connecting pipe 23 connects between the jacket air inlet 28 and the jacket air outlet 213, and the connecting pipe 23 includes a second inspection port 29, a second flow valve 210, a second fan 211, and a second gas purification. A device 212 is attached, and the attachment method is welding.

As shown in FIG. 2 , the connection part 3 includes a connection part 31 and an external connection part 32 that connect the inside and the outside, and the connection part 31 that connects the inside and the outside includes the inner layer sealing housing 11 and the outer layer sealing housing 12 . and are fixedly connected to the inner-layer sealed housing 11 and the outer-layer sealed housing 12, respectively. The connection method is welding. The signal lines and cables pass through the inner-layer sealed housing 11 and the outer-layer sealed housing 12 from the connection part 31 that connects the inside and the outside, and their reading and control are both performed outside the sealed housing 1 . The external connection part 32 penetrates only the outer layer sealed housing 12 and is fixedly connected to the outer layer sealed housing 12. The connection method is welding. The signal lines and cables are passed from the external connection parts 31 through the outer layer closed housing 12 , and both their reading and control are performed outside the closed housing 1 .

When the box chamber is sealed, the piping after communication is sealed, and gas may leak to the outside only from the inspection port. Moreover, it is always closed and only opened when cleaning and exchanging gas, so there is no gas leakage after communication.

The connection between the outer layer housing and the inner layer housing is connected by an airflow guide connection plate 51, and the height of the airflow guide connection plate is the distance between the inner layer housing and the outer layer housing.

The control/detection device 4 includes a jacket gas detection device 41, an inner box body gas detection device 42, an inner box body gas pressure control device 43, and a jacket gas pressure control device 44. The body gas pressure control device 43 is mounted inside the inner layer sealed housing 11, the inner box body gas detection device 42 detects the temperature, concentration and pressure of the gas in the inner box body, and the inner box body gas pressure control device 43 adjusts the inner casing gas pressure to a target value according to the data detected by the inner casing gas detection device 42, and maintains it. A jacket gas detector 41 detects the temperature, concentration, and pressure of the gas within the jacket.

As shown in FIG. 2, the jacket gas pressure control device 44 adjusts the jacket gas pressure to the target value according to the data detected by the jacket gas detection device 41 and maintains it.

4-6, the airflow guide structure 5 includes an airflow guide connection plate 51, an airflow guide hole 52 and an airflow guide tube 53, and the airflow guide connection plate 51 is installed in a single module jacket. The inner layer housing and the outer layer housing of this module are connected, and the connection method is welding. Each side has an inner layer housing, an outer layer housing and a jacket, each module has an air inlet and an air outlet. There is a face, which is a component part of the housing, each face consists of several modules, one module is shown in FIG. Opened, realizing the function of the single module's designated flow path, the gas entering from the single module's inlet will flow through the channel in FIG. During gas cleaning and circulation, all parts of the module can be treated more finely, reducing the fluid dead zone of a single module, increasing the gas circulation exchange rate, and the airflow guide tube 53 between the two modules The airflow guide port of the previous module communicates with the airflow guide port of this module, and the installation method is welding. Since the gas can be directly guided to the next module through the air flow guide tube 53 without passing through the module, the efficiency of gas cleaning and exchange can be greatly improved.

A particular module is one in which the inner and outer housings of this module have no welded seams and no points of leakage due to the attachment of connecting parts, etc., and the particular case is that of this module. It means that data such as atmospheric pressure, concentration, and temperature detected by the jacket gas detector 41 in the jacket conform to designated target values.

As shown in FIGS. 6-7, the gas control structure 6 includes a gas control outlet valve plate 61, a gas control outlet valve plate 62, a module outlet valve plate 63, an airflow guide port 64, an airflow guide port valve plate 65, and a module inlet. It includes a valve plate 66 , a gas control inlet 67 and a gas control inlet valve plate 68 .

The gas control outlet 62 is mounted above the module outlet, and the mounting method is welding,
The airflow guide port 64 is installed above the module inlet, and the installation method is welding,
The gas control inlet 67 is mounted above the module inlet, the mounting method is welding,
The gas control outlet valve plate 61 is attached to the gas control outlet 62 and can telescopically open and close the gas control outlet,
The module outlet valve plate 63 is attached to the module outlet and can telescopically open and close the module outlet,
The airflow guide port valve plate 65 is attached to the airflow guide port 64, and is capable of telescopically opening and closing the airflow guide port 64.
A module inlet valve plate 66 is attached to the module inlet and can telescopically open and close the module inlet,
A gas control inlet valve plate 68 is attached to the gas control inlet 67 to telescopically open and close the gas control inlet.

As shown in FIG. 2, the bottom plate of the outer layer closed housing 12 supports the weight of the entire closed housing 1 and needs to be thickened. Since there is no whole large steel plate, it is necessary to join small steel plates, and the inner layer sealing housing 11 and the outer layer sealing housing 12 are welded and fixed by connecting parts and airflow guide connecting plates, and the inner layer sealing housing 11 and the outer layer sealing housing 11 are fixed by welding. The gap between housing 12 forms a jacket.

The installation height of the intake and exhaust ports of the inner box body and jacket varies depending on the mass of the target gas. If the exhaust port is installed at a height close to the top surface and the mass of the target gas is less than the mass of the air, then the intake port is installed at a height close to the top surface and the exhaust port is installed at a height close to the bottom surface. do. Hakomuro uses a target gas whose mass is heavier/lighter than the mass of air at the beginning, and blows with a fan when switching to another target gas whose mass is lighter/heavier than the mass of air later. Backing can achieve the same effect. If the target gas is too heavy, the inlet should be placed closer to the bottom of the chamber and the outlet should be placed closer to the top of the chamber, and during the gas cleaning stage, the heavy target gas should be placed closer to the top of the chamber. Use to push the original air inside from the high exhaust port, if the target gas is very light, exchange the mounting height of the intake and exhaust ports and push the air from the low exhaust port. If you don't swap the mounting heights of the intake and exhaust, you can also achieve the same effect by blowing back directly with a fan.

Based on the above, the present invention proposes a sealing method for a closed box chamber, which includes the following steps.

Step 1: Open the first inspection port 22 and the second inspection port 29 in the inner box body circulation purification system and the jacket circulation purification system, and introduce the first gas with a concentration of 99.99% and the second gas with a concentration of 99.99%, respectively. At the same time, the first fan 25 and the second fan 211 are operated to start cleaning the inner casing and the jacket.

Step 2: While cleaning the gas, open the inner housing gas pressure control device 43, the jacket gas pressure control device 44, the inner housing gas detection device 42, and the jacket gas detection device 41, and The pressure, concentration, and temperature of the gas are detected, and the inner casing gas pressure controller 43 and the jacket gas pressure controller 44 are adjusted according to the detected data to set the pressure gradient.

A gas pressure controller is used to adjust the magnitude relationship between P1, P2, and P3 to form a pressure gradient, where P1 is the pressure intensity inside the closed box and P2 is the pressure inside the jacket. strength, and P3 is the pressure strength outside the sealed box.

Step 3: After the inner box body gas detection device 42 and the jacket gas detection device 41 detect that the gas concentration has reached the specified value, the inspection door 22 is closed to stop the gas washing operation, thereby and the gas in the jacket are self-circulated and purified under the action of the fan 25 respectively.

Step 4: After most of the inner box body gas detection device 42 or jacket gas detection device 41 detects that the target gas concentration is lower than the index value, open the inspection port 22, introduce the high-concentration target gas, After the target gas concentration is higher than the index value, the inspection port 22 is closed to allow the circulation purification system to self-circulate, and so on.

Step 5: After the local jacket gas detection device 41 detects that the target gas concentration is lower than the index value, close the module outlet valve plate 63, open the gas control outlet valve plate 61, and the concentration is lower than the index value. At the same time that the target gas is discharged from the gas control outlet 62, the airflow guide port valve plate 65 is closed, the gas control inlet valve plate 68 is opened, and the high concentration target gas is introduced from the gas control inlet 67 to the next module. .

Step 6: If there is no connection part 3 in a single module and no place where the plate joint needs to be welded and the target gas concentration in that jacket is higher than the index value, then the module outlet valve plate of the previous module 63, close the gas control outlet valve plate 61 of the previous module, close the module inlet valve plate 66 of this module, open its airflow guide outlet valve plate 65, close the module outlet valve plate 63 of this module, The next module's airflow guide port valve plate 65 is opened, the next module's module inlet valve plate 66 is opened, the next module's gas control inlet valve plate 68 is closed, and the gas entering from the previous module's inlet is flows from the airflow guide port 64 of this module to the airflow guide port 64 of the next module, and then communicates between this module and the next module.

Step 7: Steps 4, 5 and 6 can be used multiple times to control the target gas concentration and its uniformity within the chamber and jacket for different target gas concentrations. If steps 4, 5, and 6 are still used and sealing performance requirements cannot be met, adjust the first flow valve 24 and the second flow valve 210 to increase the flow rate, the first fan 25 and By increasing the wind speed of the second fan 211, the cleaning and replacement speed of the gas can be improved. If the target gas concentration in the inner box and jacket is much higher than the index value, the economic principle is taken into account and the rate of gas cleaning and exchange is preferentially reduced.

The gas pressure gradient inside the closed box is set as follows.

Optionally, the inner box body gas pressure controller 43 and the jacket gas pressure controller 44 adjust the gas pressure intensity to P2>P3>P1, where P1 is the pressure intensity inside the closed box and P2 is the pressure inside the jacket. and P3 is the pressure intensity outside the closed box. Due to the relationship of the pressure intensity, the second gas in the jacket diffuses into the third gas outside the closed box and the first gas inside the closed box. Therefore, the first gas inside does not leak to the outside of the sealed box chamber, and the third gas outside the sealed box chamber also does not leak into the sealed box chamber.

Optionally, when the gas pressure intensity is adjusted to P2=P3>P1 by the inner box body gas pressure control device 43 and the jacket gas pressure control device 44, the third gas and the second gas are mixed with each other, and the second gas leaks into the first gas together with the third gas, but the first gas inside does not leak into the third gas.

Optionally, the gas pressure intensity is adjusted to P3>P2>P1 by the inner housing gas pressure controller 43 and the jacket gas pressure controller 44 so that the third gas first diffuses into the second gas and then The third gas diffuses into the first gas together with the second gas, but the internal first gas does not leak into the third gas.

Optionally, when the gas pressure intensity is adjusted to P3>P1>P2 by the inner housing gas pressure controller 43 and the jacket gas pressure controller 44, both the third gas and the first gas diffuse into the second gas. However, the first gas inside does not leak outside the sealed box, and the third gas outside the sealed box also does not leak into the sealed box.

In some of the above embodiments, the circulation purification system 2 is operated, and the inner casing circulation purification system and the jacket circulation purification system are simultaneously controlled so as to circulate the gas in the inner casing and the jacket. The occurrence of gas dead zones is avoided by the continuous gas supply of the gas circulation purification system 2 and the action of the airflow guide structure 5 and the gas control structure 6 . In some of the above embodiments, by changing the component of the second gas and setting the gas in the jacket in which the second gas is arranged as the first gas, the target first gas in the inner box body becomes the third gas. The effect that the third gas cannot leak into the target first gas can be further enhanced.

It should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention, and although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will still be able to You can modify the provided technical solution or replace part of the technical features by equivalent. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall fall within the protection scope of the present invention.

1-closed housing, 2-circulation purification system, 3-connection part, 4-control and detection device, 5-airflow guide structure, 6-gas control structure, 11-inner layer closed housing, 12-outer layer closed housing, 21-inside Box body intake port, 22-first inspection port, 23-connection pipe, 24-first flow valve, 25-first fan, 26-first gas purification device, 27-inner box body exhaust port, 28-jacket intake 29-Second inspection port, 210-Second flow valve, 211-Second fan, 212-Second gas purification device, 213-Jacket exhaust port, 31-Connecting part connecting inside and outside, 32-External Connection parts, 41-jacket gas detection device, 42-inner housing gas detection device, 43-inner housing gas pressure control device, 44-jacket gas pressure control device, 51-airflow guide connection plate, 52-airflow guide hole, 53 - airflow guide tube, 61 - gas control outlet valve plate, 62 - gas control outlet valve plate, 63 - module outlet valve plate, 64 - airflow guide port, 65 - airflow guide port valve plate, 66 - module inlet valve plate, 67—Gas control inlet, 68—Gas control inlet valve plate.

Claims (8)

A designated flow path of a closed chamber containing a closed housing (1), a circulation purification system (2), a connection part (3), a control and detection device (4), an air flow guide structure (5), and a gas control structure (6). A two-layer closed structure having
The closed housing (1) is an octahedron, each face of the octahedron has an inner layer steel plate and an outer layer steel plate, both the inner layer steel plate and the outer layer steel plate are butt-welded with small steel plates,
The circulation purification system (2) includes an inner box body circulation purification system and a jacket circulation purification system, the gas in the inner layer closed housing circulates through the inner box body circulation purification system, and the gas in the jacket is circulate through the jacket circulation purification system,
The connecting part (3) includes a connecting part (31) connecting the inside and the outside and an external connecting part (32), and the connecting part (31) connecting the inside and the outside comprises an inner layer sealing housing (11) and an outer layer sealing The housing (12) is penetrated and fixedly connected to the inner layer sealed housing (11) and the outer layer sealed housing (12) respectively, and the external connection part (32) only penetrates the outer layer sealed housing (12) to be outer layer sealed. fixedly connected to the housing (12),
The airflow guide structure (5) is used to guide gas flow,
A two-layer sealed structure with a designated flow path of a sealed box chamber, characterized in that said gas control structure (6) is used to control the inflow and outflow of gas. The inner casing circulation purification system includes an inner casing intake port (21), a first inspection port (22), a connecting pipe (23), a first flow valve (24), a first fan (25), a first gas Including a purification device (26) and an inner box body exhaust port (27), the inner box body inlet port (21) communicating with the inner box body through the inner layer closed housing (11) and the outer layer closed housing (12). , the inner box body intake port (21) is connected to the inner layer sealed housing (11), the inner box body intake port (21) is connected to the outer layer sealed housing (12), and the inner box body exhaust port (27) passes through the outer layer sealed housing (12) and the inner layer sealed housing (11) and communicates with the jacket, the inner box body exhaust port (27) is connected to the inner layer sealed housing (11), The box body exhaust port (27) is connected to the outer layer sealed housing (12), and the inner box body intake port (21) and the inner box body exhaust port (27) are connected via a connecting pipe (23). A first inspection port (22), a first flow valve (24), a first fan (25) and a first gas purification device (26) are attached to the connecting pipe (23). , The two-layer closed structure with a designated channel of the closed box chamber as claimed in claim 1. The jacket circulation purification system includes a jacket intake port (28), a second inspection port (29), a connecting pipe (23), a second flow valve (210), a second fan (211), a second gas purification device (212). ), and a jacket outlet (213), the jacket inlet (28) communicating with the jacket only through the outer layer closed housing (12) and the jacket inlet (28) communicating with the outer layer closed housing (12). The jacket outlet (213) passes through the outer layer closed housing (12) and communicates with the jacket, the jacket outlet (29) is connected to the outer layer closed housing, and the jacket inlet (28 ) and the jacket exhaust port (213) are connected via a connecting pipe (23), and the connecting pipe (23) includes a second inspection port (29), a second flow valve (210), a second The double-layer closed structure with designated flow path of closed box chamber according to claim 1, characterized in that 2 fans (211) and a second gas purification device (212) are installed. Signal lines and cables drawn from the inner casing gas detection device (42) and the inner casing gas pressure control device (43) are connected to the inner layer sealed housing (11) and the outer layer from the connection part (31) connecting the inside and the outside. Signal lines and cables passing through the closed housing (12) and led out from the jacket gas detection device (41) and the jacket gas pressure control device (44) pass through the outer layer closed housing (12) from the external connection part (31). The two-layer closed structure with a designated channel of the closed box chamber as claimed in claim 1, characterized in that: The control/detection device (4) includes a jacket gas detection device (41), an inner housing gas detection device (42), an inner housing gas pressure control device (43), and a jacket gas pressure control device (44). A box gas detection device (42) and an inner box gas pressure control device (43) are mounted inside the inner layer sealed housing (11), and the inner box body gas detection device (42) detects gas in the inner box. Temperature, concentration, and pressure are detected, and the inner casing gas pressure control device (43) adjusts the inner casing gas pressure to a target value according to the data detected by the inner casing gas detection device (42). and maintaining it, a jacket gas detection device (41) and a jacket gas pressure control device (44) are mounted in the jacket, and the jacket gas detection device (41) measures the temperature, concentration, and temperature of the gas in the jacket. The jacket gas pressure controller (44) adjusts the jacket gas pressure to a target value according to the data detected by the jacket gas detector (41) and maintains it. , The two-layer closed structure with a designated channel of the closed box chamber as claimed in claim 1. The airflow guide structure (5) includes an airflow guide connection plate (51), an airflow guide hole (52) and an airflow guide tube (53), and the airflow guide connection plate (51) is installed in the single module jacket. and connect the inner layer housing and the outer layer housing of the corresponding module, and the airflow guide hole (52) is opened at a specific position of the airflow guide plate to achieve the function of the designated flow path of the single module, and the airflow guide tube The two-layer enclosure with designated flow paths of the enclosure of claim 1, characterized in that (53) is installed between two modules. The gas control structure (6) includes a gas control outlet valve plate (61), a gas control outlet (62), a module outlet valve plate (63), an airflow guide port (64), an airflow guide port valve plate (65). , a module inlet valve plate (66), a gas control inlet (67) and a gas control inlet valve plate (68),
The gas control outlet (62) is mounted above the module outlet, and the mounting method is welding,
The airflow guide port (64) is installed above the module inlet, and the installation method is welding,
The gas control inlet (67) is mounted above the module inlet, the mounting method is welding,
The gas control outlet valve plate (61) is attached to the gas control outlet (62) and can telescopically open and close the gas control outlet,
A module outlet valve plate (63) is attached to the module outlet and can telescopically open and close the module outlet,
The airflow guide port valve plate (65) is attached to the airflow guide port (64) and is capable of telescopically opening and closing the airflow guide port (64),
A module inlet valve plate (66) is attached to the module inlet and can telescopically open and close the module inlet;
2. A closed box chamber according to claim 1, characterized in that the gas control inlet valve plate (68) is attached to the gas control inlet (67) and is capable of telescopically opening and closing the gas control inlet. Double-layer closed structure with designated flow path. Open the first inspection port (22) and the second inspection port (29) in the inner box body circulation purification system and the jacket circulation purification system, and open the first gas with a concentration of 99.99% and the second gas with a concentration of 99.99% respectively. is introduced, and simultaneously the first fan (25) and the second fan (211) are operated to start the gas cleaning operation of the inner casing and the jacket;
While cleaning the gas, the inner casing gas pressure controller (43), the jacket gas pressure controller (44), the inner casing gas detector (42), and the jacket gas detector (41) are opened to and the pressure, concentration, and temperature of the gas in the jacket, and adjust the inner box body gas pressure controller (43) and the jacket gas pressure controller (44) according to the detected data to set the pressure gradient step 2 to
After the inner box body gas detector (42) and the jacket gas detector (41) have detected that the gas concentration has reached a specified value, the inspection door (22) is closed to stop the gas washing operation, thereby a step 3 in which the gases in the closed box chamber and the jacket are purified by self-circulation under the action of the first fan (25);
After the inner box body gas detection device (42) or the jacket gas detection device (41) detects that the target gas concentration is lower than the index value, the inspection port (22) is opened to introduce the high-concentration target gas, step 4 of closing the inspection port (22) to self-circulate the circulation purification system after the target gas concentration becomes higher than the index value;
After the local jacket gas detection device (41) detects that the target gas concentration is lower than the index value, it closes the module outlet valve plate (63), opens the gas control outlet valve plate (61), and the concentration reaches the index value. At the same time that the target gas with a lower concentration is discharged from the gas control outlet (62), the airflow guide port valve plate (65) is closed and the gas control inlet valve plate (68) is opened to allow the high concentration target gas to be discharged from the gas control inlet. step 5 of introducing into the next module through the port (67);
If the target gas concentration in the jacket is higher than the index value, open the module outlet valve plate (63) of the previous module, close the gas control outlet valve plate (61) of the previous module, and open the module inlet of this module. Close the valve plate (66), open its airflow guide port valve plate (65), close the module outlet valve plate (63) of this module, open the airflow guide port valve plate (65) of the next module, open the next module. The module inlet valve plate (66) of the module is opened and the gas control inlet valve plate (68) of the next module is closed to allow the incoming gas from the inlet of the previous module to flow through the airflow guide port (64) of this module to the next module. a step 6 of flowing out into the airflow guide port (64) of the module of and then communicating the current module with the next module;
and step 7 of controlling the target gas concentration and its uniformity within the chamber and jacket using steps (4) through (6) multiple times for different target gas concentrations. A sealing method for a two-layer sealing structure with a designated channel according to any one of claims 1-7.

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