JP7428437B2 - Two-layer sealed structure with designated flow path in sealed box chamber and its sealing method - Google Patents

Description

TECHNICAL FIELD The present invention relates to the field of sealing technology, and particularly to a two-layer sealing structure having a designated flow path in a sealed box chamber and a sealing method thereof.

[Related applications]
This application claims priority to the Chinese invention patent application 202010060996.0 filed on January 19, 2020 with the invention title "Two-layer sealed structure with designated flow path in sealed box chamber and its sealing method" .

Currently, conventional sealed box compartments rarely meet the requirements of high or ultra-high sealing, and it is difficult to achieve improved sealing levels at the manufacturing level alone, which creates problems.

In the case of a closed box room, there is a special environment inside each closed box room, and it is necessary to maintain a certain internal environmental index so that it reaches a certain demand value, and the sealing level of the closed box room is the same as the demand value. If the level has not been reached, the impurity gas outside the closed box room, relative to the internal environment of the closed box room, will enter the inside of the box body in various ways, and the content of impurity gas at the leakage point is high, and other Because the content of impurity gas in the sealed box is relatively small, the amount that enters exceeds the allowable load inside the sealed box, greatly affecting the work inside the sealed box, and damaging the working environment and atmosphere inside the sealed box, as well as the jacket. In order to ensure uniformity, it is necessary to improve the sealing level of the closed box chamber and ensure gas uniformity within the jacket of the closed box chamber.

The purpose of the present invention is to improve the sealing performance of the sealed box chamber and the uniformity of the jacket gas, reduce the amount of external impurity gas entering the sealed box chamber per unit time, and reduce the amount of external impurity gas entering the sealed box chamber per unit time. The purpose of the present invention is to reduce the amount of internal gas leaking, and the present invention provides a two-layer sealed structure with a designated flow path in a sealed box chamber and a method for sealing the same.

The technical solution of the present invention provides a two-layer sealed structure with a designated flow path of a sealed box chamber, including a sealed housing, a circulation purification system, connecting parts, a control and detection device, an airflow guide structure, and a gas control structure. Its characteristics are as follows.

The sealed housing is an octahedron, and each face of the octahedron has an inner steel plate and an outer steel plate, and both the inner steel plate and the outer steel plate are butt-welded with small steel plates,
The circulation purification system includes an inner case circulation purification system and a jacket circulation purification system, the gas in the inner sealed housing circulates through the inner case circulation purification system, and the gas in the jacket circulates through the jacket circulation purification system. circulates through the system,
The connection parts include a connection part that connects the inside and the outside, and an outside connection part, and the connection parts that connect the inside and the outside penetrate the inner sealed housing and the outer sealed housing, and are fixed to the inner sealed housing and the outer sealed housing, respectively. The external connection parts are fixedly connected to the outer sealed housing by penetrating only the outer sealed housing,
The airflow guide structure is used to guide the flow of gas,
The gas control structure is used to control gas inflow and outflow.

The present invention further provides a sealing method for a two-layer sealing structure with designated flow paths, including the following steps.

Step 1: Open the first and second inspection ports in the inner box circulation purification system and jacket circulation purification system, and introduce the first gas with a concentration of 99.99% and the second gas with a concentration of 99.99%, respectively. At the same time, the first fan and the second fan operate to start gas cleaning of the inner box and jacket.

Step 2: While cleaning the gas, open the inner case gas pressure control device, jacket gas pressure control device, inner case gas detection device, and jacket gas detection device to reduce the gas pressure inside the inner case and jacket. The concentration and temperature are detected, and the inner box gas pressure control device and the jacket gas pressure control device are adjusted according to the detected data to set the pressure gradient.

Step 3: After the inner box gas detection device and the jacket gas detection device detect that the gas concentration has reached the specified value, the inspection port is closed and the gas cleaning operation is stopped. The gases inside are purified by self-circulation under the action of the first fan.

Step 4: After the inner box gas detection device or jacket gas detection device detects that the target gas concentration is lower than the index value, it opens the inspection port and introduces a high concentration target gas, so that the target gas concentration reaches the index value. After the temperature rises above , the inspection port is closed and the circulation purification system is allowed to circulate by itself.

Step 5: After the local jacket gas detection device detects that the target gas concentration is lower than the index value, it closes the module outlet valve plate and opens the gas control outlet valve plate to detect the target gas whose concentration is lower than the index value. At the same time as exhausting from the gas control outlet, the airflow guide port valve plate is closed and the gas control inlet valve plate is opened to introduce the high concentration target gas from the gas control inlet to the next module.

Step 6: If the target gas concentration in the jacket is higher than the index value, open the module outlet valve plate of the previous module, close the gas control outlet valve plate of the previous module, and close the module inlet valve plate of this module. Close, open its airflow guide mouth valve plate, close the module outlet valve plate of this module, open the airflow guide mouth valve plate of the next module, open the module inlet valve plate of the next module, gas control of the next module The inlet valve plate is closed, and the gas entering from the inlet of the previous module is allowed to flow out from the airflow guide port of this module to the airflow guide port of the next module, and then the current module and the next module are communicated.

Step 7: Depending on the different target gas concentrations, use steps 4 to 6 to control the target gas concentration and its uniformity within the box and jacket.

The beneficial effects of the present invention are as follows.

The present invention adopts a two-layer structure with designated flow paths, and has the transition effect of the gap (jacket) between the inner layer housing and the outer layer housing, the uniform gas effect of the air flow guide structure, and the guiding effect of the pressure gradient in the gas flow direction. Through this, if the sealing level of the inner layer housing and the outer layer housing does not meet the requirements, it can be achieved to achieve the required sealing level as a whole, and the internal gas dead zone is less.

FIG. 3 is a schematic diagram of a gas environment in a closed box chamber in a specific embodiment of the present invention. FIG. 2 is a schematic diagram of a structure (front view) of a two-layer sealed box chamber with designated flow paths in a specific embodiment of the present invention. FIG. 2 is a schematic diagram of a structural diagram (axonometric view) of a two-layer sealed box chamber with designated flow paths in a specific embodiment of the present invention; FIG. 3 is a schematic diagram of the airflow guide structure of a designated flow path of a single module in a specific embodiment of the present invention; FIG. 3 is a schematic diagram of a single module designated flow path airflow guide structure (axonometric view with skin removed) in a specific embodiment of the present invention; 2 is a schematic axonometric view of two modules in a specific embodiment of the invention; FIG. FIG. 3 is a schematic diagram of a gas control structure between two modules in a specific embodiment of the present invention.

Hereinafter, the contents and advantages of the present invention will be explained in more detail with reference to specific embodiments and drawings in the specification, but the specific embodiments of the present invention are not limited thereto.

As shown in FIGS. 2 to 7, this embodiment includes a closed box chamber, including a closed housing 1, a circulation purification system 2, a connecting part 3, a control and detection device 4, an airflow guide structure 5, and a gas control structure 6. Provides a two-layer sealed structure with designated flow paths.

The entire sealed housing 1 is a regular hexagonal octahedron in plan view, and each face has an inner steel plate and an outer steel plate.The inner steel plate and the outer steel plate are butt-welded with small steel plates, and the space in the jacket itself is Due to the narrow space, we preferentially ensure the sealing performance of the inner layer sealed housing, and during construction, we preferentially meet the quality of the weld seam of the inner layer steel plate, so during welding, the inner layer steel plate adopts double-sided welded seams, and the outer layer steel plate adopts double-sided welded seams. , Adopting single-sided welded seam, the welding form is to weld the inner layer small steel plate to the inner layer small steel plate, and the outer layer small steel plate to the outer layer small steel plate, and the welding between the outer layer steel plates is one-sided open. Pre-welding is used, and the welding between the inner steel plates is double-sided groove welding.

As shown in FIG. 2, the circulation purification system 2 includes an inner case circulation purification system and a jacket circulation purification system, and the gas in the inner sealed housing circulates through the inner case circulation purification system, and the jacket The gas inside circulates and flows through the jacket circulation purification system.

The inner box circulation purification system includes an inner box intake port 21, a first inspection port 22, a connecting pipe 23, a first flow valve 24, a first fan 25, a first gas purification device 26, and an inner box exhaust port. Contains 27.

Here, the inner case intake port 21 communicates with the inner case via the inner layer sealed housing 11 and the outer layer sealed housing 12, and the inner box body intake port 21 and the inner layer sealed housing 11 are welded by fillet welding on both sides. The inner box intake port 21 and the outer sealed housing 12 are connected by single-sided fillet welding, and the inner box exhaust port 27 connects the outer sealed housing 12 and the inner sealed housing 11. The jacket is a space between the inner housing and the outer housing, and the inner box exhaust port 27 and the inner sealed housing 11 are connected by fillet welding on both sides. The inner box exhaust port 27 and the outer sealed housing 12 are connected by one-sided fillet welding. The inner box intake port 21 and the inner box exhaust port 27 are connected by a connecting pipe 23, and the connecting pipe 23 includes a first inspection port 22, a first flow valve 24, a first fan 25, and a connecting pipe 23. A first gas purification device 26 is attached, and the method of attachment is welding.

As shown in FIG. 2, the jacket circulation purification system includes a jacket intake port 28, a second inspection port 29, a connecting pipe 23, a second flow valve 210, a second fan 211, a second gas purification device 212, and a jacket exhaust port. 213, the jacket inlet 28 communicates with the jacket only through the outer hermetically sealed housing 12, and the jacket inlet 28 and the outer hermetically sealed housing 12 are connected in the form of single-sided fillet welding. The length protruding from the outer layer is 1/4 of the thickness of the jacket, and the jacket exhaust port 213 passes through the outer sealed housing 12 and communicates with the jacket. They are connected in the form of fillet welds. The jacket intake port 28 and the jacket exhaust port 213 are connected by a connecting pipe 23, and the connecting pipe 23 includes a second inspection port 29, a second flow valve 210, a second fan 211, and a second gas purification port. The device 212 is attached and its attachment method is welding.

As shown in FIG. 2, the connection part 3 includes a connection part 31 that connects the inside and the outside, and an external connection part 32. The connection part 31 that connects the inside and the outside includes an inner sealed housing 11 and an outer sealed housing 12. It penetrates through and is fixedly connected to the inner sealed housing 11 and the outer sealed housing 12, respectively, and the connection method is welding. The signal lines and cables pass through the inner sealed housing 11 and the outer sealed housing 12 from the connecting part 31 connecting the inside and the outside, and both their reading and control are performed outside the sealed housing 1. The external connection part 32 penetrates only the outer sealed housing 12 and is fixedly connected to the outer sealed housing 12, and its connection method is welding. The signal lines and cables passed from the external connection part 31 through the outer hermetic housing 12, and both their reading and control are carried out outside the hermetic housing 1.

When sealing the box chamber, the piping after communication is sealed, and gas may leak outside only through the inspection port. In addition, it is always closed and is only opened when cleaning and replacing the gas, so no gas leaks after communication.

The connection between the outer housing and the inner housing is connected by an airflow guide connection plate 51, and the height of the airflow guide connection plate is the distance between the inner and outer housings.

The control/detection device 4 includes a jacket gas detection device 41, an inner box gas detection device 42, an inner box gas pressure control device 43, and a jacket gas pressure control device 44. The body gas pressure control device 43 is installed inside the inner sealed housing 11, and the inner box gas detection device 42 detects the temperature, concentration, and pressure of the gas inside the inner box. adjusts the inner casing gas pressure to a target value according to the data detected by the inner casing gas detection device 42 and maintains it, and the jacket gas detection device 41 and the jacket gas pressure control device 44 The jacket gas detection device 41 detects the temperature, concentration, and pressure of the gas inside the jacket.

As shown in FIG. 2, the jacket gas pressure control device 44 adjusts the jacket gas pressure to a target value according to the data detected by the jacket gas detection device 41, and maintains it.

As shown in FIGS. 4 to 6, the airflow guide structure 5 includes an airflow guide connection plate 51, an airflow guide hole 52, and an airflow guide tube 53, and the airflow guide connection plate 51 is installed in the jacket of a single module. The inner and outer housings of this module are connected, and the connection method is welding. Multiple modules are joined to form one surface of a sealed box, and the sealed box has eight sides. Each side has an inner housing, an outer housing and a jacket, and each module has an air intake and an air outlet. There are surfaces, which are constituent parts of the housing, and each surface is made up of several modules, one module being shown in FIG. The gas entering from the inlet of the single module flows to the outlet of the module through the channel of FIG. During gas cleaning and circulation, all parts of the module can be treated more finely, reducing the fluid dead zone of a single module and increasing the gas circulation exchange rate, and the airflow guide pipe 53 is connected between the two modules. The airflow guide port of the previous module communicates with the airflow guide port of this module, and its installation method is welding, and in certain modules and under certain circumstances, the gas introduced into the module can Since the gas can be directly guided to the next module via the airflow guide tube 53 without passing through the module, the efficiency of gas cleaning and exchange can be greatly improved.

A specific module is one in which the inner and outer housings of this module have no welded seams and no places where leakage can occur due to the installation of connecting parts, etc. This means that data such as atmospheric pressure, concentration, temperature, etc. detected by the jacket gas detection device 41 inside the jacket conform to specified target values.

As shown in FIGS. 6 and 7, the gas control structure 6 includes a gas control outlet valve plate 61, a gas control outlet valve plate 62, a module outlet valve plate 63, an airflow guide port 64, an airflow guide port valve plate 65, a module inlet It includes a valve plate 66, a gas control inlet 67, and a gas control inlet valve plate 68.

The gas control exhaust port 62 is installed above the module outlet, and its installation method is welding.
The airflow guide port 64 is installed above the module inlet, and its installation method is welding.
The gas control intake port 67 is installed above the module inlet, and its installation method is welding.
The gas control exhaust port valve plate 61 is attached to the gas control exhaust port 62 and can telescopically open and close the gas control exhaust port.
The module outlet valve plate 63 is attached to the module outlet and can telescopically open and close the module outlet.
The airflow guide port valve plate 65 is attached to the airflow guide port 64 and can telescopically open and close the airflow guide port 64.
The module inlet valve plate 66 is attached to the module inlet and can telescopically open and close the module inlet.
The gas control inlet valve plate 68 is attached to the gas control inlet 67 and can telescopically open and close the gas control inlet.

As shown in FIG. 2, the bottom plate of the outer sealed housing 12 supports the weight of the entire sealed housing 1 and needs to be made thicker, and if the volume of the sealed box body is required to be large, in actual production. Since there is no whole large steel plate, it is necessary to join small steel plates, and the inner layer sealed housing 11 and the outer layer sealed housing 12 are welded and fixed by the connecting parts and the airflow guide connecting plate, and the inner layer sealed housing 11 and the outer layer sealed housing 12 are welded and fixed. The gap between the housing 12 forms a jacket.

The installation height of the intake and exhaust ports on the inner box body and jacket varies depending on the mass of the target gas.If the mass of the target gas is larger than the mass of air, install the intake port at a height close to the bottom. If the exhaust port is installed at a height close to the top surface, and the mass of the target gas is smaller than the mass of air, the intake port is installed at a height near the top surface, and the exhaust port is installed at a height close to the bottom surface. do. In the box chamber, if you use a target gas whose mass is heavier than/lighter than the mass of air at the beginning, and then switch to another target gas whose mass is lighter/heavier than the mass of air at a later stage, blow it with a fan. The same effect can be achieved by backing up. If the target gas is too heavy, the intake port should be placed close to the bottom of the box chamber, and the exhaust port should be placed close to the top of the box chamber. Use this to push the original air inside through the higher-positioned exhaust, and if the target gas is very light, swap the mounting heights of the intake and exhaust ports and push the air out through the lower-positioned exhaust. If the mounting heights of the intake and exhaust ports are not swapped, the same effect can also be achieved by direct blowback with a fan.

Based on the above, the present invention proposes a sealing method for a sealed box room, which includes the following steps.

Step 1: Open the first inspection port 22 and second inspection port 29 in the inner box circulation purification system and jacket circulation purification system, and supply the first gas with a concentration of 99.99% and the second gas with a concentration of 99.99%, respectively. At the same time, the first fan 25 and the second fan 211 are activated to start gas cleaning of the inner box and the jacket.

Step 2: While cleaning the gas, open the inner case gas pressure control device 43, jacket gas pressure control device 44, inner case gas detection device 42, and jacket gas detection device 41, and check the inside of the inner case and jacket. The pressure, concentration, and temperature of the gas are detected, and the inner box body gas pressure control device 43 and the jacket gas pressure control device 44 are adjusted according to the detected data to set the pressure gradient.

A gas pressure controller is used to adjust the magnitude relationship between P1, P2, and P3 to form a pressure gradient, where P1 is the pressure intensity inside the closed box and P2 is the pressure inside the jacket. P3 is the atmospheric pressure intensity outside the sealed box.

Step 3: After the inner box gas detection device 42 and the jacket gas detection device 41 detect that the gas concentration has reached the specified value, the inspection port 22 is closed and the gas cleaning operation is stopped, thereby causing the inside of the sealed box to be closed. The gas inside the jacket and the gas inside the jacket are purified by self-circulation under the action of the fan 25.

Step 4: After most of the inner box gas detection device 42 or the jacket gas detection device 41 detects that the target gas concentration is lower than the index value, the inspection port 22 is opened and a high concentration target gas is introduced. After the target gas concentration becomes higher than the index value, the inspection port 22 is closed, the circulation purification system is allowed to self-circulate, and this process is repeated.

Step 5: After the local jacket gas detection device 41 detects that the target gas concentration is lower than the index value, it closes the module outlet valve plate 63 and opens the gas control outlet valve plate 61, so that the concentration is lower than the index value. At the same time as the target gas is discharged from the gas control outlet 62, the airflow guide port valve plate 65 is closed, the gas control intake port valve plate 68 is opened, and the high concentration target gas is introduced from the gas control intake port 67 to the next module. .

Step 6: If there is no place in a single module where it is necessary to weld the connecting part 3 and the plate joint, and the target gas concentration in its jacket is higher than the index value, the module outlet valve plate of the previous module 63, close the gas control outlet valve plate 61 of the previous module, close the module inlet valve plate 66 of this module, open its airflow guide outlet valve plate 65, close the module outlet valve plate 63 of this module, Open the airflow guide inlet valve plate 65 of the next module, open the module inlet valve plate 66 of the next module, close the gas control inlet valve plate 68 of the next module, and let the gas coming in from the inlet of the previous module flows out from the airflow guide port 64 of this module to the airflow guide port 64 of the next module, and then this module and the next module are communicated.

Step 7: Depending on different target gas concentrations, steps 4, 5, and 6 can be used multiple times to control the target gas concentration and its uniformity within the box and jacket. If the sealing performance requirements are still not met after using steps 4, 5, and 6, adjust the first flow valve 24 and the second flow valve 210 to increase the flow rate and The air speed of the second fan 211 can be increased to improve the speed of gas cleaning and exchange. If the target gas concentration inside the inner box and in the jacket is much higher than the index value, economic principles are taken into account and the rate of gas cleaning and exchange is preferentially reduced.

The gas pressure gradient inside the sealed box chamber is set as follows.

Optionally, the inner box gas pressure control device 43 and the jacket gas pressure control device 44 adjust the gas pressure intensity to P2>P3>P1, where P1 is the air pressure intensity inside the sealed box chamber and P2 is the pressure intensity inside the jacket. P3 is the pressure intensity outside the sealed box, and due to the relationship of the pressure intensity, the second gas inside the jacket diffuses into the third gas outside the sealed box and the first gas inside the sealed box. Therefore, the first gas inside will not leak to the outside of the sealed box compartment, and the third gas outside the sealed box compartment will not leak into the sealed box compartment.

Optionally, when the gas pressure intensity is adjusted to P2=P3>P1 by the inner box gas pressure control device 43 and the jacket gas pressure control device 44, the third gas and the second gas mix with each other, and the second gas leaks into the first gas together with the third gas, but the first gas inside does not leak into the third gas.

Optionally, by adjusting the gas pressure intensity to P3>P2>P1 by the inner box gas pressure control device 43 and the jacket gas pressure control device 44, the third gas first diffuses into the second gas, and then The third gas diffuses into the first gas together with the second gas, but the first gas inside does not leak into the third gas.

Optionally, when the gas pressure intensity is adjusted to P3>P1>P2 by the inner box gas pressure control device 43 and the jacket gas pressure control device 44, both the third gas and the first gas are diffused into the second gas. However, the first gas inside will not leak out of the sealed box, and the third gas outside the sealed box will not leak into the sealed box.

In some of the above embodiments, the circulation purification system 2 is operated, and the inner case circulation purification system and the jacket circulation purification system are controlled simultaneously to circulate and flow the gas in the inner case and the jacket. The occurrence of gas dead zones is avoided by the continuous gas supply of the gas circulation purification system 2 and by the action of the air flow guide structure 5 and the gas control structure 6. In some of the above embodiments, by changing the composition of the second gas and setting the gas in the jacket in which the second gas is arranged as the first gas, the target first gas inside the inner box becomes the third gas. It is also possible to further strengthen the effect that the third gas cannot leak into the target first gas.

It should be noted that the above are merely preferred embodiments of the present invention, and do not limit the present invention. Although the present invention has been described in detail with reference to the above-mentioned embodiments, it is still clear to those skilled in the art that the embodiments described in each of the above-mentioned embodiments are It is possible to modify the technical solution provided or to replace part of the technical features equivalently. All modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall fall within the protection scope of the present invention.

1- Sealed housing, 2- Circulation purification system, 3- Connecting parts, 4- Control/detection device, 5- Air flow guide structure, 6- Gas control structure, 11- Inner layer sealed housing, 12- Outer layer sealed housing, 21- Inner layer Box intake port, 22-first inspection port, 23-connection pipe, 24-first flow valve, 25-first fan, 26-first gas purification device, 27-inner box exhaust port, 28-jacket intake Port, 29-Second inspection port, 210-Second flow valve, 211-Second fan, 212-Second gas purification device, 213-Jacket exhaust port, 31-Connection parts connecting the inside and outside, 32-Exterior Connection parts, 41-jacket gas detection device, 42-inner box gas detection device, 43-inner box gas pressure control device, 44-jacket gas pressure control device, 51-airflow guide connection plate, 52-airflow guide hole, 53-airflow guide pipe, 61-gas control exhaust port valve plate, 62-gas control exhaust port, 63-module outlet valve plate, 64-airflow guide port, 65-airflow guide port valve plate, 66-module inlet valve plate, 67-Gas control inlet, 68-Gas control inlet valve plate.

Claims (4)

Designated flow path of the closed box chamber, including the closed housing (1), the circulation purification system (2), the connecting parts (3), the control and detection device (4), the airflow guide structure (5), and the gas control structure (6) A two-layer sealed structure having
The sealed housing (1) is an octahedron, and each face of the octahedron has an inner steel plate and an outer steel plate, and both the inner steel plate and the outer steel plate are butt-welded with small steel plates, and the inner sealed housing (11) is made of an inner steel plate, the outer sealed housing (12) is made of an outer steel plate, and the gap between the inner sealed housing (11) and the outer sealed housing (12) forms a jacket;
The circulation purification system (2) is located outside the sealed housing (1) and includes an inner box circulation purification system and a jacket circulation purification system, and the gas in the inner sealed housing is passed through the inner box circulation purification system. The gas in the jacket circulates and flows through the jacket circulation purification system,
The connection part (3) includes a connection part (31) that connects the inside and the outside, and an external connection part (32), and the connection part (31) that connects the inside and the outside has an inner layer sealed housing (11) and an outer layer sealed housing. It penetrates the housing (12) and is fixedly connected to the inner sealed housing (11) and the outer sealed housing (12), and the connection method is welding. 12) and is fixedly connected to the outer sealed housing (12), and the connection method is welding.
The control/detection device (4) includes a jacket gas detection device (41), an inner box gas detection device (42), an inner box gas pressure control device (43), and a jacket gas pressure control device (44), The inner box gas detection device (42) and the inner box gas pressure control device (43) are installed inside the inner sealed housing (11), and the inner box gas detection device (42) detects the gas inside the inner box. The inner box gas pressure controller (43) adjusts the inner box gas pressure to a target value according to the data detected by the inner box gas detector (42). A jacket gas detection device (41) and a jacket gas pressure control device (44) are installed in the jacket, and the jacket gas detection device (41) adjusts and maintains the temperature, concentration, and temperature of the gas in the jacket. and the pressure, and the jacket gas pressure control device (44) adjusts the jacket gas pressure to a target value according to the data detected by the jacket gas detection device (41) and maintains it;
Signal lines and cables drawn out from the inner box gas detection device (42) and the inner box gas pressure control device (43) are connected to the inner sealed housing (11) and the outer layer from the connecting part (31) that connects the inside and outside. Signal lines and cables that pass through the sealed housing (12) and are drawn out from the jacket gas detection device (41) and the jacket gas pressure control device (44) pass through the outer layer sealed housing (12) from the external connection component (31). death,
The airflow guide structure (5) is used to guide the flow of gas,
The gas control structure (6) is used to control the inflow and outflow of gas ,
The inner box circulation purification system includes an inner box intake port (21), a first inspection port (22), a connecting pipe (23), a first flow valve (24), a first fan (25), and a first gas It includes a purification device (26) and an inner box exhaust port (27), and the inner box intake port (21) communicates with the inner box via an inner sealed housing (11) and an outer sealed housing (12). , the inner box intake port (21) is connected to the inner sealed housing (11), the inner box intake port (21) is connected to the outer sealed housing (12), and the inner box exhaust port (27) passes through the outer sealed housing (12) and the inner sealed housing (11) and communicates with the jacket, and the inner box exhaust port (27) is connected to the inner sealed housing (11). The box exhaust port (27) is connected to the outer sealed housing (12), and the inner box intake port (21) and the inner box exhaust port (27) are connected via a connecting pipe (23). A first inspection port (22), a first flow valve (24), a first fan (25), and a first gas purification device (26) are attached to the connecting pipe (23),
The jacket circulation purification system includes a jacket intake port (28), a second inspection port (29), a connecting pipe (23), a second flow valve (210), a second fan (211), and a second gas purification device (212). ), and a jacket exhaust port (213), the jacket inlet (28) communicating with the jacket only through the outer hermetic housing (12), and the jacket inlet (28) communicating with the jacket only through the outer hermetic housing (12). The jacket exhaust port (213) communicates with the jacket through the outer sealed housing (12), the jacket exhaust port (29) is connected to the outer sealed housing, and the jacket inlet port (28) communicates with the jacket through the outer sealed housing (12). ) and the jacket exhaust port (213) are connected via a connecting pipe (23), and the connecting pipe (23) includes a second inspection port (29), a second flow valve (210), and a second flow valve (210). A two-layer sealed structure with a designated flow path in a sealed box chamber, characterized in that two fans (211) and a second gas purification device (212) are attached . A plurality of modules are joined together to form one surface of a closed box body, each module has a module outlet and a module inlet, and the airflow guide structure (5) includes an airflow guide connection plate (51), an airflow guide hole (52), and an airflow guide tube (53), the airflow guide connection plate (51) is installed within the jacket of a single module and connects the inner sealing housing and the outer sealing housing of the corresponding module, and the connection The method is welding, and the airflow guide hole (52) is drilled at a specific position on the airflow guide plate to realize the function of a designated flow path of a single module, and the airflow guide tube (53) is made of two modules. The two-layer sealed structure having a designated flow path of a sealed box chamber according to claim 1, wherein the double-layer sealed structure is installed between a sealed box chamber and a designated flow path. The gas control structure (6) includes a gas control outlet valve plate (61), a gas control outlet valve plate (62), a module outlet valve plate (63), an airflow guide port (64), and an airflow guide port valve plate (65). , a module inlet valve plate (66), a gas control inlet (67), and a gas control inlet valve plate (68);
The gas control exhaust port (62) is installed above the module outlet, and its installation method is welding;
The airflow guide port (64) is installed above the module inlet, and its installation method is welding.
The gas control inlet (67) is installed above the module inlet, and its installation method is welding;
The gas control outlet valve plate (61) is attached to the gas control outlet (62) and can telescopically open and close the gas control outlet.
The module outlet valve plate (63) is attached to the module outlet and can telescopically open and close the module outlet,
The airflow guide port valve plate (65) is attached to the airflow guide port (64) and can telescopically open and close the airflow guide port (64).
The module inlet valve plate (66) is attached to the module inlet and can telescopically open and close the module inlet,
The closed box chamber according to claim 2 , characterized in that the gas control inlet valve plate (68) is attached to the gas control inlet (67) and can telescopically open and close the gas control inlet. Double-layer sealed structure with designated flow paths. The first inspection port (22) and the second inspection port (29) in the inner box body circulation purification system and jacket circulation purification system are opened, and the first gas with a concentration of 99.99% and the second gas with a concentration of 99.99% are released. step 1, in which the first fan (25) and the second fan (211) are activated at the same time to start gas cleaning work of the inner box body and the jacket;
While cleaning the gas, open the inner box gas pressure control device (43), jacket gas pressure control device (44), inner box gas detection device (42), and jacket gas detection device (41), and and the pressure, concentration, and temperature of the gas inside the jacket, and adjust the inner box gas pressure control device (43) and jacket gas pressure control device (44) according to the detected data to set the pressure gradient. Step 2 and
After the inner box gas detection device (42) and jacket gas detection device (41) detect that the gas concentration has reached the specified value, the inspection port (22) is closed, the gas cleaning operation is stopped, and the gas cleaning operation is stopped. a step 3 in which the gas in the sealed box and the jacket are purified by self-circulation under the action of the first fan (25);
After the inner box gas detection device (42) or jacket gas detection device (41) detects that the target gas concentration is lower than the index value, the inspection port (22) is opened and a high concentration target gas is introduced. After the target gas concentration becomes higher than the index value, a step 4 of closing the inspection port (22) and causing the circulation purification system to self-circulate;
After the local jacket gas detection device (41) detects that the target gas concentration is lower than the index value, it closes the module outlet valve plate (63) and opens the gas control outlet valve plate (61), so that the concentration reaches the index value. At the same time, the target gas with a lower concentration than the target gas is discharged from the gas control outlet (62), the airflow guide port valve plate (65) is closed, the gas control intake port valve plate (68) is opened, and the target gas with a higher concentration is discharged from the gas control intake port. step 5 of introducing the next module through the mouth (67);
If the target gas concentration in the jacket is higher than the index value, open the module outlet valve plate (63) of the previous module, close the gas control outlet valve plate (61) of the previous module, and close the module inlet of this module. Close the valve plate (66), open its airflow guide port valve plate (65), close the module outlet valve plate (63) of this module, open the airflow guide port valve plate (65) of the next module, and open the airflow guide port valve plate (65) of the next module. Open the module inlet valve plate (66) of the module and close the gas control inlet valve plate (68) of the next module, allowing the gas coming in from the inlet of the previous module to pass through the airflow guide port (64) of this module to the next module. Step 6 of letting the airflow flow out to the airflow guide port (64) of the module, and then communicating the current module with the next module;
and step 7 of controlling the target gas concentration and its uniformity within the box chamber and jacket using steps (4) to (6) multiple times in response to different target gas concentrations. A sealing method for a two-layer sealed structure having a designated flow path according to any one of claims 1 to 3 , characterized in:

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