CN202610104U - Height positioning gas pressure support device - Google Patents
Height positioning gas pressure support device Download PDFInfo
- Publication number
- CN202610104U CN202610104U CN 201220023201 CN201220023201U CN202610104U CN 202610104 U CN202610104 U CN 202610104U CN 201220023201 CN201220023201 CN 201220023201 CN 201220023201 U CN201220023201 U CN 201220023201U CN 202610104 U CN202610104 U CN 202610104U
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- Prior art keywords
- gas pressure
- support device
- pressure support
- height
- height locating
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Abstract
The utility model discloses a height positioning gas pressure support device, which comprises positioning height gas pressure column arrays and a pedestal, wherein each of the positioning height gas pressure column arrays comprises positioning height gas pressure columns, which are regularly arranged, each of the positioning height gas pressure column comprises a ball body, and a column body, a spherical crown cavity is arranged at the upper part of the column body, a through hole is arranged in the column body, a positioning lug boss is arranged at the middle of the column body, a groove is arranged at the lower part of the lug boss, and a screw thread is arranged at the lower part of the column body; and regular air ducts are arranged in the pedestal. According to the height positioning gas pressure support device provided by the utility model, input gas is input into the spherical crown cavities by the through holes in the positioning height gas pressure columns through the air ducts of the pedestal, so that the ball bodies float to transfer pressure outwards; the ball bodies can be rotated to all directions, so that friction between the ball bodies and work pieces is changed to rolling friction, damage due to friction of the contact work pieces during displacement can be reduced, and the precise setting pressure can be provided; and meanwhile, owing to the positioning lug bosses and the grooves, the height on the connected platform can be precisely ensured by the pressure columns.
Description
Technical field
The utility model relates to the pressure support field, especially relates to a kind of locating gas pressure support device.
Background technology
ITO (Indium Tin Oxides, indium tin oxide) is the english abbreviation of indium tin oxide, and it is a kind of transparent electrical conductor; Usually thickness has only several thousand dusts, and in transparent conductive body, it has good especially performance at all: high visible light transmissivity; High ir reflectance; Excellent mechanical intensity and chemicalstability can be easy to form certain electrode figure utmost point with wet-etching technologies such as acid solutions, and it is relatively easy etc. to prepare; This makes it be widely used in various electronics and opto-electronic device, like FPD fields such as mobile phone and computers.Therefore, the surface quality to ito thin film glass requires very high.
Early 1990s; Develop rapidly along with the LCD device; To ito thin film product demand amount also is rapid increase, and domestic part producer begins from a series of whole ITO of the factory coating film production lines of external introduction one after another, but because the costing an arm and a leg of import equipment; Factors such as technical service inconvenience are still hung back many manufacturers.
At the end of the eighties, article one TN-LCD has been born with ITO continuous coating production line in China.Along with the development of domestic LCD industry, when ITO product demand amount is increased, there has been new requirement the mid-90 to the quality of product, s-generation ITO coating film production line therefore occurred.99 years, effectively solved a series of problems such as production capacity and usage ratio of equipment that rf magnetron sputtering deposition SiO2 depositing of thin film speed influences production line slowly, the large-scale high-grade ito thin film production line of the third generation has appearred simultaneously.Along with reflective LCD; The development of display devices such as anti-reflection formula LCD, LCOS figure shadow machine back projection TV; The ito thin film product is had higher requirement; The ito thin film material of SiO2/ITO two-layer film configuration has satisfied not the needs that use, and than adopting multilayer complex films system to reach the optical property requirements such as highly reflective or high permeability of product.For many years the experience of designing and developing of accumulation, domestic production enterprise released the 4th generation the large-sized multiple layer film line.This production line is made up of 15 Vakuumkammers, adopts full molecular pump oil-free vacuum system, has used RF/MF/DC three kinds of magnetron sputtering techniques, carries out the control of process gas through PEM/PCV.This production line has the ability of successive sedimentation five layer films.
Along with the quietly rise of touch input electronic products such as PDA, e-book, the equipment of processing of respective material also arises at the historic moment.Because the singularity of touch product principle of work; Its required ito thin film must be processed on flexible materials (PET); The depositing of thin film temperature can not too high (less than 120 ℃); Require simultaneously that the ITO rete is thin, face resistance is high and evenly, so the depositing operation of ito thin film has been proposed strict requirement.
Along with further harshness, the ito thin film goods in processing, processing, transportation, there is strict more requirement to the ito thin film manufacturing process requirement.
Early stage ITO film glass is coating single side, along with two-sided ITO film glass is adopted in the appearance of equipment such as iphone mobile phone more and more.In ito thin film glass preparation, manufacture field, the supporting mechanism of use is more coarse mostly, a lot of support platforms of directly using; Not only increase the frivolous ito thin film glass and the contact surface of platform; Be stained with more dust easily, and easily when ito thin film glass and support platform generation relative displacement, rub; Cause the ito thin film glass surface to scratch, simultaneously neither be very convenient when picking and placeing.Given this, in what and the friction that reduce between frivolous ito thin film goods and the contact surface, the damage that causes when reducing the surface contamination that possibly cause and contingent relatively moving becomes a kind of ideal and selects; Simultaneously; In the ITO film glass course of processing, the planeness of bracing or strutting arrangement is also quite important, is taking the array bracing or strutting arrangement to add man-hour simultaneously; If planeness is accurate inadequately; Be easy to cause surface working damage, therefore a kind of reach reduce surface contamination and cause damage because of slip in, need to guarantee the accurate unanimity of supported array height.
The utility model content
The utility model is intended to solve at least one of technical problem that exists in the prior art.For this reason; A purpose of the utility model is to propose a kind of height locating gas pressure support device, and said height locating gas pressure support device can reduce the frictional force between the contact element, reduces wearing and tearing between the two; The rotation of any direction can be provided simultaneously; Allow spheroid and contact element any direction can have displacement, and accurate predetermined pressure can be provided, simultaneously; Can guarantee that the plane that the cylinder top forms has accurate planeness when gaseous tension post array connects on the platform.
A kind of height locating gas pressure support device according to the utility model embodiment comprises: by the location high air pressure column array that some location high air pressure column is formed, said location high air pressure column comprises spheroid and cylinder; Inside is provided with the pedestal of regular breather line, and said location high air pressure column array and said pedestal link.
Height locating gas pressure support device according to the utility model embodiment; When height locating gas pressure column is connected in the unicom pipeline of establishing in the pedestal through the cylinder lower thread; The perforation through hole that the gas of input is established in cylinder by the gas pipe line of in pedestal, establishing is imported the spherical crown chamber on cylinder top; The spheroid that is opposite to cylinder top spherical crown chamber is exerted pressure, and makes the spheroid come-up, outwards transmits pressure; Anchorage force can be externally transmitted in the highly chamber of locating gas pressure column and outside sealing in the spheroid come-up accurately; Simultaneously, spheroid can carry out any direction and rotate, can reduce spheroid and and the contacted contact element of spheroid between the frictional force that exists, greatly reduce wearing and tearing with the contacted contact element of spheroid; Simultaneously; Because the existence of the groove of middle part positioning boss and boss bottom; Can fit with joining pedestal upper surface accurately; Can guarantee that height locating gas pressure column top forms the accurate planeness of planar, can guarantee that thus the frivolous workpiece of placing on it can guarantee accurate planeness.
Wherein alternatively, said height locating gas pressure column array can be arranged with same rule.
Alternatively, said height locating gas pressure column array can be arranged with the rule that misplaces.
In addition, the height locating gas pressure support device according to the utility model also has following additional technical feature:
Said cylinder top is provided with spherical crown chamber, inside and is provided with and connects that through hole, middle part are provided with positioning boss, the positioning boss bottom is fluted and screw thread is arranged at the bottom;
Said spheroid is arranged in the said spherical crown chamber.
The bottom surface circular diameter of said spherical crown chamber is less than said sphere diameter.
The diameter of said spherical crown chamber is greater than said sphere diameter.
The bottom surface rounded edge of said spherical crown chamber is the smooth transition curved surface.
Because the cylinder middle part is provided with positioning boss and the positioning boss bottom is fluted; After cylinder and pedestal are linked; The space plane that height locating gas pressure column array forms has accurate planeness, and the cylinder bottom is provided with screw thread, can make installing/dismounting become convenient; Simultaneously, since the spherical crown chamber tall and big in spherical crown chamber radius and spherical crown chamber bottom surface circle less than sphere diameter, so spheroid can be installed in the spherical crown chamber and difficult drop-off; The bottom surface rounded edge that reaches said spherical crown chamber is the smooth transition curved surface, can make the friction between spheroid and the spherical crown chamber become littler.
Said height locating gas pressure support device also comprises closing piece.
Preferably, said closing piece is a rubber parts.
Said height locating gas pressure support device also comprises gas input device.
Because the existence of closing piece has guaranteed the resistance to air loss of base interior gas, gas input device can provide accurate setting pressure.
Additional aspect of the utility model and advantage part in the following description provide, and part will become obviously from the following description, or recognize through the practice of the utility model.
Description of drawings
Above-mentioned and/or additional aspect of the utility model and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 is the schematic three dimensional views according to the height locating gas pressure support device of an embodiment of the utility model;
Fig. 2 is the front section view of height locating gas pressure support device shown in Figure 1;
The synoptic diagram of Fig. 3 for arranging with same rule according to the location high air pressure column array of an embodiment of the utility model;
The synoptic diagram of Fig. 4 for arranging with the rule that misplaces according to the location high air pressure column array of an embodiment of the utility model;
Fig. 5 is synoptic diagram and the vertical view according to the pedestal of an embodiment of the utility model;
Fig. 6 is the sectional view of the pedestal breather line shown in Fig. 5;
Fig. 7 is synoptic diagram and the sectional view according to the location high air pressure column of an embodiment of the utility model.
Embodiment
Describe the embodiment of the utility model below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the utility model, and can not be interpreted as restriction the utility model.
In the description of the utility model; It will be appreciated that; The orientation of indication such as term " top ", " bottom ", " inside ", " outside ", " preceding ", " back ", " laterally ", " vertically " or position relation are for concerning based on orientation shown in the drawings or position; Only be to describe with simplifying for the ease of describing the utility model; Rather than the device or the element of indication or hint indication must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction to the utility model.。
In the description of the utility model, need to prove that only if clear and definite regulation and qualification are arranged in addition, term " installation ", " connection " should be done broad understanding, for example, can be to be fixedly connected, connect integratedly, also can be detachable connection; It can be the connection of two element internals; Can be directly to link to each other, also can link to each other indirectly, for those of ordinary skill in the art, can particular case understand the concrete implication of above-mentioned term in the utility model through intermediary.
Following with reference to a kind of height locating gas pressure support device of figure 1-7 description according to the utility model, describe as example to use air to be used for height locating gas pressure support device below as pressure source.Certainly, the utility model is not limited to this, for example, also can use other gases according to the propulsion source of the height locating gas pressure support device of the utility model.
According to an embodiment of the height locating gas pressure support device of the utility model, as shown in Figure 1, comprise height locating gas pressure column array that height locating gas pressure column 1 forms with in be provided with breather line 21, the pedestal 2 of unicom pipeline 22.
According to an embodiment of the height locating gas pressure support device of the utility model, as shown in Figure 1, also comprise closing piece 3 and gas input device 4, wherein, preferably, closing piece 3 is a rubber parts.
An embodiment according to the height locating gas pressure support device of the utility model; As shown in Figure 6; Be provided with horizontal breather line 21 and unicom pipeline 22 longitudinally in the pedestal 2; Breather line 21 links (as shown in Figure 1) with outside gas input device 4, and unicom pipeline 22 links with the screw thread 125 of height locating gas pressure column 1 bottom.
According to an embodiment of the height locating gas pressure support device of the utility model, as shown in Figure 7, height locating gas pressure column 1 comprises spheroid 11 and cylinder 12; Cylinder 12 tops are provided with spherical chamber 121; Spheroid 11 is arranged in the spherical chamber 121, and the bottom surface circular diameter of spherical chamber 121 is less than spheroid 11 diameters, and the diameter of spherical chamber 121 is greater than spheroid 11 diameters; Can avoid spheroid 11 to come off easily; Spherical chamber 121 bottom surface circumference are smooth simultaneously, the frictional force between reduction and the spheroid 11, the work-ing life of prolongation spheroid 11.
An embodiment according to the height locating gas pressure support device of the utility model; As shown in Figure 2; The perforation through hole of establishing in the cylinder 12 that breather line 21 gets into unicom pipeline 22 links to each other of gas by pedestal 21 122 gets into spherical chamber 121, floats spheroid 11, outwards transmits anchorage force; Because the existence of the groove 124 of positioning boss 123 and bottom can make positioning boss 123 and pedestal 2 upper surfaces fit tightly, guarantee the accurate planeness of supporting plane that height locating gas pressure column array forms simultaneously; When precision workpiece is placed on the supporting plane that height locating gas pressure column array forms; On the one hand bearing surface significantly reduces and can sliding friction be become rolling resistance, and the accurate planeness of supporting plane also can be improved the surface accuracy when the precision workpiece surface carried out processing treatment on the other hand.
According to an embodiment of the height locating gas pressure support device of the utility model, as shown in Figure 3, height locating gas pressure column array can be arranged with same rule.
Preferably, height locating gas pressure column array can be arranged (as shown in Figure 4) with the rule that misplaces, and so, can make in the frivolous workpiece hand on the supporting plane that is placed on the formation of height locating gas pressure column array more even.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained among at least one embodiment or example of the utility model.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described the embodiment of the utility model; Those having ordinary skill in the art will appreciate that: under the situation of principle that does not break away from the utility model and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, the scope of the utility model is limited claim and equivalent thereof.
Claims (9)
1. a height locating gas pressure support device is characterized in that, comprising:
By the location high air pressure column array that some location high air pressure column is formed, said location high air pressure column comprises spheroid and cylinder;
Inside is provided with the pedestal of breather line and unicom pipeline, and the said unicom pipeline of establishing in said location high air pressure column array and the said pedestal links.
2. height locating gas pressure support device according to claim 1 is characterized in that, said location high air pressure column array can be arranged with same rule.
3. height locating gas pressure support device according to claim 1 is characterized in that, said location high air pressure column array can be arranged with the rule that misplaces.
4. height locating gas pressure support device according to claim 1 is characterized in that, said cylinder top is provided with spherical crown chamber, inside and is provided with and connects that through hole, middle part are provided with positioning boss, the boss bottom is fluted and screw thread is arranged at the bottom;
Said spheroid is arranged in the said spherical crown chamber.
5. height locating gas pressure support device according to claim 4 is characterized in that the bottom surface circular diameter of said spherical crown chamber is less than said sphere diameter.
6. height locating gas pressure support device according to claim 4 is characterized in that the diameter of said spherical crown chamber is greater than said sphere diameter.
7. height locating gas pressure support device according to claim 4 is characterized in that the bottom surface rounded edge of said spherical crown chamber is the smooth transition curved surface.
8. height locating gas pressure support device according to claim 1 is characterized in that, said height locating gas pressure support device also comprises closing piece.
9. height locating gas pressure support device according to claim 1 is characterized in that, said height locating gas pressure support device also comprises gas input device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220023201 CN202610104U (en) | 2012-01-18 | 2012-01-18 | Height positioning gas pressure support device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220023201 CN202610104U (en) | 2012-01-18 | 2012-01-18 | Height positioning gas pressure support device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202610104U true CN202610104U (en) | 2012-12-19 |
Family
ID=47343819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220023201 Expired - Fee Related CN202610104U (en) | 2012-01-18 | 2012-01-18 | Height positioning gas pressure support device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202610104U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103214188A (en) * | 2012-01-18 | 2013-07-24 | 昆山思拓机器有限公司 | Height-positioning gas pressure support device |
-
2012
- 2012-01-18 CN CN 201220023201 patent/CN202610104U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103214188A (en) * | 2012-01-18 | 2013-07-24 | 昆山思拓机器有限公司 | Height-positioning gas pressure support device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121219 Termination date: 20200118 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |