CN204538002U - Silicon chip flower basket clamping device - Google Patents
Silicon chip flower basket clamping device Download PDFInfo
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- CN204538002U CN204538002U CN201520187272.7U CN201520187272U CN204538002U CN 204538002 U CN204538002 U CN 204538002U CN 201520187272 U CN201520187272 U CN 201520187272U CN 204538002 U CN204538002 U CN 204538002U
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- silicon chip
- clamping device
- flower basket
- chip flower
- basket clamping
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Abstract
The utility model relates to a kind of silicon chip flower basket clamping device, it comprises base, two linking arms and two handles, described base is the rectangular frame be made up of cross bar and montant, described cross bar top is provided with detent, described two linking arms are vertically located at montant top respectively, and the outside of two linking arms is laterally located at respectively by described two handles.The utility model not only can avoid rubber gloves directly to contact with liquid, operating personnel is not directly contacted with liquid, ensure that the personal safety of operating personnel; And adopt the overall stressed scheme of detent and gaily decorated basket edge, improve the stability of gaily decorated basket cleaning, moving process, prevent the gaily decorated basket from dropping or rock the secondary damage caused.
Description
Technical field
The utility model relates to a kind of clamping device, specifically silicon chip flower basket clamping device.
Background technology
Along with the develop rapidly of semiconductor industry in recent years, more and more higher to the requirement of silicon chip, the cleaning especially for 6 inches and above silicon chip is had higher requirement, and at present in the industry the method for cleaning silicon chip mostly for 6 inches with lower silicon slice.In the production process of Silicon Wafer from silicon single crystal bar, generally mainly comprise section, chamfering, back of the body process, polishing, clean to the polished silicon wafer finally obtaining perfect minute surface and terminate, the polished silicon wafer of perfect minute surface has very high requirement to wafer topography and granularity.Silicon chip surface after polishing adheres to a large amount of particle, needs to use chemical reagent cleaning to get rid of the particle on surface.
Existing silicon wafer cleaning process generally comprises the step such as chemical cleaning, drying, mainly comprises SC-1, SC-2, DHF cleaning in this step of chemical cleaning technology.SC-1 is ammoniacal liquor hydrogen peroxide mixed liquor mainly, SC-2 is hydrochloric acid hydrogen peroxide mixed liquor, DHF is hydrofluoric acid hydrogen peroxide mixed liquor, this several acid is all hazardous chemicals, silicon chip needs constantly to change rinse bath in cleaning process, and because silicon chip needs all to immerse in chemical liquids, in operating process, chemical liquids can splash on human body skin, extremely be detrimental to health, easily occur security incident.
The cleaning device structure that industry uses at present is as patent CN201320067211.8, operation principle uses hand hand-held device, both sides bayonet socket can magnify, gaily decorated basket clamping device unclamps after blocking gaily decorated basket both sides, once cleaning, whole gaily decorated basket center of gravity is all at bayonet socket place, very easily come off in transfer process theory of evolution groove, chemical liquids also can be made to spill, easily there is security incident, and before drying unload lower clamp time, need hand from again depressing above, bayonet socket is separated with the gaily decorated basket, operating very easily very high to particle requirement silicon chip like this causes secondary artificially to stain, have impact on product yield.
Summary of the invention
The utility model is intended to the defect overcoming prior art, provides a kind of silicon chip flower basket clamping device, operating personnel are not directly contacted with liquid, ensure that the personal safety of operating personnel.
In order to solve the problems of the technologies described above, the utility model is achieved in that
A kind of silicon chip flower basket clamping device, it is characterized in that: it comprises base, two linking arms and two handles, described base is the rectangular frame be made up of cross bar and montant, described cross bar top is provided with detent, described two linking arms are vertically located at montant top respectively, and the outside of two linking arms is laterally located at respectively by described two handles.
Described silicon chip flower basket clamping device, is characterized in that: described handle is connected with vertical between linking arm.
Described silicon chip flower basket clamping device, is characterized in that: the shape of described detent is del, semicircle or rectangle.
Described silicon chip flower basket clamping device, is characterized in that: the width of described detent is 10mm-15mm, and the degree of depth is 10mm-20mm.
Described silicon chip flower basket clamping device, is characterized in that: described decreased food is 100mm-150mm, and width is 15mm-30mm.
Described silicon chip flower basket clamping device, is characterized in that: the width of described rectangular frame is 15mm-20mm, and thickness is 10mm-20mm.
Described silicon chip flower basket clamping device, is characterized in that: the shape of described linking arm is triangle, semicircle, rectangle, hollow out triangle, hollow out semicircle or hollow out rectangle.
Described silicon chip flower basket clamping device, is characterized in that: described base, linking arm and handle all adopt polypropylene to make.
The beneficial effects of the utility model are: be provided with gaily decorated basket detent easily, and be convenient to quick placement and the extraction of the gaily decorated basket, prevent secondary pollution, simplify the operation flow process, increases work efficiency; Prevent the gaily decorated basket rocking in moving process simultaneously, avoid the secondary damage of silicon chip.Reduce skin to contact with the direct of chemical liquids, effectively prevent the generation of security incident.
Accompanying drawing explanation
Below in conjunction with drawings and embodiments, the utility model is described in further detail:
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation in Fig. 1 side-looking direction.
Fig. 3 is the structural representation that Fig. 1 overlooks direction.
Embodiment
As shown in Figure 1-Figure 3: a kind of silicon chip flower basket clamping device, silicon chip flower basket clamping device, it comprises base 3, two linking arms 2 and two handles 1, described base is the rectangular frame be made up of cross bar 31 and montant 32, described cross bar top is provided with detent 4, described two linking arms are vertically located at montant top respectively, and the outside of two linking arms is laterally located at respectively by described two handles; Described handle is connected with vertical between linking arm; The shape of described detent is del, semicircle or rectangle, is preferably semicircle; The width of described detent is 10mm-15mm, and the degree of depth is 10mm-20mm; Described decreased food is 100mm-150mm, and width is 15mm-30mm; The width of described rectangular frame is 15mm-20mm, and thickness is 10mm-20mm; The shape of described linking arm is triangle, semicircle, rectangle, hollow out triangle, hollow out semicircle or hollow out rectangle, preferred triangle; Described base, linking arm and handle all adopt polypropylene to make.
By silicon chip is housed the vertical inserted base of the gaily decorated basket in, fix the gaily decorated basket by detent, by the utility model, the gaily decorated basket be placed in chemical liquids, use chemical liquids silicon chip is cleaned; Before cleaning process, people's both hands are only needed to hold handle, stably the gaily decorated basket is put into chemical liquid bath to clean, in cleaning process, handle can be placed on cleaning machine board panel, handle is exposed in air, be not soaked in chemical cleaning solution, guarantee whole cleaning device not by chemical liquids submergence, decrease people and chemical liquids contact probability, in transfer process, detent can fix the gaily decorated basket, does not allow it rock, and reduces silicon chip surface in transfer process owing to rocking the secondary contamination problems caused; After cleaning terminates, only need catch handle that the gaily decorated basket is removed rinse bath, then the gaily decorated basket is directly vertically taken out from the utility model.
Claims (8)
1. a silicon chip flower basket clamping device, it is characterized in that: it comprises base, two linking arms and two handles, described base is the rectangular frame be made up of cross bar and montant, described cross bar top is provided with detent, described two linking arms are vertically located at montant top respectively, and the outside of two linking arms is laterally located at respectively by described two handles.
2. silicon chip flower basket clamping device according to claim 1, is characterized in that: described handle is connected with vertical between linking arm.
3. silicon chip flower basket clamping device according to claim 1, is characterized in that: the shape of described detent is del, semicircle or rectangle.
4. silicon chip flower basket clamping device according to claim 3, is characterized in that: the width of described detent is 10mm-15mm, and the degree of depth is 10mm-20mm.
5. silicon chip flower basket clamping device according to claim 2, is characterized in that: described decreased food is 100mm-150mm, and width is 15mm-30mm.
6. silicon chip flower basket clamping device according to claim 1, is characterized in that: the width of described rectangular frame is 15mm-20mm, and thickness is 10mm-20mm.
7. silicon chip flower basket clamping device according to claim 2, is characterized in that: the shape of described linking arm is triangle, semicircle, rectangle, hollow out triangle, hollow out semicircle or hollow out rectangle.
8. silicon chip flower basket clamping device according to claim 1, is characterized in that: described base, linking arm and handle all adopt polypropylene to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520187272.7U CN204538002U (en) | 2015-03-31 | 2015-03-31 | Silicon chip flower basket clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520187272.7U CN204538002U (en) | 2015-03-31 | 2015-03-31 | Silicon chip flower basket clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204538002U true CN204538002U (en) | 2015-08-05 |
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| CN201520187272.7U Active CN204538002U (en) | 2015-03-31 | 2015-03-31 | Silicon chip flower basket clamping device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108376668A (en) * | 2018-02-26 | 2018-08-07 | 上海提牛机电设备有限公司 | A kind of silicon chip clamping jaw and wafer clamping device |
| CN109454051A (en) * | 2018-10-25 | 2019-03-12 | 南通皋鑫电子股份有限公司 | The ME treatment process of 2CL91 type component |
| CN113211305A (en) * | 2020-01-19 | 2021-08-06 | 山东浪潮华光光电子股份有限公司 | Method and tool for polishing gallium arsenide LED chip after grinding |
-
2015
- 2015-03-31 CN CN201520187272.7U patent/CN204538002U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108376668A (en) * | 2018-02-26 | 2018-08-07 | 上海提牛机电设备有限公司 | A kind of silicon chip clamping jaw and wafer clamping device |
| CN109454051A (en) * | 2018-10-25 | 2019-03-12 | 南通皋鑫电子股份有限公司 | The ME treatment process of 2CL91 type component |
| CN109454051B (en) * | 2018-10-25 | 2021-07-23 | 南通皋鑫电子股份有限公司 | ME treatment process of 2CL91 type component |
| CN113211305A (en) * | 2020-01-19 | 2021-08-06 | 山东浪潮华光光电子股份有限公司 | Method and tool for polishing gallium arsenide LED chip after grinding |
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Legal Events
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201604 No. 88, Yangshi Road, Shihudang Town, Songjiang District, Shanghai Patentee after: Shanghai Chaosi Semiconductor Co.,Ltd. Address before: 201604 No. 88, Yangshi Road, Shihudang Town, Songjiang District, Shanghai Patentee before: SHANGHAI ADVANCED SILICON TECHNOLOGY Co.,Ltd. |