CN108376668A - A kind of silicon chip clamping jaw and wafer clamping device - Google Patents
A kind of silicon chip clamping jaw and wafer clamping device Download PDFInfo
- Publication number
- CN108376668A CN108376668A CN201810162750.7A CN201810162750A CN108376668A CN 108376668 A CN108376668 A CN 108376668A CN 201810162750 A CN201810162750 A CN 201810162750A CN 108376668 A CN108376668 A CN 108376668A
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- clamping
- groove
- clamping jaw
- crossbeam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 95
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 93
- 239000010703 silicon Substances 0.000 title claims abstract description 93
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 abstract description 17
- 238000000034 method Methods 0.000 abstract description 5
- 230000006378 damage Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of silicon chip clamping jaw and wafer clamping devices, belong to wafer cleaning technical.Clamping jaw includes crossbeam, two connecting rods and bearing beam, the both ends of crossbeam are connect with the upper end of two connecting rods respectively, the both ends of bearing beam are connect with the lower end of two connecting rods respectively, bearing beam is equipped with one group or more silicon chip clamping slot, every group of silicon chip clamping slot includes multiple silicon chip clamping slots, and the distance between adjacent two silicon chip clamping slots are equal in same group, silicon chip clamping slot is to be opened in the groove of crossbeam side, and the slot bottom of groove is in same wind up in cambered surface；Wafer clamping device includes that two drive rods and two above-mentioned silicon chip clamping jaws, two silicon chip clamping jaws are oppositely arranged, and two drive rods are parallel, and the upper end of two silicon chip clamping jaws is connect with two drive rods by stationary fixture respectively.The silicon chip clamping jaw and wafer clamping device stablize the clamping of silicon chip, change the method in the past to Wafer Cleaning, improve the cleaning quality of silicon chip.
Description
Technical field
The invention belongs to wafer cleaning technicals, more particularly to a kind of silicon chip clamping jaw and wafer clamping device.
Background technology
In the prior art, silicon chip is typically placed in silicon wafer bearing flower basket in cleaning, then holds silicon chip by silicon chip
The load gaily decorated basket, which is placed in rinse bath, cleans silicon chip.Because silicon wafer bearing flower basket blocks silicon chip with certain, cause
Cleaning solution is not thorough enough to the cleaning of silicon chip, influences the cleaning quality of silicon chip.
Invention content
For the deficiencies in the prior art, the object of the present invention is to provide a kind of silicon chip clamping jaw and silicon chip clamping machines
Structure, for solving the problems, such as that cleaning solution is not thorough enough to the cleaning of silicon chip.
The purpose of the present invention is what is be achieved through the following technical solutions：
A kind of silicon chip clamping jaw, including crossbeam, two connecting rods and bearing beam, the both ends of the crossbeam respectively with two connecting rods
Upper end connection, the both ends of the bearing beam connects with the lower end of two connecting rods respectively, and the bearing beam is equipped with one
Group or more silicon chip clamping slot, every group of silicon chip clamping slot include multiple silicon chip clamping slots, and two silicon chips adjacent in same group
The distance between holding tank is equal, and the silicon chip clamping slot is to be opened in the groove of crossbeam side, and the slot bottom of groove is in
It is same to wind up in cambered surface.
Preferably, the silicon chip clamping slot has two groups.
Preferably, the crossbeam includes first crossbeam and second cross beam, the both ends of the first crossbeam and second cross beam
Both ends are connect with the upper end of two connecting rods, and first crossbeam is in the top of second cross beam.
Preferably, the crossbeam is cylindrical.
Preferably, the upper end of described two connecting rods is passed through fillet and is handled.
Preferably, the lower end of described two connecting rods is in tip-angled shape, and the lower surface of the bearing beam is equipped with cross section
For the raised line of up-side down triangle.
A kind of wafer clamping device, including two drive rods and two above-mentioned silicon chip clamping jaws, described two silicon chip clamping jaw phases
To setting, described two drive rods are parallel, and the upper end of described two silicon chip clamping jaws passes through geometrical clamp with two drive rods respectively
Tool connection, described two stationary fixtures include fixed seat, and the upper end of the fixed seat is equipped with the first holding tank, the fixed seat
The other end be equipped with clamping jaw clamping device, the clamping jaw clamping device includes sliding seat and cover board, and the cover board connects with sliding seat
It connects, the sliding seat one side opposite with cover board is equipped with the first groove, and the cover board one side opposite with sliding seat is equipped with second
Groove, first groove and the second groove are parallel with the first holding tank, and first groove and the second groove are set relatively
It sets, first groove and the second fit depressions form the clamping part for clamping crossbeams, and the fixed seat is equipped with bar shaped
The upper end in hole, the fastening bolt is threadedly coupled across strip-shaped hole with sliding seat, and the upper surface of the fixed seat is equipped with adjusting machine
Structure, the regulating mechanism include fixed block and adjusting bolt, and the fixed block is fixedly connected with the upper surface of fixed seat, described solid
Determine block and be equipped with horizontal bolt hole, the head end of the adjusting bolt is connect across horizontal bolt hole with clamping jaw clamping device.
Preferably, the vertical section of first groove and the second groove is semicircle.
Preferably, the vertical section of the slot bottom of first holding tank is rounded, is equipped at the notch of first holding tank
Retaining mechanism for adjusting the first holding tank size.
Preferably, the retaining mechanism includes more than one clamping screw, and the notch both sides of first holding tank are equipped with
One group or more to wearing bolt hole, the clamping screw is arranged in wearing in bolt hole.
Preferably, the cover board and sliding seat are bolted by first.
Preferably, the fixed block is bolted with fixed seat by second.
Preferably, the first groove of each stationary fixture and the second groove it is equal there are two, two of the same stationary fixture
First groove forms two clamping parts for clamping crossbeams with two the second fit depressions respectively.
Preferably, two the first grooves of the same stationary fixture are mutually parallel, two second of the same stationary fixture
Groove is mutually parallel.
The beneficial effects of the invention are as follows：Silicon chip clamping is got up to clean using the clamping jaw, changes traditional silicon chip
The method of cleaning, it is possible to prevente effectively from silicon chip improves silicon chip because cleaning halfway situation caused by the blocking of film magazine
Cleaning quality.Each clamping jaw is equipped with multiple silicon chip clamping slots, can be clamped simultaneously to multiple silicon chips, improve silicon chip
Cleaning efficiency.The wafer clamping device stablizes the clamping of silicon chip, and it is possible to prevente effectively from the surface of silicon chip comes to harm, right
The surface of silicon chip plays a good protective effect.
Description of the drawings
Fig. 1 is silicon chip clamping jaw overall structure diagram of the present invention.
Fig. 2 is wafer clamping device stationary fixture overall structure diagram of the present invention.
Fig. 3 is wafer clamping device stationary fixture right view of the present invention.
Fig. 4 is wafer clamping device stationary fixture upward view of the present invention.
Fig. 5 is wafer clamping device overall structure diagram of the present invention.
Fig. 6 is wafer clamping device left view of the present invention.
In Fig. 1 to Fig. 6：1 is connecting rod, and 2 be bearing beam, and 3 be silicon chip clamping slot, and 4 be first crossbeam, and 5 is horizontal for second
Beam, 6 be drive rod, and 21 be fixed seat, and 22 be the first holding tank, and 23 be sliding seat, and 24 be cover board, and 25 be clamping part, and 26 be item
Shape hole, 27 be fixed block, and 28 be adjusting bolt, and 29 be clamping screw, and 210 be the first bolt, and 211 be the second bolt, and 212 be pair
Wear bolt hole.
Specific implementation mode
Silicon chip clamping jaw of the present invention and wafer clamping device are done further with specific case study on implementation below in conjunction with the accompanying drawings
Elaborate, in the hope of being more fully apparent from express the structure feature and concrete application of the present invention, but cannot be limited with this
Protection scope of the present invention.
Embodiment 1：A kind of silicon chip clamping jaw, including crossbeam, two connecting rods 1 and bearing beam 2, the both ends point of the crossbeam
It is not connect with the upper end of two connecting rods 1, the both ends of the bearing beam 2 are connect with the lower end of two connecting rods 1 respectively, described
Bearing beam 2 is equipped with one group or more silicon chip clamping slot 3, and every group of silicon chip clamping slot 3 includes multiple silicon chip clamping slots 3, and same
The distance between two adjacent silicon chip clamping slots 3 are equal in one group, and the silicon chip clamping slot 3 is to be opened in the recessed of crossbeam side
Slot, and the slot bottom of groove is in same wind up in cambered surface.
In the present embodiment, the silicon chip clamping slot 3 has two groups；The crossbeam includes first crossbeam 4 and second cross beam 5, institute
The both ends at the both ends and second cross beam 5 of stating first crossbeam 4 are connect with the upper end of two connecting rods 1, and first crossbeam 4 is in the
The top of two crossbeams 5；The crossbeam is cylindrical；The upper end of described two connecting rods 1 is passed through fillet and is handled；Described two companies
The lower end of extension bar 1 is in tip-angled shape, and the lower surface of the bearing beam 2 is equipped with the raised line that cross section is up-side down triangle.
In the present embodiment, a silicon chip can be clamped in each silicon chip clamping slot 3, and the slot bottom of the groove is on same
In string cambered surface, to make silicon chip clamping slot 3 carry out support and clamping to the lower part of silicon chip.Because silicon chip is circular sheet-like structures,
And the surface of silicon chip cannot be damaged, therefore silicon chip clamping slot 3 is to the lower part support of silicon chip and clamping, it can be to avoid wafer chuck
It holds slot 3 surface of silicon chip is caused to damage.
The crossbeam includes first crossbeam 4 and second cross beam 5, and first crossbeam 4 and second cross beam 5 pass through stationary fixture
It is connect with drive rod 6, drive rod 6 can be effectively ensured in rotation process, clamping jaw is rotated around the center line of drive rod 6, can be with
It effectively prevent rotating between clamping jaw and stationary fixture.The upper end of connecting rod 1 is handled by fillet, it is possible to prevente effectively from connection
Operating personnel or other component are caused to scratch the upper end of bar 1.The lower end of connecting rod 1 is in tip-angled shape, can be made in connecting rod 1
Cleaning solution quickly assemble and flow down in 1 lower end of connecting rod；It is inverted triangle that the lower surface of the bearing beam 2, which is equipped with cross section,
The raised line of shape can make the cleaning solution on bearing beam 2 assemble and flow down on raised line in time.
Embodiment 2：A kind of silicon chip clamping jaw in wafer clamping device, including two drive rods 6 and two embodiments 1, institute
Two silicon chip clamping jaws are stated to be oppositely arranged, described two drive rods 6 are parallel, the upper ends of described two silicon chip clamping jaws respectively with two
Drive rod 6 is connected by stationary fixture, and described two stationary fixtures include fixed seat 21, and the upper end of the fixed seat 21 is equipped with
The other end of first holding tank 22, the fixed seat 21 is equipped with clamping jaw clamping device, and the clamping jaw clamping device includes sliding seat
23 and cover board 24, the cover board 24 connect with sliding seat 23, the one side opposite with cover board 24 of the sliding seat 23 is equipped with first recessed
Slot, the one side opposite with sliding seat 23 of the cover board 24 are equipped with the second groove, and first groove and the second groove are with first
Holding tank 22 is parallel, and first groove and the second groove are oppositely arranged, first groove and the second fit depressions shape
At the clamping part 25 for clamping crossbeams, the fixed seat 21 is equipped with strip-shaped hole 26, and the upper end of the fastening bolt passes through item
Shape hole 26 is threadedly coupled with sliding seat 23, and the upper surface of the fixed seat 21 is equipped with regulating mechanism, and the regulating mechanism includes solid
Determine block 27 and adjusting bolt 28, the fixed block 27 is fixedly connected with the upper surface of fixed seat 21, and the fixed block 27 is equipped with
The head end of horizontal bolt hole, the adjusting bolt 28 is connect across horizontal bolt hole with clamping jaw clamping device.
In the present embodiment, the vertical section of first groove and the second groove is semicircle；First holding tank 22
Slot bottom vertical section it is rounded, be equipped at the notch of first holding tank 22 for adjusting the lock of 22 size of the first holding tank
Tight mechanism；The retaining mechanism includes more than one clamping screw 29, and the notch both sides of first holding tank 22 are equipped with one group
Above to wearing bolt hole 212, the clamping screw 29 is arranged in wearing in bolt hole 212；The cover board 24 and sliding seat 23 are logical
Cross the connection of the first bolt 210；The fixed block 27 is connect with fixed seat 21 by the second bolt 211；The of each stationary fixture
One groove and the second groove it is equal there are two, two the first grooves of the same stationary fixture respectively with two the second fit depressions
Form two clamping parts 25 for clamping crossbeams；Two the first grooves of the same stationary fixture are mutually parallel, same solid
Two the second grooves of clamp tool are mutually parallel.
The wafer clamping device is for being clamped silicon chip, and two clamping jaws are oppositely arranged so that the silicon chip clamping on two clamping jaws
Slot 3 can form support to the lower part of silicon chip and clamping, two drive rods 6 move upwards, to which silicon chip clamping be got up,
It avoids and silicon chip surface is caused to damage.
Before clamping, the distance between two clamping jaws farther out, when clamping, rotate two drive rods 6, and make two drive rods
On the contrary, two clamping jaw lower ends move toward one another, the silicon chip clamping slot 3 of two clamping jaws is formed the lower part of silicon chip to be held 6 rotation directions
Support and clamping, two drive rods 6 move upwards, to which silicon chip clamping get up.
Because the cleaning process of silicon chip is more accurate, therefore occurs silicon chip clamping slot 3 in order to prevent to the clamping of silicon chip not
The case where in place, then needs strictly to control the distance between drive rod 6 and clamping jaw, therefore adjusting machine is arranged in stationary fixture
Structure, for adjusting the distance between clamping part 25 and the first holding tank 22, to be carried out to the distance between clamping jaw and drive rod 6
Adjustment.Specific method is to loosen fastening bolt, rotates adjusting bolt 28, so that sliding seat 23 is moved in fixed seat 21, work as sliding block
After seat movement in place, fastening bolt is fastened.
In stationary fixture, if there are two clamping part 25, to realize that stationary fixture is horizontal to clamping jaw first crossbeam 4 and second
The stable holding of beam 5 prevents from rotating between clamping jaw and stationary fixture.
Claims (10)
1. a kind of silicon chip clamping jaw, which is characterized in that the silicon chip clamping jaw includes crossbeam, two connecting rods（1）And bearing beam（2）,
The both ends of the crossbeam respectively with two connecting rods（1）Upper end connection, the bearing beam（2）Both ends respectively with two companies
Extension bar（1）Lower end connection, the bearing beam（2）It is equipped with one group or more silicon chip clamping slot（3）, every group of silicon chip clamping slot
（3）Include multiple silicon chip clamping slots（3）, and two silicon chip clamping slots adjacent in same group（3）The distance between equal, institute
State silicon chip clamping slot（3）To be opened in the groove of crossbeam side, and the slot bottom of groove is in same wind up in cambered surface.
2. a kind of silicon chip clamping jaw according to claim 1, which is characterized in that the silicon chip clamping slot（3）There are two groups.
3. a kind of silicon chip clamping jaw according to claim 1, which is characterized in that the crossbeam includes first crossbeam（4）With
Two crossbeams（5）, the first crossbeam（4）Both ends and second cross beam（5）Both ends with two connecting rods（1）Upper end connect
It connects, and first crossbeam（4）In second cross beam（5）Top.
4. a kind of silicon chip clamping jaw according to claim 1 or 3, which is characterized in that the crossbeam is cylindrical.
5. a kind of silicon chip clamping jaw according to claim 1, which is characterized in that described two connecting rods（1）Upper end pass through
Cross fillet processing.
6. a kind of silicon chip clamping jaw according to claim 1, which is characterized in that described two connecting rods（1）Lower end be in
Tip-angled shape, the bearing beam（2）Lower surface be equipped with cross section be up-side down triangle raised line.
7. a kind of wafer clamping device, which is characterized in that the clamping device includes two drive rods（6）With two above-mentioned wafer chucks
Pawl, described two silicon chip clamping jaws are oppositely arranged, described two drive rods（6）It is parallel, the upper end point of described two silicon chip clamping jaws
Not with two drive rods（6）It is connected by stationary fixture, described two stationary fixtures include fixed seat（21）, the fixed seat
（21）Upper end be equipped with the first holding tank（22）, the fixed seat（21）The other end be equipped with clamping jaw clamping device, the clamping jaw
Clamping device includes sliding seat（23）And cover board（24）, the cover board（24）With sliding seat（23）Connection, the sliding seat（23）
With cover board（24）Opposite one side is equipped with the first groove, the cover board（24）With sliding seat（23）It is recessed that opposite one side is equipped with second
Slot, first groove and the second groove with the first holding tank（22）Parallel, first groove and the second groove are opposite
Setting, first groove and the second fit depressions form the clamping part for clamping crossbeams（25）, the fixed seat（21）
It is equipped with strip-shaped hole（26）, the upper end of the fastening bolt passes through strip-shaped hole（26）With sliding seat（23）It is threadedly coupled, it is described solid
Reservation（21）Upper surface be equipped with regulating mechanism, the regulating mechanism includes fixed block（27）And adjusting bolt（28）, described solid
Determine block（27）With fixed seat（21）Upper surface be fixedly connected, the fixed block（27）It is equipped with horizontal bolt hole, the adjusting
Bolt（28）Head end connect with clamping jaw clamping device across horizontal bolt hole.
8. a kind of adjustable clamping jaw stationary fixture according to claim 7, which is characterized in that first groove and second
The vertical section of groove is semicircle.
9. a kind of adjustable clamping jaw stationary fixture according to claim 7, which is characterized in that first holding tank（22）
Slot bottom vertical section it is rounded, first holding tank（22）Notch at be equipped with for adjust the first holding tank（22）Size
Retaining mechanism.
10. a kind of adjustable clamping jaw stationary fixture according to claim 9, which is characterized in that the retaining mechanism includes
More than one clamping screw（29）, first holding tank（22）Notch both sides be equipped with one group or more to wearing bolt hole, it is described
Clamping screw（29）It is arranged in wearing in bolt hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810162750.7A CN108376668A (en) | 2018-02-26 | 2018-02-26 | A kind of silicon chip clamping jaw and wafer clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810162750.7A CN108376668A (en) | 2018-02-26 | 2018-02-26 | A kind of silicon chip clamping jaw and wafer clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108376668A true CN108376668A (en) | 2018-08-07 |
Family
ID=63018224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810162750.7A Pending CN108376668A (en) | 2018-02-26 | 2018-02-26 | A kind of silicon chip clamping jaw and wafer clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108376668A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110634779A (en) * | 2019-09-19 | 2019-12-31 | 上海提牛机电设备有限公司 | Wafer grabbing mechanism |
| CN112736021A (en) * | 2021-01-19 | 2021-04-30 | 意诚新能(苏州)科技有限公司 | Clamping device of ultra-thin silicon chip |
| CN113471135A (en) * | 2021-07-06 | 2021-10-01 | 华海清科股份有限公司 | Wafer clamping device and wafer cleaning device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110634779A (en) * | 2019-09-19 | 2019-12-31 | 上海提牛机电设备有限公司 | Wafer grabbing mechanism |
| CN112736021A (en) * | 2021-01-19 | 2021-04-30 | 意诚新能(苏州)科技有限公司 | Clamping device of ultra-thin silicon chip |
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| CN113471135B (en) * | 2021-07-06 | 2022-07-29 | 华海清科股份有限公司 | Wafer clamping device and wafer cleaning device |
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