CN101386156A - Silicon slice cleaning and positioning apparatus - Google Patents
Silicon slice cleaning and positioning apparatus Download PDFInfo
- Publication number
- CN101386156A CN101386156A CNA2008101215787A CN200810121578A CN101386156A CN 101386156 A CN101386156 A CN 101386156A CN A2008101215787 A CNA2008101215787 A CN A2008101215787A CN 200810121578 A CN200810121578 A CN 200810121578A CN 101386156 A CN101386156 A CN 101386156A
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- support
- positioning apparatus
- workseats
- silicon slice
- elevating lever
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Abstract
The invention relates to a device for cleaning and positioning silicon chips, which is provided with a working plane, on which an absorbing pad and an admittance component are arranged. The device is composed of two stand rods, two lifting rods, two locating shafts, two pairs of clampingpieces and four workseats; wherein, the stand rods and the lifting rods are vertically and symmetrically arranged on the working planes around the absorbing pad, the locating shafts are arranged on the stand rods respectively, the clampingpieces are arranged on the lifting rods respectively; the two ends of the stand rods are lapped and connected on the left clampingpiece and the right clampingpiece and fastened by locating pieces arranged on the clampingpieces in a tightening way; two of the workseats which are arranged along opposite position are taken as a working unit, and each workseat is provided with an admittance slot, a fastening piece and a lifting handle which are arranged on a whole component. After a single crystal rod is cut, the device can receive the whole components disassembled from the clampingpieces by taking two workseats as one working unit, and the whole component is sequentially moved into a rinse bath and a deglue bath to be cleaned and treated by deglue operations and ensure that the silicon can not be damaged during the process, thus being beneficial to improving the finished product rate.
Description
[technical field]
The invention belongs to the silicon chip manufacture field, especially belong to a kind of multi-line cutting machine cutting silicon single crystal ingot after, to the silicon slice cleaning and positioning apparatus that cleans, comes unstuck, the burst stage uses.
[background technology]
In silicon chip processing, silicon single crystal ingot is fixed on the workpiece to be processed anchor clamps, moves to rinse bath and clean after the multi-line cutting machine cutting, then, changes to the groove that comes unstuck again and comes unstuck, promptly gets the silicon chip that separates state behind the burst.
Fixedly the structure of workpiece to be processed anchor clamps as shown in Figure 1: workpiece is that silicon single crystal ingot 6 (about being generally two) is bonded on the cutting cushion block 2 (being generally glassware), cutting cushion block 2 is bonded in again on the connector 5 of anchor clamps, makes silicon single crystal ingot 6, cutting cushion block 2 and connector 5 constitute a bonding single piece.Described connector 5 is parts of anchor clamps, Connection Block 7 splits of it and anchor clamps, and both contact-making surfaces are the plane, but front and back are tightened together both by fastening bolt 3 corresponding connecting hole on fastening screw keyhole 4 and connector 5 to having dovetail groove 71.After the cutting, unclamp fastening bolt 3 (having many) and can unload described single piece.At this moment, because silicon single crystal ingot 6, and part is cut cushion block 2 and has been cut, therefore, a little less than these two parts in the described single piece are actually and are highly brittle, the one, the silicon chip after being cut is extremely thin, and the 2nd, all silicon chips and the cutting cushion block 2 that is cut part only stick on the brace 5 with viscose glue, just will cause the silicon chip damage slightly because of carelessness.The problem that prior art exists is: after single piece is removed, move after can only relying on a locating shaft to pass positioning through hole 1 on the brace 5, and in whole cleaning, the process of coming unstuck, can only rely on and manually support connector 2 with finger, the operation of cleaning successively, come unstuck, although it is carefully careful, double cautious, but can cause damage often, time-consuming, yield rate is low to silicon chip.
[summary of the invention]
Be to solve the problems referred to above that prior art exists, the present invention aims to provide a kind of silicon slice cleaning and positioning apparatus, adopt this device after, can easily described single piece be moved to rinse bath successively, groove comes unstuck, the operation of cleaning, come unstuck does not damage silicon chip again, the yield rate height.
For achieving the above object, the present invention has adopted following technical scheme: the structural feature of this silicon slice cleaning and positioning apparatus is: have,
One working face is formed by stent support, and working face is provided with a horizontal crash roll;
One admits assembly, and by two support bars, two elevating levers, two locating shafts, two pairs of folders and four workseats constitute; Support bar and elevating lever symmetry shape, vertically on the working face that is located at crash roll four sides, two locating shafts are shelved on respectively on the support bar, two pairs of folders are shelved on the elevating lever respectively; Described support bar two ends are overlapped on the folder of the left and right sides, are fixed as force-loose by the keeper on the folder; Four workseats are an operation unit with per two, are in opposite directions to be provided with, and have described unitarily formed receiving channel on every workseat, securing member and carry handle.
Aforesaid silicon slice cleaning and positioning apparatus, its structural feature is: every elevating lever is by controlling organization control lifting, controlling organization is made up of the stretching bar and the extension spring thereof that are arranged on the support, the stretching boom end is vertical with elevating lever to offset, and stretching bar level is flexible corresponding with the oscilaltion of elevating lever.
Aforesaid silicon slice cleaning and positioning apparatus, its structural feature is: support is shelved on the chassis, and the last plane on chassis is a liquid tank, and the bottom is provided with scroll wheel.
Aforesaid silicon slice cleaning and positioning apparatus, its structural feature is: there is a controlled apocenosis passage in the liquid tank on described chassis to the external world.
Aforesaid silicon slice cleaning and positioning apparatus, its structural feature is: the both sides of every workseat are provided with vertical slot.
Beneficial effect: prior art yet there are no open report and use.The present invention is after single crystal rod is cut, with two workseats is an operation unit, it is the described single piece that unloads from work piece holder of receivability, then, by the handle of carrying on the workseat, easily single piece is moved to rinse bath successively, the groove that comes unstuck cleans, comes unstuck operation, and use device structure, with the bonding characteristics of viscose glue, guarantee that silicon chip is injury-free in whole cleaning, the process of coming unstuck in conjunction with single piece, yield rate is improved greatly.
[description of drawings]
Fig. 1 is the schematic perspective view of the clamp structure of fixation workpiece in the prior art, and this figure is mainly used in the described unitarily formed structure of explanation.
Fig. 2 is the structural representation of one embodiment of the invention.
Among Fig. 1: positioning through hole 1, cutting cushion block 2, fastening bolt 3, fastening screw keyhole 4, brace 5, workpiece 6, Connection Block 7, dovetail groove 71.
Among Fig. 2: workseat 10, carry down handle 101, on carry handle 102, fixing threaded hole 103, fixed head 104, horizontal slot 105, vertically slot 106.Folder 20, hinge 201, pivot pin 202, elevating lever 203, hinge jaw 204, locating shaft 205, support bar 206, suspension place 207.Chassis 30, spout hole 301, overflow pipe 302.Support 40.Stretching bar 50, spring 501, spring base 502, stretching boom end 503.Crash roll 60,
[specific embodiment]
Referring to Fig. 2.Chassis 30 is positioned at below, and its bottom surface is provided with four deflecting rollers, convenient moving.Overflow pipe 302 by valve control posts on the bottom surface.A storage tank is formed at the top on chassis 30, and the effect of storage tank mainly rises and connects liquid usefulness, and liquid communicates with the external world through spout hole 301, overflow pipe 302.
The ccontaining groove face on chassis 30 also is the supporting plane of support 40.Support 40 is actually the tower structure of a cabinet shape, and a horizontal working face is formed at top, tiling one deck sponge crash roll 50 on the working face.
In four sides of working face, vertically to described unitarily formed admittance assembly is set.Admit assembly by two support bars 206, two elevating levers 203, two locating shafts 205, two pairs of folders 20 constitute (left side do not draw elevating lever 203 and relevant parts thereof among the figure with four workseats 10, because it and right side are symmetrical structure, pretended omission).Support bar 206 be before and after about fixedly install, elevating lever 203 is to the symmetry, vertically to setting.Two locating shaft 205 middle parts are shelved on respectively on the fixed support bar 206, and two ends are overlapped on the left and right sides folder 20.Every pair of folder 20 is shelved on the elevating lever 203, and folder 20 is provided with the hinge 201 that plays the role of positioning, and hinge 201 is turning around hinge jaw 204, and behind locating shaft 205 ends overlap joints, the rotating part on the pivot pin 202 can be fixed as force-loose locating shaft 205.
Four workseats 10 are an operation unit with per two, are in opposite directions to be provided with, and have described unitarily formed receiving channel on every workseat 10, securing member and carry handle.
For sharpening understanding,, the use of this device is described below in conjunction with accompanying drawing:
When described single piece need unload from the anchor clamps of Fig. 1, at first two locating shafts 205 are through on the positioning through hole 1 of brace 5, unscrew fastening bolt 3 and unload single piece, rely on locating shaft 205 that single piece is moved on to then and admit on the assembly.
Moving on to the method for admitting on the assembly is: earlier locating shaft 205 is shelved on the support bar 206, and the two ends of locating shaft 205 are shelved on respectively on the folder 20 of both sides, by the 201 stationary positioned axles 205 of the hinge on the folder 20.At this moment, described single piece then is positioned in suspension place 207, and workpiece is positioned at lowest part.Then, two workseats 10 are fixed on the brace 5, that is: the workseat among Fig. 2 10 radially behind (center line in figure) Rotate 180 degree, are moved to described single piece, brace 5 both sides are inserted in the horizontal slot 105, fixed head 104 is fixed on the brace 5 with securing member.It is stand-by after two single piece fix.
When needs will be wherein single piece move on to rinse bath when cleaning, spur expansion link 50 earlier, make stretching boom end 503 break away from elevating levers 203, elevating lever 203 descends after losing the power that compresses of stretching boom end 503, then, unscrew the securing member on the pivot pin 202, unload lower clamping piece 20, thus, two hands hold respectively workseat 10 on carry handle 102, can extract described single piece out, and it is moved in the rinse bath clean.The effect of crash roll 50 is to prevent single piece middle part dispersing tablet, because of damaging silicon chip in bonding not firm whereabouts.
After the cleaning, again two hands hold respectively workseat 10 on carry handle 102, move in the groove that comes unstuck and come unstuck, at this moment, should allow down and carry handle 101 up.When coming unstuck, be the silicon chip left and right sides overturning after preventing to come unstuck, utilize the vertical slot 106 of workseat 10 both sides, insert two baffle plates, shelve several blend stops between the plate washer again, make the silicon chip after coming unstuck under the blend stop effect, keep vertical state.
After coming unstuck, both hands are held the following handle 101 of carrying of workseat 10 respectively, take out workseat 10 and get final product.
When needs move on to rinse bath when cleaning with another root single piece, elevating lever 203, the folder 20 dismantled are resetted, press said procedure again and operate, finish cleaning, the operation of coming unstuck.
Claims (5)
1, a kind of silicon slice cleaning and positioning apparatus, it is characterized in that: it has:
One working face is formed by support (40) support, and working face is provided with a horizontal crash roll (60);
One admits assembly, and by two support bars (206), two elevating levers (203), two locating shafts (205), two pairs of folders (20) and four workseats (10) constitute; Support bar (206) and elevating lever (203) symmetry shape, vertically on the working face that is located at crash roll (60) four sides, two locating shafts (205) are shelved on respectively on the support bar (206), two pairs of folders (20) are shelved on respectively on the elevating lever (203); Described support bar (206) two ends are overlapped on the left and right sides folder (20), are fixed as force-loose by the keeper on the folder (20); Four workseats (10) are an operation unit with per two, are in opposite directions to be provided with, and have described unitarily formed receiving channel on every workseat (10), securing member and carry handle.
2, silicon slice cleaning and positioning apparatus as claimed in claim 1, it is characterized in that: every elevating lever (203) is by controlling organization control lifting, controlling organization is made up of the stretching bar (203) and the extension spring (501) thereof that are arranged on the support (40), stretching boom end (503) and vertical the offseting of elevating lever (203).
3, silicon slice cleaning and positioning apparatus as claimed in claim 1 or 2 is characterized in that: support (40) is shelved on the chassis (30), and the last plane of chassis (30) is a liquid tank, and the bottom is provided with scroll wheel.
4, silicon slice cleaning and positioning apparatus as claimed in claim 3 is characterized in that: there is a controlled apocenosis passage in the liquid tank of described chassis (30) to the external world.
5, silicon slice cleaning and positioning apparatus as claimed in claim 1 is characterized in that: the both sides of every workseat (10) are provided with vertical slot (106).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101215787A CN101386156B (en) | 2008-10-14 | 2008-10-14 | Silicon slice cleaning and positioning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101215787A CN101386156B (en) | 2008-10-14 | 2008-10-14 | Silicon slice cleaning and positioning apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101386156A true CN101386156A (en) | 2009-03-18 |
| CN101386156B CN101386156B (en) | 2010-06-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101215787A Expired - Fee Related CN101386156B (en) | 2008-10-14 | 2008-10-14 | Silicon slice cleaning and positioning apparatus |
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| Country | Link |
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| CN (1) | CN101386156B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102172904A (en) * | 2011-03-18 | 2011-09-07 | 河南大学 | Single-sided corrosion/cleaning fixture |
| CN102275234A (en) * | 2011-06-29 | 2011-12-14 | 浙江光益硅业科技有限公司 | Automatic degumming method and device for multi-wire cutting of monocrystal/ polycrystalline silicon wafer |
| CN102366753A (en) * | 2011-10-10 | 2012-03-07 | 江苏港星方能超声洗净科技有限公司 | Clamping device for cleaning organosilicon optical conductors |
| CN104257332A (en) * | 2014-08-28 | 2015-01-07 | 金丹 | Traveling support for cleaning of article surfaces |
| CN105092904A (en) * | 2014-05-04 | 2015-11-25 | 无锡华润上华半导体有限公司 | MEMS silicon wafer fixing device, fixing method and testing method |
| CN109894422A (en) * | 2019-04-12 | 2019-06-18 | 晶科能源有限公司 | A kind of cleaning drying device and method of multi-wire saw thin slice |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US4494433A (en) * | 1982-01-25 | 1985-01-22 | Gerber Garment Technology, Inc. | Apparatus for working on sheet material and having movable vacuum chamber |
| ES2010344A6 (en) * | 1987-09-07 | 1989-11-01 | Young Peter David | Article handling apparatus. |
| JP3850951B2 (en) * | 1997-05-15 | 2006-11-29 | 東京エレクトロン株式会社 | Substrate transport apparatus and substrate transport method |
| CN1951582A (en) * | 2006-11-15 | 2007-04-25 | 周建茗 | Thrust bearing hoisting clamp of bearing cleaning machine |
| CN1986086A (en) * | 2006-12-22 | 2007-06-27 | 上海集成电路研发中心有限公司 | Device and method for cleaning semiconductor silicon chip |
| CN201264318Y (en) * | 2008-10-14 | 2009-07-01 | 浙江华友电子有限公司 | Silicon chip locating device |
-
2008
- 2008-10-14 CN CN2008101215787A patent/CN101386156B/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102172904A (en) * | 2011-03-18 | 2011-09-07 | 河南大学 | Single-sided corrosion/cleaning fixture |
| CN102172904B (en) * | 2011-03-18 | 2013-04-03 | 河南大学 | Single-sided corrosion/cleaning fixture |
| CN102275234A (en) * | 2011-06-29 | 2011-12-14 | 浙江光益硅业科技有限公司 | Automatic degumming method and device for multi-wire cutting of monocrystal/ polycrystalline silicon wafer |
| CN102275234B (en) * | 2011-06-29 | 2014-03-12 | 沈利军 | Automatic degumming method and device for multi-wire cutting of monocrystal/ polycrystalline silicon wafer |
| CN102366753A (en) * | 2011-10-10 | 2012-03-07 | 江苏港星方能超声洗净科技有限公司 | Clamping device for cleaning organosilicon optical conductors |
| CN102366753B (en) * | 2011-10-10 | 2012-11-14 | 江苏港星方能超声洗净科技有限公司 | Clamping device for cleaning organosilicon optical conductors |
| CN105092904A (en) * | 2014-05-04 | 2015-11-25 | 无锡华润上华半导体有限公司 | MEMS silicon wafer fixing device, fixing method and testing method |
| CN105092904B (en) * | 2014-05-04 | 2018-04-10 | 无锡华润上华科技有限公司 | MEMS fixing device for silicon piece, fixing means and method of testing |
| CN104257332A (en) * | 2014-08-28 | 2015-01-07 | 金丹 | Traveling support for cleaning of article surfaces |
| CN109894422A (en) * | 2019-04-12 | 2019-06-18 | 晶科能源有限公司 | A kind of cleaning drying device and method of multi-wire saw thin slice |
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| Publication number | Publication date |
|---|---|
| CN101386156B (en) | 2010-06-02 |
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Granted publication date: 20100602 Termination date: 20171014 |
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| CF01 | Termination of patent right due to non-payment of annual fee |