CN206480600U - Silicon chip auxiliary cleaner - Google Patents
Silicon chip auxiliary cleaner Download PDFInfo
- Publication number
- CN206480600U CN206480600U CN201620585948.2U CN201620585948U CN206480600U CN 206480600 U CN206480600 U CN 206480600U CN 201620585948 U CN201620585948 U CN 201620585948U CN 206480600 U CN206480600 U CN 206480600U
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- pressure pin
- base
- montant
- decorated basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model is related to a kind of silicon chip auxiliary cleaner, it includes pressure pin, two linking arms and two handles below base, base, the base is the rectangular frame being made up of cross bar and montant, the cross bar top is provided with detent, two holes are arranged below in the montant, pressure pin is connected to the hole site above base montant by montant below the base, pressure pin is the framework of fixing groove position composition below the base, described two linking arms are located at montant top vertically respectively, and described two handles are laterally located at the outside of two linking arms.The utility model not only can avoid rubber gloves from directly being contacted with decoction, operating personnel is not contacted directly with decoction, it is ensured that the personal safety of operating personnel；And bottom pressure pin in the gaily decorated basket by silicon chip due to that can eject certain distance upwards, so that silicon chip is separated in cleaning process with gaily decorated basket groove position, whole silicon chip can contact no dead angle with chemical liquids completely, cleaning performance can than silicon chip inside the gaily decorated basket it is more excellent.
Description
Technical field
The utility model is related to a kind of cleaning device, specifically silicon chip auxiliary cleaner.
Background technology
Currently used for the silicon polished mostly using crystal pulling, section, chamfering, burn into polishing, cleaning etc. of IC manufacturing
Technological process, silicon chip surface after polishing adheres to a large amount of particles, cleans as the final step of whole technique, thus cleaning performance
Quality will be reacted directly into client that.
Current RCA cleanings widely used in silicon chip manufacturing process, the cleaning method mainly use SC-1,
The mixed chemical liquid such as DHF, SC-2, silicon chip is fixed in cleaning fluid by the gaily decorated basket, will by the effect of heating chemical liquid and million sound
Particle is removed from silicon chip surface.
The cleaning device structure that industry is used at present such as patent CN201320067211.8, due to weight in cleaning process
Power so that the silicon chip edge of setting is in close contact the neck of the gaily decorated basket.Cause during Wafer Cleaning, chemical liquids can not connect completely
The silicon chip edge part being in contact with neck is contacted, then the more clean of wafer center region cleaning often occurs and edge has
Dirty quality problems, this causes very big puzzlement to cleaning, influences product yield.
Utility model content
The utility model is intended to overcome the defect of prior art there is provided a kind of new silicon chip cleaning device, and it can be effective
Solution Wafer Cleaning not thoroughly, exist contamination dead angle, repeatedly do over again cleaning the problem of, lifted product yield.
In order to solve the above-mentioned technical problem, the utility model provides a kind of silicon chip cleaning device, mainly including rectangular base,
U-shaped silicon chip pressure pin, two linking arms and two hand-held devices；The U-shaped silicon chip pressure pin is fixed on the bottom of rectangular base short side,
The linking arm is located at rectangular base short side top vertically respectively, and described two hand-held devices are respectively laterally located at two linking arms
Outside.
Further, the silicon chip pressure pin is provided with two altogether, and spacing is 40~60mm.
Further, the silicon chip pressure pin apart from rectangular base height 120mm, or silicon chip hold up height 30MM.
Further, the silicon chip pressure pin is provided only with one, and is fixed on the underface at rectangular base short side midpoint.
Further, the silicon chip pressure pin apart from rectangular base height 120mm, or silicon chip hold up height 30MM.
Further, the silicon chip pressure pin is provided with silicon chip fixed groove.
Further, the silicon chip fixed groove is in del, inverted trapezoidal, semicircle or rectangle, preferably inverted trapezoidal.
Further, silicon chip pressure pin is triangular in shape, trapezoidal, semicircle or rectangle, preferably triangle.
Further, the silicon chip pressure pin, rectangular base, linking arm and hand-held device are made of polypropylene.
The beneficial effects of the utility model are：Silicon chip is put into after chemical liquids by the present apparatus, the bottom in cleaning process
Pressure pin can carry out silicon chip jack-up, away from the neck of the gaily decorated basket, the positive exact separation that will be with the gaily decorated basket of such silicon chip,
The effect same with centre can be cleaned in the presence of million sound and chemical liquids, Wafer Cleaning field is solved and often goes out at present
Existing cleaning is not thorough, exists and stains dead angle, multiple the problem of cleaning of doing over again.
Brief description of the drawings
The utility model is described in further detail with embodiment below in conjunction with the accompanying drawings：
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of Fig. 1 side-looking directions.
Fig. 3 is the structural representation of Fig. 1 overlook directions.
Embodiment
The gaily decorated basket that will be equipped with silicon chip is put into base vertically, and the gaily decorated basket is fixed by detent, while bottom tray can be by
Silicon chip is held up away from gaily decorated basket certain position, and the gaily decorated basket is placed in chemical liquids by the utility model, chemical liquids pair are used
Silicon chip is cleaned；Before cleaning process, only need people's both hands to hold hand-held device, smoothly the gaily decorated basket is put into chemical liquid bath
Cleaning, hand-held device can be placed on cleaning machine board panel in cleaning process, and hand-held device is exposed in air, is not soaked
Steep in chemical cleaning solution, it is ensured that whole cleaning device is not submerged by chemical liquids, reduces people and chemical liquids contact probability, simultaneously
Silicon chip is in cleaning process, and silicon chip only has bottom margin position to contact cleaning device, and other positions are separated with cleaning device, whole
Individual front is to completely attach to chemical liquids, and it is more clean that surface can be cleaned in the presence of million sound, in transfer process, fixed
Position groove can fix the gaily decorated basket, not allow it to rock, and reduce silicon chip surface caused secondary due to rocking in transfer process
Contamination problems；After cleaning terminates, only it need to catch hand-held device that the gaily decorated basket is removed into rinse bath, then by the gaily decorated basket from the utility model
It is directly vertical to take out.
Claims (4)
1. a kind of silicon chip auxiliary cleaner, it is characterised in that：Including rectangular base, U-shaped silicon chip pressure pin, two linking arms and two
Individual hand-held device；The U-shaped silicon chip pressure pin is fixed on the bottom of rectangular base short side, and the linking arm is located at rectangle vertically respectively
Base short side top, described two hand-held devices are respectively laterally located at the outside of two linking arms；The U-shaped silicon chip pressure pin is set altogether
There are two, and spacing is 40-60mm；The silicon chip pressure pin is provided only with one, and be fixed on rectangular base short side midpoint just under
Side；The silicon chip pressure pin is provided with silicon chip fixed groove.
2. silicon chip auxiliary cleaner according to claim 1, it is characterised in that the silicon chip pressure pin is apart from rectangular base
Height 120mm.
3. silicon chip auxiliary cleaner according to claim 1, it is characterised in that the silicon chip fixed groove should be in three
Angular, inverted trapezoidal, semicircle or rectangle.
4. silicon chip auxiliary cleaner according to claim 1, it is characterised in that the silicon chip pressure pin, rectangular base, company
Arm and hand-held device is connect to be made of polypropylene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620585948.2U CN206480600U (en) | 2016-06-17 | 2016-06-17 | Silicon chip auxiliary cleaner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620585948.2U CN206480600U (en) | 2016-06-17 | 2016-06-17 | Silicon chip auxiliary cleaner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206480600U true CN206480600U (en) | 2017-09-08 |
Family
ID=59756339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620585948.2U Active CN206480600U (en) | 2016-06-17 | 2016-06-17 | Silicon chip auxiliary cleaner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206480600U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108372963A (en) * | 2018-02-26 | 2018-08-07 | 上海提牛机电设备有限公司 | A kind of silicon chip and film magazine releasing mechanism |
| CN114273317A (en) * | 2021-12-06 | 2022-04-05 | 扬州思普尔科技有限公司 | High-cleanliness high-capacity semiconductor wafer wet cleaning device |
| CN117160984A (en) * | 2023-09-08 | 2023-12-05 | 无锡中环应用材料有限公司 | Monocrystalline silicon wafer washing degumming system and degumming process thereof |
-
2016
- 2016-06-17 CN CN201620585948.2U patent/CN206480600U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108372963A (en) * | 2018-02-26 | 2018-08-07 | 上海提牛机电设备有限公司 | A kind of silicon chip and film magazine releasing mechanism |
| CN114273317A (en) * | 2021-12-06 | 2022-04-05 | 扬州思普尔科技有限公司 | High-cleanliness high-capacity semiconductor wafer wet cleaning device |
| CN117160984A (en) * | 2023-09-08 | 2023-12-05 | 无锡中环应用材料有限公司 | Monocrystalline silicon wafer washing degumming system and degumming process thereof |
| CN117160984B (en) * | 2023-09-08 | 2024-04-12 | 无锡中环应用材料有限公司 | Monocrystalline silicon wafer washing system of coming unstuck |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201604 No. 88, Yangshi Road, Shihudang Town, Songjiang District, Shanghai Patentee after: Shanghai Chaosi Semiconductor Co.,Ltd. Address before: 201604 No. 88, Yangshi Road, Shihudang Town, Songjiang District, Shanghai Patentee before: SHANGHAI ADVANCED SILICON TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |