CN203999908U - Polycrystalline silicon ingot casting thermal field structure - Google Patents

Polycrystalline silicon ingot casting thermal field structure Download PDF

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Publication number
CN203999908U
CN203999908U CN201420158038.7U CN201420158038U CN203999908U CN 203999908 U CN203999908 U CN 203999908U CN 201420158038 U CN201420158038 U CN 201420158038U CN 203999908 U CN203999908 U CN 203999908U
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China
Prior art keywords
warming plate
heat
open end
furnace body
crucible
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Expired - Fee Related
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CN201420158038.7U
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Chinese (zh)
Inventor
何亮
李松林
胡动力
周成
雷琦
陈红荣
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LDK Solar Co Ltd
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LDK Solar Co Ltd
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Abstract

The utility model discloses a kind of polycrystalline silicon ingot casting thermal field structure, it comprises: body of heater, comprises host cavity; Heat-insulation cage, be contained in described host cavity, comprise top warming plate, end warming plate and side warming plate, described side warming plate comprises the upper open end and the lower open end that are oppositely arranged, described top warming plate is contained in described upper open end, and being fixedly connected with described body of heater top, the relatively described top of the warming plate warming plate setting of the described end is also fixedly connected with described body of heater bottom; Graphite heat conducting block, is contained in described heat-insulation cage, is fixedly connected with warming plate of the described end, and described graphite heat conducting block periphery is fixedly connected with a heat insulating strip, and described heat insulating strip is for being divided into described heat-insulation cage medial area in high temperature chamber and heat radiation chamber; Well heater, is contained in described heat-insulation cage, is positioned at described high temperature chamber, and is arranged at described crucible outside.

Description

Polycrystalline silicon ingot casting thermal field structure
Technical field
The utility model relates to a kind of photovoltaic industry field of crystal growth, relates in particular to a kind of polycrystalline silicon ingot casting thermal field structure.
Background technology
Common polycrystalline silicon ingot casting thermal field structure, in crystal growing process, is the interface of nick type in the starting stage, along with the continuous increase of crystal height, solid-liquid interface changes, and becomes convex interface by nick type interface, crystal height more up increases, and interface is more and more protruding.This interface is unfavorable for crystal growth, easily causes dislocation breeding growth in process of growth, and it is large that crystal dislocation density becomes.
Utility model content
The purpose of this utility model is to provide a kind of polycrystalline silicon ingot casting thermal field structure that improves polycrystalline efficiency of conversion.
In order to solve the problems of the technologies described above, the utility model provides a kind of polycrystalline silicon ingot casting thermal field structure, its
Comprise:
Body of heater, comprises upper furnace body and lower furnace body that opening is oppositely arranged, between described upper furnace body and lower furnace body, forms host cavity;
Heat-insulation cage, be contained in described host cavity, described heat-insulation cage comprises top warming plate, end warming plate and side warming plate, described side warming plate comprises the upper open end and the lower open end that are oppositely arranged, the top of described upper furnace body has been slidably installed with slide bar, described slide bar one end is fixedly connected with described upper open end and the top of described upper furnace body is fixed in the relative upper open end of warming plate position, described top, the bottom of described lower furnace body is fixed in the relative upper open end of warming plate position, the described end, in the time that described slide bar slides, described side warming plate vertically slides up and down on relatively described upper furnace body top, to realize upper open end described in the warming plate capping of described top, lower open end described in the warming plate capping of the described end,
Graphite heat conducting block, be contained in described heat-insulation cage and be fixedly connected with warming plate of the described end, described graphite heat conducting block periphery is fixedly connected with heat insulating strip, described heat insulating strip is for being divided into described heat-insulation cage medial area in high temperature chamber and heat radiation chamber, described high temperature chamber is between described graphite heat conducting block and described upper open end, and described heat radiation chamber is between described graphite heat conducting block and described lower open end;
Well heater, is contained in described heat-insulation cage, is fixedly connected with described top warming plate, is positioned at described high temperature chamber, and is arranged at described crucible outside.
Wherein, described lower open end inner side-wall vertically extends to described upper open end, and in the time needing to dispel the heat in described heat-insulation cage, warming plate of the described end is away from described heat radiation chamber, and inner side, described heat radiation chamber is from described lower open end distribute heat.
Wherein, described graphite heat conducting block periphery extends a card to described heat-insulation cage inwall, and described heat insulating strip arranges slot near described graphite heat conducting block one end, and described card inserts in described slot.
Wherein, described heat insulating strip material is charcoal felt.
Wherein, on described graphite heat conducting block, place crucible, described crucible is used for holding polycrystalline silicon raw material, and described crucible material is quartz.
Wherein, described upper furnace body top is provided with davit, described davit vertically extends, described davit is through described top warming plate, and be fixedly connected with described top warming plate, and described well heater is fixedly connected on described davit through warming plate one end, described top, and described well heater arranges electrode near described upper furnace body one side, described electrode extends to described upper furnace body outside through described top warming plate, and described electrode is used for being electrically connected external power supply.
Wherein, in described davit, ventilating pit is set, described ventilating pit extends in described crucible from described body of heater outside along described davit length direction.
Wherein, described well heater comprises hot-plate and heat block, and described hot-plate is fixed on described davit, and the setting of relatively described crucible opening end, and described heat block is fixed on described hot-plate periphery, between all sides of described crucible and described heat-insulation cage inwall.
Wherein, described crucible opening end is provided with cover plate, crucible opening end described in described cover plate capping, and described cover plate is fixedly connected on described davit away from described crucible one side.
Wherein, be fixedly connected with two pillar stiffeners between described lower furnace body bottom and described graphite heat conducting block, described two pillar stiffeners are through warming plate of the described end.
The polycrystalline silicon ingot casting thermal field structure that the utility model provides is fixedly connected with described graphite heat conducting block by described heat insulating strip, be surrounded on described graphite heat conducting block periphery, described heat insulating strip is for being divided into described heat-insulation cage medial area in high temperature chamber and heat radiation chamber, make to concentrate and be heated in described heat-insulation cage, and can Homogeneouslly-radiating.Realized and obtained more flat film structure of liquid-solid interface, made silicon wafer dislocation desity low, polycrystalline efficiency of conversion is higher.
Brief description of the drawings
In order to be illustrated more clearly in the technical solution of the utility model, to the accompanying drawing of required use in embodiment be briefly described below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the schematic diagram of polycrystalline silicon ingot casting thermal field structure.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described.
Refer to Fig. 1, a kind of polycrystalline silicon ingot casting structure 100 that the utility model embodiment provides, described polycrystalline silicon ingot casting structure 100 comprises body of heater 10, heat-insulation cage 20, graphite heat conducting block 30, crucible 40 and well heater 50.Described body of heater 10 can be square box body, can be spherical box body, can also be cylindrical box body, and in present embodiment, described body of heater 10 is cylindrical box body.Described heat-insulation cage 20, graphite heat conducting block 30, crucible 40 and well heater 50 are all contained in described body of heater 10, described graphite heat conducting block 30 is contained in described heat-insulation cage 20, described crucible 40 is positioned on described graphite heat conducting block 30, and described well heater 50 is contained in described heat-insulation cage 20 and described crucible 40 is heated.Described heat-insulation cage medial area is divided into high temperature chamber and heat radiation chamber by heat insulating strip on described graphite heat conducting block 30, so that in the time that described polycrystalline silicon raw material carries out crystal block moulding, realize and need to concentrate and be heated at holding stage, need to concentrate heat radiation in the long brilliant stage, be more conducive to described polycrystalline silicon raw material and be shaped to crystal block.
Described body of heater 10 comprises the upper furnace body 11 and the lower furnace body 12 that are oppositely arranged.Between described upper furnace body 11 and described lower furnace body 12, form host cavity 10a.In described host cavity 10a, accommodate described heat-insulation cage 20.Concrete, described lower furnace body 12 is barrel-shaped, and described lower furnace body 12 is fixed on (not shown) on anchor.Described lower furnace body 12 opening ends vertically upward.In present embodiment, described lower furnace body 12 is fixedly connected with two pillar stiffener 12a away from the bottom, inner side of described upper furnace body 11.Described two pillar stiffener 12a vertically extend, and described two pillar stiffener 12a pass described heat-insulation cage 20, and support described graphite heat conducting block 30.Certainly in other embodiments, can also be that described lower furnace body bottom arranges a pillar stiffener and supports described graphite heat conducting block.Described upper furnace body 11 is barrel-shaped, described upper furnace body 11 opening ends are towards described lower furnace body 12, described upper furnace body 11 opening ends are fixedly connected with described body of heater 12 opening ends, in this enforcement side, described upper furnace body 11 and body of heater 12 opening ends arrange corresponding screw hole, and described upper furnace body 11 is connected with lower furnace body 12 screws, certainly, in other embodiments, upper furnace body and lower furnace body can also be engagement connections.Described upper furnace body 11 arranges a davit 11a and two slide bar 11b away from the top, inner side of described lower furnace body 12.Concrete, described davit 11a vertically extends, and described davit 11a is fixed on one end described upper furnace body 11 tops, and the other end 11a passes described heat-insulation cage 20, and is fixedly connected with described heat-insulation cage 20.In described davit 11a, ventilating pit 110a is set, the steam of the interior crucible 40 of described heat-insulation cage 20 is discharged outside body of heater 10.Described ventilating pit 110a extends in described crucible 40 from described body of heater 10 outsides along described davit 11a length direction.Described two slide bar 11b vertically extend, and described two slide bar 11b one end are fixedly connected with described heat-insulation cage 20, and the other end slides and is arranged at described upper furnace body 11 tops.
Described heat-insulation cage 20 comprises top warming plate 21, end warming plate 22 and side warming plate 23.Described side warming plate 23 is fixedly connected with described slide bar 11b, and described top warming plate 21 is fixedly connected with described davit 11a, and warming plate of the described end 22 is fixedly connected with described pillar stiffener 12a.Concrete, described heat-insulation cage 20 box body that is square, certainly, in other embodiments, described heat-insulation cage can also be cylindrical box body.In the present embodiment, described side warming plate 23 is tubular, and described side warming plate 23 inner sides accommodate described graphite heat conducting block 30 and described crucible 40, and described side warming plate 23 comprises the upper open end 231 and the end opening end 232 that are oppositely arranged.Described upper open end 231 end faces weld described two slide bar 11b away from described upper furnace body 11 one end, make described two slide bar 11b can drive the relatively described upper furnace body of described side warming plate 23 11 tops vertically to slide.Described lower open end 232 inner side-walls vertically extend to described upper open end 231 places, in the time that described heat-insulation cage 20 need to dispel the heat to described crucible 40, described heat-insulation cage 20 inner side heats distribute from described lower open end 232, because the interior bore of described lower open end 232 does not have ladder setting, so the lower open end 232 on described heat-insulation cage 20 is strengthened the heat dissipation region of described crucible 40.
Described top warming plate 21 is square plate, and described top warming plate 21 is arranged in described upper open end 231, and in the time that described heat-insulation cage 20 need to be incubated described crucible 40, upper open end 231 described in warming plate 21 cappings of described top; In the time that described heat-insulation cage 20 need to dispel the heat, described top warming plate 21 is contained in described heat-insulation cage 20.Concrete, described davit 11a passes described top warming plate 21, and is fixedly connected with described top warming plate 21, described top warming plate 21 and described upper open end 231 is oppositely arranged, in order to upper open end described in capping 232.
Warming plate of the described end 22 is square plate.Warming plate of the described end 22 is fixedly connected with described lower furnace body 12 bottoms, and described pillar stiffener 12a is through warming plate of the described end 22.When described heat-insulation cage 20 is interior need to be incubated time, lower open end 232 described in warming plate 22 cappings of the described end; When described heat-insulation cage 20 is interior need to dispel the heat time, warming plate of the described end 22 is positioned at described heat-insulation cage 20 outsides, and away from described lower open end 232.In present embodiment, warming plate 22 peripheries of the described end arrange step, described step matches with end face and the medial surface of described lower open end 232, certainly, in other embodiments, can also be that warming plate of the described end is contained in described lower open end, warming plate periphery of the described end and described lower open end medial surface running fit.When described heat-insulation cage 20 is interior need to dispel the heat time, described side warming plate 23 vertically rises, and warming plate of the described end 22 is positioned at described lower open end 232 outsides, and the interior heat of described side warming plate 23 sheds from described lower open end 232.Thereby make crucible 40 center heat radiations and edge heat radiation in described heat-insulation cage 20 reach even.
Described graphite heat conducting block 30 is contained in described heat-insulation cage 20, and described crucible 40 is positioned over described graphite heat conducting block 30 away from warming plate 22 1 sides of the described end, facilitates described crucible 40 in the time that needs dispel the heat, and better conducts heat.Concrete, described graphite heat conducting block 30 is rectangular block, described graphite heat conducting block 30 cross sections are horizontally disposed with.Described graphite heat conducting block 30 is fixedly connected with described two pillar stiffener 12a near warming plate 22 1 sides of the described end, between described graphite heat conducting block 30 and described lower furnace body 12 bottoms, is fixedly connected with described two pillar stiffener 12a.Described graphite heat conducting block 30 peripheries arrange step, described step is fixedly connected with a heat insulating strip 31, described heat insulating strip 31, away from described graphite heat conducting block 30 one end and described side warming plate 23 inner side running fit, makes described heat insulating strip 31 that described heat-insulation cage 20 medial areas are divided into high temperature chamber 31a and heat radiation chamber 31b.Described high temperature chamber 31a is between described graphite heat conducting block 30 and described upper open end 231, and described heat radiation chamber 31b is between described graphite heat conducting block 30 and described lower open end 232.In the time that described polycrystalline silicon raw material carries out crystal block moulding, holding stage need to be concentrated and be heated, be to be incubated interior needs of described heat-insulation cage 20, upper open end 231 described in described top board warming plate 21 cappings, make described high temperature chamber 31a form enclosed space, can concentrate heating to described crucible 40, make described polycrystalline silicon raw material thermally equivalent fusing.And need to concentrate heat radiation in the long brilliant stage time, the interior needs of described heat-insulation cage 20 are concentrated heat radiation, warming plate of the described end 22 is away from described heat radiation chamber 31b, and heat inside described heat radiation chamber 31b is distributed from described lower open end 232.
In present embodiment, described heat insulating strip 31 is rectangular ring plate.Described heat insulating strip 31 arranges slot near described graphite heat conducting block 30 one end, in described slot, is inserted with card, and described card screw is connected on the step of described graphite heat conducting block 30 peripheries.Certainly, in other embodiments, can also be that described graphite heat conducting block periphery arranges slot, described heat insulating strip inserts in described slot.In present embodiment, described heat insulating strip material is charcoal felt, and certainly, in other embodiments, described heat insulating strip material can also be polymeric amide.
Described crucible 40 is positioned on described graphite heat conducting block 30, is contained in described high temperature chamber 31a.In present embodiment, described crucible 40 materials are quartzy material, and certainly, in other embodiments, described crucible material can also be silicon carbide material.In described crucible 40, for placing polycrystalline silicon raw material, in the time that described crucible 40 is heated, described polycrystalline silicon raw material melts, and when to slow 40 heat radiation of described crucible, described polysilicon solution slowly forms crystal block, and solid-liquid interface rising, finally forms silico briquette.In present embodiment, for described crucible 40 is heated evenly, the described crucible 40 outsides graphite linings that is sticked, makes the surperficial received heat of described crucible 40 consistent.Certainly in other embodiments, can also be at described crucible arranged outside plumbago crucible.Described crucible 40 opening ends arrange a cover plate 40a, prevent that impurity from entering described crucible 40.Simultaneously, described lid 40a passes warming plate 21 one end, described top away from davit 11a described in described crucible 40 1 side bonds, ventilating pit 110a in described davit 11a is extended in described crucible 40, and in the time of the interior heating of crucible 40, steam drains into body of heater 10 outsides from described ventilating pit.
Described well heater 50 is contained in described heat-insulation cage 20, is positioned at and is fixedly connected with described top warming plate 21, is positioned at described high temperature chamber 31a simultaneously, makes described high temperature chamber 31a continue to keep high temperature.Concrete, described well heater 50 comprises hot-plate 51 and heat block 52.Described hot-plate 52 is sheathed on described davit 11a through warming plate 21 one end, described top.The relatively described crucible 40 opening end settings of described hot-plate 52.Described heat block 52 is fixed on described hot-plate periphery, and is positioned at 40 weeks sides of described crucible.Described hot-plate 51 is to described crucible 40 opening end heating, and described heat block 52 is to the side heating in 40 weeks of described crucible.Described well heater 50 arranges electrode 53 near described upper furnace body 11 1 sides, and described electrode 53 is through described top warming plate 21 and extend to described upper furnace body 11 outsides, and described electrode 53 is for being electrically connected external power supply.
The polycrystalline silicon ingot casting thermal field structure that the utility model provides is fixedly connected with described graphite heat conducting block by described heat insulating strip, be surrounded on described graphite heat conducting block periphery, described heat insulating strip is for being divided into described heat-insulation cage medial area in high temperature chamber and heat radiation chamber, described crucible is concentrated and be heated, and can Homogeneouslly-radiating.Realized and obtained more flat film structure of liquid-solid interface, made silicon wafer dislocation desity low, polycrystalline efficiency of conversion is higher.
The above is preferred implementation of the present utility model; it should be pointed out that for those skilled in the art, do not departing under the prerequisite of the utility model principle; can also make some improvements and modifications, these improvements and modifications are also considered as protection domain of the present utility model.

Claims (10)

1. a polycrystalline silicon ingot casting thermal field structure, is characterized in that, it comprises:
Body of heater, comprises upper furnace body and lower furnace body that opening is oppositely arranged, between described upper furnace body and lower furnace body, forms host cavity;
Heat-insulation cage, be contained in described host cavity, described heat-insulation cage comprises top warming plate, end warming plate and side warming plate, described side warming plate comprises the upper open end and the lower open end that are oppositely arranged, the top of described upper furnace body has been slidably installed with slide bar, described slide bar one end is fixedly connected with described upper open end and the top of described upper furnace body is fixed in the relative upper open end of warming plate position, described top, the bottom of described lower furnace body is fixed in the relative upper open end of warming plate position, the described end, in the time that described slide bar slides, described side warming plate vertically slides up and down on relatively described upper furnace body top, to realize upper open end described in the warming plate capping of described top, lower open end described in the warming plate capping of the described end,
Graphite heat conducting block, be contained in described heat-insulation cage and be fixedly connected with warming plate of the described end, described graphite heat conducting block periphery is fixedly connected with heat insulating strip, described heat insulating strip is away from running fit inside described graphite heat conducting block one end and described side warming plate, described heat insulating strip is for being divided into described heat-insulation cage medial area in high temperature chamber and heat radiation chamber, described high temperature chamber is between described graphite heat conducting block and described upper open end, and described heat radiation chamber is between described graphite heat conducting block and described lower open end;
Well heater, is contained in described heat-insulation cage, is fixedly connected with described top warming plate, is positioned at described high temperature chamber, and is arranged at crucible outside.
2. polycrystalline silicon ingot casting thermal field structure according to claim 1, it is characterized in that, described lower open end inner side-wall vertically extends to described upper open end, in the time needing to dispel the heat in described heat-insulation cage, warming plate of the described end is away from described heat radiation chamber, and inner side, described heat radiation chamber is from described lower open end distribute heat.
3. polycrystalline silicon ingot casting thermal field structure according to claim 1, it is characterized in that, described graphite heat conducting block periphery extends a card to described heat-insulation cage inwall, and described heat insulating strip arranges slot near described graphite heat conducting block one end, and described card inserts in described slot.
4. polycrystalline silicon ingot casting thermal field structure according to claim 1, is characterized in that, described heat insulating strip material is charcoal felt.
5. polycrystalline silicon ingot casting thermal field structure according to claim 1, is characterized in that, on described graphite heat conducting block, places crucible, and described crucible is used for holding polycrystalline silicon raw material, and described crucible material is quartz.
6. polycrystalline silicon ingot casting thermal field structure according to claim 5, it is characterized in that, described upper furnace body top is provided with davit, described davit vertically extends, described davit is through described top warming plate, and be fixedly connected with described top warming plate, described well heater is fixedly connected on described davit through warming plate one end, described top, described well heater arranges electrode near described upper furnace body one side, described electrode extends to described upper furnace body outside through described top warming plate, and described electrode is used for being electrically connected external power supply.
7. polycrystalline silicon ingot casting thermal field structure according to claim 6, is characterized in that, in described davit, ventilating pit is set, and described ventilating pit extends in described crucible from described body of heater outside along described davit length direction.
8. polycrystalline silicon ingot casting thermal field structure according to claim 7, it is characterized in that, described well heater comprises hot-plate and heat block, described hot-plate is fixed on described davit, and relatively described crucible opening end arranges, described heat block is fixed on described hot-plate periphery, between all sides of described crucible and described heat-insulation cage inwall.
9. polycrystalline silicon ingot casting thermal field structure according to claim 8, is characterized in that, described crucible opening end is provided with cover plate, crucible opening end described in described cover plate capping, and described cover plate is fixedly connected on described davit away from described crucible one side.
10. polycrystalline silicon ingot casting thermal field structure according to claim 1, is characterized in that, is fixedly connected with two pillar stiffeners between described lower furnace body bottom and described graphite heat conducting block, and described two pillar stiffeners are through warming plate of the described end.
CN201420158038.7U 2014-04-02 2014-04-02 Polycrystalline silicon ingot casting thermal field structure Expired - Fee Related CN203999908U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105019021A (en) * 2015-07-20 2015-11-04 无锡荣能半导体材料有限公司 Polysilicon cast ingot thermal field structure
CN105926036A (en) * 2016-05-24 2016-09-07 山东省科学院能源研究所 Polycrystalline silicon crystal growing furnace growth device and heat source adjusting method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105019021A (en) * 2015-07-20 2015-11-04 无锡荣能半导体材料有限公司 Polysilicon cast ingot thermal field structure
CN105926036A (en) * 2016-05-24 2016-09-07 山东省科学院能源研究所 Polycrystalline silicon crystal growing furnace growth device and heat source adjusting method thereof

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