CN203818143U - Multifunctional manipulator for loading and unloading crystal bars - Google Patents

Multifunctional manipulator for loading and unloading crystal bars Download PDF

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Publication number
CN203818143U
CN203818143U CN201420128390.6U CN201420128390U CN203818143U CN 203818143 U CN203818143 U CN 203818143U CN 201420128390 U CN201420128390 U CN 201420128390U CN 203818143 U CN203818143 U CN 203818143U
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CN
China
Prior art keywords
paw
clamping
screw mandrel
guide rail
vertical
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Expired - Lifetime
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CN201420128390.6U
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Chinese (zh)
Inventor
曹建伟
傅林坚
石刚
沈文杰
陈明杰
叶欣
周建灿
孙明
董熔成
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Priority to CN201420128390.6U priority Critical patent/CN203818143U/en
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Abstract

The utility model relates to the field of crystal growth furnaces, and aims to provide a multifunctional manipulator for loading and unloading crystal bars. The multifunctional manipulator for loading and unloading the crystal bars comprises a horizontal moving device, a vertical moving device, a clamping device and a base. The multifunctional manipulator can be used for clamping crystal bars with different specifications, such as 6-inch and 8-inch round bars and square bars; the clamping is reliable, and the positioning accuracy is high; the length range of the clamped crystal bars is wide, and all crystal bars within 700mm can be clamped; the dead weight capacity is large, and is up to 100 Kg; all the movements are controlled by a program automatically, and manual participation is not needed, thereby being suitable for full automatic control over single crystal silicon rod production line processing workshops.

Description

A kind of multifunction manipulator for crystal bar handling
Technical field
The utility model is about crystal growing furnace field, particularly a kind of multifunction manipulator for crystal bar handling.
Background technology
In solar module production process, the raw material with monocrystalline silicon as solar module, are more and more applied because it has the feature that photoelectric transformation efficiency is high.
When producing solar battery sheet, first the silicon single crystal rod of monocrystal growing furnace growth to be cut into the short pole of certain length, and then short pole to be processed into after butt, grinding process to four jiaos be the square rod of circular arc, finally, again by square rod cutting flakiness, these thin slices have just become solar battery sheet after subsequent treatment.At present, all need manually silicon single crystal rod to be moved into butting machine in process, the square rod that butt completes also needs to be manually relayed to grinding machine, and grinding square silicon rod later also needs manually to unload rear preservation, so not only time-consuming but also be not easy to management, also waste of manpower.From now on, pipelining will become a kind of trend, after flow shop builds up, all process steps Automatic Control, without artificial participation, at this moment need one can pack circle crystal bar into butting machine, the conveying robot that the prismatic crystal rod cutting can be proceeded to grinding machine and the good prismatic crystal rod of grinding is unloaded simultaneously.This manipulator need to comprise and moves horizontally, vertically moves and clamp three actions, want the pole of 6 inches and 8 inches to be sent into butt operation from crystal bar storage device, then the square rod cutting is forwarded to grinding process, the square rod of finally grinding is completed 6 inches and 8 inches takes off sends crystal bar storage device back to.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, and a kind of crystal bar process line workshop, manipulator that carries out crystal bar material loading, transfer and blanking of being applicable to is provided.For solving the problems of the technologies described above, solution of the present utility model is:
A kind of multifunction manipulator for crystal bar handling is provided, comprise horizontally moving device, vertical mobile device, clamping device and base, described horizontally moving device comprises horizontal guide rail mount pad, horizontal guide rail, cross sliding clock, horizontal lead screw, moves horizontally drive motors, Timing Belt and synchronous pulley; Horizontal guide rail mount pad is horizontally fixed on base, and horizontal guide rail is provided with two, and two horizontal guide rail symmetries are arranged on horizontal guide rail mount pad; Horizontal lead screw and horizontal guide rail be arranged in parallel, and be positioned in the middle of two horizontal guide rails, the head of horizontal lead screw with move horizontally drive motors and be connected, the output that moves horizontally drive motors is provided with a synchronous pulley, the afterbody of horizontal lead screw is also provided with a synchronous pulley, and two synchronous pulleys are connected by Timing Belt; Cross sliding clock is provided with four altogether, on two horizontal guide rails, is respectively provided with respectively two;
Described vertical mobile device comprises and moves horizontally slide, horizontal lead screw nut seat, vertically motor mount, upright guide rail, upright slide block, vertically screw mandrel, vertical mobile drive motors, vertically shaft coupling, vertical slide plate and vertical thread stem nut seat; Vertical slide plate is vertically fixed on vertical thread stem nut seat, and upright guide rail is provided with two, and symmetry is arranged in vertical slide plate; Upright slide block is provided with four, and symmetry is fixed on and moves horizontally on slide, moves horizontally slide and is arranged on upright guide rail by upright slide block, makes upright slide block respectively be provided with respectively two on two upright guide rails; Horizontal lead screw nut seat is fixed on and moves horizontally on slide, for realizing vertical mobile device, is connected with horizontally moving device, and vertically motor mount is arranged on the top that moves horizontally slide, and vertical mobile drive motors is fixed on vertical motor mount; Vertically screw mandrel is arranged in vertical slide plate by vertical thread stem nut seat, and vertical mobile drive motors is connected with vertical screw mandrel by vertical shaft coupling;
Described clamping device comprises paw bracket, clamping guide rails assembling plate, clamping guide rail, clamping slide block, paw holder, paw, left-handed screw mandrel, dextrorotation screw mandrel, screw mandrel shaft coupling, clamping motor, clamping motor fixing seat, motor coupler; Clamping guide rails assembling plate is arranged on paw bracket, and clamping guide rail is arranged on clamping guide rails assembling plate with clamping motor fixing seat; Clamping slide block is provided with three, be arranged on respectively on clamping guide rail, paw holder and paw are respectively provided with two, be respectively paw A, paw B, paw holder A and paw holder B, paw holder A is fixed on a clamping slide block, and paw holder A is connected with the afterbody of left-handed screw mandrel, paw holder B is fixed on two other clamping slide block, and paw holder B is connected with dextrorotation screw mandrel, and it is upper that paw A installs paw holder A, and paw B is arranged on paw holder B; Clamping motor is arranged in clamping motor fixing seat, and clamping motor output shaft is connected with the head of dextrorotation screw mandrel by motor coupler, and the afterbody of dextrorotation screw mandrel is connected with the head of left-handed screw mandrel by screw mandrel shaft coupling;
When clamping motor turns clockwise, drive left-handed screw mandrel and dextrorotation screw mandrel to turn clockwise, left-handed screw mandrel turns clockwise, drive paw mount pad A and paw A to move right, dextrorotation screw mandrel turns clockwise, and drives paw mount pad B and paw B to be moved to the left, and realizes the clamping of paw A and paw B; When clamping motor is rotated counterclockwise, drive left-handed screw mandrel and dextrorotation screw mandrel to be rotated counterclockwise, left-handed screw mandrel is rotated counterclockwise, drive paw mount pad A and paw A to be moved to the left, dextrorotation screw mandrel is rotated counterclockwise, and drives paw mount pad B and paw B to move right, and realizes unclamping of paw A and paw B;
Paw bracket in clamping device is connected with the vertical slide plate in vertical mobile device, and vertically the cross sliding clock moving horizontally in slide and horizontally moving device in mobile device is fixed.
As further improvement, described in move horizontally drive motors, vertical mobile drive motors and clamping motor all adopts servomotor.
As further improvement, described horizontal lead screw, vertically screw mandrel, left-handed screw mandrel and dextrorotation screw mandrel all adopt (precision) ball screw, and horizontal lead screw, vertically on screw mandrel, left-handed screw mandrel and dextrorotation screw mandrel all respectively with feed screw nut.
As further improvement, described horizontal guide rail, upright guide rail, clamping guide rail all adopt (precision) line slideway.
As further improvement, described paw comprises four clamping faces, and two clamping faces become 120 degree, and for clamping circular single crystal rod, two other clamping face becomes 90 degree, for the side's of clamping monocrystal rod.
As further improvement, on described paw, be also provided with paw cushion block, paw cushion block is for preventing that crystal bar from being pressed from both sides bad nylon sheet.
Compared with prior art, the beneficial effects of the utility model are:
Can clamp the crystal bar of different size, as pole and the square rod of 6 inches and 8 inches; Clamping is reliable, and positioning precision is high; Clamping boule length has a very wide distribution, and can clamp 700mm with interior all crystal bars; Loading capacity is large, and loading capacity is up to 100Kg; Everything, by procedure auto-control, does not need artificial participation, is applicable to the Automatic Control of silicon single crystal rod streamline job shop.
Accompanying drawing explanation
Fig. 1 is three-dimensional axonometric drawing of the present utility model.
Fig. 2 is the utility model horizontally moving device schematic diagram.
Fig. 3 is the vertical mobile device front view of the utility model.
Fig. 4 is the vertical mobile device left view of utility model.
Fig. 5 is the utility model clamping device schematic diagram.
Fig. 6 is the utility model clamping device clamping pole schematic diagram.
Fig. 7 is the utility model clamping device clamping square rod schematic diagram.
Reference numeral in figure is: 100 horizontally moving devices; 200 vertical mobile devices; 300 clamping devices; 101 bases; 102 horizontal guide rail mount pads; 103 horizontal guide rails; 104 cross sliding clocks; 105 horizontal lead screws; 106 move horizontally drive motors; 107 synchronous pulleys; 201 vertical slide plate; 202 upright slide blocks; 203 vertical thread stem nut seats; 204 upright guide rails; 205 vertical motor mounts; 206 vertical mobile drive motors; 207 vertical shaft couplings; 208 move horizontally slide; 209 vertical screw mandrels; 210 horizontal lead screw nut seats; 301 paw cushion blocks; 302 paws; 303 paw holders; 304 clamping slide blocks; 305 clamping guide rails assembling plates; 306 clamping guide rails; 307 left-handed screw mandrels; 308 screw mandrel shaft couplings; 309 dextrorotation screw mandrels; 310 paw brackets; 311 clamping motor fixing seat; 312 clamping motors; 313 motor couplers; 314 circular single crystal rods; 315 side's monocrystal rod.
The specific embodiment
Below in conjunction with accompanying drawing and the specific embodiment, the utility model is described in further detail:
As shown in Figure 1, a kind of multifunction manipulator for crystal bar handling comprises horizontally moving device 100, vertical mobile device 200, clamping device 300 and base 101, this kind can be sent into butt operation from crystal bar storage device the circular single crystal rod 314 of 6 inches and 8 inches for the multifunction manipulator of crystal bar handling, then the square monocrystal rod 315 cutting is forwarded to grinding process, the square monocrystal rod 315 of finally grinding is completed 6 inches and 8 inches is taken off and is sent crystal bar storage device back to.
As shown in Figure 2, horizontally moving device 100 comprises horizontal guide rail mount pad 102, horizontal guide rail 103, cross sliding clock 104, horizontal lead screw 105, moves horizontally drive motors 106, Timing Belt and synchronous pulley 107.Horizontal guide rail mount pad 102 is horizontally fixed on base 101, and horizontal guide rail 103 is provided with two, and two horizontal guide rail 103 symmetries are arranged on horizontal guide rail mount pad 102.Horizontal lead screw 105 be arranged in parallel with horizontal guide rail 103, and be positioned in the middle of two horizontal guide rails 103, the head of horizontal lead screw 105 with move horizontally drive motors 106 and be connected, the output that moves horizontally drive motors 106 is provided with a synchronous pulley 107, horizontal lead screw 105 inputs are also provided with a synchronous pulley 107, and synchronous pulley 107 is connected by Timing Belt with synchronous pulley 107.Cross sliding clock 104 is provided with four altogether, on two horizontal guide rails 103, is respectively provided with respectively two.
As shown in Figure 3 and Figure 4, vertically mobile device 200 comprises and moves horizontally slide 208, horizontal lead screw nut seat 210, vertically motor mount 205, upright guide rail 204, upright slide block 202, vertically screw mandrel 209, vertical mobile drive motors 206, vertically shaft coupling 207, vertical slide plate 201 and vertical thread stem nut seat 203.On the vertical fixedly vertical thread stem nut seat 203 of vertical slide plate 201, two upright guide rail 204 symmetries are arranged in vertical slide plate 201.Upright slide block 202 is provided with four, and symmetry is fixed on and moves horizontally on slide 208, moves horizontally slide 208 and is arranged on upright guide rail 204 by upright slide block 202, makes upright slide block 202 respectively be provided with respectively two on two upright guide rails 204.Horizontal lead screw nut seat 210 is fixed on and moves horizontally on slide 208, and vertically motor mount 205 is arranged on the top that moves horizontally slide 208, and vertical mobile drive motors 206 is fixed on vertical motor mount 205.Vertically screw mandrel 209 is arranged in vertical slide plate 201 by vertical thread stem nut seat 203, and vertical mobile drive motors 206 is connected with vertical screw mandrel 209 by vertical shaft coupling 207.
As shown in Figure 5, clamping device 300 comprises paw bracket 310, clamping guide rails assembling plate 305, clamping guide rail 306, clamping slide block 304, paw holder 303, paw 302, left-handed screw mandrel 307, dextrorotation screw mandrel 309, screw mandrel shaft coupling 308, clamping motor 312, clamping motor fixing seat 311, motor coupler 313.Paw bracket 310 is fixed in vertical slide plate 201, and clamping guide rails assembling plate 305 is arranged on paw bracket 310, and clamping guide rail 306 is arranged on clamping guide rails assembling plate 305 with clamping motor fixing seat 311.Clamping slide block 304 is provided with three, be arranged on respectively on clamping guide rail 306, paw holder 303 and paw 302 are respectively provided with two, be respectively paw A, paw B, paw holder A and paw holder B, paw holder A is fixed on a clamping slide block 304, and paw holder A is connected with the afterbody of left-handed screw mandrel 307, paw holder B is fixed on two other clamping slide block 304, and paw holder B is connected with dextrorotation screw mandrel 309, it is upper that paw A installs paw holder A, and paw B is arranged on paw holder B.Clamping motor 312 is arranged in clamping motor fixing seat 311, clamping motor 312 output shafts are connected with the head of dextrorotation screw mandrel 309 by motor coupler 313, the afterbody of dextrorotation screw mandrel 309 is connected with the head of left-handed screw mandrel 307 by screw mandrel shaft coupling 308, clamping motor 312 turns clockwise, drive left-handed screw mandrel 307 and dextrorotation screw mandrel 309 to turn clockwise, left-handed screw mandrel 307 turns clockwise, drive paw mount pad A and paw A to move right, dextrorotation screw mandrel 309 turns clockwise, drive paw mount pad B and paw B to be moved to the left, realize the clamping of paw A and paw B, on the contrary, clamping motor 312 is rotated counterclockwise, and realizes unclamping of paw A and paw B.
Paw 302 comprises four clamping faces, and two clamping faces become 120 degree, for clamping circular single crystal rod 314, as shown in Figure 6; Two other clamping face becomes 90 degree, for the side's of clamping monocrystal rod 315, as shown in Figure 7.On paw 302, be also provided with paw cushion block 301, paw cushion block 301 is that nylon sheet material can adopt MC901 nylon for preventing that crystal bar from being pressed from both sides bad nylon sheet.
Paw bracket 310 in clamping device 300 is connected with the vertical slide plate 201 in vertical mobile device 200, and vertically the slide 208 that moves horizontally in mobile device 200 is fixed with the cross sliding clock 104 in horizontally moving device 100.
Described drive motors 106, vertical mobile drive motors 206 and the clamping motor 312 of moving horizontally all adopts servomotor; Described horizontal lead screw 105, vertically screw mandrel 209, left-handed screw mandrel 307 and dextrorotation screw mandrel 309 all adopt precise ball screw, and horizontal lead screw 105, vertically on screw mandrel 209, left-handed screw mandrel 307 and dextrorotation screw mandrel 309 all respectively with feed screw nut; Described horizontal guide rail 103, upright guide rail 204, clamping guide rail 306 all adopt precise linear guide.
Finally, it should be noted that above what enumerate is only specific embodiment of the utility model.Obviously, the utility model is not limited to above embodiment, can also have a lot of distortion.All distortion that those of ordinary skill in the art can directly derive or associate from the disclosed content of the utility model, all should think protection domain of the present utility model.

Claims (6)

1. the multifunction manipulator for crystal bar handling, comprise horizontally moving device, vertical mobile device, clamping device and base, it is characterized in that, described horizontally moving device comprises horizontal guide rail mount pad, horizontal guide rail, cross sliding clock, horizontal lead screw, moves horizontally drive motors, Timing Belt and synchronous pulley; Horizontal guide rail mount pad is horizontally fixed on base, and horizontal guide rail is provided with two, and two horizontal guide rail symmetries are arranged on horizontal guide rail mount pad; Horizontal lead screw and horizontal guide rail be arranged in parallel, and be positioned in the middle of two horizontal guide rails, the head of horizontal lead screw with move horizontally drive motors and be connected, the output that moves horizontally drive motors is provided with a synchronous pulley, the afterbody of horizontal lead screw is also provided with a synchronous pulley, and two synchronous pulleys are connected by Timing Belt; Cross sliding clock is provided with four altogether, on two horizontal guide rails, is respectively provided with respectively two;
Described vertical mobile device comprises and moves horizontally slide, horizontal lead screw nut seat, vertically motor mount, upright guide rail, upright slide block, vertically screw mandrel, vertical mobile drive motors, vertically shaft coupling, vertical slide plate and vertical thread stem nut seat; Vertical slide plate is vertically fixed on vertical thread stem nut seat, and upright guide rail is provided with two, and symmetry is arranged in vertical slide plate; Upright slide block is provided with four, and symmetry is fixed on and moves horizontally on slide, moves horizontally slide and is arranged on upright guide rail by upright slide block, makes upright slide block respectively be provided with respectively two on two upright guide rails; Horizontal lead screw nut seat is fixed on and moves horizontally on slide, for realizing vertical mobile device, is connected with horizontally moving device, and vertically motor mount is arranged on the top that moves horizontally slide, and vertical mobile drive motors is fixed on vertical motor mount; Vertically screw mandrel is arranged in vertical slide plate by vertical thread stem nut seat, and vertical mobile drive motors is connected with vertical screw mandrel by vertical shaft coupling;
Described clamping device comprises paw bracket, clamping guide rails assembling plate, clamping guide rail, clamping slide block, paw holder, paw, left-handed screw mandrel, dextrorotation screw mandrel, screw mandrel shaft coupling, clamping motor, clamping motor fixing seat, motor coupler; Clamping guide rails assembling plate is arranged on paw bracket, and clamping guide rail is arranged on clamping guide rails assembling plate with clamping motor fixing seat; Clamping slide block is provided with three, be arranged on respectively on clamping guide rail, paw holder and paw are respectively provided with two, be respectively paw A, paw B, paw holder A and paw holder B, paw holder A is fixed on a clamping slide block, and paw holder A is connected with the afterbody of left-handed screw mandrel, paw holder B is fixed on two other clamping slide block, and paw holder B is connected with dextrorotation screw mandrel, and it is upper that paw A installs paw holder A, and paw B is arranged on paw holder B; Clamping motor is arranged in clamping motor fixing seat, and clamping motor output shaft is connected with the head of dextrorotation screw mandrel by motor coupler, and the afterbody of dextrorotation screw mandrel is connected with the head of left-handed screw mandrel by screw mandrel shaft coupling;
When clamping motor turns clockwise, drive left-handed screw mandrel and dextrorotation screw mandrel to turn clockwise, left-handed screw mandrel turns clockwise, drive paw mount pad A and paw A to move right, dextrorotation screw mandrel turns clockwise, and drives paw mount pad B and paw B to be moved to the left, and realizes the clamping of paw A and paw B; When clamping motor is rotated counterclockwise, drive left-handed screw mandrel and dextrorotation screw mandrel to be rotated counterclockwise, left-handed screw mandrel is rotated counterclockwise, drive paw mount pad A and paw A to be moved to the left, dextrorotation screw mandrel is rotated counterclockwise, and drives paw mount pad B and paw B to move right, and realizes unclamping of paw A and paw B;
Paw bracket in clamping device is connected with the vertical slide plate in vertical mobile device, and vertically the cross sliding clock moving horizontally in slide and horizontally moving device in mobile device is fixed.
2. a kind of multifunction manipulator for crystal bar handling according to claim 1, is characterized in that, described in move horizontally drive motors, vertical mobile drive motors and clamping motor and all adopt servomotor.
3. a kind of multifunction manipulator for crystal bar handling according to claim 1, it is characterized in that, described horizontal lead screw, vertically screw mandrel, left-handed screw mandrel and dextrorotation screw mandrel all adopt ball screw, and horizontal lead screw, vertically on screw mandrel, left-handed screw mandrel and dextrorotation screw mandrel all respectively with feed screw nut.
4. a kind of multifunction manipulator for crystal bar handling according to claim 1, is characterized in that, described horizontal guide rail, upright guide rail, clamping guide rail all adopt line slideway.
5. a kind of multifunction manipulator for crystal bar handling according to claim 1, is characterized in that, described paw comprises four clamping faces, two clamping faces become 120 degree, be used for clamping circular single crystal rod, two other clamping face becomes 90 degree, for the side's of clamping monocrystal rod.
6. a kind of multifunction manipulator for crystal bar handling according to claim 1, is characterized in that, on described paw, be also provided with paw cushion block, paw cushion block is for preventing that crystal bar from being pressed from both sides bad nylon sheet.
CN201420128390.6U 2014-03-20 2014-03-20 Multifunctional manipulator for loading and unloading crystal bars Expired - Lifetime CN203818143U (en)

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104440903A (en) * 2014-12-10 2015-03-25 江苏万工科技集团有限公司 Feeding and discharging device for armband lockstitch manipulator
CN105417127A (en) * 2015-12-21 2016-03-23 安徽德力日用玻璃股份有限公司 Ball screw bottle pushing machine
CN106313020A (en) * 2016-08-31 2017-01-11 安徽米科智能科技有限公司 Three-axis moving and carrying manipulator
CN106395401A (en) * 2016-08-31 2017-02-15 广西联壮科技股份有限公司 Working-width-adjustable side grasping stacking device
CN106475878A (en) * 2016-11-25 2017-03-08 浙江晶盛机电股份有限公司 A kind of full-automatic silicon single crystal rod barreling equipment integrating
CN106586543A (en) * 2016-12-31 2017-04-26 汕头市新青罐机有限公司 Intelligent mechanical arm carrying device
CN106670931A (en) * 2016-11-30 2017-05-17 浙江晶盛机电股份有限公司 Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine
CN106671300A (en) * 2015-11-11 2017-05-17 西安隆基硅材料股份有限公司 Workpiece assembling clamp and automatic bonding device provided with workpiece assembling clamp
CN106697918A (en) * 2016-12-30 2017-05-24 天津朗誉科技发展有限公司 Positioning mechanism for silicon rod loading and unloading
CN106882646A (en) * 2017-03-19 2017-06-23 福建景丰科技有限公司 Implementation method of the silk ingot into automatic business processing after material
CN106956972A (en) * 2017-03-19 2017-07-18 福建景丰科技有限公司 Spinning workshop automation silk ingot unloads fortune system
CN107963454A (en) * 2017-12-22 2018-04-27 大连运明自动化技术有限公司 The special X-axis intelligence transfer handling device of terminal screw
CN108097533A (en) * 2017-12-21 2018-06-01 重庆超硅半导体有限公司 A kind of integrated circuit silicon single crystal rod automatic glue application adhering method
CN112318494A (en) * 2020-11-04 2021-02-05 安徽工程大学 Active variable stiffness actuator based on adjustable length reed and adjusting method
CN114277440A (en) * 2021-11-23 2022-04-05 浙江晶盛机电股份有限公司 Clamp, crystal bar grabbing device and single crystal furnace
CN117415683A (en) * 2023-10-31 2024-01-19 宁夏中欣晶圆半导体科技有限公司 Barreling method of semiconductor crystal bar barreling machine

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104440903A (en) * 2014-12-10 2015-03-25 江苏万工科技集团有限公司 Feeding and discharging device for armband lockstitch manipulator
CN104440903B (en) * 2014-12-10 2016-11-23 江苏万工科技集团有限公司 The feeding blanking device of armband lock seaming mechanical hand
CN106671300A (en) * 2015-11-11 2017-05-17 西安隆基硅材料股份有限公司 Workpiece assembling clamp and automatic bonding device provided with workpiece assembling clamp
CN105417127A (en) * 2015-12-21 2016-03-23 安徽德力日用玻璃股份有限公司 Ball screw bottle pushing machine
CN106395401A (en) * 2016-08-31 2017-02-15 广西联壮科技股份有限公司 Working-width-adjustable side grasping stacking device
CN106313020A (en) * 2016-08-31 2017-01-11 安徽米科智能科技有限公司 Three-axis moving and carrying manipulator
CN106475878A (en) * 2016-11-25 2017-03-08 浙江晶盛机电股份有限公司 A kind of full-automatic silicon single crystal rod barreling equipment integrating
CN106670931A (en) * 2016-11-30 2017-05-17 浙江晶盛机电股份有限公司 Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine
CN106697918A (en) * 2016-12-30 2017-05-24 天津朗誉科技发展有限公司 Positioning mechanism for silicon rod loading and unloading
CN106586543A (en) * 2016-12-31 2017-04-26 汕头市新青罐机有限公司 Intelligent mechanical arm carrying device
CN106956972A (en) * 2017-03-19 2017-07-18 福建景丰科技有限公司 Spinning workshop automation silk ingot unloads fortune system
CN106882646A (en) * 2017-03-19 2017-06-23 福建景丰科技有限公司 Implementation method of the silk ingot into automatic business processing after material
CN108097533A (en) * 2017-12-21 2018-06-01 重庆超硅半导体有限公司 A kind of integrated circuit silicon single crystal rod automatic glue application adhering method
CN108097533B (en) * 2017-12-21 2021-01-26 重庆超硅半导体有限公司 Automatic gluing and bonding method for single crystal silicon rod for integrated circuit
CN107963454A (en) * 2017-12-22 2018-04-27 大连运明自动化技术有限公司 The special X-axis intelligence transfer handling device of terminal screw
CN112318494A (en) * 2020-11-04 2021-02-05 安徽工程大学 Active variable stiffness actuator based on adjustable length reed and adjusting method
CN114277440A (en) * 2021-11-23 2022-04-05 浙江晶盛机电股份有限公司 Clamp, crystal bar grabbing device and single crystal furnace
CN117415683A (en) * 2023-10-31 2024-01-19 宁夏中欣晶圆半导体科技有限公司 Barreling method of semiconductor crystal bar barreling machine

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Granted publication date: 20140910