CN106670931A - Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine - Google Patents
Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine Download PDFInfo
- Publication number
- CN106670931A CN106670931A CN201611083551.4A CN201611083551A CN106670931A CN 106670931 A CN106670931 A CN 106670931A CN 201611083551 A CN201611083551 A CN 201611083551A CN 106670931 A CN106670931 A CN 106670931A
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- Prior art keywords
- paw
- centering
- slide block
- screw mandrel
- single crystal
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention relates to monocrystal silicon bar rolling and grinding and provides an automatic centering manipulator device used for a monocrystal silicon bar rolling and grinding integrated machine. The automatic centering manipulator device used for the monocrystal silicon bar rolling and grinding integrated machine comprises a horizontal moving assembly and a vertical moving assembly. The horizontal moving assembly is used for realizing moving forward and backward horizontally of the vertical moving assembly. The vertical assembly comprises a vertical guiding rail seat, a motor seat assembly and a manipulator claw and is used for guaranteeing a monocrystal silicon bar being coaxial with the moving route of a machine tool at the time of working. The automatic centering manipulator device has the advantages of being high in centering precision, compact in equipment structure, convenient to maintain, low in production cost and the like, and perfect connection with a six-degree-of-freedom manipulator can be realized.
Description
Technical field
The present invention is with regard to silicon single crystal rod barreling field, more particularly to for the automatic centering of silicon single crystal rod barreling all-in-one
Robot device.
Background technology
In semicon industry and solar energy industry, the silicon single crystal rod that single crystal growing furnace is produced be processed into section bar more use
Tumbling mill, but the alternative scope of corresponding tumbling mill model is not very wide, and present Ge great Photovoltaics Com Inc. is adopted
Tumbling mill be divided into two kinds, the first was transformed by former grinding machine, with low cost, Middle Phase to being easier to, such as
LDK Solar Co., Ltd. and the silicon single crystal rod tumbling mill of sky dragon photoelectricity, its lathe needs pure craft
Operation, cumbersome, integrated level is not high, its two be by spheronizator be integrated into monocrystalline silicon processing other manufacturing procedures in, such as
Beijing Jinglianfa CNC Technologies Co., Ltd., it is in silicon single crystal bar that its lathe is QGM600-8XB monocrystal silicon-rod butting barreling lathes
Exploitation on tumbling mill is formed, although have certain integrated level, but manual with above allied industry machinery is unable to as the first
Make, be after automated production upgrading cause it is greatly inconvenient in most cases, they are to be only applicable to single size
Bar, but the silicon single crystal rod for 2,3,4,5,6,8 cun, many sizes and surface is irregular causes bar processing to get up but to become
Obtain extremely difficult, the range of work is little and precision is unstable.
And cause above-mentioned difficulty of processing to be mainly the difficult problem caused by centering during silicon single crystal rod feeding, therefore develop a kind of energy
The robot device of feeding centering is solved the problems, such as, market prospects are had an optimistic view of, more can provide one more preferably for later related research and development
Reference function.
The content of the invention
Present invention is primarily targeted at overcoming deficiency of the prior art, there is provided one kind can be time saving and energy saving, and can drop
The tumbling mill aligning equipment of low cost.To solve above-mentioned technical problem, the solution of the present invention is：
A kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one is provided, including move horizontally component,
Vertical shift component, the component that moves horizontally is including horizontal base, horizontal feed motor, adjustment fixed block, horizontal tail end axle
Bearing, slide block installing plate, horizontal guide rail, slide block, screw mandrel；Horizontal guide rail is installed on horizontal base, and slide block is provided with four, solid respectively
The corner of slide block installing plate is scheduled on, and slide block is arranged on horizontal guide rail；Vertical shift component is fixed on slide block installing plate, water
Flat feeding motor is fixed on slide block installing plate by the horizontal tail end bearing block equipped with screw mandrel, and horizontal feed motor rotarily drives
Screw mandrel is rotated, and slide block can be caused to move with the movement of slide block installing plate, so as to before and after the level for realizing vertical shift component
It is mobile；Adjustment fixed block is used to play a part of adjustment position when vertical shift component is arranged on and moves horizontally on component；
The vertical shift component include upright guide rail seat, motor holder assembly, mechanical paw, for guarantee silicon single crystal rod with
Movement line when lathe works is coaxial；
The upright guide rail seat is arranged on and moves horizontally on the slide block installing plate of component, and upright guide rail seat is frame structure
(upright guide rail seat is the frame structure for installing each part of vertical shift component, and material uses HT300), upright guide rail seat
Front is equipped with two sections of long guide rails；
The motor holder assembly includes vertical motor cabinet, upper clamping screw mandrel, lower clamping screw mandrel, clamps screw mandrel shaft coupling, perpendicular
Straight motion motor, screw mandrel end cap, shaft coupling；Upper clamping screw mandrel, lower clamping screw mandrel are connected by clamping screw mandrel shaft coupling, then are passed through
Shaft coupling, vertically movable motor connection are fixed on vertical motor cabinet, and the lower tail end for clamping screw mandrel is equipped with screw mandrel end cap；And upper folder
Tight screw mandrel, lower clamping screw mandrel are oppositely oriented, for ensureing paw in centering, centering under paw synchronization reverse direction operation；
The mechanical paw includes that paw, upper paw slide block mounting seat, lower paw slide block are installed under paw, centering in centering
Seat；Paw is fixed by screws in paw slide block mounting seat in centering, and paw is fixed by screws in lower paw under centering
In slide block mounting seat；The bottom of the upper paw slide block mounting seat is equipped with two slide blocks, and two slide blocks are separately mounted to vertically shifting
On one long guideway of correspondence of dynamic component, and two slide blocks are respectively positioned at the top half of long guideway；The lower paw slide block peace
Dress seat bottom is provided with four slide blocks, and four slide blocks are two-by-two with respect to being respectively arranged on a long guideway of vertical shift component,
And four slide blocks are positioned at the latter half of long guideway；In the centering under paw, centering the pawl heart of paw be respectively equipped with two it is right
The little V-shaped groove of the V-shaped groove answered, i.e. leading portion and the big V-shaped groove of back segment；In centering under paw, centering paw respectively by it is upper clamping screw mandrel,
Lower clamping screw mandrel transmission power, and then make in centering the little V-shaped groove of paw, big V under the little V-shaped groove of paw, big V-shaped groove and centering
Shape groove can coordinate clamping different size silicon single crystal rod；The pawl of paw is additionally provided with the heart comb under centering, and with feeding platform (feeding platform
For a subassembly of silicon single crystal rod tumbling mill, and be not belonging in this centering mechanical-hand device) on comb intermesh, can
Silicon single crystal rod is transferred under centering in the V-shaped groove of paw from feeding platform.
Used as further improvement, the V-shaped groove on the mechanical paw is to output a little square groove shape by v-shaped structure lower section
Into little V-shaped groove is applied to the silicon single crystal rod clamping centering of 2,3,4,5 inch diameters, and big V-shaped groove is applied to 6,8 inch diameters
Silicon single crystal rod clamps centering.
Used as further improvement, the lower end of the motor holder assembly is equipped with vertical cushion pad, prevents mechanical paw upper and lower
Collide with upright guide rail seat during feeding.
Used as further improvement, the automatic centering machinery arm device for silicon single crystal rod barreling all-in-one also includes
Horizontal centralized oil supply block, vertical centralized oil supply block, horizontal centralized oil supply block is used to provide lubricating oil for horizontal slide block, vertically collection
Middle confession oil clot is used to provide lubricating oil for vertical slide block.
Compared with prior art, the invention has the beneficial effects as follows：
The advantages of present invention has accuracy of alignment height, compact equipment, easy to maintenance, low production cost, can realize
Perfectly it is connected with six degree of freedom manipulator.
Description of the drawings
Fig. 1 is the structural representation of large and small V-shaped groove in the present invention.
Fig. 2 is the front view of the present invention.
Fig. 3 is the left view of the present invention.
Fig. 4 is the isometric side view of the present invention.
Reference in figure is：1 vertically movable motor；2 vertical motor cabinets；3 long guideways；4 upright guide rail seats；5 left-hand seats
Pawl slide block mounting seat；Paw in 6 centerings；Screw mandrel is clamped on 7；8 guide rail briquettings；9 clamp screw mandrel shaft coupling；10 times clamping screw mandrels；
Paw under 11 centerings；12 screw mandrel end caps；13 times paw slide block mounting seats；14 shaft couplings；15 vertical cushion pads；16 vertically concentrate confession
Oil clot；17 center bumpers；18 organ shields；19 horizontal centralized oil supply blocks；20 horizontal feed motors；21 adjustment fixed blocks；22
Slide block；23 silicon single crystal rods；24 horizontal tail end bearing blocks；25 feeding platforms.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail with specific embodiment：
A kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one as shown in Figures 2 to 4 includes machine
Tool paw, component, vertical shift component are moved horizontally, can be solved on different size silicon single crystal rod 23 by the manipulator with comb
Centering problem during material.
Component is moved horizontally including horizontal centralized oil supply block 19, horizontal feed motor 20, adjustment fixed block 21, horizontal tail end
Bearing block 24, slide block installing plate, horizontal guide rail, horizontal guide rail is installed on horizontal base, and four slide blocks 22 are separately fixed at slide block
The corner of mounting seat, horizontal feed motor 20 is fixed on slide block installing plate by the horizontal tail end bearing block 24 equipped with screw mandrel,
And the effect of adjustment block be when vertical shift component installed in move horizontally on component when play adjustment position.Move horizontally group
Part is a horizontal linear displacement component, and the vertical shift component level is driven by slide block installing plate by a servomotor
It is movable, play feeding effect, it is therefore an objective to which automatic centring device is moved into plant width place-centric
Vertical shift component include upright guide rail seat 4, mechanical paw, motor holder assembly, for guarantee silicon single crystal rod 23 with
Movement line when lathe works is coaxial.
The upright guide rail seat 4 is the frame structure for installing each part of vertical shift component, and material uses HT300,
On the slide block installing plate for moving horizontally component；The front of upright guide rail seat 4 is equipped with two sections of long guide rails 3, on long guideway 3
Equipped with the slide block 22 supporting with it.
The motor holder assembly includes vertical motor cabinet 2, upper clamping screw mandrel 7, lower clamping screw mandrel 10, clamping screw mandrel shaft coupling
9th, vertically movable motor 1, screw mandrel end cap 12, shaft coupling 14.Upper clamping screw mandrel 7, lower clamping screw mandrel 10 are by clamping screw mandrel shaft coupling
Device 9 connects, and is then fastened on vertical motor cabinet 2 with vertically movable motor 1 by shaft coupling 14, lower clamping screw mandrel 10
Tail end is equipped with screw mandrel end cap 12.Upper clamping screw mandrel 7, lower clamping screw mandrel 10 in motor holder assembly is oppositely oriented, can cause centering
The synchronous reverse direction operation of paw 11 under upper paw 6, centering, it is ensured that action is symmetrically consistent, so that it is guaranteed that the center clamped during centering
It is constant.Lower end in motor holder assembly is equipped with vertical cushion pad 15, with upright guide rail seat 4 when preventing mechanical paw bottom and top feed
Raw collision.
The mechanical paw includes paw 11, upper paw slide block mounting seat 5, lower paw slide block under paw 6, centering in centering
Mounting seat 13, paw 6 is fixed by screws in paw slide block mounting seat 5 in centering, and paw 11 is solid by screw under centering
It is scheduled in lower paw slide block mounting seat 13.The bottom of the upper paw slide block mounting seat 5 is equipped with two slide blocks 22, two slide blocks 22
It is separately mounted on one long guideway 3 of correspondence of vertical shift component, and two slide blocks 22 are respectively positioned at the first half of long guideway 3
Point.The lower bottom of paw slide block mounting seat 13 is provided with four slide blocks 22, and four slide blocks 22 are respectively arranged on two-by-two perpendicular relatively
On one long guideway 3 of straight moving assembly, and four slide blocks 22 are positioned at the latter half of long guideway 3；Using double-slider against peace
Dress, enables paw 11 under centering to bear bigger tilting moment, can effectively prevent paw because the increasing of the weight of silicon single crystal rod 23
Plus cause flexural deformation.
As shown in figure 1, the pawl heart of paw 11 is respectively equipped with two corresponding V-shaped grooves under paw 6, centering in centering, i.e., before
The little V-shaped groove of section and the big V-shaped groove of back segment, the structure of V-shaped groove is to output a little square groove by v-shaped structure lower section, and little V-shaped groove is applied to
2nd, the clamping centering of silicon single crystal rod 23 of 3,4,5 inch diameters, big V-shaped groove is applied to the silicon single crystal rod 23 of 6,8 inch diameters and clamps
Centering；Paw 11 is transmitted power, and then is made by upper clamping screw mandrel 7, lower clamping screw mandrel 10 respectively under paw 6, centering in centering
The little V-shaped groove of paw 11, big V-shaped groove can coordinate clamping different size under the little V-shaped groove of paw 6, big V-shaped groove and centering in centering
Silicon single crystal rod 23.The pawl of paw 11 is additionally provided with the heart comb under centering, and (feeding platform is silicon single crystal rod tumbling mill with feeding platform 25
A subassembly, and be not belonging in this centering mechanical-hand device) on comb intermesh, can be by silicon single crystal rod 23 from upper
Material platform 25 is transferred under centering in the V-shaped groove of paw 11.
Automatic centering machinery arm device for silicon single crystal rod barreling all-in-one also includes center bumper 17, organ shield
18th, horizontal centralized oil supply block 19, vertical centralized oil supply block 16；Center bumper 17 is used to prevent vertical shift component from colliding lathe
Main body；Organ shield 18 is used to protect centralising device to avoid dust deposit；Horizontal centralized oil supply block 19 is used to be horizontal slide block
Lubricating oil is provided, vertical centralized oil supply block 16 is used to provide lubricating oil for vertical slide block.
When carrying out centering using the automatic centering machinery arm device for silicon single crystal rod barreling all-in-one, specifically used method
For：
During 23 centering of silicon single crystal rod, silicon single crystal rod 23 is sent to table core lower end by feeding platform 25, moves horizontally component
Centering mechanical-hand device is moved into the center of plant width position, then is clamped silicon single crystal rod 23 by mechanical paw and is guaranteed and folder
End to end seat is coaxial for tight workbench, and horizontal feed motor 20 operates so that move horizontally component feed motion forward, paw in centering
6th, under centering between paw 11, the comb of paw 6 passes through the paw comb of feeding platform 25 by the lifting of silicon single crystal rod 23, feeding platform in centering
25 exit therewith, and vertically movable motor 1 is rotated, and screw mandrel 7 is clamped in drive and lower clamping screw mandrel 10 is rotated so that paw in centering
6th, the Quick-clamped of paw 11 under centering, end to end seat is coaxial for center and the tumbling mill clamping table of silicon single crystal rod 23, works as clamping force
When reaching a definite value, vertically movable motor 1 shuts down, and centering is completed.
After the completion of centering, the seat end to end at workbench two ends holds out against silicon single crystal rod 23, paw under paw 6, centering in centering
11 open, and exit, centering release, carry out the grinding action of next step.
Finally it should be noted that listed above is only specific embodiment of the invention.It is clear that the invention is not restricted to
Above example, can also there is many variations.One of ordinary skill in the art can directly lead from present disclosure
The all deformations for going out or associating, are considered as protection scope of the present invention.
Claims (4)
1. a kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one, including moving horizontally component, vertically move
Dynamic component, it is characterised in that the component that moves horizontally is including horizontal base, horizontal feed motor, adjustment fixed block, horizontal tail
End bearing block, slide block installing plate, horizontal guide rail, slide block, screw mandrel；Horizontal guide rail is installed on horizontal base, and slide block is provided with four, point
The corner of slide block installing plate is not fixed on, and slide block is arranged on horizontal guide rail；Vertical shift component is fixed on slide block installing plate
On, horizontal feed motor is fixed on slide block installing plate by the horizontal tail end bearing block equipped with screw mandrel, the rotation of horizontal feed motor
Turn the rotation of drive screw mandrel, slide block can be caused to move with the movement of slide block installing plate, so as to realize the water of vertical shift component
It is flat movable；Adjustment fixed block is used to play the work of adjustment position when vertical shift component is arranged on and moves horizontally on component
With；
The vertical shift component includes upright guide rail seat, motor holder assembly, mechanical paw, for guaranteeing silicon single crystal rod and lathe
Movement line during work is coaxial；
The upright guide rail seat is arranged on and moves horizontally on the slide block installing plate of component, and upright guide rail seat is frame structure, vertically
The front of track base is equipped with two sections of long guide rails；
The motor holder assembly includes vertical motor cabinet, upper clamping screw mandrel, lower clamping screw mandrel, vertically clamping screw mandrel shaft coupling, fortune
Dynamic motor, screw mandrel end cap, shaft coupling；Upper clamping screw mandrel, lower clamping screw mandrel are connected by clamping screw mandrel shaft coupling, then by shaft coupling
Device, vertically movable motor connection are fixed on vertical motor cabinet, and the lower tail end for clamping screw mandrel is equipped with screw mandrel end cap；And upper clamping silk
Bar, lower clamping screw mandrel are oppositely oriented, for ensureing paw in centering, centering under paw synchronization reverse direction operation；
The mechanical paw includes paw, upper paw slide block mounting seat, lower paw slide block mounting seat under paw, centering in centering；
Paw is fixed by screws in paw slide block mounting seat in centering, and paw is fixed by screws in lower paw slide block under centering
In mounting seat；The bottom of the upper paw slide block mounting seat is equipped with two slide blocks, and two slide blocks are separately mounted to vertical shift group
On one long guideway of correspondence of part, and two slide blocks are respectively positioned at the top half of long guideway；The lower paw slide block mounting seat
Bottom is provided with four slide blocks, and four slide blocks are two-by-two with respect to being respectively arranged on a long guideway of vertical shift component, and four
Individual slide block is located at the latter half of long guideway；The pawl heart of paw is respectively equipped with two corresponding V under paw, centering in the centering
The little V-shaped groove of shape groove, i.e. leading portion and the big V-shaped groove of back segment；Paw clamps screw mandrel, lower folder by upper respectively under paw, centering in centering
Tight screw mandrel transmission power, and then make in centering the little V-shaped groove of paw, big V-shaped groove under the little V-shaped groove of paw, big V-shaped groove and centering
Clamping different size silicon single crystal rod can be coordinated；The pawl of paw is additionally provided with the heart comb under centering, and mutual with the comb on feeding platform
It is staggered, silicon single crystal rod can be transferred under centering in the V-shaped groove of paw from feeding platform.
2. a kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one according to claim 1, it is special
Levy and be, the V-shaped groove on the mechanical paw is outputed a little square groove and formed by v-shaped structure lower section, little V-shaped groove is applied to 2,
3rd, the silicon single crystal rod clamping centering of 4,5 inch diameters, big V-shaped groove is applied to the silicon single crystal rod clamping centering of 6,8 inch diameters.
3. a kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one according to claim 1, it is special
Levy and be, the lower end of the motor holder assembly is equipped with vertical cushion pad, with upright guide rail seat when preventing mechanical paw bottom and top feed
Collide.
4. a kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one according to claim 1, it is special
Levy and be, the automatic centering machinery arm device for silicon single crystal rod barreling all-in-one also includes horizontal centralized oil supply block, erects
Straight centralized oil supply block, horizontal centralized oil supply block is used to provide lubricating oil for horizontal slide block, and it is perpendicular that vertical centralized oil supply block is used for
Straight slide block provides lubricating oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611083551.4A CN106670931A (en) | 2016-11-30 | 2016-11-30 | Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611083551.4A CN106670931A (en) | 2016-11-30 | 2016-11-30 | Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106670931A true CN106670931A (en) | 2017-05-17 |
Family
ID=58866983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611083551.4A Pending CN106670931A (en) | 2016-11-30 | 2016-11-30 | Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106670931A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108436778A (en) * | 2018-05-31 | 2018-08-24 | 欧朋达科技(深圳)有限公司 | Deburring protective cradle |
| CN108942643A (en) * | 2017-05-19 | 2018-12-07 | 浙江集英精密机器有限公司 | Silicon rod handler and silicon rod Multi-position processing machine |
| CN110000692A (en) * | 2019-04-29 | 2019-07-12 | 青岛高测科技股份有限公司 | A kind of handling equipment and application method for semiconductor die stick grinding process |
| CN114102376A (en) * | 2020-08-28 | 2022-03-01 | 天通日进精密技术有限公司 | Silicon rod grinding machine and silicon rod grinding method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201471197U (en) * | 2009-08-03 | 2010-05-19 | 苏州澳昆智能机器人技术有限公司 | Multifunctional machine tool charging structure |
| CN203092580U (en) * | 2013-02-05 | 2013-07-31 | 昆山艾博机器人系统工程有限公司 | Mechanical arm clamping jaw |
| CN203818143U (en) * | 2014-03-20 | 2014-09-10 | 浙江晶盛机电股份有限公司 | Multifunctional manipulator for loading and unloading crystal bars |
| CN204584812U (en) * | 2015-04-25 | 2015-08-26 | 苏州凯雷特精密机械有限公司 | For the tool of clamp cylinders shape object |
| CN204772579U (en) * | 2015-06-24 | 2015-11-18 | 常州市乘风机械厂 | Pneumatic manipulator is taken to stamping workpiece clamp |
| CN205601002U (en) * | 2016-04-01 | 2016-09-28 | 上虞晶信机电科技有限公司 | Single crystal silicon rod single line clipper |
| CN206277227U (en) * | 2016-11-30 | 2017-06-27 | 浙江晶盛机电股份有限公司 | A kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one |
-
2016
- 2016-11-30 CN CN201611083551.4A patent/CN106670931A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201471197U (en) * | 2009-08-03 | 2010-05-19 | 苏州澳昆智能机器人技术有限公司 | Multifunctional machine tool charging structure |
| CN203092580U (en) * | 2013-02-05 | 2013-07-31 | 昆山艾博机器人系统工程有限公司 | Mechanical arm clamping jaw |
| CN203818143U (en) * | 2014-03-20 | 2014-09-10 | 浙江晶盛机电股份有限公司 | Multifunctional manipulator for loading and unloading crystal bars |
| CN204584812U (en) * | 2015-04-25 | 2015-08-26 | 苏州凯雷特精密机械有限公司 | For the tool of clamp cylinders shape object |
| CN204772579U (en) * | 2015-06-24 | 2015-11-18 | 常州市乘风机械厂 | Pneumatic manipulator is taken to stamping workpiece clamp |
| CN205601002U (en) * | 2016-04-01 | 2016-09-28 | 上虞晶信机电科技有限公司 | Single crystal silicon rod single line clipper |
| CN206277227U (en) * | 2016-11-30 | 2017-06-27 | 浙江晶盛机电股份有限公司 | A kind of automatic centering machinery arm device for silicon single crystal rod barreling all-in-one |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108942643A (en) * | 2017-05-19 | 2018-12-07 | 浙江集英精密机器有限公司 | Silicon rod handler and silicon rod Multi-position processing machine |
| CN108436778A (en) * | 2018-05-31 | 2018-08-24 | 欧朋达科技(深圳)有限公司 | Deburring protective cradle |
| CN110000692A (en) * | 2019-04-29 | 2019-07-12 | 青岛高测科技股份有限公司 | A kind of handling equipment and application method for semiconductor die stick grinding process |
| CN110000692B (en) * | 2019-04-29 | 2024-01-09 | 青岛高测科技股份有限公司 | Loading and unloading device for grinding process of semiconductor crystal bar and using method |
| CN114102376A (en) * | 2020-08-28 | 2022-03-01 | 天通日进精密技术有限公司 | Silicon rod grinding machine and silicon rod grinding method |
| CN114102376B (en) * | 2020-08-28 | 2024-03-01 | 天通日进精密技术有限公司 | Silicon rod grinding machine and silicon rod grinding method |
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Application publication date: 20170517 |
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| RJ01 | Rejection of invention patent application after publication |