CN205601002U - Single crystal silicon rod single line clipper - Google Patents

Single crystal silicon rod single line clipper Download PDF

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Publication number
CN205601002U
CN205601002U CN201620271148.3U CN201620271148U CN205601002U CN 205601002 U CN205601002 U CN 205601002U CN 201620271148 U CN201620271148 U CN 201620271148U CN 205601002 U CN205601002 U CN 205601002U
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China
Prior art keywords
crystal bar
assembly
guide rail
paw
crystal
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CN201620271148.3U
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Chinese (zh)
Inventor
曹建伟
沈文杰
朱亮
卢嘉彬
邱文杰
杨思炜
何守龙
陈志聪
罗世铭
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Shaoxing Shangyu Jingxin Electromechanical Technology Co. Ltd.
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Shangyu Jingxin Electromechanical Technology Co Ltd
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Abstract

The utility model relates to a crystal bar cutting technique aims at providing single crystal silicon rod single line clipper. This single crystal silicon rod single line clipper includes chassis subassembly, feed unit, robot assembly, unloading platform subassembly, can utilize the mode of buddha's warrior attendant wire -electrode cutting to block processing to the single crystal silicon rod. Use the utility model discloses carry out blocking of crystal bar and add man -hour, can once realize three crystal bars the crop end, cut sample wafer and isometric and block processing, three crystal bar simultaneous processing, it is consuming time to have practiced thrift processing, additionally, the utility model discloses a buddha's warrior attendant line is as the line of cut, and the score is narrow, silicon consumes less, the tangent plane is level and smooth, and the crystal bar transfer transport of cut has reduced manual operation by manipulator automation completion.

Description

Silicon single crystal rod single line shear
Technical field
This utility model is about crystal bar cutting technique field, particularly to silicon single crystal rod single line shear.
Background technology
Along with the development that photovoltaic industry is advanced by leaps and bounds in recent years, the production capacity of monocrystal silicon also continues to increase.Prepare the normal of silicon single crystal Including the method such as vertical pulling method, zone-melting process by method, the monocrystal silicon using this type of method to prepare all becomes the crystal bar of column type, Needing to proceed series of processes, silicon single crystal rod single line shear applies to block manufacturing procedure, carry out crop end, Cut print and isometric batch block processing, then, also need carrying out after silicon rod viscose cutting into slices, clean, chamfering, corrosion Cleaning etc. again;Last silicon chip carry out making herbs into wool, spread, make the operations such as knot, plated film and sintering after just can produce for The solar battery sheet of photovoltaic generation.
Silicon single crystal rod single line shear utilizes diamond stone line as line of cut, and diamond stone line is by resin bonding or electricity Diamond is sticked to steel wire surface by the method for plating, and diamond stone line is called for short diamond wire.Silicon single crystal rod single line shear passes through Diamond on diamond wire and silicon rod friction therebetween reach dissection.
Current domestic main silicon single crystal rod single line shear equipment traditional band saw or mortar line block, common band Saw thickness is at about 3mm, and the saw kerf of diamond fretsaw is only 0.3-0.45mm, uses diamond fretsaw score narrow, Raw-material loss can be reduced, significantly reduce production cost.Traditional mortar free type cutting mode, its environment Badly, not environmentally, there is substantial amounts of mortar to need recycling, consume substantial amounts of manpower, financial resources.And diamond wire Clear water can be used directly during saw cut as cutting liquid, greatly improved the working environment of workman, it is achieved that environmental protection is raw Produce.
Utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, it is provided that a kind of side using diamond wire to cut Formula, silicon single crystal rod to three stations can block the equipment of processing simultaneously.For solving above-mentioned technical problem, this practicality Novel solution is:
Thering is provided silicon single crystal rod single line shear, silicon single crystal rod is blocked processing by the mode that diamond wire can be utilized to cut, institute State silicon single crystal rod single line shear and include underframe assemblies, feed unit, mechanical arm assembly, blanking bench assembly;
Described underframe assemblies includes that crystal bar supports platform, clamp system, automatic supporting mechanism, crystal bar carrying assembly;Described crystalline substance Rod supports platform and is provided with at least one station, and the both sides of each station are each provided with one and line up oblique crank Z and hold A, are used for placing crystalline substance Rod;Described crystal bar carrying assembly includes crystal bar end face body, sucker, sucker cylinder, and sucker connects with sucker cylinders, Sucker cylinder is fixed on crystal bar end face body, and sucker cylinder can stretch out, and sucker is used for holding crystal bar truncation surface, and drags Crystal bar is to the Cutting Length set;Described clamp system includes crystal bar fixed claw, clamping cylinder, clamp system support, brilliant Rod fixed claw is connected with clamping cylinder, and clamping cylinder is fixed on clamp system support, when crystal bar carrying assembly is by crystal bar After dragging to required Cutting Length, clamping cylinder can stretch out, and promotes crystal bar fixed claw to move downward clamping crystal bar;Described Automatic supporting mechanism includes that locking cylinder, V-arrangement prop up bracer, floating junction, automatically support body, roller, and V-arrangement supports Block is connected by floating junction with locking cylinder, and locking cylinder is fixed on and automatically supports on body, and V-arrangement props up pacifies on bracer Equipped with roller, after crystal bar is clamped by clamp system, locking cylinder can stretch out promotion V-arrangement, and to prop up bracer close to centre, connects Touch locking cylinder locking after crystal bar, it is achieved support;
Described feed unit is vertically mounted on the top of underframe assemblies, feed unit include portal frame, guide rail A, big backboard, Guide wheel, the guide wheel that tests the speed, retractable cable wheel, motor A, screw mandrel A;Portal frame is provided with two parallel guide rail A, carries on the back greatly Plate is arranged on two guide rail A;Described motor A is arranged on portal frame, and motor A can drive the big back of the body by screw mandrel A Plate, makes big backboard can move along guide rail A in the vertical direction;Described guide wheel, the guide wheel that tests the speed, retractable cable wheel is respectively mounted On big backboard, and retractable cable wheel is provided with two, and diamond wire can be from the beginning of a retractable cable wheel, after guide wheel, the guide wheel that tests the speed, On another one retractable cable wheel, the crystal bar on station can be carried out MATERIAL CUTTING simultaneously;
Described mechanical arm assembly includes moving horizontally assembly, vertical moving assembly, paw assembly, states mechanical arm assembly and utilizes Move horizontally assembly and vertical moving assembly, can move on the station of underframe assemblies, and crystal bar can be carried out by paw assembly Capture, and the crystal bar cut is moved be placed on blanking bench;Described move horizontally assembly include moving horizontally body, Horizontal lead screw, horizontal guide rail, horizontal slide, move horizontally motor, move horizontally body and be fixed on above portal frame, water Level gauge is fixed on and moves horizontally on body, and horizontal slide is arranged on horizontal guide rail, moves horizontally motor and can pass through level Screw mandrel drives horizontal slide to carry out moving left and right in horizontal direction along horizontal guide rail;Described vertical moving assembly includes vertically Mounting seat, vertical screw mandrel, upright guide rail, vertical mobile motor, upright guide rail is fixed on the level cunning moving horizontally assembly On seat, vertically-mounted seat is arranged on upright guide rail, and vertical mobile motor can drive vertically-mounted seat edge by vertical screw mandrel Upright guide rail carries out moving up and down on vertical direction;Described paw assembly includes mechanical paw mounting seat, paw, left-handed Screw mandrel, dextrorotation screw mandrel, paw guide rail, clamping motor, mechanical paw mounting seat is fixed on the bottom of vertically-mounted seat, hands Pawl is by paw guide rails assembling in mechanical paw mounting seat, and paw mounted in pairs, clamping motor can pass through left-handed screw mandrel Paired paw is driven to realize clamping and unclamp action with dextrorotation screw mandrel;
Described blanking bench assembly includes blanking bench body, shapes bearing B, and the both sides of blanking bench body are each provided with one and line up Oblique crank Z holds B, for placing the crystal bar after blocking, and shifts the crystal bar after blocking.
As further improving, described underframe assemblies being provided with three stations, each station can place a crystal bar.
As further improving, seven holes on described big backboard, are distributed, are used for guide wheel and the introduction that tests the speed are installed.
Compared with prior art, the beneficial effects of the utility model are:
Use this utility model to carry out blocking of crystal bar and add man-hour, can once realize three crystal bars crop end, cut print and Isometric blocking processing, three crystal bars are processed simultaneously, have saved processing time-consuming.It addition, this utility model uses diamond wire to make For line of cut, score is narrow, silicon consumes less, tangent plane is smooth, and the crystal bar transfer carrying cut is automatically performed by mechanical hand, Decrease manual operation.
Accompanying drawing explanation
Fig. 1 is that isometric of the present utility model attempts.
Fig. 2 is front view of the present utility model.
Fig. 3 is side view of the present utility model.
Fig. 4 is the schematic diagram of underframe assemblies in this utility model.
Fig. 5 is the top view of automatic supporting mechanism in this utility model.
Fig. 6 is the schematic diagram of feed unit in this utility model.
Fig. 7 is the paw assembly partial view of mechanical arm assembly in this utility model.
Reference in figure is: 100 mechanical arm assemblies;200 feed unit;300 underframe assemblies;400 blanking bench groups Part;101 paw assemblies;102 vertical moving assemblies;103 move horizontally assembly;104 move horizontally motor;105 water Smooth seat;106 vertical screw mandrels;107 upright guide rails;108 horizontal guide rails;109 horizontal lead screws;110 move horizontally this Body;111 clamping motors;112 left-handed screw mandrels;113 dextrorotation screw mandrels;114 paw guide rails;115 paws;116 machineries Paw mounting seat;117 vertical mobile motors;118 vertically-mounted seats;201 guide wheels;202 big backboards;203 guide rail A; 204 portal frames;205 screw mandrel A;206 motor A;207 retractable cable wheels;208 test the speed guide wheel;209 diamond wires;301 Crystal bar;302 shape bearing A;303 crystal bars support platform;304 clamp systems;305 automatic supporting mechanisms;306 suckers; 307 crystal bar carrying assemblies;308 sucker cylinders;309 crystal bar end face bodies;310 crystal bar fixed claws;311 clamp systems Support;312 clamping cylinders;313 floating junctions;314V shape props up bracer;315 rollers;316 support body automatically; 317 locking cylinders;401 shape bearing B;402 blanking bench bodies.
Detailed description of the invention
With detailed description of the invention, this utility model is described in further detail below in conjunction with the accompanying drawings:
As shown in Figures 1 to 7, silicon single crystal rod single line shear includes underframe assemblies 300, feed unit 200, machinery Hands assembly 100, blanking bench assembly 400, silicon single crystal rod is blocked processing by the mode that diamond wire 209 can be utilized to cut.
As shown in Figure 4, underframe assemblies 300 includes that crystal bar supports platform 303, clamp system 304, automatic supporting mechanism 305, crystal bar carrying assembly 307.Described crystal bar supports and is provided with three stations on platform 303, and each station both sides are respectively provided with One lines up oblique crank Z holds A302, and each station can place a crystal bar 301, makes crystal bar 301 can support platform at crystal bar smoothly Move forward and backward on 303.Described crystal bar carrying assembly 307 includes crystal bar end face body 309, sucker 306, sucker cylinder 308, sucker 306 is connected with sucker cylinder 308, and sucker cylinder 308 is fixed on crystal bar end face body 309, inhales Dish cylinder 308 stretches out, and sucker 306 holds the truncation surface of crystal bar 301, and drags crystal bar 301 to the Cutting Length set. Described clamp system 304 includes crystal bar fixed claw 310, clamping cylinder 312, clamp system support 311, crystal bar fixed claw 310 are connected with clamping cylinder 312, and clamping cylinder 312 is fixed on clamp system support 311;When crystal bar carrying group After crystal bar 301 is dragged to required Cutting Length by part 307, clamping cylinder 312 stretches out, and promotes crystal bar fixed claw 310 Move downward clamping crystal bar 301.Described automatic supporting mechanism 305 includes that locking cylinder 317, V-arrangement prop up bracer 314, float Dynamic joint 313, roller 315, automatically support body 316, V-arrangement is propped up bracer 314 and is connect by floating with locking cylinder 317 313 are connected, and locking cylinder 317 is fixed on and automatically supports on body 316, and V-arrangement props up and is provided with rolling on bracer 314 Wheel 315;After crystal bar 301 is clamped by clamp system 304, locking cylinder 317 stretch out promotion V-arrangement prop up bracer 314 to Middle close, after contact crystal bar 301, locking cylinder 317 is locked, it is achieved support.Specifically refer to Fig. 5.
As shown in Figure 6, feed unit 200 is vertically mounted on the top of underframe assemblies 300, and feed unit 200 includes dragon Door frame 204, guide rail A203, big backboard 202, guide wheel 201, the guide wheel 208 that tests the speed, retractable cable wheel 207, motor A206, Screw mandrel A205.Portal frame 204 is provided with two parallel guide rail A203, and big backboard 202 is arranged on two guide rail A203 On;Described motor A206 is arranged on portal frame 204, and motor A206 can drive big backboard 202 by screw mandrel A205, Big backboard 202 is made to move along guide rail A203 in the vertical direction.Described guide wheel 201, the guide wheel 208 that tests the speed, retractable cable are taken turns 207 are respectively mounted on big backboard 202, and wherein, guide wheel 201 and the guide wheel 208 that tests the speed are utilized respectively and are distributed in big backboard 202 On seven holes install.Retractable cable wheel 207 is provided with two, diamond wire 209 can from the beginning of a retractable cable wheel 207, After guide wheel 201, the guide wheel 208 that tests the speed, on another one retractable cable wheel 207;In cutting process, two folding and unfoldings Line wheel 207 rotates back and forth and drives diamond wire 209 to move back and forth, and the biggest backboard 202 is driven to moving down by motor A206 Dynamic, the crystal bar 301 on station can be carried out MATERIAL CUTTING simultaneously.
As in figure 2 it is shown, mechanical arm assembly 100 includes moving horizontally assembly 103, vertical moving assembly 102, paw group Part 101, mechanical arm assembly 100 utilizes and moves horizontally assembly 103 and vertical moving assembly 102, can move to underframe group On the station of part 300, and crystal bar 301 can be captured by paw assembly 101, and is moved by the crystal bar 301 cut It is placed on blanking bench.The described assembly 103 that moves horizontally includes moving horizontally body 110, horizontal lead screw 109, level Guide rail 108, horizontal slide 105, move horizontally motor 104, move horizontally body 110 and be fixed on above portal frame 204, Horizontal guide rail 108 is fixed on and moves horizontally on body 110, and horizontal slide 105 is arranged on horizontal guide rail 108, level Mobile motor 104 can drive horizontal slide 105 to carry out in horizontal direction along horizontal guide rail 108 by horizontal lead screw 109 Move left and right.Described vertical moving assembly 102 include vertically-mounted seat 118, vertical screw mandrel 106, upright guide rail 107, Vertically mobile motor 117, upright guide rail 107 is fixed on the horizontal slide 105 moving horizontally assembly 103, vertically pacifies Dress seat 118 is arranged on upright guide rail 107, and vertical mobile motor 117 can drive vertically-mounted by vertical screw mandrel 106 Seat 118 carries out moving up and down on vertical direction along upright guide rail 107.As it is shown in fig. 7, described paw assembly 101 wraps Include mechanical paw mounting seat 116, paw 115, left-handed screw mandrel 112, dextrorotation screw mandrel 113, paw guide rail 114, clamping Motor 111, mechanical paw mounting seat 116 is fixed on the bottom of vertically-mounted seat 118, and paw 115 is by paw guide rail 114 are arranged in mechanical paw mounting seat 116, and paw 115 mounted in pairs, and clamping motor 111 can pass through left-handed silk Bar 112 and dextrorotation screw mandrel 113 drive paired paw 115 realize clamping and unclamp action.
Blanking bench assembly 400 includes blanking bench body 402, shapes bearing B401, and the both sides of blanking bench body 402 respectively set It is equipped with one to line up profile shaft and hold B401, for the crystal bar 301 placed after blocking and the crystal bar 301 after blocking is shifted.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality Novel it is not limited to above example, it is also possible to have many variations.Those of ordinary skill in the art can be from this utility model The all deformation directly derived in disclosure or associate, are all considered as protection domain of the present utility model.

Claims (3)

1. silicon single crystal rod single line shear, silicon single crystal rod blocks processing by the mode that diamond wire can be utilized to cut, its Being characterised by, described silicon single crystal rod single line shear includes underframe assemblies, feed unit, mechanical arm assembly, blanking bench group Part;
Described underframe assemblies includes that crystal bar supports platform, clamp system, automatic supporting mechanism, crystal bar carrying assembly;Described crystalline substance Rod supports platform and is provided with at least one station, and the both sides of each station are each provided with one and line up oblique crank Z and hold A, are used for placing crystalline substance Rod;Described crystal bar carrying assembly includes crystal bar end face body, sucker, sucker cylinder, and sucker connects with sucker cylinders, Sucker cylinder is fixed on crystal bar end face body, and sucker cylinder can stretch out, and sucker is used for holding crystal bar truncation surface, and drags Crystal bar is to the Cutting Length set;Described clamp system includes crystal bar fixed claw, clamping cylinder, clamp system support, brilliant Rod fixed claw is connected with clamping cylinder, and clamping cylinder is fixed on clamp system support, when crystal bar carrying assembly is by crystal bar After dragging to required Cutting Length, clamping cylinder can stretch out, and promotes crystal bar fixed claw to move downward clamping crystal bar;Described Automatic supporting mechanism includes that locking cylinder, V-arrangement prop up bracer, floating junction, automatically support body, roller, and V-arrangement supports Block is connected by floating junction with locking cylinder, and locking cylinder is fixed on and automatically supports on body, and V-arrangement props up pacifies on bracer Equipped with roller, after crystal bar is clamped by clamp system, locking cylinder can stretch out promotion V-arrangement, and to prop up bracer close to centre, connects Touch locking cylinder locking after crystal bar, it is achieved support;
Described feed unit is vertically mounted on the top of underframe assemblies, feed unit include portal frame, guide rail A, big backboard, Guide wheel, the guide wheel that tests the speed, retractable cable wheel, motor A, screw mandrel A;Portal frame is provided with two parallel guide rail A, carries on the back greatly Plate is arranged on two guide rail A;Described motor A is arranged on portal frame, and motor A can drive the big back of the body by screw mandrel A Plate, makes big backboard can move along guide rail A in the vertical direction;Described guide wheel, the guide wheel that tests the speed, retractable cable wheel is respectively mounted On big backboard, and retractable cable wheel is provided with two, and diamond wire can be from the beginning of a retractable cable wheel, after guide wheel, the guide wheel that tests the speed, On another one retractable cable wheel, the crystal bar on station can be carried out MATERIAL CUTTING simultaneously;
Described mechanical arm assembly includes moving horizontally assembly, vertical moving assembly, paw assembly, states mechanical arm assembly and utilizes Move horizontally assembly and vertical moving assembly, can move on the station of underframe assemblies, and crystal bar can be carried out by paw assembly Capture, and the crystal bar cut is moved be placed on blanking bench;Described move horizontally assembly include moving horizontally body, Horizontal lead screw, horizontal guide rail, horizontal slide, move horizontally motor, move horizontally body and be fixed on above portal frame, water Level gauge is fixed on and moves horizontally on body, and horizontal slide is arranged on horizontal guide rail, moves horizontally motor and can pass through level Screw mandrel drives horizontal slide to carry out moving left and right in horizontal direction along horizontal guide rail;Described vertical moving assembly includes vertically Mounting seat, vertical screw mandrel, upright guide rail, vertical mobile motor, upright guide rail is fixed on the level cunning moving horizontally assembly On seat, vertically-mounted seat is arranged on upright guide rail, and vertical mobile motor can drive vertically-mounted seat edge by vertical screw mandrel Upright guide rail carries out moving up and down on vertical direction;Described paw assembly includes mechanical paw mounting seat, paw, left-handed Screw mandrel, dextrorotation screw mandrel, paw guide rail, clamping motor, mechanical paw mounting seat is fixed on the bottom of vertically-mounted seat, hands Pawl is by paw guide rails assembling in mechanical paw mounting seat, and paw mounted in pairs, clamping motor can pass through left-handed screw mandrel Paired paw is driven to realize clamping and unclamp action with dextrorotation screw mandrel;
Described blanking bench assembly includes blanking bench body, shapes bearing B, and the both sides of blanking bench body are each provided with one and line up Oblique crank Z holds B, for placing the crystal bar after blocking, and shifts the crystal bar after blocking.
Silicon single crystal rod single line shear the most according to claim 1, it is characterised in that set on described underframe assemblies Being equipped with three stations, each station can place a crystal bar.
Silicon single crystal rod single line shear the most according to claim 1, it is characterised in that be distributed on described big backboard There are seven holes, are used for guide wheel and the introduction that tests the speed are installed.
CN201620271148.3U 2016-04-01 2016-04-01 Single crystal silicon rod single line clipper Active CN205601002U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106426580A (en) * 2016-10-19 2017-02-22 成都迅德科技有限公司 Silicon single crystal rod electric cutting-off device based on diamond wire roller
CN106670931A (en) * 2016-11-30 2017-05-17 浙江晶盛机电股份有限公司 Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine
CN107443601A (en) * 2017-08-26 2017-12-08 福州天瑞线锯科技有限公司 Monocrystalline bar MATERIAL CUTTING equipment
CN108748749A (en) * 2018-05-31 2018-11-06 青岛高测科技股份有限公司 A kind of crystal silicon hilted broadsword shear
CN110238980A (en) * 2019-07-03 2019-09-17 青岛高测科技股份有限公司 A kind of hilted broadsword double stick shear

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106426580A (en) * 2016-10-19 2017-02-22 成都迅德科技有限公司 Silicon single crystal rod electric cutting-off device based on diamond wire roller
CN106670931A (en) * 2016-11-30 2017-05-17 浙江晶盛机电股份有限公司 Automatic centering manipulator device used for monocrystal silicon bar rolling and grinding integrated machine
CN107443601A (en) * 2017-08-26 2017-12-08 福州天瑞线锯科技有限公司 Monocrystalline bar MATERIAL CUTTING equipment
CN108748749A (en) * 2018-05-31 2018-11-06 青岛高测科技股份有限公司 A kind of crystal silicon hilted broadsword shear
CN110238980A (en) * 2019-07-03 2019-09-17 青岛高测科技股份有限公司 A kind of hilted broadsword double stick shear

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Address after: 312300 No. 218 West Tongjiang Road, Shangyu economic and Technological Development Zone, Shaoxing, Zhejiang

Co-patentee after: Zhejiang Jingsheng Electrical and Mechanical Co., Ltd.

Patentee after: Shaoxing Shangyu Jingxin Electromechanical Technology Co. Ltd.

Address before: 312300 Shangyu economic and Technological Development Zone, Zhejiang, Tongjiang West Road, No. 218, No.

Co-patentee before: Zhejiang Jingsheng Electrical and Mechanical Co., Ltd.

Patentee before: Shangyu Jingxin Electromechanical Technology Co., Ltd.

CP03 Change of name, title or address