CN210968306U - Coarse grinding and fine grinding integrated machine for crystalline silicon - Google Patents
Coarse grinding and fine grinding integrated machine for crystalline silicon Download PDFInfo
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- CN210968306U CN210968306U CN201921358052.0U CN201921358052U CN210968306U CN 210968306 U CN210968306 U CN 210968306U CN 201921358052 U CN201921358052 U CN 201921358052U CN 210968306 U CN210968306 U CN 210968306U
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- 229910021419 crystalline silicon Inorganic materials 0.000 title claims description 92
- 238000012546 transfer Methods 0.000 claims abstract description 88
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 86
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 86
- 239000010703 silicon Substances 0.000 claims abstract description 86
- 239000013078 crystal Substances 0.000 claims abstract description 82
- 230000007246 mechanism Effects 0.000 claims abstract description 81
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 10
- 238000007670 refining Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 21
- 230000003028 elevating effect Effects 0.000 description 6
- 230000000712 assembly Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 229910001651 emery Inorganic materials 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a crystal silicon corase grind correct grinding all-in-one belongs to crystal silicon processing equipment field, including base and slide rail, the slide rail setting sets gradually along the length direction of slide rail on the base: coarse grinding district, crystal silicon transfer mechanism and accurate grinding district, be provided with crystal silicon transfer mechanism between coarse grinding district and the accurate grinding district, coarse grinding district and accurate grinding district all are equipped with the grinding that is used for centre gripping crystal silicon and feed worktable mechenism and at least two sets of bistriques and feed the subassembly, the grinding is fed worktable mechenism and is located on the slide rail and with slide rail sliding connection, and at least two sets of bistriques that are located coarse grinding district and accurate grinding district feed the setting in the slide rail both sides of subassembly symmetry, form the grinding passageway that supplies crystal silicon to pass through and grinding crystal silicon, the utility model discloses a coarse grinding district and accurate grinding district carry out coarse grinding and accurate grinding processing to crystal silicon respectively, and can carry out the coarse grinding and accurate grinding processing to different.
Description
Technical Field
The utility model belongs to the technical field of crystal silicon processing equipment, specifically speaking relates to a crystal silicon corase grind correct grinding all-in-one.
Background
The existing equipment on the market is mainly used for carrying out the rough grinding and the accurate grinding on the opposite surface and the arc in a separated working procedure, only two surfaces can be processed each time, and the grinding efficiency is low. Because the rough grinding and the accurate grinding are at two positions, the accurate grinding allowance is large after the rough grinding, the efficiency is low, and therefore how to rapidly carry out the rough grinding and the accurate grinding on the silicon after the square cutting is the problem which needs to be solved.
SUMMERY OF THE UTILITY MODEL
Aiming at various defects in the prior art, a rough grinding and fine grinding integrated machine which has the functions of grinding four sides, grinding single side and processing single arc independently and controlling is provided for grinding, polishing and chamfering the cut monocrystalline silicon rod, so that arc and surface integrated polishing of monocrystalline silicon square rods with different specifications is realized, and the grinding and rounding of the silicon ingot can be automatically completed in the same equipment.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a crystalline silicon corase grind correct grinding all-in-one, includes base and slide rail, and the slide rail setting sets gradually on the base along the length direction of slide rail: coarse grinding district, crystal silicon transfer mechanism and accurate grinding district, coarse grinding district and accurate grinding district all are equipped with the grinding that is used for centre gripping crystal silicon and feed the workstation mechanism and at least two sets of bistriques and feed the subassembly, the grinding feeds workstation mechanism and slide rail sliding connection for the centre gripping carries crystal silicon, and the at least two sets of bistriques that are located coarse grinding district and accurate grinding district feed the subassembly symmetry set up in the slide rail both sides, form the grinding passageway that supplies crystal silicon to pass through and grind crystal silicon.
Further, the rough grinding area also comprises a rough grinding head assembly, a feeding worktable mechanism and a centering mechanism; the rough grinding head assembly is connected with the grinding head feeding assembly through a rough grinding main shaft; the feeding worktable mechanism is arranged on one side of the slide rail and used for bearing the crystalline silicon and conveying the crystalline silicon to the upper part of the slide rail; the centering mechanism is arranged between the feeding worktable mechanism and the slide rail so as to perform centering operation on the crystalline silicon on the feeding worktable mechanism and enable the length direction of the crystalline silicon to be parallel to the slide rail;
the crystal silicon transfer mechanism is arranged along the direction vertical to the sliding rail and used for transferring the crystal silicon after coarse grinding to the fine grinding area;
the fine grinding area also comprises a fine grinding head component and a blanking worktable mechanism; the grinding head feeding assembly is connected with the grinding head feeding assembly through a grinding main shaft; and the blanking worktable mechanism is arranged on one side of the sliding rail and is used for bearing the crystal silicon which is finished by accurate grinding.
Further, the feeding worktable mechanism comprises a feeding supporting seat, a feeding supporting plate, a feeding worktable and a feeding vertical lifting screw rod, the bottom of the feeding supporting seat is fixedly connected with the base, the feeding supporting seat is vertically provided with a feeding vertical slide rail, the feeding supporting plate is arranged along the horizontal direction and is in sliding connection with the feeding supporting seat in the vertical direction through the feeding vertical lifting screw rod, the feeding supporting plate is provided with a horizontal feeding worktable, the feeding worktable is in sliding connection with the feeding supporting plate through the horizontal feeding screw rod, the upper part of the feeding worktable is fixedly provided with a crystalline silicon supporting plate for supporting crystalline silicon, one side of the crystalline silicon supporting plate, which is close to the slide rail, is provided with a backup plate, the other side of the crystalline silicon supporting plate is provided with a crystalline silicon clamping plate, the backup plate and the crystalline silicon clamping plate are both arranged along the vertical direction, and the crystalline silicon clamping plate is fixedly connected with the piston end of the horizontal driving cylinder, so as to push the crystalline silicon clamping plate to be attached to the crystalline silicon and to be matched with the crystalline silicon clamping plate to adjust the crystalline silicon to be parallel to the guide rail.
Further, centering mechanism includes centering support column, centering clamp plate and centering clamp slide rail, the relative setting of centering clamp plate is two, and its vertical setting, the bottom and the base of centering support column link firmly, centering clamp slide rail sets firmly in the upper portion of centering support column and parallels with the slide rail, and two centering clamp plates pass through gear and rack and mesh mutually and slide with centre gripping crystal silicon along centering clamp slide rail, make the center of crystal silicon and crystal silicon backup pad center lie in same vertical line.
Further, the grinding and feeding worktable mechanism comprises a grinding and feeding base, a headstock assembly, a tailstock assembly and a tailstock feeding screw, wherein the grinding and feeding base is arranged on a slide rail and is in sliding connection with the slide rail through the grinding feeding screw;
the headstock assembly comprises a headstock chuck and a headstock rotating motor, the headstock chuck is in driving connection with the headstock rotating motor, the tailstock assembly comprises a tailstock chuck and a tailstock rotating motor, the tailstock chuck is connected with the tailstock rotating motor, the headstock chuck and the tailstock chuck are both positioned on the same straight line and are parallel to the sliding rail, and the headstock chuck and the tailstock chuck rotate simultaneously to rotate the crystalline silicon;
the headstock assembly is arranged at one end close to the crystal silicon transfer mechanism, and the tailstock assembly is arranged at one end far away from the crystal silicon transfer mechanism.
Further, the bistrique feeds the subassembly and includes that the bistrique feeds base, bistrique workstation, the vertical slide rail of bistrique and bistrique horizontal slide rail, the bottom that the bistrique fed the base links firmly with the base, and bistrique horizontal slide rail is located on the bistrique feeds the base, the bistrique workstation passes through bistrique horizontal feed lead screw and bistrique horizontal slide rail sliding connection, bistrique horizontal slide rail sets up along the horizontal direction and it is mutually perpendicular with the slide rail, the vertical slide rail of bistrique and surplus detection device have set firmly on the bistrique workstation, and the vertical slide rail of bistrique sets up and is provided with the bistrique slip table on the vertical slide rail of bistrique along vertical direction, the bistrique slip table set up and with the vertical.
Further, the rough grinding head assembly comprises a rough grinding rotating motor, a rough grinding main shaft and a rough grinding wheel, the rough grinding main shaft penetrates through the grinding head sliding table, one end of the rough grinding main shaft is fixedly connected with the output end of the rough grinding rotating motor, and the other end of the rough grinding main shaft is fixedly connected with the rough grinding wheel;
the fine grinding head assembly comprises a fine grinding rotating motor, a fine grinding main shaft and a fine grinding wheel, the fine grinding main shaft penetrates through the grinding head sliding table, one end of the fine grinding main shaft is fixedly connected with the output end of the fine grinding rotating motor, and the other end of the fine grinding main shaft is fixedly connected with the fine grinding wheel;
the rough grinding wheel and the fine grinding wheel are arranged in the vertical direction.
Further, crystal silicon shifts mechanism is including shifting support post, the relative transfer clamping jaw subassembly that sets up, vertical transfer cylinder, horizontal transfer cylinder, vertical transfer guide pillar, horizontal transfer guide rail and shifting fixed station, the bottom that shifts support post links firmly with the base, and vertical transfer guide pillar links firmly with the upper portion that shifts support post, shifts clamping jaw subassembly through vertical transfer cylinder and shift support post sliding connection, shifts clamping jaw subassembly and produces relative displacement through the drive of horizontal transfer cylinder for carry out centre gripping and relax to crystal silicon.
Further, unloading workstation mechanism includes unloading supporting seat, unloading backup pad, unloading workstation, the vertical elevating screw of unloading, the lower part and the base of unloading supporting seat link firmly, the unloading backup pad sets up along the horizontal direction, the vertical elevating screw of unloading is vertical along vertical direction for drive unloading backup pad moves along vertical direction, the top of unloading backup pad is provided with the level to unloading workstation, the unloading workstation passes through horizontal feed lead screw and unloading backup pad sliding connection, and its upper portion is equipped with the unloading fixed plate, is used for accepting the crystal silicon that the correct grinding has finished.
The utility model has the advantages that:
and the crystal silicon after being cut is subjected to surface grinding, polishing and chamfering, so that the requirement of arc and surface integrated polishing of the monocrystalline silicon square rods with different specifications is met. The grinding surface and the rounding of the crystal silicon are automatically completed by the same equipment, the crystal silicon is converted into a station in a finish grinding area to be processed in a finish grinding mode after coarse grinding, meanwhile, idle coarse grinding station feeding can simultaneously perform coarse grinding, the silicon rod coarse grinding and finish grinding are simultaneously processed, the grinding surface and the rounding efficiency are improved, and the efficiency is improved by more than 1 time.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is another overall structure diagram of the present invention;
FIG. 3 is a schematic structural diagram of a feeding worktable mechanism;
FIG. 4 is a schematic structural view of the centering mechanism;
FIG. 5 is a schematic view of the structure of the grinding feed table mechanism;
fig. 6 is a schematic structural view of the grinding head feed assembly;
FIG. 7 is a schematic structural view of a crystal silicon transfer mechanism;
fig. 8 is a schematic structural view of the blanking table mechanism.
In the drawings: 1-a base; 2-a slide rail;
the device comprises a 3-crystalline silicon transfer mechanism, a 301-transfer support upright, a 302-transfer clamping jaw assembly, a 303-vertical transfer guide column, a 304-horizontal transfer guide rail and a 305-transfer fixed table;
4-grinding feed table mechanism, 401-grinding feed base, 402-headstock assembly, 403-tailstock assembly and 404-tailstock feed screw;
5-grinding head feeding assembly, 501-grinding head feeding base, 502-grinding head workbench, 503-grinding head vertical slide rail, 504-grinding head horizontal slide rail, 505-grinding head horizontal feeding screw rod and 506-grinding head lifting cylinder;
6-rough grinding head assembly, 601-rough grinding wheel;
7-a feeding worktable mechanism, 701-a feeding supporting seat, 702-a feeding supporting plate, 703-a feeding worktable, 704-a crystalline silicon supporting plate, 705-a backup plate and 706-a crystalline silicon clamping plate;
8-centering mechanism, 801-centering support column, 802-centering clamping plate, 803-centering clamping slide rail, 804-gear and 805-rack;
9-a fine grinding head assembly and 901-a fine grinding wheel;
10-a blanking worktable mechanism, 1001-a blanking supporting seat, 1002-a blanking supporting plate, 1003-a blanking worktable and 1004-a blanking fixing plate.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following description, together with the drawings of the present invention, clearly and completely describes the technical solution of the present invention, and based on the embodiments in the present application, other similar embodiments obtained by those skilled in the art without creative efforts shall all belong to the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustration and not for limitation of the present invention.
The present invention will be further described with reference to the accompanying drawings and preferred embodiments.
The utility model provides a crystal silicon corase grind correct grinding all-in-one, includes base 1 and slide rail 2, slide rail 2 sets up on base 1, has set gradually corase grind district, crystal silicon transfer mechanism 3 and correct grinding district along the length direction of slide rail 2, corase grind district and correct grinding district all are equipped with the grinding that is used for centre gripping crystal silicon and feed worktable mechenism 4 and at least two sets of bistriques and feed subassembly 5, the grinding is fed worktable mechenism 4 and is located slide rail 2 go up and with slide rail 2 sliding connection, be located corase grind district and correct grinding district at least two sets of bistriques and feed subassembly 5 symmetries set up in slide.
The corase grind district still includes corase grind head subassembly 6, material loading worktable mechenism 7 and centering mechanism 8, corase grind head subassembly 6 through the rough grinding head cylinder with the bistrique feeds subassembly 5 swing joint, and the relative setting of rough grinding head subassembly 6 that is located slide rail 2 both sides forms the corase grind passageway that supplies crystal silicon to pass through. The feeding worktable mechanism 7 is arranged on one side of the slide rail 2 and used for bearing the crystalline silicon and conveying the crystalline silicon to the upper part of the slide rail 2. The centering mechanism 8 is arranged between the feeding worktable mechanism 7 and the slide rail 2 and used for centering the crystalline silicon on the feeding worktable mechanism 7, so that the length direction of the crystalline silicon after being chamfered is parallel to the slide rail 2. The crystalline silicon transfer mechanism 3 is arranged along the direction vertical to the slide rail 2 and used for transferring the crystalline silicon after coarse grinding to the fine grinding area.
The refining zone also comprises a refiner head assembly 9 and a discharge table mechanism 10. The fine grinding head assembly 9 is movably connected with the grinding head feeding assembly 5, and the fine grinding head assemblies 9 positioned on two sides of the sliding rail 2 are oppositely arranged to form a fine grinding channel for the crystalline silicon to pass through and grinding the crystalline silicon. The blanking worktable mechanism 10 is positioned at one side of the slide rail 2 and is used for bearing the crystal silicon which is finished by accurate grinding.
On material loading worktable mechenism 7 was placed to the crystalline silicon that the evolution finished, through the centering of centering mechanism 8, material loading worktable mechenism 7 carries crystalline silicon to slide rail 2 tops, the grinding feeds 4 centre gripping crystalline silicon of worktable mechenism to rough grinding head subassembly 6 departments, carry out the corase grind to crystalline silicon, crystalline silicon transfer mechanism 3 feeds worktable mechenism 4 departments with the crystalline silicon centre gripping after the corase grind to the grinding that is located the accurate grinding district, the realization is to the centre gripping of crystalline silicon, the accurate grinding subassembly 9 of being convenient for carries out the accurate grinding to crystalline silicon, unloading worktable mechenism 10 removes to slide rail 2 tops, be used for bearing the crystalline silicon that the accurate grinding has finished, realize the integration of crystalline silicon corase grind and accurate grinding.
Example one
Referring to fig. 1, 2, and 3, the feeding table mechanism 7 includes a feeding support seat 701, a feeding support plate 702, a feeding table 703, and a feeding vertical lifting screw. The bottom of material loading supporting seat 701 links firmly with base 1, and is provided with the vertical slide rail of material loading on the material loading supporting seat 701, simultaneously, material loading backup pad 702 sets up along the horizontal direction, the vertical elevating screw of material loading sets up along vertical direction, and it links firmly with material loading supporting seat 701 through the vertical elevating screw support of material loading, the screw nut of the vertical elevating screw of material loading links firmly with material loading backup pad 702, the vertical elevating screw of material loading links firmly with servo motor's output for drive material loading backup pad 702 slides along the vertical slide rail of material loading, is used for carrying crystal silicon on vertical direction. Meanwhile, a feeding horizontal sliding rail and a feeding screw rod are arranged on the upper portion of the feeding supporting plate 702, the feeding horizontal sliding rail and the feeding screw rod are arranged in the horizontal direction and perpendicular to the sliding rail 2, and the feeding workbench 703 is located above the feeding horizontal sliding rail and slides along the feeding horizontal sliding rail under the driving of the feeding screw rod. That is to say, the feeding workbench 703 can generate displacement along the vertical direction through the feeding vertical lifting screw rod, and can also generate horizontal displacement along the direction perpendicular to the slide rail 2 through the feeding screw rod.
In order to place crystalline silicon, a crystalline silicon supporting plate 704 is fixedly arranged on the feeding workbench 703, and the crystalline silicon supporting plate 704 is arranged in the horizontal direction and is parallel to the sliding rail 2. In addition, be provided with backup plate 705 along vertical direction on the material loading workstation 703, backup plate 705 is located the one side of crystal silicon backup pad 704 for offset with the terminal surface of crystal silicon, the vertical crystal silicon clamping plate 706 that is equipped with of the opposite side of crystal silicon backup pad 704, one side that crystal silicon clamping plate 706 kept away from backup plate 705 links firmly with the piston end that the clamping plate drove actuating cylinder, the clamping plate drove actuating cylinder and sets firmly on material loading workstation 703 along the horizontal direction for promote crystal silicon and guarantee that crystal silicon and backup plate 705 paste mutually. That is to say, crystal silicon is placed on crystal silicon supporting plate 704, and crystal silicon clamping plate 706 is adjusted it to pasting mutually with backup plate 705, and the vertical lifting screw drive material loading workstation 703 of material loading produces the displacement of vertical direction, and the material loading lead screw drives material loading workstation 703 and produces horizontal displacement along the direction with slide rail 2 looks vertically, carries crystal silicon to grinding and feeds workstation mechanism 4 department.
Example two
Referring to fig. 4, 1 and 2, the centering mechanism 8 includes a centering support column 801, two centering clamping plates 802 arranged oppositely, and two centering clamping sliding rails 803 arranged in parallel. The centering and clamping plate 802 is arranged along the vertical direction, the bottom of the centering and supporting column 801 is fixedly connected with the base 1, the centering and clamping slide rail 803 is arranged in parallel with the slide rail 2 and is arranged on the upper portion of the centering and supporting column 801 through a fixing plate, a centering and clamping slide block and the centering and clamping slide rail 803 are arranged on the centering and clamping slide rail 803 in a sliding fit mode, the centering and clamping plate 802 is fixedly connected with the centering and clamping slide block, meanwhile, a gear 804 and a rack 805 forming a transmission pair with the gear 804 are arranged on the fixing plate, the rack 805 is arranged along the direction of the slide rail 2, the centering and clamping slide block is fixedly connected with the rack 805, and the gear 804 is fixedly connected with. That is to say, the two centering clamping plates 802 are meshed with the gear 804 through the rack 805, when the centering motor rotates forwards, the two centering clamping plates 802 approach to each other, when the centering motor rotates backwards, the two centering clamping plates 802 are away from each other, and in the process that the two centering clamping plates 802 approach to each other, the purpose of adjusting the crystalline silicon to the central position of the crystalline silicon supporting plate 704 is achieved.
The crystalline silicon clamping plate 706 adjusts the crystalline silicon to be attached to the backup plate 705, and the centering mechanism 8 adjusts the centers of the crystalline silicon and the crystalline silicon support plate 704 in the direction of the slide rail 2 to be located on the same vertical line. The subsequent grinding feeding worktable mechanism 4 is convenient for clamping the crystal silicon, and the crystal silicon is prevented from being clamped and biased.
EXAMPLE III
Referring to fig. 5, 1 and 2, the grinding and feeding table mechanism 4 includes a grinding and feeding base 401, a headstock assembly 402, a tailstock assembly 403 and a tailstock feed screw 404. The grinding feeding base 401 is arranged on the slide rail 2, a slide rail groove is arranged at the bottom of the grinding feeding base, and the grinding feeding base is in sliding fit with the slide rail 2 through a grinding feeding screw fixed on the base 1. Headstock subassembly 402 sets firmly on grinding feeding base 401, and its one end that is located near crystal silicon transfer mechanism 3, tailstock subassembly 403 is located and keeps away from crystal silicon transfer mechanism 3's one end, simultaneously, tailstock subassembly 403's below is provided with tailstock feed screw 404, just tailstock feed screw 404 sets up along the direction of slide rail 2, tailstock subassembly 403 slides along the direction of slide rail 2 through tailstock feed screw 404, realizes the centre gripping to different length crystal silicon.
Specifically, the headstock assembly 402 includes a headstock fixing frame, a headstock chuck, a headstock rotating shaft, and a headstock rotating motor, the headstock fixing frame is fixedly connected to the grinding feeding base 401, the headstock rotating motor is disposed at the upper portion of the headstock fixing frame, the output end of the headstock rotating motor is connected to one end of the headstock rotating shaft, the other end of the headstock rotating shaft is fixedly connected to the headstock chuck, the headstock rotating shaft is parallel to the slide rail 2, and the headstock chuck is disposed along the vertical direction and is used for abutting against one end of the clamped crystalline silicon.
That is, the tailstock assembly 403 is driven by the tailstock feed screw 404 to slide along the direction of the slide rail 2, so as to adjust the distance between the tailstock assembly and the headstock assembly 402, so as to clamp crystalline silicon with different lengths, and when the headstock chuck and the tailstock chuck are both abutted to the clamped crystalline silicon, the crystalline silicon is smoothly clamped. When the head frame rotating motor and the tail frame rotate to the same direction at the same time, the rotation of the clamped crystal silicon is realized.
Example four
Referring to fig. 6, 1 and 2, the grinding head feeding assembly 5 includes a grinding head feeding base 501, a grinding head worktable 502, grinding head vertical slide rails 503, grinding head horizontal slide rails 504, a grinding head horizontal feeding screw 505 and a grinding head lifting cylinder 506. The bottom of the grinding head feeding base 501 is fixedly connected with the base 1, a grinding head horizontal slide rail 504 and a grinding head horizontal feeding screw 505 are fixedly arranged on the grinding head feeding base 501, and the grinding head horizontal feeding screw 505 is used for driving the grinding head workbench 502 to generate displacement. Specifically, the grinding head horizontal slide rail 504 and the grinding head horizontal feed screw 505 are arranged along the horizontal direction and are perpendicular to the slide rail 2, and a screw nut of the grinding head horizontal feed screw 505 is fixedly connected with the grinding head worktable 502 and is connected with an output end of a servo motor for driving the grinding head worktable 502 to displace along the grinding head horizontal slide rail 504.
In addition, still be provided with the vertical slide rail 503 of bistrique and surplus detection device on bistrique workstation 502, the vertical slide rail 503 of bistrique sets up along vertical direction, be provided with the bistrique slip table on the vertical slide rail 503 of bistrique, the bistrique slip table sets up along vertical direction. Meanwhile, a grinding head lifting cylinder 506 is fixedly arranged on the grinding head workbench 502, the grinding head lifting cylinder 506 is arranged in the vertical direction, and the piston end of the grinding head lifting cylinder 506 is fixedly connected with the grinding head sliding table and used for driving the grinding head sliding table to slide along the grinding head vertical sliding rail 503. The allowance detection device is used for performing allowance detection on the crystalline silicon.
That is to say, bistrique slip table both can produce the displacement along the horizontal direction, can produce the displacement along vertical direction again.
EXAMPLE five
Referring to fig. 1 and 2, the rough grinding head assembly 6 located in the rough grinding area is movably connected with the grinding head sliding table through a rough grinding main shaft. Specifically, rough grinding head subassembly 6 includes corase grind rotating electrical machines and corase grind emery wheel 601, the corase grind main shaft runs through bistrique slip table, and its one end links firmly with corase grind rotating electrical machines's output, and its other end links firmly with corase grind emery wheel 601, rotates through corase grind rotating electrical machines drive corase grind emery wheel 601.
And a fine grinding head assembly 9 positioned in the fine grinding area is movably connected with the grinding head sliding table through a fine grinding main shaft. Specifically, the finish grinding head assembly 9 includes a finish grinding rotating motor and a finish grinding wheel 901, the finish grinding spindle penetrates through the grinding head sliding table, one end of the finish grinding spindle is fixedly connected with the output end of the finish grinding rotating motor, the other end of the finish grinding spindle is fixedly connected with the finish grinding wheel 901, and the finish grinding wheel 901 is driven to rotate by the finish grinding rotating motor. Meanwhile, the rough grinding wheel 601 and the finish grinding wheel 901 are both arranged in the vertical direction.
EXAMPLE six
Referring to fig. 7, 1 and 2, the crystalline silicon transfer mechanism 3 includes a transfer support column 301, a transfer jaw assembly 302 arranged oppositely, a vertical transfer cylinder, a horizontal transfer cylinder, a vertical transfer guide column 303, a horizontal transfer guide rail 304 and a transfer fixing table 305. The bottom of the transfer support upright 301 is fixedly connected with the base 1, the vertical transfer guide column 303 is fixedly connected with the upper portion of the transfer support upright 301 and is arranged along the vertical direction, meanwhile, the vertical transfer cylinder is arranged along the vertical direction, the cylinder body of the vertical transfer cylinder is fixedly connected with the transfer support upright 301, the piston end of the vertical transfer cylinder is fixedly connected with the transfer fixing table 305, the transfer fixing table 305 is arranged along the horizontal direction, four vertical transfer guide columns 303 are arranged, the four vertical transfer guide columns 303 are respectively connected with four corners of the transfer fixing table 305, specifically, the vertical transfer guide column 303 comprises a guide sleeve and a guide column core body positioned in the guide sleeve, the guide column core body is connected with the guide sleeve in a sliding manner, the guide sleeve is fixedly connected with the transfer support upright 301, the guide column core body is fixedly connected with the transfer fixing table 305, and the guide effect is achieved.
One side of the transfer fixing platform 305, which is close to the slide rail 2, is fixedly provided with a horizontal transfer guide rail 304 and at least two groups of horizontal transfer cylinders which are arranged oppositely, and the horizontal transfer guide rail 304 and the horizontal transfer cylinders are both arranged along the direction of the slide rail 2. The transfer clamping jaw assembly 302 comprises a plurality of clamping jaws fixed in parallel, the clamping jaws fixed in parallel are all arranged in the horizontal direction, the longitudinal sections of the clamping jaws are V-shaped, and a space for clamping the silicon rod is formed between the clamping jaw assemblies arranged oppositely. In this embodiment, the transfer jaw assembly 302 includes 3 jaws. And meanwhile, a movable clamping jaw fixing groove is formed in the movable clamping jaw assembly and is used for being matched with the horizontal transfer guide rail 304, and the two movable clamping jaw assemblies are fixedly connected with the piston end of the horizontal transfer cylinder. That is, the two sets of movable clamping jaw assemblies are driven by the horizontal transfer cylinder to generate relative displacement so as to clamp and release the crystal silicon.
EXAMPLE seven
Referring to fig. 8, fig. 1 and fig. 2, the blanking table mechanism 10 is disposed on one side of the base 1, and includes a blanking support seat 1001, a blanking support plate 1002, a blanking worktable 1003 and a blanking vertical lifting screw, the blanking support plate 1002 is disposed along a horizontal direction, the bottom of the blanking worktable 1003 is fixedly connected to the base 1, the blanking support seat 1001 is provided with a blanking vertical slide rail, and meanwhile, the blanking support plate 1002 is disposed along a horizontal direction, the blanking vertical lifting screw and the blanking vertical slide rail are disposed along a vertical direction, the blanking vertical lifting screw is fixedly connected to the blanking support seat 1001 through a vertical lifting screw bracket, a screw nut of the blanking vertical lifting screw is fixedly connected to the blanking support plate 1002, the blanking vertical lifting screw is connected to an output end of a servo motor for driving the blanking support plate to slide along the blanking vertical slide rail 1002, the crystalline silicon is transported in a vertical direction. Meanwhile, a blanking horizontal slide rail and a blanking feed screw are arranged on the upper portion of the blanking support plate 1002, the blanking horizontal slide rail and the blanking feed screw are both arranged along the horizontal direction and are perpendicular to the slide rail 2, and the blanking workbench 1003 is located above the blanking horizontal slide rail and slides along the blanking horizontal slide rail under the driving of the blanking feed screw. That is to say, the blanking worktable 1003 can generate displacement along the vertical direction through the blanking vertical lifting screw rod, and can generate horizontal displacement along the direction vertical to the slide rail 2 through the blanking feeding screw rod, so as to convey the crystalline silicon in the horizontal direction and the vertical direction. In addition, a discharging fixing plate 1004 is provided on the upper part of the discharging table 1003 for carrying the finely ground crystalline silicon.
During the specific operation, a worker or a mechanical arm conveys the cut crystalline silicon to the feeding worktable mechanism 7, the crystalline silicon clamping plate 706 pushes the crystalline silicon to be attached to the backup plate 705, the centering clamping plate 802 clamps and centers the crystalline silicon, and the feeding worktable mechanism 7 conveys the crystalline silicon to the position above the slide rail 2 in the rough grinding area; the grinding feeding worktable mechanism 4 of the rough grinding area moves to the position opposite to the crystal silicon, and the headstock assembly 402 and the tailstock assembly 403 thereof clamp the crystal silicon and move the crystal silicon to the grinding head feeding assembly 5; the allowance detection device positioned in the rough grinding area performs allowance detection before rough grinding on the crystalline silicon, the rough grinding head assembly 6 performs surface rough grinding on the crystalline silicon, the headstock chuck and the tailstock chuck rotate clockwise or anticlockwise for 45 degrees simultaneously, the rough grinding head assembly 6 performs rough grinding on the edges of the crystalline silicon, the headstock chuck and the tailstock chuck rotate clockwise or anticlockwise for 45 degrees simultaneously, and the operations are repeated to perform rough grinding on four sides and four edges of the crystalline silicon; the grinding feeding table mechanism 4 in the coarse grinding area moves to the crystalline silicon transfer mechanism 3, the vertical transfer cylinder drives the transfer fixing table 305 to vertically move downwards, the transfer clamping jaw assembly 302 clamps the crystalline silicon from the side surface of the crystalline silicon, the vertical transfer cylinder drives the transfer fixing table 305 to vertically move upwards, a space is provided for the grinding feeding table mechanism 4 in the coarse grinding area to reset to the coarse grinding area, meanwhile, the grinding feeding table mechanism 4 in the fine grinding area moves to the transfer clamping jaw assembly 302 along the sliding rail 2, at the moment, the transfer cylinder drives the transfer fixing table 305 to vertically move downwards to be matched with the grinding feeding table mechanism 4 in the fine grinding area, the crystalline silicon is clamped and the crystalline silicon is conveyed to the grinding head feeding assembly 5 in the fine grinding area; the allowance detection device positioned in the accurate grinding area detects allowance before accurate grinding of the crystalline silicon, the accurate grinding head assembly 9 carries out surface accurate grinding on the crystalline silicon, the headstock chuck and the tailstock chuck rotate clockwise or anticlockwise for 45 degrees simultaneously to carry out accurate grinding on the edges of the crystalline silicon, the headstock chuck and the tailstock chuck rotate clockwise or anticlockwise for 45 degrees simultaneously, and the operations are repeated to carry out accurate grinding on four sides and four edges of the crystalline silicon; after the finish grinding is finished, the blanking worktable mechanism 10 moves to the position above the grinding feeding worktable mechanism 4 of the finish grinding area, and the finish grinding area grinding feeding worktable mechanism 4 places the crystal silicon which is finished by finish grinding on the blanking worktable mechanism 10.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, i.e. the present invention is intended to cover all equivalent variations and modifications within the scope of the present invention.
Claims (9)
1. The utility model provides a crystal silicon corase grind correct grinding all-in-one, includes base (1) and slide rail (2), and slide rail (2) set up on base (1), and its characterized in that sets gradually along the length direction of slide rail (2): coarse grinding district, crystal silicon transfer mechanism (3) and accurate grinding district, coarse grinding district and accurate grinding district all are equipped with the grinding that is used for centre gripping crystal silicon and feed worktable mechenism (4) and at least two sets of bistriques and feed subassembly (5), grinding is fed worktable mechenism (4) and is located on slide rail (2) and with slide rail (2) sliding connection, be located coarse grinding district and accurate grinding district at least two sets of bistriques feed subassembly (5) symmetrical setting in slide rail (2) both sides, form the grinding passageway that supplies crystal silicon to pass through and grinding crystal silicon.
2. A crystal silicon rough grinding and fine grinding all-in-one machine as claimed in claim 1, wherein the rough grinding area further comprises a rough grinding head assembly (6), a loading worktable mechanism (7) and a centering mechanism (8); the rough grinding head assembly (6) is connected with the grinding head feeding assembly (5) through a rough grinding main shaft; the feeding worktable mechanism (7) is arranged on one side of the sliding rail (2) and used for bearing the crystalline silicon and conveying the crystalline silicon to the upper part of the sliding rail (2); the centering mechanism (8) is arranged between the feeding worktable mechanism (7) and the sliding rail (2) to perform centering operation on the crystalline silicon on the feeding worktable mechanism (7) so that the length direction of the crystalline silicon is parallel to the sliding rail (2);
the crystalline silicon transfer mechanism (3) is arranged along the direction vertical to the sliding rail (2) and is used for transferring the coarsely ground crystalline silicon to the fine grinding area;
the refining zone further comprises a refining head assembly (9) and a blanking table mechanism (10); the grinding head feeding assembly (5) is connected with the grinding head assembly (9) through a grinding main shaft; and the blanking worktable mechanism (10) is arranged on one side of the sliding rail (2) and is used for bearing the crystal silicon after finish grinding.
3. The coarse grinding and fine grinding integrated machine for crystalline silicon as claimed in claim 2, wherein the feeding table mechanism (7) comprises a feeding support base (701), a feeding support plate (702), a feeding worktable (703) and a feeding vertical lifting screw, the bottom of the feeding support base (701) is fixedly connected with the base (1), a feeding vertical slide rail is vertically arranged on the feeding support base (701), the feeding support plate (702) is horizontally arranged and is in sliding connection with the feeding support base (701) in the vertical direction through the feeding vertical lifting screw, a horizontal feeding worktable (703) is arranged on the feeding support plate (702), the feeding worktable (703) is in sliding connection with the feeding support plate (702) through the horizontal feeding screw, and a crystalline silicon support plate (704) is fixedly arranged at the upper part of the feeding worktable for supporting crystalline silicon, one side that crystal silicon backup pad (704) is close to slide rail (2) is equipped with backup plate (705), and its opposite side is equipped with crystal silicon clamping plate (706), backup plate (705) and crystal silicon clamping plate (706) all set up along vertical direction, and crystal silicon clamping plate (706) link firmly with the piston end that the level drove actuating cylinder to promote crystal silicon clamping plate (706) and crystal silicon paste mutually and cooperate with crystal silicon clamping plate (706) to adjust crystal silicon to parallel with the guide rail.
4. A crystal silicon rough grinding and fine grinding integrated machine according to claim 3, characterized in that the centering mechanism (8) comprises two centering support columns (801), two centering clamping plates (802) and two centering clamping sliding rails (803), the two centering clamping plates (802) are arranged oppositely and arranged vertically, the bottoms of the centering support columns (801) are fixedly connected with the base (1), the centering clamping sliding rails (803) are fixedly arranged at the upper parts of the centering support columns (801) and are parallel to the sliding rails (2), the two centering clamping plates (802) are meshed through gear racks and slide along the centering clamping sliding rails (803) to clamp the crystal silicon, and the center of the crystal silicon supporting plate (704) are located on the same vertical line.
5. A crystal silicon rough grinding and fine grinding integrated machine as claimed in claim 4, characterized in that the grinding and feeding table mechanism (4) comprises a grinding and feeding base (401), a headstock assembly (402), a tailstock assembly (403) and a tailstock feed screw (404), the grinding and feeding base (401) is arranged on a slide rail (2) and is in sliding connection with the slide rail (2) through the grinding and feeding screw, the headstock assembly (402) and the tailstock assembly (403) are oppositely arranged on the grinding and feeding base (401), the headstock assembly (402) is fixedly connected with the grinding and feeding base (401), and the tailstock assembly (403) is in sliding connection with the grinding and feeding base (401) through the tailstock feed screw (404);
the headstock assembly (402) comprises a headstock chuck and a headstock rotating motor, the headstock chuck is connected with the headstock rotating motor, the tailstock assembly (403) comprises a tailstock chuck and a tailstock rotating motor, the tailstock chuck is connected with the tailstock rotating motor, the headstock chuck and the tailstock chuck are both positioned on the same straight line and parallel to the sliding rail (2), and the headstock chuck and the tailstock chuck rotate simultaneously and are used for rotating the crystalline silicon;
the headstock assembly (402) is arranged at one end close to the crystalline silicon transfer mechanism (3), and the tailstock assembly (403) is arranged at one end far away from the crystalline silicon transfer mechanism (3).
6. The crystal silicon rough grinding and fine grinding integrated machine according to claim 4 or 5, characterized in that the grinding head feeding assembly (5) comprises a grinding head feeding base (501), a grinding head workbench (502), a grinding head vertical sliding rail (503) and a grinding head horizontal sliding rail (504), the bottom of the grinding head feeding base (501) is fixedly connected with the base, the grinding head horizontal sliding rail (504) is positioned on the grinding head feeding base (501), the grinding head workbench (502) is slidably connected with the grinding head horizontal sliding rail (504) through a grinding head horizontal feeding lead screw (505), the grinding head horizontal sliding rail (504) is arranged along the horizontal direction and is perpendicular to the sliding rail (2), the grinding head vertical sliding rail (503) and a surplus detection device are fixedly arranged on the grinding head workbench (502), the grinding head vertical sliding rail (503) is arranged along the vertical direction and a grinding head sliding table is arranged on the grinding head vertical sliding rail (503), the grinding head sliding table is arranged in the vertical direction and is in sliding connection with a grinding head vertical sliding rail (503), and the allowance detection device is located on one side close to the sliding rail (2) and is used for performing allowance detection on the crystalline silicon.
7. The crystal silicon rough grinding and finish grinding all-in-one machine as claimed in claim 6, wherein the rough grinding head assembly (6) comprises a rough grinding rotating motor, a rough grinding main shaft and a rough grinding wheel (601), the rough grinding main shaft penetrates through a grinding head sliding table, one end of the rough grinding main shaft is fixedly connected with the output end of the rough grinding rotating motor, and the other end of the rough grinding main shaft is fixedly connected with the rough grinding wheel (601);
the fine grinding head assembly (9) comprises a fine grinding rotating motor, a fine grinding main shaft and a fine grinding wheel (901), the fine grinding main shaft penetrates through the grinding head sliding table, one end of the fine grinding main shaft is fixedly connected with the output end of the fine grinding rotating motor, and the other end of the fine grinding main shaft is fixedly connected with the fine grinding wheel (901);
the rough grinding wheel (601) and the finish grinding wheel (901) are arranged along the vertical direction.
8. A crystal silicon rough grinding and fine grinding integrated machine according to claim 7, characterized in that the crystal silicon transfer mechanism (3) comprises a transfer support column (301), a transfer clamping jaw assembly (302) arranged oppositely, a vertical transfer cylinder, a horizontal transfer cylinder, a vertical transfer guide pillar (304), a horizontal transfer guide rail and a transfer fixing table (305), the bottom of the transfer support column (301) is fixedly connected with a base (1), the vertical transfer guide pillar (304) is fixedly connected with the upper part of the transfer support column (301), the transfer clamping jaw assembly (302) is connected with the transfer support column (301) in a sliding mode through the vertical transfer cylinder, and the transfer clamping jaw assembly (302) is driven by the horizontal transfer cylinder to generate relative displacement for clamping and loosening the crystal silicon.
9. The coarse grinding and fine grinding integrated machine for crystalline silicon as claimed in claim 8, wherein the blanking table mechanism (10) comprises a blanking support seat (1001), a blanking support plate (1002), a blanking worktable (1003) and a blanking vertical lifting screw, the lower part of the blanking support seat (1001) is fixedly connected with the base (1), the blanking support plate (1002) is arranged along the horizontal direction, the blanking vertical lifting screw is vertical along the vertical direction and used for driving the blanking support plate (1002) to move along the vertical direction, the horizontal blanking worktable (1003) is arranged above the blanking support plate (1002), the blanking worktable (1003) is connected with the blanking support plate (1002) in a sliding manner through the horizontal feeding screw, and a blanking fixing plate (1004) is arranged at the upper part of the blanking worktable and used for receiving the crystalline silicon which is finished by fine grinding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921358052.0U CN210968306U (en) | 2019-08-20 | 2019-08-20 | Coarse grinding and fine grinding integrated machine for crystalline silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921358052.0U CN210968306U (en) | 2019-08-20 | 2019-08-20 | Coarse grinding and fine grinding integrated machine for crystalline silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210968306U true CN210968306U (en) | 2020-07-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921358052.0U Withdrawn - After Issue CN210968306U (en) | 2019-08-20 | 2019-08-20 | Coarse grinding and fine grinding integrated machine for crystalline silicon |
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| Country | Link |
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| CN (1) | CN210968306U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110355669A (en) * | 2019-08-20 | 2019-10-22 | 青岛高测科技股份有限公司 | A kind of crystal silicon corase grinding fine grinding all-in-one machine and its application method |
| WO2022048192A1 (en) * | 2020-09-02 | 2022-03-10 | 天通日进精密技术有限公司 | Silicon rod grinding machine |
-
2019
- 2019-08-20 CN CN201921358052.0U patent/CN210968306U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110355669A (en) * | 2019-08-20 | 2019-10-22 | 青岛高测科技股份有限公司 | A kind of crystal silicon corase grinding fine grinding all-in-one machine and its application method |
| CN110355669B (en) * | 2019-08-20 | 2024-04-02 | 青岛高测科技股份有限公司 | Crystal silicon rough grinding and fine grinding integrated machine and application method thereof |
| WO2022048192A1 (en) * | 2020-09-02 | 2022-03-10 | 天通日进精密技术有限公司 | Silicon rod grinding machine |
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