CN201511280U - Special grinding machine for grinding crystalline silicon square billet - Google Patents
Special grinding machine for grinding crystalline silicon square billet Download PDFInfo
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- CN201511280U CN201511280U CN2009201247843U CN200920124784U CN201511280U CN 201511280 U CN201511280 U CN 201511280U CN 2009201247843 U CN2009201247843 U CN 2009201247843U CN 200920124784 U CN200920124784 U CN 200920124784U CN 201511280 U CN201511280 U CN 201511280U
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- square billet
- crystal silicon
- grinding
- silicon square
- slide unit
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Abstract
The utility model relates to a special grinding machine for grinding a crystalline silicon square billet, which comprises a base, a first lateral surface grinding power head, a second lateral surface power head, a first chamfer mechanism, a second chamfer mechanism, a carrying manipulator and an overturning platform, wherein a guide rail and a worktable are arranged on the base. The utility model has the advantages of no more clamping, high production efficiency, high processing precision and low defective rate.
Description
Technical field
The utility model relates to the equipment that the silicon electronic material is carried out machining, particularly a kind of special purpose grinder that the crystal silicon square billet is carried out four sides and chamfering grinding.
Background technology
Photovoltaic generation is to utilize semi-conducting material photovoltaic effect principle directly solar radiant energy to be converted to the technology of electric energy, along with the rapid consumption of global mineral resources, and the continuous enhancing of people's environmental consciousness, the green energy resource that makes full use of the sun is paid much attention to.Crystal silicon solar batteries is as main market of using in occupation of the solar cell overwhelming majority, silicon chip preparation technology and technology are at high speed development, requirement to the process unit that adopts improves day by day, and especially the requirement of efficiency of equipment and machining accuracy aspect is more outstanding.In the production of solar cell silicon wafer, before to the crystal silicon section, need carry out the side and the chamfering grinding of crystal silicon square billet, be shaped to reach the square billet finishing, prevent that crystal silicon square billet edge break and lattice defect from producing, guarantee the purpose of the quality of section back silicon chip.At present, owing to lack special processing equipment efficiently, method commonly used is to adopt the common plane grinding machine that the single face grinding is carried out in the surface one by one in four sides of crystal silicon square billet earlier, changing a chamfering lathe again carries out the chamfering grinding with chamfering abrasive wheel one by one to four seamed edges of square billet and finishes, this processing mode has increased operation, personnel and equipment, simultaneously, face of the every grinding of work in-process just needs clamping once, whole process need be carried out multiple clamping and just can be finished, because the characteristic of crystal silicon materials processing, multiple clamping processing will have a strong impact on production efficiency and machining accuracy, and defect rate is risen.Simultaneously because the specifications vary of crystal silicon square billet is bigger, many of the 125 * 125mm～215 * 215mm that has that the sectional dimension of square billet is common does not wait the specification size, the length variations scope of square billet is also bigger, size does not wait in 150～350mm, and the specifications vary of square billet has been brought the frequent adjustment problem to lathe.
The utility model content
Adopt the single face wheel grinding when overcoming existing processing crystal silicon square billet, need carry out multiple clamping, complex process, production efficiency is low, machining accuracy is poor, the shortcoming that defect rate is high, the utility model provide a kind of multiple clamping that need not, production efficiency height, the machining accuracy height, the special grinding machine for ground finish of crystal silicon square billet that defect rate is low.
Special grinding machine for ground finish of crystal silicon square billet is characterized in that: comprise base, described base is provided with:
Guide rail and the workbench of laying the crystal silicon square billet, described workbench is slidably mounted on the described guide rail, described workbench and the work drive motor interlock that is fixed on the base;
The first side grinding unit head and the second side grinding unit head that are arranged on the guide rail both sides symmetrically, crystal silicon square billet two sides are carried out grinding;
Be arranged on the guide rail both sides symmetrically, four corner angle of crystal silicon square billet carried out first chamfer mechanism and second chamfer mechanism of chamfering, described chamfer mechanism comprises the chamfering support, described chamfering support is equipped with up and down symmetrically to the last chamfering grinding unit head of crystal silicon square billet chamfering and following chamfering grinding unit head, the installed surface of described chamfering grinding unit head and horizontal plane angle at 45;
Described base be provided with the crystal silicon square billet from the conveying robot of described workbench loading and unloading and be positioned at guide rail one side, with the roll-over table of 90 ° of the crystal silicon square billet upsets unloaded; Described conveying robot comprises transporting supports, and described transporting supports is provided with the carrying motor and carries pawl with the fork-shaped of described motor interlock; Described workbench is provided with and allows described carrying pawl to insert so that the groove of loading and unloading crystal silicon square billet;
Described roll-over table comprises the front and back symmetry, is mounted slidably preceding switching mechanism and back switching mechanism in described carrying pawl both sides; Described switching mechanism comprises that over against the gripper jaw of described crystal silicon square billet side described gripper jaw and can 90 ° of rotating oscillating cylinder interlocks.
Further, be provided with to described guide rail bilateral symmetry first centering body and second centering body of the positional information of the side to be processed that obtains the crystal silicon square billet and corner angle, described centering body comprises medium-height trestle, the described location link stopper of aiming at the crystal silicon square billet that medium-height trestle is provided with.
Further, described medium-height trestle is provided with slide rail, the centering slide unit is installed on the described slide rail slidably, described location link stopper is connected with described centering slide unit by a trunnion axis, the motor interlock that described centering slide unit moves by centering feed mechanism and the described centering slide unit of drive, the first location link stopper and described first trunnion axis of described first centering body are hinged.
Further, described centering body is arranged between described side grinding unit head and the described chamfer mechanism, and described conveying robot is arranged between described centering body and the described chamfer mechanism.
Further, described switching mechanism also comprises base, described base is provided with sliding rail and the slide unit that can be installed in slidingly back and forth on the described sliding rail, and described gripper jaw is arranged on the described slide unit rotationally, and described oscillating cylinder is fixed on the described slide unit; Be fixed with on the described base with described slide unit and be connected, promote the cylinder that slide unit moves forward and backward.
Further, described gripper jaw comprises holding frame and last holding piece that is connected with described holding frame and following holding piece; Be fixed with top nut on the described last holding piece, be fixed with lower nut on the described following holding piece, the thread rotary orientation of described top nut and described lower nut is opposite; Be fixed with the screw rod that cooperates with described upper and lower nut on the described holding frame, the thread rotary orientation of the first half that cooperates with described top nut of described screw rod is identical with the thread rotary orientation of described top nut, and the thread rotary orientation of described Lower Half is identical with the thread rotary orientation of described lower nut;
Be fixed with sliding guide on the described holding frame, described holding piece is arranged on the described sliding guide slidably.
Further, described base is provided with manipulator support, and described transporting supports is erected on the track of both sides of described manipulator support, and described transporting supports is by screw body and the motor interlock that is fixed on the described manipulator support;
The transmission mechanism of described conveying robot is a nut-screw mechanism, and described transporting supports is provided with the carrying slide rail, is equipped with the carrying slide unit on the described carrying slide rail, and described carrying pawl is fixed on the described carrying slide unit.
Further, described base is provided with the grinding slide rail, described side grinding unit head is installed on the described grinding slide rail movably by the grinding slide unit, and described grinding slide unit is by grinding and feeding mechanism and the feeding motor interlock that is fixed on the base, drive grinding slide unit moves;
The installed surface of described chamfering grinding unit head is the combination of slide rail slide unit, and described slide rail is fixed on the described chamfering support, and described slide unit is connected with described chamfering grinding unit head, and described slide unit is by chamfering feed mechanism and chamfering feeding motor interlock.
Further, described workbench is provided with the clamp mechanism that clamps described crystal silicon square billet, described clamp mechanism comprises the clamping workbench that is fixed on the described workbench, described clamping workbench is provided with the compact heap that the crystal silicon square billet is clamped, and described compact heap and clamps the cylinder interlock; The groove that described permission carrying pawl inserts is located on the described clamping workbench.
Described grinding unit head comprises motor that power is provided, abrasive grinding wheel and with the transmission of power of the motor transmission mechanism to emery wheel.
Technical conceive of the present utility model is: 1, earlier crystal silicon square billet (hereinafter to be referred as square billet) is placed on the workbench, by clamp mechanism square billet is clamped.2, with table feed to centering body, clamp mechanism is unclamped square billet, and the location link stopper of centering body all reliably contacts with two sides of square billet simultaneously up to two location link stoppers to the feeding of crystal silicon square billet, realize the centering location of workpiece, clamping device clamps square billet again.3, workbench is run through by side grinding unit head, carry out the grinding of square billet two sides, wherein, the control accurate position data of the square billet plane of symmetry surveyed according to centering body in the position location of side grinding unit head is by the servomotor control of the feed mechanism of grinding unit head.4, with movable workbench to the conveying robot station, clamping device unclamps the clamping to square billet.5, the fork-shaped of conveying robot carrying pawl insert the clamping workbench on groove, hold up square billet and transport by the bottom from the clamping workbench, deliver to roll-over table; Cylinder promotes switching mechanism and moves to the square billet direction, makes gripper jaw arrive clip position; Two gripper jaws are with the square billet clamping; Motor-driven screw body work makes transporting supports move to the direction away from square billet, make conveying robot by open position so that the switching mechanism action; The rotary cylinder action makes 90 ° of gripper jaw upsets, to realize 90 ° of upsets of square billet; Conveying robot moves to square billet, holds up square billet again from the bottom; Gripper jaw moves to the direction away from square billet and resets; Conveying robot is delivered to square billet on the surface of clamping workbench, and clamping device clamps square billet.6, workbench is fed to centering body again; Clamping device unclamps the clamping to square billet; Centering body carries out the centering location to square billet once more; Clamping device clamps square billet.7, table feed runs through by side grinding unit head, carries out the grinding of square billet two sides.8, workbench returns and direct in the other direction length feed, runs through by chamfer mechanism, disposable finish four corner angle of square billet run through the chamfering grinding.9, workbench returns and moves to the handling machinery beast, unloads the square billet of finishing processing; The new square billet of packing into carries out the processing of same next time circulation.
The beneficial effect that the utlity model has mainly shows: the distribution form of (1) machine adopted penetration type side mill and chamfering mill, can on a machine tool, finish the chamfering grinding of crystal silicon square billet four sides and four corner angle continuously, the production efficiency height.(2) the centering positioning principle to square billet is simple, reliable, and the centering accurate positioning has guaranteed that the allowance of side and chamfering is even, and mill rear surface quality is good.(3) adjustment of relative position adopts servomotor Position Control mode to realize between the grinding head grinding wheel of penetration type grinding, can reach higher square billet dimensioned precision.(4) centering location contact force and mechanical grip power adopt servomotor Torque Control mode to realize, the size control of power accurately prevents processing the damage on square billet surface, back.(5) whole machine tooling process circulation of finishing the work continuously automatically under the programme-control of control system has higher automatization level, has improved operator's operating condition.(6) can to sectional dimension behind the butt in 125 * 125mm～215 * 215mm scope, the side of the plurality of specifications crystal silicon square billet of length dimension in 150～350mm scope and chamfering adopt skive to carry out high-speed grinding, the machine tooling scope is wide, and adaptability is strong.
Description of drawings
Fig. 1 is a schematic diagram of the present utility model
Fig. 2 is the vertical view of Fig. 1
Fig. 3 is the left view of Fig. 1
Fig. 4 is the right view of Fig. 1
Fig. 5 is the schematic diagram of centering body
Fig. 6 is the schematic diagram of clamp mechanism
Fig. 7 is the schematic diagram of conveying robot
Fig. 8 is the schematic diagram of roll-over table
Fig. 9 is the schematic diagram of switching mechanism
The specific embodiment
Embodiment one
With reference to Fig. 1-9
Special grinding machine for ground finish of crystal silicon square billet comprises base 1, and described base 1 is provided with:
Guide rail 2 and the workbench 3 of laying the crystal silicon square billet, described workbench 3 is slidably mounted on the described guide rail 2, described workbench 3 and work drive motor 35 interlocks that are fixed on the base 1;
The first side grinding unit head 41 and the second side grinding unit head 42 that are arranged on guide rail 2 both sides symmetrically, crystal silicon square billet two sides are carried out grinding;
Be arranged on guide rail 2 both sides symmetrically, four corner angle of crystal silicon square billet carried out first chamfer mechanism 51 and second chamfer mechanism 52 of chamfering, described chamfer mechanism comprises the chamfering support 511 that is fixed on the described base 1, described chamfering support 511 is equipped with last chamfering grinding unit head 512 and the following chamfering grinding unit head 513 to crystal silicon square billet chamfering, the installed surface of described chamfering grinding unit head 512,513 and horizontal plane angle at 45 up and down symmetrically;
Described base 1 be provided with the crystal silicon square billet from the conveying robot 6 of described workbench 3 loading and unloading and be positioned at guide rail 2 one sides, with the roll-over table 7 of 90 ° of the crystal silicon square billet upsets unloaded; Described conveying robot 6 comprises the transporting supports 61 that is connected with manipulator support 11, and described transporting supports 61 is provided with carrying motor 62 and carries pawl 63 by the fork-shaped of nut-screw transmission mechanism and described carrying motor 62 interlocks; Described workbench 3 is provided with and allows described carrying pawl 63 to insert so that the groove 31 of loading and unloading crystal silicon square billet;
Described roll-over table 7 comprises the front and back symmetry, is mounted slidably preceding switching mechanism 71 and back switching mechanism 72 in described carrying pawl 63 both sides; Described switching mechanism 71,72 comprises that over against the gripper jaw 711 of described crystal silicon square billet side described gripper jaw 711 and can 90 ° of rotating oscillating cylinder 712 interlocks.
Be provided with to described guide rail 2 bilateral symmetry first centering body 81 and second centering body 82 of the positional information of the side to be processed that obtains the crystal silicon square billet and corner angle, described centering body 81,82 comprise be connected with described base 1 to medium-height trestle 811, the described location link stopper 812 of aiming at the crystal silicon square billet that medium-height trestle 811 is provided with.
Embodiment two
With reference to Fig. 1-5
The difference part of present embodiment and embodiment one is: described base 1 is provided with centering slide rail 813, on the described centering slide rail 813 centering slide unit 814 is installed slidably, described location link stopper 812 is connected with described centering slide unit 814 by a trunnion axis 815, motor 816 interlocks that described centering slide unit 814 moves by centering feed mechanism and the described centering slide unit 814 of drive, described centering feed mechanism is a screw body; The first location link stopper 812 of described first centering body 81 is hinged with described first trunnion axis 815.
Described centering body 81,82 is arranged between described side grinding unit head 41,42 and the described chamfer mechanism 51,52, and described conveying robot 6 is arranged between described centering body 81,82 and the described chamfer mechanism 51,52.All the other are identical.
Embodiment three
With reference to Fig. 8,9
The difference part of present embodiment and embodiment two is: described switching mechanism also comprises sliding rail 713 that is fixed on the base 1 and the slide unit 714 that can be installed in slidingly back and forth on the described sliding rail 713, described gripper jaw 711 is arranged on the described slide unit 714 rotationally, and described oscillating cylinder 712 is fixed on the described slide unit 714; Be fixed with on the described base 1 with described slide unit 714 and be connected, promote the cylinder 715 that slide unit 714 moves forward and backward.
Described gripper jaw 711 comprises holding frame 7111 and the last holding piece 7112 and the following holding piece 7113 that are connected with described holding frame 7111; Be fixed with top nut on the described last holding piece 7112, be fixed with lower nut 7114 on the described following holding piece 7112, the thread rotary orientation of described top nut and described lower nut 7114 is opposite; Be fixed with the screw rod 7115 that cooperates with described upper and lower nut on the described holding frame 7111, the thread rotary orientation of the first half that cooperates with described top nut of described screw rod 7115 is identical with the thread rotary orientation of described top nut, and the thread rotary orientation of described Lower Half is identical with the thread rotary orientation of described lower nut 7114.
Be fixed with sliding guide 7116 on the described holding frame 7111, described holding piece 7112,7113 is arranged on the described sliding guide 7116 slidably.All the other are identical.
Embodiment four
With reference to Fig. 1,7
The difference part of present embodiment and embodiment two is: described base 1 is provided with manipulator support 11, described transporting supports 61 is erected on the track 111 of both sides of described manipulator support 11, and described transporting supports 61 is by screw body 64 and the motor interlock that is fixed on the described manipulator support 11;
The transmission mechanism of described conveying robot 6 is a nut-screw mechanism, and described transporting supports 61 is provided with carrying slide rail 611, is equipped with carrying slide unit 612 on the described carrying slide rail 611, and described carrying pawl 63 is fixed on the described carrying slide unit 612.All the other are identical.
Embodiment five
With reference to Fig. 1-6
Described base 1 is provided with grinding slide rail 411, described side grinding unit head is installed on the described grinding slide rail 411 movably by grinding slide unit 412, described grinding slide unit 412 by grinding and feeding mechanism be fixed on the base 1, drive feeding motor 413 interlocks that grinding slide unit 412 moves, described grinding and feeding mechanism is a screw body;
The installed surface of described chamfering grinding unit head is the combination of slide rail slide unit, described slide rail 514 is fixed on the described chamfering support 511, described slide unit 515 is connected with described chamfering grinding unit head, described slide unit 515 is by chamfering feed mechanism and a chamfering feeding motor 516 interlocks, and described chamfering feed mechanism is a screw body.
Described workbench 3 is provided with the clamp mechanism that clamps described crystal silicon square billet, described clamp mechanism comprises the clamping workbench 32 that is fixed on the described workbench 3, the compact heap 33 that on the described clamping workbench 32 the crystal silicon square billet is clamped, described compact heap 33 and clamps cylinder 34 interlocks; The groove 31 that described permission carrying pawl inserts is located on the described clamping workbench 32; Described workbench 3 is by work feed mechanism and decelerator 36 and described work drive motor 35 interlocks, and described work feed mechanism is a screw body.
The described content of this specification embodiment only is enumerating the way of realization of utility model design; protection domain of the present utility model should not be regarded as only limiting to the concrete form that embodiment states, protection domain of the present utility model also reach in those skilled in the art according to the utility model design the equivalent technologies means that can expect.
Claims (9)
1. special grinding machine for ground finish of crystal silicon square billet, it is characterized in that: comprise base, described base is provided with:
Guide rail and the workbench of laying the crystal silicon square billet, described workbench is slidably mounted on the described guide rail, described workbench and the work drive motor interlock that is fixed on the base;
The first side grinding unit head and the second side grinding unit head that are arranged on the guide rail both sides symmetrically, crystal silicon square billet two sides are carried out grinding;
Be arranged on the guide rail both sides symmetrically, four corner angle of crystal silicon square billet carried out first chamfer mechanism and second chamfer mechanism of chamfering, described chamfer mechanism comprises the chamfering support, described chamfering support is equipped with up and down symmetrically to the last chamfering grinding unit head of crystal silicon square billet chamfering and following chamfering grinding unit head, the installed surface of described chamfering grinding unit head and horizontal plane angle at 45;
Described base be provided with the crystal silicon square billet from the conveying robot of described workbench loading and unloading and be positioned at guide rail one side, with the roll-over table of 90 ° of the crystal silicon square billet upsets unloaded; Described conveying robot comprises transporting supports, and described transporting supports is provided with the carrying motor and carries pawl with the fork-shaped of described motor interlock; Described workbench is provided with and allows described carrying pawl to insert so that the groove of loading and unloading crystal silicon square billet;
Described roll-over table comprises the front and back symmetry, is mounted slidably preceding switching mechanism and back switching mechanism in described carrying pawl both sides; Described switching mechanism comprises that over against the gripper jaw of described crystal silicon square billet side described gripper jaw and can 90 ° of rotating oscillating cylinder interlocks.
2. special grinding machine for ground finish of crystal silicon square billet as claimed in claim 1, it is characterized in that: first centering body and second centering body that are provided with to described guide rail bilateral symmetry the positional information of the side to be processed that obtains the crystal silicon square billet and corner angle, described centering body comprises medium-height trestle, the described location link stopper of aiming at the crystal silicon square billet that medium-height trestle is provided with.
3. special grinding machine for ground finish of crystal silicon square billet as claimed in claim 2, it is characterized in that: described medium-height trestle is provided with slide rail, the centering slide unit is installed on the described slide rail slidably, described location link stopper is connected with described centering slide unit by a trunnion axis, the motor interlock that described centering slide unit moves by centering feed mechanism and the described centering slide unit of drive, the first location link stopper and described first trunnion axis of described first centering body are hinged.
4. special grinding machine for ground finish of crystal silicon square billet as claimed in claim 3, it is characterized in that: described centering body is arranged between described side grinding unit head and the described chamfer mechanism, and described conveying robot is arranged between described centering body and the described chamfer mechanism.
5. as the described special grinding machine for ground finish of crystal silicon square billet of one of claim 1-4, it is characterized in that: described switching mechanism also comprises base, described base is provided with sliding rail and the slide unit that can be installed in slidingly back and forth on the described sliding rail, described gripper jaw is arranged on the described slide unit rotationally, and described oscillating cylinder is fixed on the described slide unit; Be fixed with on the described base with described slide unit and be connected, promote the cylinder that slide unit moves forward and backward.
6. special grinding machine for ground finish of crystal silicon square billet as claimed in claim 5 is characterized in that: described gripper jaw comprises holding frame and last holding piece that is connected with described holding frame and following holding piece; Be fixed with top nut on the described last holding piece, be fixed with lower nut on the described following holding piece, the thread rotary orientation of described top nut and described lower nut is opposite; Be fixed with the screw rod that cooperates with described upper and lower nut on the described holding frame, the thread rotary orientation of the first half that cooperates with described top nut of described screw rod is identical with the thread rotary orientation of described top nut, and the thread rotary orientation of described Lower Half is identical with the thread rotary orientation of described lower nut;
Be fixed with sliding guide on the described holding frame, described holding piece is arranged on the described sliding guide slidably.
7. special grinding machine for ground finish of crystal silicon square billet as claimed in claim 6, it is characterized in that: described base is provided with manipulator support, described transporting supports is erected on the track of both sides of described manipulator support, and described transporting supports is by screw body and the motor interlock that is fixed on the described manipulator support;
The transmission mechanism of described conveying robot is a nut-screw mechanism, and described transporting supports is provided with the carrying slide rail, is equipped with the carrying slide unit on the described carrying slide rail, and described carrying pawl is fixed on the described carrying slide unit.
8. special grinding machine for ground finish of crystal silicon square billet as claimed in claim 7, it is characterized in that: described base is provided with the grinding slide rail, described side grinding unit head is installed on the described grinding slide rail movably by the grinding slide unit, and described grinding slide unit is by grinding and feeding mechanism and the feeding motor interlock that is fixed on the base, drive grinding slide unit moves;
The installed surface of described chamfering grinding unit head is the combination of slide rail slide unit, and described slide rail is fixed on the described chamfering support, and described slide unit is connected with described chamfering grinding unit head, and described slide unit is by chamfering feed mechanism and chamfering feeding motor interlock.
9. special grinding machine for ground finish of crystal silicon square billet as claimed in claim 8, it is characterized in that: described workbench is provided with the clamp mechanism that clamps described crystal silicon square billet, described clamp mechanism comprises the clamping workbench that is fixed on the described workbench, the compact heap that on the described clamping workbench crystal silicon square billet is clamped, described compact heap and clamps the cylinder interlock; The groove that described permission carrying pawl inserts is located on the described clamping workbench.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2009201247843U CN201511280U (en) | 2009-07-16 | 2009-07-16 | Special grinding machine for grinding crystalline silicon square billet |
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| CN2009201247843U CN201511280U (en) | 2009-07-16 | 2009-07-16 | Special grinding machine for grinding crystalline silicon square billet |
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| CN102267073A (en) * | 2011-07-20 | 2011-12-07 | 洛阳金诺机械工程有限公司 | Double-headed bridge type crystalline material grinding machine |
| CN102240951B (en) * | 2011-07-20 | 2013-08-21 | 洛阳金诺机械工程有限公司 | Crystal material grinding mechanism |
| CN102267073B (en) * | 2011-07-20 | 2013-12-18 | 洛阳金诺机械工程有限公司 | Double-headed bridge type crystalline material grinding machine |
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| CN102528603A (en) * | 2012-03-13 | 2012-07-04 | 深圳市金洲精工科技股份有限公司 | Fixed-length chamfering machine |
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