CN202766657U - Cooling device for cooling polycrystalline silicon ingot furnace - Google Patents
Cooling device for cooling polycrystalline silicon ingot furnace Download PDFInfo
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- CN202766657U CN202766657U CN 201220258484 CN201220258484U CN202766657U CN 202766657 U CN202766657 U CN 202766657U CN 201220258484 CN201220258484 CN 201220258484 CN 201220258484 U CN201220258484 U CN 201220258484U CN 202766657 U CN202766657 U CN 202766657U
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- cooling
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Abstract
The utility model discloses a cooling device for cooling a polycrystalline silicon ingot furnace. Heat-insulated doors are arranged in a heat-insulated cage of the ingot furnace to divide the heat-insulated cage into an upper chamber and a lower chamber; the upper chamber is a heating chamber; a heating assembly and a crucible are contained in the upper chamber; the upper chamber is used for melting raw materials; the lower chamber is a refrigeration chamber; a refrigeration assembly is contained in the lower chamber; and the lower chamber is used for uniformly cooling the molten raw materials in the crucible, so as to achieve uniform growth of crystalline silicon. An oriented temperature conduction device is arranged in the upper chamber to divide the upper chamber into upper and lower parts; an upper heater and the crucible are arranged at the upper part; and a lower heater is arranged at the lower part. The cooling device separates cold from heat in the furnace ingeniously by the heat-insulated doors and forms an upper and lower temperature gradient by controlling powers of the upper heater and the lower heater, and the opening size can be controlled by opening each heat-insulated door to control ventilatory capacity and cooling speed. The cooling device is simple in structure and convenient to operate.
Description
Technical field
The utility model relates to technical field of polysilicon production, relates in particular to a kind of refrigerating unit of realizing the polycrystalline silicon ingot or purifying furnace cooling.
Background technology
Solar panel mainly adopts polysilicon to make in the prior art, however the making processes of polysilicon be at first in ingot furnace with the polycrystalline silicon raw material heat fused, then to polycrystalline silicon raw material in the crucible lower the temperature, cooled and solidified forms polycrystal silicon ingot.Produce polycrystal silicon ingot in the above-mentioned technology, mainly comprise following several stages: fusing, crystallographic orientation, annealing, cooling.
Cooling is the most important in the process of growth of polycrystal silicon ingot, and adopt by regulating the power of well heater regulated the contact distance of Base Heat board and lowered the temperature, so that the control silicon ingot speed of growth and the direction of growth more.
Also use by circulation coil pipe refrigeration plant being set in crucible bottom, after crucible heating finishes, initiatively crucible bottom is begun to cool down by starting the refrigeration plant circulating refrigerant.Cool position of uncontrollable crucible all in the above-mentioned refrigeration modes, the also direction of growth of polysilicon in the uncontrollable crucible, with the uniformity coefficient that can not control polysilicon, the polycrystal silicon ingot poor quality of producing, waste material is many, and productivity is low.Existing ingot furnace as shown in Figure 1, application number is: 201010176628.9 Chinese patent, concrete disclosed is the crystal silicon ingot furnace of double-cavity heat-insulation cage.
Yet a kind of method of cooling and refrigerating unit that is provided with the polycrystalline silicon ingot or purifying furnace of Heat-insulation device there is not yet report.
The utility model content
For solving existing technical problem, the purpose of this utility model provides the refrigerating unit of the realization polycrystalline silicon ingot or purifying furnace cooling of the high-quality polycrystal silicon ingot of a kind of energy output.
The technical solution adopted in the utility model is for achieving the above object:
A kind of refrigerating unit of realizing the polycrystalline silicon ingot or purifying furnace cooling is provided with insulated door in the heat-insulation cage of described ingot furnace, and heat-insulation cage is divided into upper and lower chamber;
Described upper chamber is heating chamber, is equipped with heating component and crucible in it, is used for melt raw material;
Described lower chambers is refrigeration cabinet, is equipped with cooling assembly in it, is used for the melt raw material uniform decrease in temperature in the crucible, evenly grows in order to realize crystal silicon.
Be provided with the orientation temperature conduction device in the described upper chamber, upper chamber is divided into upper and lower two parts;
Described top is divided and is provided with upper heater and crucible, and the bottom is divided and is provided with lower well heater.
Described insulated door is the temperature separation door of two superimposed, and wherein the first layer insulated door is the sealing insulated door; Second layer insulated door is the intermediate openings insulated door;
Described each layer insulated door runs through the heat-insulation cage sidewall and is connected with drive-motor, drives door-plate by drive-motor and is connected with the heat-insulation cage snug engagement, realizes opening/closing of insulated door;
When opening the first layer insulated door, second layer insulated door intermediate openings flows through freezing air; According to the requirement of cooling rate and lowering temperature uniform degree, make the larger amount of importing into of controlling cooling gas of intermediate openings by opening second layer insulated door, finally control speed of cooling, crystallization control.
Described insulated door is set to N layer insulated door; The first layer insulated door is the sealing insulated door, and other insulated doors are made as intermediate openings;
When insulated door is the N layer, opening degree on the N layer insulated door is set greater than the opening degree on the N-1 insulated door;
N>=3 wherein, N is integer.
Described each insulated door tail end docks with the draw-in groove that the heat-insulation cage sidewall is provided with, and the material of described insulated door is curing carbon fiber; Described opening is square, oblong openings.
The utility model has the advantages that:
1, the utility model refrigerating unit is that ingot furnace is equipped with Heat-insulation device, and the method is novel ingenious effectively with cold and hot separating in the stove, and control is thermograde up and down.
2, can be arranged to N layer temperature separation door in the utility model refrigerating unit, this inverted pyramid structure can more accurate control import gas volume and cool position, makes cooling rate and cooling position controlled.
Description of drawings
Fig. 1 be the utility model based on existing ingot furnace structure iron.
Fig. 2 is one-piece construction synoptic diagram of the present utility model.
Fig. 3 is temperature separation door structural representation of the present utility model.
Fig. 4 is temperature separation door intermediate openings structural representation of the present utility model.
Fig. 5 is a plurality of temperature separation door intermediate openings structural representation of the present utility model.
Fig. 6 is multi-layer door stacked configuration synoptic diagram of the present utility model.
Embodiment
Shown in accompanying drawing Fig. 1-6,
A kind of refrigerating unit of realizing the polycrystalline silicon ingot or purifying furnace cooling is provided with insulated door in the heat-insulation cage 7 of described ingot furnace, and heat-insulation cage 7 is divided into upper and lower chamber; Described upper chamber is heating chamber, is equipped with heating component and crucible 2 in it, is used for melt raw material, and described heating component is upper and lower well heater 1,6.Described lower chambers is refrigeration cabinet, is equipped with cooling assembly in it, is used for the melt raw material uniform decrease in temperature in the crucible 2, and described cooling assembly is water-cooled heat exchange dish, evenly grows in order to realize crystal silicon.
Be provided with orientation temperature conduction device 3 in the described upper chamber, upper chamber is divided into upper and lower two parts; Described top is divided and is provided with upper heater 1 and crucible 2, and the bottom is divided and is provided with lower well heater 6.Described orientation temperature conduction device 3 is currently available products, as adopts the fan of directed air-supply, the blower fan of directed air-supply, the air channel of directed air-supply etc.
Described insulated door is the temperature separation door of two superimposed, and wherein the first layer insulated door is the sealing insulated door; Second layer insulated door is the intermediate openings insulated door; Described each layer insulated door runs through heat-insulation cage 7 sidewalls and is connected with drive-motor, drives door-plate by drive-motor and is connected with heat-insulation cage 7 snug engagement, realizes opening/closing of insulated door; When opening the first layer insulated door, second layer insulated door intermediate openings flows through freezing air; According to the requirement of cooling rate and lowering temperature uniform degree, make the larger amount of importing into of controlling cooling gas of intermediate openings by opening second layer insulated door, finally control speed of cooling, crystallization control.
Described insulated door is set to N layer insulated door; The first layer insulated door is the sealing insulated door, and other insulated doors are made as intermediate openings; When insulated door is the N layer, opening degree on the N layer insulated door is set greater than the opening degree on the N-1 insulated door; N>=3 wherein, N is integer.
Described each insulated door tail end docks with the draw-in groove that heat-insulation cage 7 sidewalls are provided with, and the material of described insulated door is curing carbon fiber; Described opening is square, oblong openings.
Operating process is: by controlling upper and lower well heater 1,6 power, open insulated door, be communicated with water-cooled heat exchange dish, make drop in temperature formation temperature gradient under the silicon material, and control the size of ventilation volume and then the speed of control crystal growth by the openings of sizes that changes insulated door.
Open the first layer insulated door, realize that second layer insulated door intermediate openings connects, and imports cooling gas and carries out heat exchange; Also can make the intermediate openings maximum control the amount of importing into of cooling gas by opening again second layer temperature separation door according to the requirement of cooling rate and lowering temperature uniform degree, finally control crucible 2 interior even growth crystal silicon ingots.
A kind of method that realizes the polycrystalline silicon ingot or purifying furnace cooling based on the ingot furnace of existing structure, is improved heat-insulation cage 7 structures in the ingot furnace; The first step is at first at heat-insulation cage 7 interior increase by one Heat-insulation devices 4 of ingot furnace, with the chamber of two sealings of heat-insulation cage 7 interior formation; Then second step is provided with upper heater 1, crucible 2 and lower well heater 6 in the upper chamber therein, by closing Heat-insulation device 4, starts upper heater 1 and lower well heater 6 and heats simultaneously, makes the silicon material fusing in the crucible 2; In the 3rd step, below Heat-insulation device 4, be provided with heat-exchanger rig 5; In the 4th step, the size of control Heat-insulation device 4 openings is controlled air conditioning quantity, and the control crystal silicon is evenly grown.Described heat-exchanger rig 5 adopts water-cooled heat exchange dish.Described Heat-insulation device 4 adopts a plurality of temperature separation doors.
Heat-insulation device 4 in the above-mentioned the first step is two or more temperature separation doors, with the stacked setting of each temperature separation door.
When Heat-insulation device 4 was two-layer temperature separation door in the above-mentioned the first step, the first layer temperature separation door was set to totally-enclosed temperature separation door, and second layer temperature separation door is set to the temperature separation door of intermediate openings; Heat-insulation device 4 is according to the requirement of the rear raw material of fusing to the lowering temperature uniform degree in the above-mentioned the first step, and temperature separation door is set to N layer door; The first layer door is totally enclosed, and the second layer~N layer temperature separation door is set as intermediate openings; When temperature separation door is the N layer, opening degree on the N layer temperature separation door is set greater than the opening degree on the N-1 temperature separation door; N>=3 wherein, N is integer.
After described the first layer temperature separation door opened, ran through and form the inverted pyramid shape at the intermediate openings place of all the other temperature separation doors.
Embodiment
Adopt existing polycrystalline silicon ingot or purifying furnace, melting 450kg polycrystalline silicon ingot casting was gone through 52 hours, hair ingot yield rate 66%; Behind the growth crystal silicon, same melting 450kg polycrystalline silicon ingot casting was gone through 46 hours behind employing the utility model refrigeration plant, hair ingot yield rate 72%.
Claims (5)
1. refrigerating unit of realizing polycrystalline silicon ingot or purifying furnace cooling is characterized in that:
Be provided with insulated door in the heat-insulation cage of described ingot furnace, heat-insulation cage is divided into upper and lower chamber;
Described upper chamber is heating chamber, is equipped with heating component and crucible in it, is used for melt raw material;
Described lower chambers is refrigeration cabinet, is equipped with cooling assembly in it, is used for the melt raw material uniform decrease in temperature in the crucible, evenly grows in order to realize crystal silicon.
2. by refrigerating unit claimed in claim 1, it is characterized in that:
Be provided with the orientation temperature conduction device in the described upper chamber, upper chamber is divided into upper and lower two parts;
Described top is divided and is provided with upper heater and crucible, and the bottom is divided and is provided with lower well heater.
3. by refrigerating unit claimed in claim 1, it is characterized in that:
Described insulated door is the temperature separation door of two superimposed, and wherein the first layer insulated door is the sealing insulated door; Second layer insulated door is the intermediate openings insulated door;
Described each layer insulated door runs through the heat-insulation cage sidewall and is connected with drive-motor, drives door-plate by drive-motor and is connected with the heat-insulation cage snug engagement, realizes opening/closing of insulated door;
When opening the first layer insulated door, second layer insulated door intermediate openings flows through freezing air; According to the requirement of cooling rate and lowering temperature uniform degree, make the larger amount of importing into of controlling cooling gas of intermediate openings by opening second layer insulated door, finally control speed of cooling, crystallization control.
4. by refrigerating unit claimed in claim 1, it is characterized in that:
Described insulated door is set to N layer insulated door; The first layer insulated door is the sealing insulated door, and other insulated doors are made as intermediate openings;
When insulated door is the N layer, opening degree on the N layer insulated door is set greater than the opening degree on the N-1 insulated door;
N>=3 wherein, N is integer.
5. by refrigerating unit claimed in claim 1, it is characterized in that:
Described each insulated door tail end docks with the draw-in groove that the heat-insulation cage sidewall is provided with, and the material of described insulated door is curing carbon fiber; Described opening is square, oblong openings.
Priority Applications (1)
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CN 201220258484 CN202766657U (en) | 2012-06-01 | 2012-06-01 | Cooling device for cooling polycrystalline silicon ingot furnace |
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CN 201220258484 CN202766657U (en) | 2012-06-01 | 2012-06-01 | Cooling device for cooling polycrystalline silicon ingot furnace |
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CN 201220258484 Expired - Fee Related CN202766657U (en) | 2012-06-01 | 2012-06-01 | Cooling device for cooling polycrystalline silicon ingot furnace |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102912412A (en) * | 2012-06-01 | 2013-02-06 | 沈阳森之洋光伏科技有限公司 | Method and device for cooling polysilicon ingot furnace |
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2012
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102912412A (en) * | 2012-06-01 | 2013-02-06 | 沈阳森之洋光伏科技有限公司 | Method and device for cooling polysilicon ingot furnace |
CN102912412B (en) * | 2012-06-01 | 2016-09-21 | 沈阳森之洋自动化科技有限公司 | A kind of method realizing polycrystalline silicon ingot or purifying furnace cooling and chiller |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130306 Termination date: 20140601 |