CN202398133U - 一种三氯氢硅提纯尾气回收装置 - Google Patents
一种三氯氢硅提纯尾气回收装置 Download PDFInfo
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- CN202398133U CN202398133U CN2011205053562U CN201120505356U CN202398133U CN 202398133 U CN202398133 U CN 202398133U CN 2011205053562 U CN2011205053562 U CN 2011205053562U CN 201120505356 U CN201120505356 U CN 201120505356U CN 202398133 U CN202398133 U CN 202398133U
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CN2011205053562U CN202398133U (zh) | 2011-12-07 | 2011-12-07 | 一种三氯氢硅提纯尾气回收装置 |
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CN2011205053562U CN202398133U (zh) | 2011-12-07 | 2011-12-07 | 一种三氯氢硅提纯尾气回收装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113401907A (zh) * | 2020-03-16 | 2021-09-17 | 新疆新特晶体硅高科技有限公司 | 一种多晶硅合成中的四氯化硅提纯分离方法及装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113401907A (zh) * | 2020-03-16 | 2021-09-17 | 新疆新特晶体硅高科技有限公司 | 一种多晶硅合成中的四氯化硅提纯分离方法及装置 |
CN113401907B (zh) * | 2020-03-16 | 2023-03-07 | 新疆新特晶体硅高科技有限公司 | 一种多晶硅合成中的四氯化硅提纯分离方法及装置 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: JIANGXI CHENGUANG NEW MATERIAL CO., LTD. Free format text: FORMER NAME: NOBEL (JIUJIANG) HIGH-TECH MATERIAL CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: 332500 Hukou County, Jiangxi province Jinsha Bay Industrial Park Patentee after: JIANGXI CHENGUANG NEW MATERIAL CO., LTD. Address before: 332500 Hukou County, Jiangxi province Jinsha Bay Industrial Park Patentee before: Nobel (Jiujiang) hi tech Material Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120829 Termination date: 20141207 |
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EXPY | Termination of patent right or utility model |