CN201930863U - Baseplate spraying device - Google Patents

Baseplate spraying device Download PDF

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Publication number
CN201930863U
CN201930863U CN2010206364441U CN201020636444U CN201930863U CN 201930863 U CN201930863 U CN 201930863U CN 2010206364441 U CN2010206364441 U CN 2010206364441U CN 201020636444 U CN201020636444 U CN 201020636444U CN 201930863 U CN201930863 U CN 201930863U
Authority
CN
China
Prior art keywords
substrate
jet pipe
spraying
spray
baseplate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2010206364441U
Other languages
Chinese (zh)
Inventor
杨明生
范继良
刘惠森
余超平
王曼媛
王勇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongguan Anwell Digital Machinery Co Ltd
Original Assignee
Dongguan Anwell Digital Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongguan Anwell Digital Machinery Co Ltd filed Critical Dongguan Anwell Digital Machinery Co Ltd
Priority to CN2010206364441U priority Critical patent/CN201930863U/en
Application granted granted Critical
Publication of CN201930863U publication Critical patent/CN201930863U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a baseplate spraying device, which is applicable to spraying treatment fluid onto a baseplate in a display device. The baseplate spraying device comprises a frame, a linear driver, a spraying support, a horizontal conveying device and a plurality of spraying pipes, wherein the baseplate is carried on the horizontal conveying device, the horizontal conveying device is used for conveying the baseplate in the horizontal direction, the spraying support is movably connected onto the frame and positioned above the baseplate, the linear driver is used for driving the spraying support to do linear reciprocating motion in the horizontal direction, the motion direction of the spraying support is vertical to the conveying direction of the baseplate, the spraying pipes are mounted on the spraying support in parallel, a treatment fluid inlet port communicated with the treatment fluid is formed on each spraying pipe, and a plurality of pinhole-like spraying nozzles are arranged on one side of each spraying pipe, which faces the baseplate. The baseplate spraying device is applicable to cleaning the semiconductor baseplate, has a simple structure, is convenient to operate and control, and achieves the effect of uniform spraying.

Description

The substrate spray equipment
Technical field
The utility model relates to a kind of sprinkling equipment, relates in particular to a kind of substrate spray equipment that substrate in the display is sprayed the treatment fluid cleaning.
Background technology
Produce semiconductor storage or flat-panel monitors such as LCD, plasma scope and organic light emitting diode display will carry out various repetitions usually on substrates such as semiconductor substrate and glass substrate cell processing.For example, on semiconductor substrate or glass substrate, carry out handling, carry out various cell processing such as patterned process and cleaning to film such as film, thereby on substrate, form circuitous pattern, and these cell processing use usually the various process equipments that are in the clean room to carry out with some particular processing methods with various electric and optical signatures.Concrete, be that treatment fluid is supplied on the substrate carrying out methods such as etching or cleaning and dry processing on the semiconductor substrate.For example, in cleaning, various clean solutions are transported on the substrate spray equipment and supply on the substrate from the substrate spray equipment again, with will be such as the Impurity removal on the semiconductor substrates such as glass substrate.But existing substrate spray equipment all exists complex structure, the technological deficiency wayward, that motion is loaded down with trivial details.
Therefore, need a kind of can the cleaning to semiconductor substrate, simple in structure, control conveniently, spray uniform substrate spray equipment.
The utility model content
The purpose of this utility model is to provide a kind of and can cleans semiconductor substrate, and is simple in structure, controls conveniently, sprays uniform substrate spray equipment.
To achieve these goals, the utility model provides a kind of substrate spray equipment, be applicable to the substrate in the display is advanced to spray treatment fluid, comprise frame, linear actuator, the spray support, horizontal feed device and some jet pipes, described base plate carrying is on described horizontal feed device, described horizontal feed device drives described substrate and transmits in the horizontal direction, described spray support is movably connected on the described frame and is positioned at the top of described substrate, described linear actuator drives described spray support and does straight reciprocating motion in the horizontal direction, the direction of motion of described spray support is perpendicular to the transmission direction of described substrate, described jet pipe is parallel being installed on the described spray support, described jet pipe offers the treatment fluid inlet port that is communicated with treatment fluid, and described jet pipe is provided with some nozzles that are the pin hole shape towards a side of described substrate.
Preferably, described jet pipe is uniformly distributed on the described spray support.A plurality of described jet pipes are distributed on the described spray support, can effectively improve spray efficient.
Preferably, described treatment fluid inlet port is opened in the middle part of described jet pipe and straight up.Treatment fluid inlet straight up makes treatment fluid enter easily.
Preferably, described nozzle is uniformly distributed on the described jet pipe and straight down.Described nozzle can spray vaporific treatment fluid, and treatment fluid is directly fallen on the described substrate, makes described substrate spray very evenly.
Preferably, described spray support comprises jet pipe bearing frame, back shaft and power transmission shaft, described jet pipe is fixed on the described jet pipe bearing frame, described power transmission shaft is and is horizontally disposed with and an end is fixedlyed connected with described jet pipe bearing frame, the other end of described power transmission shaft is connected with described linear actuator, described back shaft is and is horizontally disposed with and an end is fixed on the described frame, and the other end of described back shaft is on the described frame of being connected in of slip.By the rectilinear motion of described power transmission shaft and described back shaft, make described jet pipe bearing frame along moving back and forth with the axial vertical direction of described substrate throughput direction, further make described substrate spray more evenly.
Preferably, described horizontal feed device comprises rotation motor and some roller shafts, is socketed with roller on the described roller shaft, and described roller shaft is installed on the described frame uniformly and is positioned at same plane, described rotation motor drives described roller shaft and rotates, and described base plate carrying is on described roller.Thereby drive described roller rolling by driving described roller shaft rotation, make described roller drive described substrate and move, simple in structure, transmission is reliable, and control is easy.
Compared with prior art, because the utility model is placed described jet pipe on described spray support, and a plurality of described nozzles that are the pin hole shape are set on described Effuser device, described nozzle can be with described treatment fluid ejection, making treatment fluid be vaporific falls on the described substrate, by utilizing linear actuator to drive described spray support, make described spray support along moving back and forth with the axial vertical direction of described substrate throughput direction, thereby make spray more even, the whole base plate spray equipment is simple in structure, control conveniently, be suitable for semiconductor substrate is cleaned, develop, technology such as etching and demoulding.
Description of drawings
Fig. 1 is the structural representation of the utility model substrate spray equipment.
The specific embodiment
As shown in Figure 1, the utility model substrate spray equipment 100 comprises the frame (not shown), the linear actuator (not shown), spray support 1, horizontal feed device 2 and some jet pipes 3, described horizontal feed device 2 comprises rotation motor (not shown) and some roller shafts 21, be socketed with roller 22 on the described roller shaft 21, described roller shaft 21 is installed on the described frame uniformly and is positioned at same plane, described rotation motor drives described roller shaft 21 and rotates, described substrate 200 is carried on the described roller 22, and described horizontal feed device 2 drives described substrate 200 and transmits in the horizontal direction.Described spray support 1 is movably connected on the described frame and is positioned at the top of described substrate 200, comprise jet pipe bearing frame 11, back shaft 12 and power transmission shaft 13, described jet pipe 3 is fixed on the described jet pipe bearing frame 11, described power transmission shaft 13 is and is horizontally disposed with and an end is fixedlyed connected with described jet pipe bearing frame 11, the other end of described power transmission shaft 13 is connected with described linear actuator, described back shaft 12 is and is horizontally disposed with and an end is fixed on the described frame, and the other end of described back shaft 12 is on the described frame of being connected in of slip.Described linear actuator drives described spray support 1 and does straight reciprocating motion in the horizontal direction, the direction of motion of described spray support 1 is perpendicular to the transmission direction of described substrate 200, described jet pipe 3 is parallel and is installed on evenly distributedly on the described spray support 1, described jet pipe 3 offers the treatment fluid inlet port 31 that is communicated with treatment fluid, described treatment fluid inlet port 31 is opened in the middle part of described jet pipe 3 and straight up, described jet pipe 3 is provided with some nozzles 32 that are the pin hole shape towards a side of described substrate 200, and described nozzle 32 is uniformly distributed on the described jet pipe 3 and straight down.
Comprehensively above-mentioned, the operation principle to described substrate spray equipment 100 is described in detail below, and is as follows:
During work, described substrate 200 is positioned on the described horizontal feed device 2, drive described horizontal feed device 2 motions then, described roller shaft 21 rotates and drives described roller 22 rotations, described roller 22 drives described substrate 200, described substrate 200 is moved below described jet pipe 3 lentamente, at this moment, the treatment fluid that will have certain pressure injects in the described jet pipe 3 from described treatment fluid inlet port 31, and by described nozzle 32 ejections, because described nozzle 32 is a pinhole nozzle, the treatment fluid of ejection is vaporific and falls on the described substrate 200, simultaneously, the described power transmission shaft 13 of linear actuator linear drives, described power transmission shaft 13 drives described spray support 1, and described spray support 1 is moving back and forth with the axial vertical direction of described substrate 200 throughput directions, thereby described substrate 200 is sprayed equably.
Because the utility model is placed a plurality of described jet pipes 3 on described spray support 1, and a plurality of described nozzles 32 that are the pin hole shape are set on described jet pipe 3, described nozzle 32 can be with described treatment fluid ejection, making treatment fluid be vaporific falls on the described substrate 200, utilize linear actuator to drive described spray support 1 by described power transmission shaft 13 and described back shaft 12, make described spray support 1 along moving back and forth with the axial vertical direction of described substrate 200 throughput directions, not only improve spray efficient but also make spray more even, whole base plate spray equipment 100 is simple in structure, control conveniently, be suitable for semiconductor substrate is cleaned, develop, technology such as etching and demoulding.
The described frame that the utility model substrate spray equipment 100 is involved and the operation principle of described linear actuator are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is preferred embodiments of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.

Claims (6)

1. substrate spray equipment, be applicable to the substrate in the display is advanced to spray treatment fluid, it is characterized in that: comprise frame, linear actuator, the spray support, horizontal feed device and some jet pipes, described base plate carrying is on described horizontal feed device, described horizontal feed device drives described substrate and transmits in the horizontal direction, described spray support is movably connected on the described frame and is positioned at the top of described substrate, described linear actuator drives described spray support and does straight reciprocating motion in the horizontal direction, the direction of motion of described spray support is perpendicular to the transmission direction of described substrate, described jet pipe is parallel being installed on the described spray support, described jet pipe offers the treatment fluid inlet port that is communicated with treatment fluid, and described jet pipe is provided with some nozzles that are the pin hole shape towards a side of described substrate.
2. substrate spray equipment as claimed in claim 1 is characterized in that: described jet pipe is uniformly distributed on the described spray support.
3. substrate spray equipment as claimed in claim 1 is characterized in that: described treatment fluid inlet port is opened in the middle part of described jet pipe and straight up.
4. substrate spray equipment as claimed in claim 1 is characterized in that: described nozzle is uniformly distributed on the described jet pipe and straight down.
5. as any described substrate spray equipment among the claim 1-4, it is characterized in that: described spray support comprises jet pipe bearing frame, back shaft and power transmission shaft, described jet pipe is fixed on the described jet pipe bearing frame, described power transmission shaft is and is horizontally disposed with and an end is fixedlyed connected with described jet pipe bearing frame, the other end of described power transmission shaft is connected with described linear actuator, described back shaft is and is horizontally disposed with and an end is fixed on the described frame, and the other end of described back shaft is on the described frame of being connected in of slip.
6. substrate spray equipment as claimed in claim 1, it is characterized in that: described horizontal feed device comprises rotation motor and some roller shafts, be socketed with roller on the described roller shaft, described roller shaft is installed on the described frame equably and is positioned at same plane, described rotation motor drives described roller shaft and rotates, and described base plate carrying is on described roller.
CN2010206364441U 2010-12-01 2010-12-01 Baseplate spraying device Expired - Fee Related CN201930863U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010206364441U CN201930863U (en) 2010-12-01 2010-12-01 Baseplate spraying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010206364441U CN201930863U (en) 2010-12-01 2010-12-01 Baseplate spraying device

Publications (1)

Publication Number Publication Date
CN201930863U true CN201930863U (en) 2011-08-17

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CN2010206364441U Expired - Fee Related CN201930863U (en) 2010-12-01 2010-12-01 Baseplate spraying device

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102107162A (en) * 2010-12-01 2011-06-29 东莞宏威数码机械有限公司 Spray device
CN103658077A (en) * 2012-08-31 2014-03-26 鸿富锦精密工业(深圳)有限公司 Surface cleaning device
CN103691716A (en) * 2013-11-28 2014-04-02 南京中电熊猫液晶显示科技有限公司 Liquid crystal display panel conveying equipment
CN104874531A (en) * 2015-05-28 2015-09-02 深圳市顺安恒科技发展有限公司 Anti-fingerprint spray coating method and equipment

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102107162A (en) * 2010-12-01 2011-06-29 东莞宏威数码机械有限公司 Spray device
CN103658077A (en) * 2012-08-31 2014-03-26 鸿富锦精密工业(深圳)有限公司 Surface cleaning device
CN103658077B (en) * 2012-08-31 2016-04-27 鸿富锦精密工业(深圳)有限公司 Surface cleaning apparatus
CN103691716A (en) * 2013-11-28 2014-04-02 南京中电熊猫液晶显示科技有限公司 Liquid crystal display panel conveying equipment
CN103691716B (en) * 2013-11-28 2016-01-20 南京中电熊猫液晶显示科技有限公司 A kind of liquid crystal panel transmission equipment
CN104874531A (en) * 2015-05-28 2015-09-02 深圳市顺安恒科技发展有限公司 Anti-fingerprint spray coating method and equipment
CN104874531B (en) * 2015-05-28 2017-05-10 深圳市顺安恒科技发展有限公司 Anti-fingerprint spray coating method and equipment

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Effective date of registration: 20131205

Granted publication date: 20110817

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Date of cancellation: 20140905

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Granted publication date: 20110817

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Effective date of registration: 20150905

Granted publication date: 20110817

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CF01 Termination of patent right due to non-payment of annual fee