CN201930863U - Substrate shower - Google Patents
Substrate shower Download PDFInfo
- Publication number
- CN201930863U CN201930863U CN2010206364441U CN201020636444U CN201930863U CN 201930863 U CN201930863 U CN 201930863U CN 2010206364441 U CN2010206364441 U CN 2010206364441U CN 201020636444 U CN201020636444 U CN 201020636444U CN 201930863 U CN201930863 U CN 201930863U
- Authority
- CN
- China
- Prior art keywords
- spray
- substrate
- jet pipe
- base plate
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 66
- 239000007921 spray Substances 0.000 claims abstract description 72
- 239000012530 fluid Substances 0.000 claims abstract description 27
- 230000005540 biological transmission Effects 0.000 claims abstract description 19
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- 239000004065 semiconductor Substances 0.000 abstract description 10
- 238000004140 cleaning Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
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- Spray Control Apparatus (AREA)
Abstract
The utility model discloses a base plate spray set is applicable to and advances to spray treatment fluid to the base plate in the display, include frame, linear actuator, spray support, horizontal conveyor and a plurality of spray tube, the base plate bear in horizontal conveyor is last, horizontal conveyor drives the base plate is in the horizontal direction transmission, spray support swing joint in the frame and be located the top of base plate, the linear actuator drive spray the support and make straight reciprocating motion in the horizontal direction, the direction of motion perpendicular to that sprays the support the transmission direction of base plate, the spray tube be parallel install in spray on the support, the treatment fluid inlet port with treatment fluid intercommunication is seted up to the spray tube, the spray tube orientation one side of base plate is equipped with a plurality of nozzles that are the pinhole form. The utility model discloses base plate spray set is applicable to and washs semiconductor substrate, and simple structure controls the convenience, sprays evenly.
Description
Technical field
The utility model relates to a kind of sprinkling equipment, relates in particular to a kind of substrate spray equipment that substrate in the display is sprayed the treatment fluid cleaning.
Background technology
Produce semiconductor storage or flat-panel monitors such as LCD, plasma scope and organic light emitting diode display will carry out various repetitions usually on substrates such as semiconductor substrate and glass substrate cell processing.For example, on semiconductor substrate or glass substrate, carry out handling, carry out various cell processing such as patterned process and cleaning to film such as film, thereby on substrate, form circuitous pattern, and these cell processing use usually the various process equipments that are in the clean room to carry out with some particular processing methods with various electric and optical signatures.Concrete, be that treatment fluid is supplied on the substrate carrying out methods such as etching or cleaning and dry processing on the semiconductor substrate.For example, in cleaning, various clean solutions are transported on the substrate spray equipment and supply on the substrate from the substrate spray equipment again, with will be such as the Impurity removal on the semiconductor substrates such as glass substrate.But existing substrate spray equipment all exists complex structure, the technological deficiency wayward, that motion is loaded down with trivial details.
Therefore, need a kind of can the cleaning to semiconductor substrate, simple in structure, control conveniently, spray uniform substrate spray equipment.
The utility model content
The purpose of this utility model is to provide a kind of and can cleans semiconductor substrate, and is simple in structure, controls conveniently, sprays uniform substrate spray equipment.
To achieve these goals, the utility model provides a kind of substrate spray equipment, be applicable to the substrate in the display is advanced to spray treatment fluid, comprise frame, linear actuator, the spray support, horizontal feed device and some jet pipes, described base plate carrying is on described horizontal feed device, described horizontal feed device drives described substrate and transmits in the horizontal direction, described spray support is movably connected on the described frame and is positioned at the top of described substrate, described linear actuator drives described spray support and does straight reciprocating motion in the horizontal direction, the direction of motion of described spray support is perpendicular to the transmission direction of described substrate, described jet pipe is parallel being installed on the described spray support, described jet pipe offers the treatment fluid inlet port that is communicated with treatment fluid, and described jet pipe is provided with some nozzles that are the pin hole shape towards a side of described substrate.
Preferably, described jet pipe is uniformly distributed on the described spray support.A plurality of described jet pipes are distributed on the described spray support, can effectively improve spray efficient.
Preferably, described treatment fluid inlet port is opened in the middle part of described jet pipe and straight up.Treatment fluid inlet straight up makes treatment fluid enter easily.
Preferably, described nozzle is uniformly distributed on the described jet pipe and straight down.Described nozzle can spray vaporific treatment fluid, and treatment fluid is directly fallen on the described substrate, makes described substrate spray very evenly.
Preferably, described spray support comprises jet pipe bearing frame, back shaft and power transmission shaft, described jet pipe is fixed on the described jet pipe bearing frame, described power transmission shaft is and is horizontally disposed with and an end is fixedlyed connected with described jet pipe bearing frame, the other end of described power transmission shaft is connected with described linear actuator, described back shaft is and is horizontally disposed with and an end is fixed on the described frame, and the other end of described back shaft is on the described frame of being connected in of slip.By the rectilinear motion of described power transmission shaft and described back shaft, make described jet pipe bearing frame along moving back and forth with the axial vertical direction of described substrate throughput direction, further make described substrate spray more evenly.
Preferably, described horizontal feed device comprises rotation motor and some roller shafts, is socketed with roller on the described roller shaft, and described roller shaft is installed on the described frame uniformly and is positioned at same plane, described rotation motor drives described roller shaft and rotates, and described base plate carrying is on described roller.Thereby drive described roller rolling by driving described roller shaft rotation, make described roller drive described substrate and move, simple in structure, transmission is reliable, and control is easy.
Compared with prior art, because the utility model is placed described jet pipe on described spray support, and a plurality of described nozzles that are the pin hole shape are set on described Effuser device, described nozzle can be with described treatment fluid ejection, making treatment fluid be vaporific falls on the described substrate, by utilizing linear actuator to drive described spray support, make described spray support along moving back and forth with the axial vertical direction of described substrate throughput direction, thereby make spray more even, the whole base plate spray equipment is simple in structure, control conveniently, be suitable for semiconductor substrate is cleaned, develop, technology such as etching and demoulding.
Description of drawings
Fig. 1 is the structural representation of the utility model substrate spray equipment.
The specific embodiment
As shown in Figure 1, the utility model substrate spray equipment 100 comprises the frame (not shown), the linear actuator (not shown), spray support 1, horizontal feed device 2 and some jet pipes 3, described horizontal feed device 2 comprises rotation motor (not shown) and some roller shafts 21, be socketed with roller 22 on the described roller shaft 21, described roller shaft 21 is installed on the described frame uniformly and is positioned at same plane, described rotation motor drives described roller shaft 21 and rotates, described substrate 200 is carried on the described roller 22, and described horizontal feed device 2 drives described substrate 200 and transmits in the horizontal direction.Described spray support 1 is movably connected on the described frame and is positioned at the top of described substrate 200, comprise jet pipe bearing frame 11, back shaft 12 and power transmission shaft 13, described jet pipe 3 is fixed on the described jet pipe bearing frame 11, described power transmission shaft 13 is and is horizontally disposed with and an end is fixedlyed connected with described jet pipe bearing frame 11, the other end of described power transmission shaft 13 is connected with described linear actuator, described back shaft 12 is and is horizontally disposed with and an end is fixed on the described frame, and the other end of described back shaft 12 is on the described frame of being connected in of slip.Described linear actuator drives described spray support 1 and does straight reciprocating motion in the horizontal direction, the direction of motion of described spray support 1 is perpendicular to the transmission direction of described substrate 200, described jet pipe 3 is parallel and is installed on evenly distributedly on the described spray support 1, described jet pipe 3 offers the treatment fluid inlet port 31 that is communicated with treatment fluid, described treatment fluid inlet port 31 is opened in the middle part of described jet pipe 3 and straight up, described jet pipe 3 is provided with some nozzles 32 that are the pin hole shape towards a side of described substrate 200, and described nozzle 32 is uniformly distributed on the described jet pipe 3 and straight down.
Comprehensively above-mentioned, the operation principle to described substrate spray equipment 100 is described in detail below, and is as follows:
During work, described substrate 200 is positioned on the described horizontal feed device 2, drive described horizontal feed device 2 motions then, described roller shaft 21 rotates and drives described roller 22 rotations, described roller 22 drives described substrate 200, described substrate 200 is moved below described jet pipe 3 lentamente, at this moment, the treatment fluid that will have certain pressure injects in the described jet pipe 3 from described treatment fluid inlet port 31, and by described nozzle 32 ejections, because described nozzle 32 is a pinhole nozzle, the treatment fluid of ejection is vaporific and falls on the described substrate 200, simultaneously, the described power transmission shaft 13 of linear actuator linear drives, described power transmission shaft 13 drives described spray support 1, and described spray support 1 is moving back and forth with the axial vertical direction of described substrate 200 throughput directions, thereby described substrate 200 is sprayed equably.
Because the utility model is placed a plurality of described jet pipes 3 on described spray support 1, and a plurality of described nozzles 32 that are the pin hole shape are set on described jet pipe 3, described nozzle 32 can be with described treatment fluid ejection, making treatment fluid be vaporific falls on the described substrate 200, utilize linear actuator to drive described spray support 1 by described power transmission shaft 13 and described back shaft 12, make described spray support 1 along moving back and forth with the axial vertical direction of described substrate 200 throughput directions, not only improve spray efficient but also make spray more even, whole base plate spray equipment 100 is simple in structure, control conveniently, be suitable for semiconductor substrate is cleaned, develop, technology such as etching and demoulding.
The described frame that the utility model substrate spray equipment 100 is involved and the operation principle of described linear actuator are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is preferred embodiments of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (6)
1. substrate spray equipment, be applicable to the substrate in the display is advanced to spray treatment fluid, it is characterized in that: comprise frame, linear actuator, the spray support, horizontal feed device and some jet pipes, described base plate carrying is on described horizontal feed device, described horizontal feed device drives described substrate and transmits in the horizontal direction, described spray support is movably connected on the described frame and is positioned at the top of described substrate, described linear actuator drives described spray support and does straight reciprocating motion in the horizontal direction, the direction of motion of described spray support is perpendicular to the transmission direction of described substrate, described jet pipe is parallel being installed on the described spray support, described jet pipe offers the treatment fluid inlet port that is communicated with treatment fluid, and described jet pipe is provided with some nozzles that are the pin hole shape towards a side of described substrate.
2. substrate spray equipment as claimed in claim 1 is characterized in that: described jet pipe is uniformly distributed on the described spray support.
3. substrate spray equipment as claimed in claim 1 is characterized in that: described treatment fluid inlet port is opened in the middle part of described jet pipe and straight up.
4. substrate spray equipment as claimed in claim 1 is characterized in that: described nozzle is uniformly distributed on the described jet pipe and straight down.
5. as any described substrate spray equipment among the claim 1-4, it is characterized in that: described spray support comprises jet pipe bearing frame, back shaft and power transmission shaft, described jet pipe is fixed on the described jet pipe bearing frame, described power transmission shaft is and is horizontally disposed with and an end is fixedlyed connected with described jet pipe bearing frame, the other end of described power transmission shaft is connected with described linear actuator, described back shaft is and is horizontally disposed with and an end is fixed on the described frame, and the other end of described back shaft is on the described frame of being connected in of slip.
6. substrate spray equipment as claimed in claim 1, it is characterized in that: described horizontal feed device comprises rotation motor and some roller shafts, be socketed with roller on the described roller shaft, described roller shaft is installed on the described frame equably and is positioned at same plane, described rotation motor drives described roller shaft and rotates, and described base plate carrying is on described roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206364441U CN201930863U (en) | 2010-12-01 | 2010-12-01 | Substrate shower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206364441U CN201930863U (en) | 2010-12-01 | 2010-12-01 | Substrate shower |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201930863U true CN201930863U (en) | 2011-08-17 |
Family
ID=44442402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206364441U Expired - Fee Related CN201930863U (en) | 2010-12-01 | 2010-12-01 | Substrate shower |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201930863U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102107162A (en) * | 2010-12-01 | 2011-06-29 | 东莞宏威数码机械有限公司 | sprinkler |
| CN103658077A (en) * | 2012-08-31 | 2014-03-26 | 鸿富锦精密工业（深圳）有限公司 | Surface cleaning device |
| CN103691716A (en) * | 2013-11-28 | 2014-04-02 | 南京中电熊猫液晶显示科技有限公司 | Liquid crystal display panel conveying equipment |
| CN104874531A (en) * | 2015-05-28 | 2015-09-02 | 深圳市顺安恒科技发展有限公司 | Anti-fingerprint spray coating method and equipment |
-
2010
- 2010-12-01 CN CN2010206364441U patent/CN201930863U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102107162A (en) * | 2010-12-01 | 2011-06-29 | 东莞宏威数码机械有限公司 | sprinkler |
| CN103658077A (en) * | 2012-08-31 | 2014-03-26 | 鸿富锦精密工业（深圳）有限公司 | Surface cleaning device |
| CN103658077B (en) * | 2012-08-31 | 2016-04-27 | 鸿富锦精密工业（深圳）有限公司 | Surface cleaning apparatus |
| CN103691716A (en) * | 2013-11-28 | 2014-04-02 | 南京中电熊猫液晶显示科技有限公司 | Liquid crystal display panel conveying equipment |
| CN103691716B (en) * | 2013-11-28 | 2016-01-20 | 南京中电熊猫液晶显示科技有限公司 | A kind of liquid crystal panel transmission equipment |
| CN104874531A (en) * | 2015-05-28 | 2015-09-02 | 深圳市顺安恒科技发展有限公司 | Anti-fingerprint spray coating method and equipment |
| CN104874531B (en) * | 2015-05-28 | 2017-05-10 | 深圳市顺安恒科技发展有限公司 | Anti-fingerprint spray coating method and equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20131205 Granted publication date: 20110817 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20110817 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20110817 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20110817 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20110817 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20201201 Granted publication date: 20110817 |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110817 Termination date: 20131201 |