CN202067842U - Equipment for cleaning OLED (organic light emitting diode) glass substrate - Google Patents
Equipment for cleaning OLED (organic light emitting diode) glass substrate Download PDFInfo
- Publication number
- CN202067842U CN202067842U CN2011200966004U CN201120096600U CN202067842U CN 202067842 U CN202067842 U CN 202067842U CN 2011200966004 U CN2011200966004 U CN 2011200966004U CN 201120096600 U CN201120096600 U CN 201120096600U CN 202067842 U CN202067842 U CN 202067842U
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- glass substrate
- oled glass
- oled
- cleaning
- shower
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Abstract
The utility mode discloses equipment for cleaning an OLED (organic light emitting diode) glass substrate, which comprises a cleaning mechanism, a transmission mechanism and a control mechanism, wherein the cleaning mechanism comprises a flushing device arranged on the transmission mechanism, an air-drying device and a drying device; the flushing device comprises at least two spraying pipe groups which comprise spraying pipes symmetrically arranged at the upper and lower side of a bearing surface; the spraying pipes are uniformly provided with nozzles towards the bearing surface and are mutually communicated and are communicated with the outside cleaning fluid; rolling brushes are arranged between the adjacent spraying pipes which are arranged at the same side; and the rolling brushes at the upper and the lower sides of the bearing surface are arranged symmetrically. The equipment for cleaning the OLED glass substrate has a simple structure, high automation degree, and high cleaning efficiency and cleanness and can clean thoroughly.
Description
Technical field
The utility model relates to a kind of automatic cleaning process equipment, relates more specifically to a kind of OLED glass substrate cleaning equipment.
Background technology
Along with the extensive use and the development of semiconductor of various semiconductor products, the batch process scale of semiconductor product is increasing.The size of semiconductor product is also increasing simultaneously, causes semiconductor technology increasingly sophisticated.And the production of product not only requires high accuracy, also requires high efficiency and high automation, therefore, the production equipment and the production technology of producing semiconductor product is also had higher requirement.For semiconductor article, for example organic light emitting display, liquid crystal display device, non-crystal silicon solar cell plate etc., it is produced all needs to utilize glass etc. as substrate, on substrate, carry out working procedures and then form plural layers, technologies such as the plated film that relates in the processing step, photoetching, etching can produce dust attached on the substrate, and then influencing the cleannes of substrate, the cleannes of substrate have significant impact to the quality of product.Therefore, be to be penetrated with cleaning step in the steps such as plated film, photoetching and etching, to keep substrate surface cleanness in process of production.
With OLED (Organic Light-Emitting Diode, be Organic Light Emitting Diode) be example, repeatedly processing step is generally all carried out in the manufacturing of OLED on glass substrate, and then on substrate deposit multilayer film in succession, its rete mainly is included in the transparent anode that forms on the glass substrate, depositing hole injection layer, hole transmission layer, luminescent layer, electron transfer layer and electron injecting layer on anode successively, is the metallic cathode layer at last; If deposit dust on the substrate, meeting covers it in the forming process of next rete in above-mentioned each processing step, thereby influences the thickness and the uniformity of rete, and then influences follow-up processing quality, and the quality of OLED is reduced.Therefore as seen the cleaning of described substrate plays a part very importantly, needs a kind of Weft cleaner, also can guarantee the high cleanliness of described substrate when described substrate is efficiently cleaned.
The existing device that is used for cleaning substrate has rectangular fluid inlet zone, and the precalculated position that is separated by in this zone is provided with a plurality of jets, when the substrate of motion through out-of-date, eject cleaning fluid in the jet and then substrate cleaned.But the device of this cleaning substrate just carries out simple streamline flushing to described substrate, cleans thorough inadequately.For addressing the above problem, can set up cleaning device usually in addition and further clean described substrate, but such complex structure that just causes whole cleaning device, and increased production cost.
Therefore, be badly in need of a kind of simple in structure, automaticity is high, cleaning efficiency and cleannes height, clean OLED glass substrate cleaning equipment completely.
The utility model content
The purpose of this utility model provides a kind of OLED glass substrate cleaning equipment, and it is simple in structure, automaticity is high, cleaning efficiency and cleannes height, clean thoroughly.
For achieving the above object, the utility model provides a kind of OLED glass substrate cleaning equipment, comprise wiper mechanism, transport sector and controlling organization, described controlling organization is controlled described wiper mechanism and is cleaned the OLED glass substrate and control described transport sector transmission OLED glass substrate, described transport sector forms a horizontal loading end, and described OLED glass substrate is carried on the described loading end and is transmitted.Wherein, described wiper mechanism comprises the flusher that is arranged in order, air-dry apparatus and drying unit, described flusher, air-dry apparatus and drying unit are scrubbed described OLED glass substrate successively, air-dry and the oven dry, described flusher comprises at least two group shower groups, described shower group comprise be symmetrically set in described loading end on, the shower of downside, described shower evenly is provided with the nozzle towards described loading end, described shower is interconnected and all is communicated with extraneous cleaning fluid, between the adjacent described shower of the same side, be provided with round brush, be positioned at described loading end on, the described round brush of downside is and is symmetrical arranged.
Particularly, described transport sector comprises drive unit, roller and fixed mount, and described roller evenly is articulated in the both sides of described fixed mount and forms described loading end, and described drive unit drives described roller rotation and drives described OLED glass substrate and moves.
In a preferred embodiment of the present utility model, described OLED glass substrate cleaning equipment also comprises lowering or hoisting gear and is positioned over framework on the described lowering or hoisting gear, described controlling organization is electrically connected and controls described lowering or hoisting gear lifting with described lowering or hoisting gear, described lowering or hoisting gear butts up against the input end of described transport sector, is the some draw-in grooves for the placement of OLED glass substrate that are parallel to each other of being provided with of stratiform in the described framework.
Preferably, described OLED glass substrate cleaning equipment also comprises water tank that is used to store cleaning fluid and the water-main that is communicated with described water tank, and described water-main is communicated with described shower respectively.
Preferably, described drying unit is a ultraviolet light-emitting device.
Particularly, described air-dry apparatus comprises at least two group blower groups, described blower group comprises the blower of the upper and lower side that becomes to be symmetrically set in described loading end, described blower is the horizontal tilt setting and evenly offers airflow hole, described airflow hole is acute angle towards described loading end and with described OLED glass substrate, and described blower is communicated with extraneous blowing plant.
Preferably, the cross section of described blower is rectangular, and described airflow hole is along the axial formation row shape of described blower.
Compared with prior art, because the flusher of the utility model wiper mechanism comprises at least two group shower groups, described shower group comprises the shower that is the upper and lower side that is symmetrically set in described loading end, described shower evenly is provided with the nozzle towards described loading end, described shower is interconnected and all is communicated with extraneous cleaning fluid, be provided with round brush between the adjacent described shower of the same side, the described round brush that is positioned at the upper and lower side of described loading end is and is symmetrical arranged; During cleaning, in the extraneous cleaning fluid input shower, clean to the OLED glass substrate and then by nozzles spray again substrate, in this process, round brush further brush is wiped described substrate, and is feasible more thorough to the cleaning of described substrate, improved cleannes and cleaning efficiency.In addition, can carry out the control of automation completely to whole cleaning process by described controlling organization, promptly described OLED glass substrate cleaning equipment automaticity height, and simple in structure.
By following description also in conjunction with the accompanying drawings, it is more clear that the utility model will become, and these accompanying drawings are used to explain embodiment of the present utility model.
Description of drawings
Fig. 1 is the schematic diagram of the utility model OLED glass substrate cleaning equipment one embodiment.
Fig. 2 is the structural representation of framework shown in Figure 1.
Fig. 3 is the structural representation of transport sector shown in Figure 1.
Fig. 4 is the structural representation of flusher shown in Figure 1, wherein also shows fixed mount and water-main.
Fig. 4 a is the structural representation of the shower of flusher shown in Figure 4.
Fig. 5 is the structural representation of the blower group of air-dry apparatus shown in Figure 1, wherein also shows loading end.
Fig. 5 a is the blower structural representation of blower group shown in Figure 5.
Fig. 6 a is the schematic diagram that the utility model OLED glass substrate cleaning equipment cleans substrate, and wherein the OLED glass substrate is stated from framework on not.
Fig. 6 b is transferred to the schematic diagram of flusher flushing for OLED glass substrate shown in Fig. 6 a.
Fig. 6 c is transferred to the air-dry schematic diagram of air-dry apparatus for OLED glass substrate shown in Fig. 6 a.
Fig. 6 d is transferred to the schematic diagram of drying unit oven dry for OLED glass substrate shown in Fig. 6 a.
Fig. 6 e is unloaded at the schematic diagram of described cleaning equipment after having cleaned for the OLED glass substrate.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.As mentioned above, the utility model provides a kind of OLED glass substrate cleaning equipment, because the flusher of described wiper mechanism comprises at least two group shower groups, described shower group comprises the shower that is the upper and lower side that is symmetrically set in described loading end, described shower evenly is provided with the nozzle towards described loading end, described shower is interconnected and all is communicated with extraneous cleaning fluid, be provided with round brush between the adjacent described shower of the same side, the described round brush that is positioned at the upper and lower side of described loading end is and is symmetrical arranged; During cleaning, in the extraneous cleaning fluid input shower, clean to the OLED glass substrate and then by nozzles spray again substrate, in this process, round brush further brush is wiped described substrate, and is feasible more thorough to the cleaning of described substrate, improved cleannes and cleaning efficiency.In addition, can carry out the control of automation completely to whole cleaning process by described controlling organization, promptly described OLED glass substrate cleaning equipment automaticity height, and simple in structure.
Please refer to Fig. 1, one embodiment of the utility model OLED glass substrate cleaning equipment comprises transport sector 100, wiper mechanism 200, controlling organization 300, two lowering or hoisting gears 400, two frameworks 500, two water tanks 600, article two, water-main 700 and blowing plant 800, wherein only show a lowering or hoisting gear 400 and a framework 500 among the figure, the described transport sector 100 of described controlling organization 300 controls transmits described OLED glass substrates and controls described wiper mechanism 200 and clean described OLED glass substrate, described controlling organization 300 also is electrically connected and controls the lifting of described lowering or hoisting gear 400 with described lowering or hoisting gear 400, described two lowering or hoisting gears 400 butt up against the input and the output of described transport sector 100 respectively, described framework 500 is positioned on the described lowering or hoisting gear 400, described two water tanks 600 are respectively applied for and store cleaning fluid and pure water, and described two water tanks 600 are communicated with described two water-mains 700 respectively.Described wiper mechanism 200 comprises and is installed on the described transport sector 100 and the flusher 20 that is arranged in order, air-dry apparatus 22 and drying unit 24, described two water-mains 700 are communicated with described flusher 20, and described blowing plant 800 is communicated with described air-dry apparatus 22.Described transport sector 100 passes described flusher 20, air-dry apparatus 22 and drying unit 24 successively, described flusher 20, air-dry apparatus 22 and drying unit 24 successively to described OLED glass substrate scrub, air-dry and the oven dry.
Particularly, as shown in Figure 2, be the some draw-in grooves 501 that are parallel to each other of being provided with of stratiform in the described framework 500 for the placement of OLED glass substrate.
Particularly, as shown in Figure 3, described transport sector 100 comprises drive unit, roller 12 and fixed mount 14, described roller 12 evenly is articulated in the both sides of described fixed mount 14 and forms a horizontal loading end, described OLED glass substrate is carried on the described loading end and is transmitted, and described drive unit 10 drives described roller 12 rotations and drives described OLED glass substrate and moves.Particularly, described roller 12 bag flushing roller and guide rollers, flushing roller are between guide roller, and guide roller plays certain guide effect in the process of the described substrate of described transport sector 100 transmission, thereby guarantees the direct of travel of described substrate.
Preferably, described controlling organization 300 comprises transducer, and described transducer is arranged at the two ends of flusher 20, air-dry apparatus 22 and the drying unit 24 of described wiper mechanism 200.Like this, set preset program by described controlling organization 300, and in conjunction with the perception and the tally function of described transducer, each device that just can automatically described glass substrate be transferred to described wiper mechanism 200 cleans, and whole cleaning process is carried out whole process control.
Particularly, in conjunction with Fig. 4 and Fig. 4 a, described flusher 20 comprises at least two group shower groups 201, described shower group 201 comprises shower 201a, round brush 201b and the nozzle 201c that is the upper and lower side that is symmetrically set in described loading end, described round brush 201b is located between the adjacent described shower 201a of the same side, and the described round brush 201b that is positioned at the upper and lower side of described loading end is and is symmetrical arranged, and described nozzle 201c is located at that described shower 201a goes up and towards described loading end.Described shower 201a is communicated with described water-main 700.Particularly, 20 pairs of described OLED glass substrates of described flusher wash and brush two steps of wiping.In the described OLED glass substrate process of described transport sector 100 transmission, earlier cleaning fluid is flowed in the shower 201a by the described water-main 700 of article one, be sprayed onto on the described OLED glass substrate and then by the nozzle 201c on the described shower 201a again and wash described OLED glass substrate, in this process, described round brush 201b further brush wipes described OLED glass substrate, feasible more thorough to the cleaning of described OLED glass substrate, improved cleannes and cleaning efficiency.Afterwards, again pure water is sprayed onto on the described OLED glass substrate by the described water-main 700 of second, shower 201a and nozzle 201c thereof, to clean cleaning fluid residual on the described OLED glass substrate, dust etc.It should be noted that, described water tank 600 is connected with high-pressure hydraulic pump and operated pneumatic valve, after entering described water-main 700 and shower 201a, described cleaning fluid or pure water can produce certain water flow pressure like this, and formation column current, when described nozzle 201c is ejected into described OLED glass substrate, can form certain impulsive force again, strengthen cleaning performance better.
Particularly, in conjunction with Fig. 5 and Fig. 5 a, described air-dry apparatus 22 comprises at least two group blower groups 221, described blower group 221 comprises the blower 221a that is the upper and lower side that is symmetrically set in described loading end 16, described blower 221a is horizontal tilt ground and is provided with and evenly offers airflow hole 221a1, described airflow hole 221a1 is acute angle towards described loading end 16 and with the transmission direction of described OLED glass substrate, and described blower 221a is communicated with extraneous blowing plant 800.Preferably, described blower 221a and horizontal direction are 60 degree angles.It should be noted that, can feed the compressed air of dried and clean and adjustable in pressure in the described blower 221a, when described OLED glass substrate is transferred to described air-dry apparatus 22, the globule on the described OLED glass substrate will by opposite with described OLED glass substrate direct of travel, purge by certain tangential angle and compressed air with certain pressure clean, for the baking operation that enters next step ready.
Preferably, as shown in Figure 1, described drying unit 24 is a ultraviolet light-emitting device.After described OLED glass substrate was finished air-dry operation, described transport sector 100 transferred to baking operation with described OLED glass substrate.Described drying unit 24 comprises many row's ultraviolet light-emitting devices, and it is installed on the described fixed mount 14.Described ultraviolet light-emitting device gives out elevated temperature heat spoke energy, the trickle globule residual on the described OLED glass substrate evaporated, thus the purpose of realization oven dry.After waiting to finish baking operation, by described transport sector 100 described OLED glass substrate is unloaded again, thereby finish whole cleaning process.
Please refer to Fig. 6 a-6e again, described the cleaning process of the utility model OLED glass cleaning equipment cleaning OLED glass substrate: (1) prepares OLED glass substrate 900 to be cleaned is positioned over the draw-in groove 501 interior (shown in Fig. 6 a) of described framework 500; (2) described transport sector 100 transfers to flusher 20 with described OLED glass substrate 900 and scrubs (shown in Fig. 6 b); (3) described transport sector 100 transfers to air-dry apparatus 22 air-dry (shown in Fig. 6 c) with described OLED glass substrate 900; (4) described transport sector 100 transfers to drying unit 24 with described OLED glass substrate 900 and dries (shown in Fig. 6 d); (5) the described transport sector 100 described OLED glass substrate 900 that continues to have cleaned transfers to another framework 500, finishes whole cleaning process, and is unloaded at described cleaning equipment (shown in Fig. 6 e).
To sum up, as can be seen from the above description, OLED glass substrate cleaning equipment of the present utility model is simple in structure, and each functions of modules is well arranged, and cleaning efficiency and cleannes height clean thoroughly.In addition, be easy to realize full-automation control to whole cleaning process, i.e. automaticity height by described controlling organization 300.
Abovely the utility model is described, but the utility model is not limited to the embodiment of above announcement, and should contains various modification, equivalent combinations of carrying out according to essence of the present utility model in conjunction with most preferred embodiment.
Claims (7)
1. OLED glass substrate cleaning equipment, comprise wiper mechanism, transport sector and controlling organization, described controlling organization is controlled described wiper mechanism and is cleaned the OLED glass substrate and control described transport sector transmission OLED glass substrate, described transport sector forms a horizontal loading end, described OLED glass substrate is carried on the described loading end and is transmitted, it is characterized in that, described wiper mechanism comprises the flusher that is arranged in order, air-dry apparatus and drying unit, described transport sector passes described flusher successively, air-dry apparatus, drying unit, described flusher, air-dry apparatus and drying unit are scrubbed described OLED glass substrate successively, air-dry and the oven dry, described flusher comprises at least two group shower groups, described shower group comprise be symmetrically set in described loading end on, the shower of downside, described shower evenly is provided with the nozzle towards described loading end, described shower is interconnected and all is communicated with extraneous cleaning fluid, between the adjacent described shower of the same side, be provided with round brush, be positioned at described loading end on, the described round brush of downside is and is symmetrical arranged.
2. OLED glass substrate cleaning equipment as claimed in claim 1, it is characterized in that, described transport sector comprises drive unit, roller and fixed mount, described roller evenly is articulated in the both sides of described fixed mount and forms described loading end, and described drive unit drives described roller rotation and drives described OLED glass substrate and moves.
3. OLED glass substrate cleaning equipment as claimed in claim 1, it is characterized in that, also comprise lowering or hoisting gear and be positioned over framework on the described lowering or hoisting gear, described controlling organization and described lowering or hoisting gear are electrically connected and control the lifting of described lowering or hoisting gear, described lowering or hoisting gear butts up against the input end of described transport sector, is the some draw-in grooves for the placement of OLED glass substrate that are parallel to each other of being provided with of stratiform in the described framework.
4. OLED glass substrate cleaning equipment as claimed in claim 1 is characterized in that, described OLED glass substrate cleaning equipment also comprises water tank that is used to store cleaning fluid and the water-main that is communicated with described water tank, and described water-main is communicated with described shower respectively.
5. OLED glass substrate cleaning equipment as claimed in claim 4 is characterized in that described drying unit is a ultraviolet light-emitting device.
6. as each described OLED glass substrate cleaning equipment of claim 1-5, it is characterized in that, described air-dry apparatus comprises at least two group blower groups, described blower group comprises the blower that is the upper and lower side that is symmetrically set in described loading end, described blower is the horizontal tilt setting and evenly offers airflow hole, described airflow hole is acute angle towards described loading end and with the transmission direction of described OLED glass substrate, and described blower is communicated with extraneous blowing plant.
7. OLED glass substrate cleaning equipment as claimed in claim 6 is characterized in that the cross section of described blower is rectangular, and described airflow hole is along the axial formation row shape of described blower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200966004U CN202067842U (en) | 2011-04-02 | 2011-04-02 | Equipment for cleaning OLED (organic light emitting diode) glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200966004U CN202067842U (en) | 2011-04-02 | 2011-04-02 | Equipment for cleaning OLED (organic light emitting diode) glass substrate |
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| Publication Number | Publication Date |
|---|---|
| CN202067842U true CN202067842U (en) | 2011-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200966004U Expired - Lifetime CN202067842U (en) | 2011-04-02 | 2011-04-02 | Equipment for cleaning OLED (organic light emitting diode) glass substrate |
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| CN (1) | CN202067842U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185119A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning equipment and cleaning method |
| CN102527656A (en) * | 2011-12-31 | 2012-07-04 | 绍兴县瑞群纺织机械科技有限公司 | Continuous cleaning device for flat-screen printing plate |
| CN102820242A (en) * | 2012-07-26 | 2012-12-12 | 江阴迪林生物电子技术有限公司 | Online chip cleaning and drying equipment |
| CN107597672A (en) * | 2017-09-19 | 2018-01-19 | 合肥惠科金扬科技有限公司 | A kind of manufacture method of the cleaning assembly of substrate cleaning apparatus |
| CN107597775A (en) * | 2017-09-19 | 2018-01-19 | 合肥惠科金扬科技有限公司 | A kind of substrate cleaning apparatus |
| CN107597673A (en) * | 2017-09-19 | 2018-01-19 | 合肥惠科金扬科技有限公司 | A kind of cleaning assembly of substrate cleaning apparatus |
| CN109219486A (en) * | 2016-04-06 | 2019-01-15 | 法国圣戈班玻璃厂 | The device of glass plate is especially used to support in cleaning equipment |
-
2011
- 2011-04-02 CN CN2011200966004U patent/CN202067842U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185119A (en) * | 2011-04-02 | 2011-09-14 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning equipment and cleaning method |
| CN102185119B (en) * | 2011-04-02 | 2013-04-10 | 东莞宏威数码机械有限公司 | Organic light emitting diode (OLED) glass substrate cleaning equipment and cleaning method |
| CN102527656A (en) * | 2011-12-31 | 2012-07-04 | 绍兴县瑞群纺织机械科技有限公司 | Continuous cleaning device for flat-screen printing plate |
| CN102527656B (en) * | 2011-12-31 | 2014-04-02 | 绍兴县瑞群纺织机械科技有限公司 | Continuous cleaning device for flat-screen printing plate |
| CN102820242A (en) * | 2012-07-26 | 2012-12-12 | 江阴迪林生物电子技术有限公司 | Online chip cleaning and drying equipment |
| CN102820242B (en) * | 2012-07-26 | 2014-11-19 | 江阴迪林生物电子技术有限公司 | Online chip cleaning and drying equipment |
| CN109219486A (en) * | 2016-04-06 | 2019-01-15 | 法国圣戈班玻璃厂 | The device of glass plate is especially used to support in cleaning equipment |
| CN107597672A (en) * | 2017-09-19 | 2018-01-19 | 合肥惠科金扬科技有限公司 | A kind of manufacture method of the cleaning assembly of substrate cleaning apparatus |
| CN107597775A (en) * | 2017-09-19 | 2018-01-19 | 合肥惠科金扬科技有限公司 | A kind of substrate cleaning apparatus |
| CN107597673A (en) * | 2017-09-19 | 2018-01-19 | 合肥惠科金扬科技有限公司 | A kind of cleaning assembly of substrate cleaning apparatus |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20111207 Effective date of abandoning: 20130410 |
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| RGAV | Abandon patent right to avoid regrant |