TWI387488B - Apparatus for jetting fluid - Google Patents

Description

Fluid ejection device

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a fluid ejecting apparatus, and more particularly to a fluid ejecting apparatus suitable for use in a technique of manufacturing a flat panel display panel substrate by using a jetting fluid, in particular, a variable jetting method based on a nozzle swinging motion. And a fluid ejection device that uniformly supplies the fluid.

A liquid crystal display device such as an LCD generally displays a video signal by a liquid crystal transmittance that changes in accordance with an applied voltage of an electric signal. The liquid crystal display device generally includes a backlight module, a liquid crystal display panel, and a casing.

The liquid crystal display panel uses a substrate having a functional film of a multilayer structure. The substrate is fabricated by a thin film evaporation process, a photolithography process, and an etching and stripping process. Wherein, the photolithography process forms a photoresist pattern after exposure and development of the coating; the etching and stripping process is used to form a real film pattern on the substrate.

In each of the processes, the etching and stripping process is a process of directly forming a functional film having a predetermined pattern on a substrate, and the process employs a known method of ejecting a fluid such as an etching solution or a stripping liquid onto the substrate.

That is, the etching process leaves a necessary portion of the film on the substrate by the chemical reaction of the etching solution, and selectively removes unnecessary portions; and the stripping process is performed by using a stripping solution to remove the etching process and remaining on the substrate. A photoresist mask on the layer.

Therefore, the etching and peeling process is performed in a working tank having an ejection device (ejection tube and nozzle) for ejecting a fluid such as an etching liquid or a peeling liquid. Among them, the nozzle position or the ejection angle of the ejection device has a large influence on the etching and peeling quality of the substrate.

However, most of the injection devices employ a means of injecting fluid from a fixed nozzle. This structure has the following disadvantages in etching or peeling work in the substrate manufacturing process.

First, when a fluid is ejected to a substrate, the fluid is concentratedly supplied to a region covered by the ejection angle of each nozzle.

Therefore, when the substrate is etched or peeled off, it is difficult to uniformly eject the entire surface of the substrate, so that excessive defects are generated after the etching or peeling operation.

For example, if the fluid ejected on the entire surface of the substrate is not uniform, the etched surface of the substrate may be irregular, or it may be difficult to smoothly remove the residual photoresist from the entire surface of the substrate.

Further, in the state in which the fixed nozzles are arranged, the phenomenon that the injection angle of the adjacent nozzles is supplied with excessive fluid in the region where the substrates overlap is caused.

Therefore, if the substrate is etched or peeled off by the fixed ejection device, it is difficult to obtain satisfactory work and production efficiency due to uneven supply of the fluid.

In view of the above problems in the prior art, the present invention provides a fluid ejecting apparatus which can uniformly supply a fluid to the entire surface of a substrate. The device realizes a variable injection mode by a nozzle swinging motion.

In order to achieve the above object, the present invention adopts the following technical means. The fluid ejecting apparatus of the present invention includes: a working tank having a working space; a plurality of injection pipes having nozzles for ejecting fluid and disposed apart from the working space; and the nozzle is connected to the injection pipe and moved by the link A power transmission mechanism that changes a spray posture; a drive source that generates power for causing the power transmission mechanism to perform a link motion.

The fluid ejecting apparatus according to the present invention is provided with a mechanism capable of uniformly ejecting a fluid to all areas of one surface of a substrate in a process of spraying a fluid such as etching or peeling in a substrate manufacturing technique, so that work efficiency can be further improved.

In particular, the mechanism can change the posture of the nozzle in the conveying direction across the substrate, and generate a continuous oscillating motion, thereby uniformly spraying the fluid by the variable injection method, thereby solving the prior art fixed type using the fixed nozzle. Quality problems caused by the spray method.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, and the description will be made within the scope of the present invention. Since the specific embodiments of the present invention can be implemented in various forms, the scope of the present invention is not limited to the specific embodiments described below.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall configuration of a fluid ejecting apparatus according to an embodiment of the present invention. The symbol 2 in the figure indicates a work slot.

The working tank 2 is constituted by a conventional structure and has a working space S therein, and can perform an etching or stripping operation in a process for manufacturing a flat panel display panel substrate G (hereinafter referred to as a substrate).

A conveying device 4 for conveying the substrate G is provided inside the working tank 2.

The conveying device 4 employs a roller conveyor of a conventional structure including a plurality of conveying rollers R.

The conveying device 4 can receive power from a motor (not shown) by a conventional method to rotate the conveying roller R, and thereby convey the substrate G from the left side to the right side of the working space S (when based on FIG. 1).

The substrate G is moved along the transport device 4 in a state as shown in FIG. 1 in a state in which one of the processed surfaces G1 subjected to etching or peeling treatment is directed upward.

Further, a fluid ejecting apparatus according to an embodiment of the present invention includes a plurality of ejecting tubes P for ejecting a fluid W inside the working tank 2.

Each of the plurality of injection pipes P has one or more nozzles N, and as shown in FIG. 1, the injection pipe P is located above the conveying device 4 in the working space S.

As shown in Fig. 2, the injection pipe P is spaced apart from each other at the front and rear positions of the substrate G transporting zone, and is arranged in the moving direction of the substrate G in the manner shown in the drawing.

Such a configuration can reduce the fluid to the maximum extent even if a time difference occurs during the conveyance of the substrate G, compared with a configuration (not shown) in which the injection pipe P is disposed in a state of traversing the moving direction of the substrate G. The distribution of W on the substrate G is uneven.

The injection pipe P has a fluid flow passage inside thereof, and is connected to the supply pipe L as shown in FIG.

Moreover, the supply pipe L is connected to the storage tank T containing the fluid W, so that the fluid W for the conventional etching or peeling operation is supplied from the storage tank T to the injection pipe P.

The nozzle N is coupled to the outer surface of the injection pipe P in a state of being in communication with the internal passage of the injection pipe P, thereby injecting the fluid W supplied to the injection pipe P at a predetermined pressure.

As shown in FIG. 2, one or more nozzles N are coupled to the respective ejecting tubes P, and are arranged in a zigzag pattern. The nozzle N is positioned inside the working space S in a state where the fluid W can be ejected onto the substrate G moving along the conveying device 4.

Although not shown, the nozzle N coupled to the injection pipe P has a nozzle hole capable of spraying the fluid W in a radial manner.

As shown in Fig. 1, both ends of the plurality of injection pipes P are inserted and fixed in the support holes H of the bracket 6 provided inside the work tank 2, so that the injection pipe P can be rotated with reference to its center axis.

Each of the brackets 6 is fixed to the upper side of the work space S, and each of the spray pipes P is fixed and supported in a state of being horizontally suspended above the work space S.

Further, as shown in FIG. 4, a bearing 8 can be further mounted in the support hole H.

The bearing 8 can use a conventional radial bearing for supporting the inserted end of the injection pipe to make the rotation of the injection pipe P smoother.

Each of the injection pipes P is fixed and supported in the working space S with its both ends inserted into the holder 6, and is rotated about the axis thereof.

The fluid ejection device according to an embodiment of the present invention includes a power transmission mechanism 10.

The power transmission mechanism 10 can transmit power to rotate the plurality of injection pipes P by the movement of the link with reference to the center axis thereof.

To this end, as shown in FIG. 5, in the present embodiment, a moving rod 12 connected to one end of each of the injection pipes P by the connecting rod 14 is provided, so that the connecting rod 14 and the moving rod 12 are The link moves to transmit power.

In the working tank 2, the moving rod 12 is placed between the injection pipes P disposed in the front and rear of the conveyance region of the substrate G.

Further, one end of the link 14 is hinged to the moving rod 12, and the other end is fixedly coupled to one end of the injection pipe P.

With reference to Fig. 6, when the moving rod 12 reciprocates in the left-right direction, the connection posture of the link 14 changes, and the link motion is performed. The power transmission mechanism 10 rotates each of the injection pipes P based on the center thereof by the movement of the link.

The fluid ejection device according to an embodiment of the present invention includes a drive source M that generates power that can drive the power transmission mechanism 10 to perform link motion.

The driving source M can use a conventional motor, and as shown in FIG. 3, in order to transmit power to the moving rod 12, the driving source M is connected to one end of the moving rod 12 and disposed outside the working tank 2. .

As shown in FIG. 6, the drive source M can transmit power to the travel bar 12 by rotating the disk 16 and the coupling member 18.

The center of the rotating disk 16 is connected to the motor shaft of the driving source M, and one end of the coupling member 18 is fixedly coupled to a position deviated from the center of the rotating disk 16.

Moreover, the other end of the coupling member 18 is fixedly coupled to one end of the moving rod 12.

The coupling member 18 can use a conventional universal joint capable of changing the connection angle, and its both ends are hinged to the rotary disk 16 and the moving rod 12, respectively.

The coupling member 18 is used to change the connection angle of the rotating disk 16 and the moving rod 12, thereby smoothly transmitting power.

The rotary disk 16 functions as an eccentric disk that rotates in accordance with the center of the rotary member according to the rotational power generated by the drive source M to push and pull one end of the coupling member 18 in one direction.

That is, with reference to Fig. 6, when the driving source M is driven, the moving rod 12 performs a reciprocating movement of a certain displacement in the left-right direction by the pushing and pulling force of the coupling member 18.

Further, as described above, when the moving rod 12 performs a linear reciprocating motion, the injection pipe P receives power by the link movement of the link 14, thereby rotating left and right with reference to its center axis, as shown in FIG. Like.

Therefore, the nozzle N can change its posture within a certain variable angle A by the rotation of the injection pipe P to complete the continuous swinging motion.

Therefore, the upper surface of the substrate G moved in the work space S can be etched or peeled off by the variable injection method realized by the swing operation of the plurality of nozzles N coupled to the ejection tube P.

Such a variable ejection structure can solve various problems caused by the uneven injection amount of the fluid W to the substrate G when etching or peeling is performed by a conventional ejection device having a plurality of fixed nozzles.

Further, depending on the size of the substrate G or the working environment, the variable injection angle A of the nozzle N can be appropriately adjusted, and the ejection operation can be performed in this state, so that the work compatibility can be further improved.

Further, the variable angle A of the nozzle N can be appropriately adjusted in accordance with the reciprocating pitch of the moving rod 12.

For example, if the reciprocating movement pitch of the moving rod 12 is set longer, the nozzle N variable angle A becomes larger, and vice versa.

In addition, the moving pitch of the moving rod 12 can be changed by connecting one end of the coupling member 18 and the rotating disk 16 to adjust the eccentric distance or the like.

In the above description, the driving source M uses a motor and the power transmission mechanism 10 performs the link motion by the rotational power of the motor as an example for explanation, and the structure is shown in the figure, but the present invention Not limited to this.

For example, as shown in FIG. 8, the drive source M1 can also use a conventional cylinder.

That is, the present invention can also connect the piston rod of the cylinder and one end of the moving rod 12 of the power transmission mechanism 10 in the manner shown in Fig. 8, thereby effecting the link movement by driving the cylinder.

This power transmission mode directly connects the piston rod of the cylinder, thereby directly transmitting the linear moving power to the power transmission mechanism 10.

Further, although not shown, in addition to the motor or the cylinder, various power generating devices that can satisfy the object of the present invention can be used.

2. . . Job slot

4. . . Conveyor

6. . . support

8. . . Bearing

10. . . Power transmission mechanism

12. . . Moving rod

14. . . link

16. . . Rotating disk

18. . . Coupling component

A. . . Variable angle

G(G1). . . Substrate

H. . . Support hole

L. . . Supply tube

M(M1). . . Drive source

P. . . Jet tube

N. . . nozzle

R. . . Conveyor roller

S. . . Working space

T. . . Storage tank

W. . . fluid

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall configuration of a fluid ejecting apparatus of the present invention.

Fig. 2 is a schematic view for explaining an arrangement state of the injection pipes of the fluid ejecting apparatus of the present invention.

Figure 3 is a side cross-sectional view of the fluid ejection device of Figure 1.

Fig. 4 is a schematic view for explaining a state in which the injection pipe of the fluid ejecting apparatus of the present invention is fixed.

Fig. 5 is a schematic view for explaining the structure of a power transmission mechanism of the fluid ejection device of the present invention.

Fig. 6 is a schematic view for explaining the action of the power transmission mechanism shown in Fig. 5.

Fig. 7 is a schematic view for explaining a state in which the injection pipe is swung under the action of the power transmission mechanism shown in Fig. 5.

Fig. 8 is a schematic view showing another embodiment of a driving source of the fluid ejecting apparatus of the present invention.

2. . . Job slot

4. . . Conveyor

6. . . support

12. . . Moving rod

14. . . link

G(G1). . . Substrate

N. . . nozzle

P. . . Jet tube

R. . . Conveyor roller

S. . . Working space

Claims (1)

A fluid ejection device comprising: a working tank having a working space; a plurality of injection pipes having a plurality of nozzles for injecting fluid and spaced apart from each other and disposed in the working space, each of the injection tubes being capable of having a central axis thereof Swinging, at least one of the nozzles is disposed on each of the spray tubes, each of the nozzles being oscillating with a central axis of the spray tube, the nozzle being configured to eject fluid to an upper surface of the substrate; and the spray tube a power transmission mechanism that is connected to each other and changes an injection posture of the nozzle by a movement of a link; and a drive source that generates power for causing the power transmission mechanism to perform a link motion, the drive source being a motor or a cylinder; The spray pipes are arranged in a spaced relationship and are supported in a swingable manner to enable a change in the spray angle of the nozzle; the power transmission mechanism includes: a moving rod that reciprocates at a predetermined interval, and connects the moving rod and the same a plurality of injection pipes for causing a link to move, when the moving rod is linearly reciprocated by the power of the driving source, A plurality of injection pipes by link motion of the link, and the axis as the center of swing predetermined angle.