CN212418822U - High-pressure cleaning device for high-temperature gas-phase-inversion application of screen - Google Patents
High-pressure cleaning device for high-temperature gas-phase-inversion application of screen Download PDFInfo
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- CN212418822U CN212418822U CN201922349078.5U CN201922349078U CN212418822U CN 212418822 U CN212418822 U CN 212418822U CN 201922349078 U CN201922349078 U CN 201922349078U CN 212418822 U CN212418822 U CN 212418822U
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Abstract
The utility model relates to a high pressure cleaning device is used on contrary to gas under high temperature of screen, including the frame, the centre of frame sets up the holding portion that supplies the diffusion board to put immediately, and the both sides of holding portion set up the cleaning unit, the cleaning unit include with the steelframe of the diffusion board parallel arrangement of putting immediately, set up drive mechanism on the steelframe, drive mechanism include the pole setting that the diffusion board that parallel put immediately set up and be located the horizontal guide arm between the pole setting, horizontal guide arm can move from top to bottom along the direction that sets up of pole setting, set up the slider on the horizontal guide arm, the slider make a round trip along the pole length direction of horizontal guide arm can move, set up the shower nozzle subassembly on the slider, the shower nozzle subassembly include a plurality of shower nozzles that extend to the slider outside, these a plurality of shower nozzle injection ends are perpendicular the steelframe. The front surface and the back surface of the diffusion plate can be automatically cleaned at high pressure at the same time, the cost is low, the cleaning efficiency is high, the occupied space is small, and the diffusion plate is suitable for a diffusion plate product in a CVD (chemical vapor deposition) process.
Description
Technical Field
The utility model relates to a display screen processing field, concretely relates to high pressure cleaning device is used to gas phase opposition under the high temperature of screen.
Background
In the CVD (Chemical Vapor Deposition) process in the field of LCD (liquid crystal display) and OLED (organic light emitting display) screens, a required gas is injected into the inside of a workpiece, and in the process, a diffusion plate with holes on the surface is used, wherein the diffusion plate usually has a length and a width of over 3m and a large specification, and has about 16 ten thousand holes penetrating through the front and back surfaces of the diffusion plate, and the holes are cleaned with high pressure water of 100Bar or more because of the foreign matters generated by the process. The existing high-pressure water cleaning mainly adopts the following two schemes:
1) the manual washing, this kind of washing is because wash water needs high pressure, and the handheld high pressure hose holding power of operating personnel is limited, and water pressure is higher slightly, and operating personnel just can not support, so operating personnel can hand the state of supporting, and water pressure is given less relatively, and operating personnel just must wash repeatedly like this, nevertheless because water pressure is less, the washing dynamics is not enough, hardly reaches the requirement of sanitization. And when cleaning the holes, due to the factor of the hole type, the cleaning solution needs to be horizontally and linearly washed by the vertical diffusion plate, so that an operator needs to horizontally spray the cleaning solution to all the holes of the diffusion plate, and thus, the manual cleaning accuracy is low and the cleaning efficiency is low.
2) The cleaning of the large-scale multi-joint robot is realized by connecting a hose with the high-pressure water through the purchased large-scale multi-joint robot in a workshop, although the coordinate high-pressure cleaning can be set according to the large-scale multi-joint robot, the cost is high in the first and second aspects, the base of the large-scale multi-joint robot is fixed, the large-scale multi-joint robot cannot simultaneously perform two-side cleaning, so that a vehicle is usually required to turn over a diffusion plate, or two large-scale multi-joint robots are positioned on the front side and the back side of the diffusion plate and simultaneously perform cleaning, the cleaning time of the former is long, and the equipment cost of the latter is required to be increased.
Disclosure of Invention
The utility model aims at providing a high pressure cleaning device is used on contrary to gas under the high temperature of screen, the cost is lower, washs high-efficient, the cleaning time is short, and takes up an area of the space for a short time, can automatic high-pressure cleaning simultaneously to the positive and negative both sides of diffusion board, not only is applicable to the diffusion board in the CVD technology, also is applicable to the large tracts of land product that has a large amount of slight apertures.
In order to realize the above purpose, the utility model discloses a technical scheme be: the high-pressure cleaning device comprises a rack, a containing part for a diffusion plate to be vertically arranged is arranged in the middle of the rack, cleaning units are arranged on two sides of the containing part, each cleaning unit comprises a steel frame which is arranged in parallel with the vertically arranged diffusion plate, a transmission mechanism is arranged on each steel frame, each transmission mechanism comprises a vertical rod and a horizontal guide rod, the vertical rods are parallel to the diffusion plate to be vertically arranged, each horizontal guide rod can move up and down along the arrangement direction of the vertical rods, a sliding block is arranged on each horizontal guide rod, each sliding block can move back and forth along the rod length direction of each horizontal guide rod, a nozzle assembly is arranged on each sliding block, each nozzle assembly comprises a plurality of nozzles extending towards the outer sides of the corresponding sliding block, the injection ends of the plurality of nozzles are perpendicular to the steel frame, and the water inlet ends.
Further, the shower nozzle subassembly include the joint socket of being connected with the slider, set up rotatory piece on the joint socket, rotatory piece side sets up the response piece, the perpendicular steelframe of pivot of rotatory piece arrange, set up the air knife on the rotatory piece, on the air knife is fixed in the rotatory piece through the fixed plate, the front of rotatory piece is fixed with the rotating rod, the rotating rod have the declination, the inner water connectors that lead to of rotating rod, the shower nozzle spray end set up in the outer end of rotating rod, the back of rotatory piece sets up driving motor, driving motor's drive gear's below sets up the encoder, driving motor drive air knife pneumatics, water connectors UNICOM water supply host computer.
Still further, the water supply main machine is a 250Bar high-pressure water main machine, and the 250Bar high-pressure water main machine adopts an ABB variable frequency drive variable frequency motor to drive water delivery.
Furthermore, the transmission mechanism comprises a first screw mechanism which drives the horizontal guide rod to move up and down along the arrangement direction of the vertical rod and a second screw mechanism which drives the sliding block to move back and forth along the rod length direction of the horizontal guide rod.
Furthermore, a push rod is arranged on the horizontal plane of the rack in the direction of the vertical accommodating part, the cleaning unit is arranged on the push rod, and the cleaning unit can move along the arrangement direction of the push rod.
Still further, the bottom of frame sets up the ponding tray, the water delivery end UNICOM of water supply host computer the ponding tray.
Still further, the holding part is a strip-shaped supporting groove.
Still further, the nozzle assembly comprises four nozzles arranged in a square matrix.
The technical effects of the utility model reside in that: adopt the utility model discloses a high pressure cleaning device is used on contrary to gas under high temperature of screen, the cost is lower, washs high-efficient, the cleaning time is short, and takes up an area of the space for a short time, can automatic high pressure cleaning simultaneously to the positive and negative both sides of diffusion board, actually washs water pressure and transfers to 250bar at most. It is not only suitable for diffusion plate in CVD process, but also suitable for large area product with a large amount of tiny small holes.
Drawings
FIG. 1 is a top view of the structure of the present invention;
FIG. 2 is a side view of the structure of the present invention;
FIG. 3 is a top view structural diagram of the horizontal guide rod of the present invention with a slider and a nozzle assembly;
FIG. 4 is a right side cross-sectional view of the showerhead assembly of the present invention;
FIG. 5 is a left side view of the showerhead assembly of the present invention;
fig. 6 is a rear view structural diagram of the nozzle assembly of the present invention.
Detailed Description
Referring to the drawings, a high-pressure cleaning device for high-temperature air-phase reversal application of a screen comprises a frame 10, a holding part 11 for standing a diffusion plate is arranged in the middle of the frame 10, cleaning units 20 are arranged on two sides of the holding part 11, each cleaning unit 20 comprises a steel frame 21 arranged in parallel with the vertical diffusion plate, a transmission mechanism 22 is arranged on each steel frame 21, each transmission mechanism 22 comprises vertical rods 22a arranged in parallel with the vertical diffusion plate and horizontal guide rods 22b positioned between the vertical rods 22a, each horizontal guide rod 22b can move up and down along the arrangement direction of the vertical rods 22a, a sliding block 23 is arranged on each horizontal guide rod 22b, each sliding block 23 can move back and forth along the rod length direction of the horizontal guide rod 22b, a spray head assembly 24 is arranged on each sliding block 23, each spray head assembly 24 comprises a plurality of spray heads 24a extending towards the outer side of each sliding block 23, and the spray ends of the plurality of spray heads 24a are perpendicular to, the water inlet end of the spray head 24a is connected with a water supply host. The diffusion plate is vertically arranged at the accommodating part 11, the transmission mechanism 22 drives the sliding block 23 to freely move up and down along the arrangement direction of the vertical rod 22a and freely move left and right along the arrangement direction of the horizontal guide rod 22b, so that the spray head assembly 24 and other components on the sliding block 23 can freely move along with the sliding block 23 on two sides of the diffusion plate which is vertically arranged in parallel, and the spray ends of a plurality of spray heads 24a of the spray head assembly 24 arranged on the sliding block 23 are vertical to the steel frame 21, namely the diffusion plate which is vertically arranged in vertical, so as to form.
Further, the nozzle assembly 24 includes a joint seat connected with the slider 23, a rotating block 24c is arranged on the joint seat, an induction block 24g is arranged beside the rotating block 24c, a rotating shaft of the rotating block 24c is arranged perpendicular to the steel frame 21, an air knife 24h is arranged on the rotating block 24c, the air knife 24h is fixed on the rotating block 24c through a fixing plate 24e, a rotating rod is fixed on the front surface of the rotating block 24c, the rotating rod has a deflection angle, the inner end of the rotating rod is communicated with a water inlet joint 24d, the spraying end of the nozzle 24a is arranged at the outer end of the rotating rod, a driving motor 24b is arranged on the back surface of the rotating block 24c, an encoder 24f is arranged below a driving gear of the driving motor 24b, the driving motor 24b drives the air knife 24h, and the water inlet joint 24d is communicated with a water supply host. The rotating rod on the sliding block 23 freely rotates in the plane of the diffusion plate which is vertically arranged in parallel, specifically, the arranged sensing block 24g senses the diffusion plate, the system starts the spray head assembly 24 to work, the water inlet joint 24d feeds water under high pressure, and the rotating rod automatically rotates at high speed under the action of water pressure because the rotating rod is provided with a deflection angle, the spray end of the spray head 24a communicated with the water inlet joint 24d rotates and is cleaned from discharged water, here, the water inlet end of the lower water inlet joint 24d and the spray end of the spray head 24a are connected in a sleeve type, and the rotating center is the connecting axis of the sleeve; and the air knife 24h is accurately pneumatic under the action of an encoder according to the cleaning working condition, so that the effect of quickly air-drying the holes of the cleaned diffusion plate is achieved, and the influence of blockage and the like caused by the retention of cleaning water in the holes is avoided.
Still further, the water supply main machine is a 250Bar high-pressure water main machine, and the 250Bar high-pressure water main machine adopts an ABB variable frequency drive variable frequency motor to drive water delivery.
Further, the transmission mechanism 22 includes a first screw mechanism for driving the horizontal guide rod 22b to move up and down along the setting direction of the vertical rod 22a, and a second screw mechanism for driving the sliding block 23 to move back and forth along the rod length direction of the horizontal guide rod 22 b.
Further, a push rod 12 is provided in the horizontal plane of the frame 10 in the direction of the vertical receiving portion 11, the cleaning unit 20 is disposed on the push rod 12, and the cleaning unit 20 is movable in the arrangement direction of the push rod 12. The pushing rod 12 is provided for the cleaning unit 20 to move in parallel to the diffusion plate at the accommodating portion 11, and move to a proper position for fixing, thereby facilitating cleaning.
Still further, the bottom of frame 10 sets up the ponding tray, the water delivery end UNICOM of water supply host computer the ponding tray. The ponding tray that sets up collects the recycle to wasing water, and resources are saved reaches further reduce cost's effect.
Still further, the accommodating portion 11 is a strip-shaped supporting groove.
Still further, the showerhead assembly 24 includes four showerhead 24a arranged in a square matrix.
Adopt the utility model discloses a high pressure cleaning device is used on contrary to gas under high temperature of screen, the cost is lower, washs high-efficient, the cleaning time is short, and takes up an area of the space for a short time, can automatic high pressure cleaning simultaneously to the positive and negative both sides of diffusion board, actually washs water pressure and transfers to 250bar at most. It is not only suitable for diffusion plate in CVD process, but also suitable for large area product with a large amount of tiny small holes.
The horizontal guide rod 22b and the vertical rod 22a of the transmission mechanism 22 are matched with the first screw rod mechanism and the second screw rod mechanism, the driving ends of the first screw rod mechanism and the second screw rod mechanism are provided with hydraulic motors to form a two-axis hydraulic moving mechanism, the two-axis hydraulic moving mechanism can adjust the movement speed in a mode of adjusting the flow of hydraulic oil, the two-axis hydraulic moving mechanism adopts a hydraulic driving system with extremely high durability and a roller track beam structure to adapt to a humid working environment, the first screw rod mechanism and the second screw rod mechanism adopt a T-shaped screw rod transmission mode for transmission, and a nylon sleeve is adopted as a guide sleeve on a screw rod, so that the blockage caused by the pollution of impurities such as dust in a workshop and the like can be effectively prevented. The spray head 24a of the spray head assembly 24, namely the spray nozzle, adopts a rotary multi-branch spray rod to form a rotary rod, automatically rotates at high speed under the action of water pressure, and adjusts the rotation speed by adjusting the deflection angle of the rotary rod. External power is not required to be provided, and energy cost is saved. An air knife 24h forms an automatic air drying system (the high-pressure air knife scans from top to bottom for drying) so as to achieve the air drying effect of the diffusion plate. The water supply host computer adopts 250Bar high pressure water host computer, provides the high pressure water of the required 250Bar pressure of washing actuating mechanism (shower nozzle subassembly 24) like this, and the penetrating power is strong, has better cleaning performance to intensive orifice plate product (the utility model discloses a processing object diffusion diffuser plate), all has very big promotion on washing position, cleaning speed, washing precision and stability than manual cleaning, has guaranteed the qualification rate of intensive orifice plate product. Just the utility model discloses 250Bar high pressure water host computer adopts ABB frequency conversion drive inverter motor drive, and water supply system adopts and compensates formula control mode and can adjust the flow of water and the size of pressure by oneself concurrently. The cleaning requirements of different dense hole plate products are met.
The utility model discloses an all drives adopt hydraulic motor drive. The hydraulic driving system can operate in a humid environment, and the movable range of the hydraulic driving system is fixed, so that the robot injury accident cannot occur. And the two-shaft hydraulic moving mechanism adopted by the transmission mechanism 22 occupies small space, and has low installation cost and low later maintenance cost. The device can run completely by itself without the need of personnel.
The following are the specific parameters of the components of the device of the present invention:
water supply host (model: FS 90/25 VF; ceramic plunger pump; 90L/min,250 bar; Siemens Moto/ABB variable frequency drive)
The hydraulic drive system adopts a control cabinet (model: FS HPC-2X D; hydraulic drive numerical control system; Siemens PLC automatic program; AC380V, 3P, 7.5 KW; MAX controllable water pressure: 250 bar; MAX controllable water flow: 160L/min)
Transmission mechanism 22 (model: FS HPC-2X D; movement range: X: 5400 mm; Y: 3200 mm; cleaning range: X: 5800 mm; Y: 3800 mm; cleaning by high-pressure water up-down scanning mode; cleaning by high-pressure air knife up-down scanning mode; Y-axis mirror surface SUS pipe guide, double-trapezoid SUS screw rod; synchronous large-span drive; X-axis 6M roller ruler bar beam, lubrication-free, rust-proof; cleaning diameter by high-pressure water self-rotation; 470 mm; rotation speed 2000rpm)
The water inlet joint (24d) is communicated with the water supply main machine and adopts a high-pressure hose (working pressure 400bar, 10M)
Water accumulation tray (made of SUS material).
Further, the diffusion plate is vertically arranged in the accommodating part 11, and the distance between the accommodating part 11 and the arranged cleaning unit 20 is 150 mm; 150mm is the optimal distance for the straight water column ejected by the nozzle 24a to pass through the diffusion diffuser hole; the distance is more than 150mm, and the effect of the straight water column cleaning hole is weakened; distances < 150mm, the diffusion diffuser plate surface increases the risk of damage; spray head 24a is a particular 0 ° model (horizontal spray); the ultrapure water pressurized by the water supply host machine forms a linear water column after passing through the 0-degree spray head and is sprayed to the holes on the diffusion plate; the cleaning unit 20 may be operated at both sides simultaneously to secure the diffusion plate
Foreign matters in the holes are thoroughly removed; the rotation and the rotating speed of the spray head assembly 24 are realized by adjusting any number of angles among the four spray heads 24a without additional power support; the greater the number of angles to which spray head 24a is adjusted, the smaller the angle, the higher the rotational speed of spray head assembly 24. The washing unit 20 is movable in the arrangement direction of the push lever 12, and the distance (speed) of movement can be set; checking the foreign matter in each diffusion plate hole in advance, adjusting the cleaningThe speed of the cleaning agent is increased to ensure that the optimal cleaning effect is achieved; the air supply and the air stop of the air knife for 24 hours are realized by the on-off of the electromagnetic valve; the two sets of air knives 24h (with the cleaning unit 20 disposed on both sides) can move together with the cleaning unit 20, and can move along the arrangement direction of the push rod 12, and the moving distance (speed) can be set; and after the cleaning is finished, the drying speed is adjusted according to the residual moisture in the holes of the diffusion plate so as to ensure that the optimal drying effect is achieved.
Claims (8)
1. The utility model provides a high pressure cleaning device is used to gas phase reversal under the high temperature of screen which characterized in that: comprises a frame (10), a containing part (11) for a diffusion plate to be vertically arranged is arranged in the middle of the frame (10), cleaning units (20) are arranged on two sides of the containing part (11), each cleaning unit (20) comprises a steel frame (21) arranged in parallel with the vertically arranged diffusion plate, a transmission mechanism (22) is arranged on each steel frame (21), each transmission mechanism (22) comprises vertical rods (22a) arranged in parallel with the vertically arranged diffusion plate and horizontal guide rods (22b) positioned between the vertical rods (22a), each horizontal guide rod (22b) can move up and down along the arrangement direction of the vertical rods (22a), a sliding block (23) is arranged on each horizontal guide rod (22b), each sliding block (23) can move back and forth along the rod length direction of the corresponding horizontal guide rod (22b), a sprayer assembly (24) is arranged on each sliding block (23), and each sprayer assembly (24) comprises a plurality of sprayers (24a) extending towards the outer side of each sliding block, the spraying ends of the plurality of spray heads (24a) are vertical to the steel frame (21), and the water inlet ends of the spray heads (24a) are connected with a water supply host.
2. The high temperature gas reverse application high pressure cleaning apparatus of a screen according to claim 1, wherein: the spray head assembly (24) comprises a joint seat connected with a sliding block (23), a rotating block (24c) is arranged on the joint seat, an induction block (24g) is arranged beside the rotating block (24c), a rotating shaft of the rotating block (24c) is arranged perpendicular to a steel frame (21), an air knife (24h) is arranged on the rotating block (24c), the air knife (24h) is fixed on the rotating block (24c) through a fixing plate (24e), a rotating rod is fixed on the front surface of the rotating block (24c), the rotating rod is provided with a deflection angle, the inner end of the rotating rod is communicated with a water inlet joint (24d), the spraying end of the spray head (24a) is arranged at the outer end of the rotating rod, a driving motor (24b) is arranged on the back surface of the rotating block (24c), an encoder (24f) is arranged below a driving gear of the driving motor (24b), and the driving motor (24b) drives the air knife (24h), the water inlet joint (24d) is communicated with the water supply host.
3. The high temperature gas reverse application high pressure cleaning apparatus for a screen according to claim 1 or 2, wherein: the water supply main machine is a 250Bar high-pressure water main machine, and the 250Bar high-pressure water main machine adopts an ABB variable frequency drive variable frequency motor to drive water delivery.
4. The high temperature gas reverse application high pressure cleaning apparatus of a screen according to claim 1, wherein: the transmission mechanism (22) comprises a first screw rod mechanism which drives the horizontal guide rod (22b) to move up and down along the arrangement direction of the vertical rod (22a) and a second screw rod mechanism which drives the sliding block (23) to move back and forth along the rod length direction of the horizontal guide rod (22 b).
5. The high temperature gas reverse application high pressure cleaning apparatus of a screen according to claim 1, wherein: a push rod (12) is arranged on the horizontal plane of the frame (10) in the direction of the vertical accommodating part (11), the cleaning unit (20) is arranged on the push rod (12), and the cleaning unit (20) can move along the arrangement direction of the push rod (12).
6. The high temperature gas reverse application high pressure cleaning apparatus for a screen according to claim 1 or 5, wherein: the bottom of the frame (10) is provided with a water accumulation tray, and the water delivery end of the water supply host is communicated with the water accumulation tray.
7. The high temperature gas reverse application high pressure cleaning apparatus of a screen according to claim 6, wherein: the accommodating part (11) is a strip-shaped supporting groove.
8. The high temperature gas reverse application high pressure cleaning apparatus of a screen according to claim 7, wherein: the spray head assembly (24) comprises four spray heads (24a) arranged in a square matrix.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922349078.5U CN212418822U (en) | 2019-12-24 | 2019-12-24 | High-pressure cleaning device for high-temperature gas-phase-inversion application of screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922349078.5U CN212418822U (en) | 2019-12-24 | 2019-12-24 | High-pressure cleaning device for high-temperature gas-phase-inversion application of screen |
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| Publication Number | Publication Date |
|---|---|
| CN212418822U true CN212418822U (en) | 2021-01-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922349078.5U Active CN212418822U (en) | 2019-12-24 | 2019-12-24 | High-pressure cleaning device for high-temperature gas-phase-inversion application of screen |
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| Country | Link |
|---|---|
| CN (1) | CN212418822U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111229683A (en) * | 2019-12-24 | 2020-06-05 | 合肥微睿光电科技有限公司 | High-pressure cleaning device for high-temperature gas-phase-inversion application of screen |
-
2019
- 2019-12-24 CN CN201922349078.5U patent/CN212418822U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111229683A (en) * | 2019-12-24 | 2020-06-05 | 合肥微睿光电科技有限公司 | High-pressure cleaning device for high-temperature gas-phase-inversion application of screen |
| CN111229683B (en) * | 2019-12-24 | 2023-08-08 | 合肥微睿光电科技有限公司 | High-pressure cleaning device for high-temperature gas-phase reaction of screen |
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Address after: 230000 No. 1766, Jiudingshan Road, Xinzhan District, Hefei City, Anhui Province Patentee after: Hefei Weirui Technology Co.,Ltd. Address before: 230000 southeast corner of the intersection of Jiudingshan road and Zhucheng Road, Xinzhan District, Hefei City, Anhui Province Patentee before: HEFEI WEIRUI OPTOELECTRONIC TECHNOLOGY CO.,LTD. |
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