CN201707160U - Piezoresistive pressure sensor integrated base - Google Patents
Piezoresistive pressure sensor integrated base Download PDFInfo
- Publication number
- CN201707160U CN201707160U CN201020237242XU CN201020237242U CN201707160U CN 201707160 U CN201707160 U CN 201707160U CN 201020237242X U CN201020237242X U CN 201020237242XU CN 201020237242 U CN201020237242 U CN 201020237242U CN 201707160 U CN201707160 U CN 201707160U
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- China
- Prior art keywords
- pressure sensor
- piezoresistive pressure
- housing
- sintering
- integrated base
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Abstract
The utility model relates to a piezoresistive pressure sensor integrated base, which comprises a casing (1) and pin lines (3) connected with the casing (1), and is characterized in that an open cavity is arranged at one end of the casing (1), more than one sintering hole is arranged on the circumference at the other end of the casing (1), and one pin line is fixed into each sintering hole in a sintering manner respectively by the aid of glass insulators (2). The piezoresistive pressure sensor integrated base has the advantages of adopting integrated design, decreasing TO seats and welding link, improving production efficiency, leading failure rate to be one per ten thousands, improving product reliability and prolonging the service life of products. After the pressure sensor integrated base is adopted, a sensor is high in sensibility and frequency response and wide in measuring range, and can measure micro-pressure as low as 10Pa and high pressure as high as 60MPa. The piezoresistive pressure sensor integrated base increases product extending and applicable scope, has high precision reaching +/-0.2%-0.02%, and is reliable in work and easy for miniaturization.
Description
Technical field
The utility model relates to the sensor part, in particular for the integrated pedestal of piezoresistive pressure sensor.
Background technology
At present, piezoresistive pressure sensor is based on the sensor that the piezoresistive effect principle of semiconductor material (monocrystalline silicon) is made, utilize integrated circuit technology directly on the silicon flat diaphragm, to make the diffusion voltage dependent resistor (VDR) exactly by certain crystal orientation, when the silicon diaphragm pressurized, the distortion of diaphragm will make the resistance of diffusion resistance change.Diffusion resistance on the silicon flat diaphragm constitutes the bridge-type metering circuit usually, and relative arm resistance is a symmetric arrangement, and during resistance variations, bridge output voltage becomes corresponding relation with the diaphragm pressure.The oil-filled core body pedestal that existing piezoresistive pressure sensor uses, inner structure all is to use the housing of TO seat and core body to be welded, because above-mentioned structure and process characteristic, determined split type pressure transducer that following shortcoming is arranged in production application: 1. owing to use welding technology, cause production efficiency low, 2. poor reliability, when the instantaneous pressure peak value, be easy to generate silicone oil leakage in the oil-filled core body, influence the sensor quality, reduce serviceable life, 3. range ability is limited to, owing to adopt welding technology, only be suitable for and produce little range sensors.
The utility model content
The purpose of this utility model is exactly in order to overcome the defective that oil-filled core body pedestal that piezoresistive pressure sensor uses is welded by the housing of TO seat and core body, and provides a kind of piezoresistive pressure sensor integrated pedestal.
The technical scheme that its technical matters that solves the utility model adopts is:
The integrated pedestal of piezoresistive pressure sensor, comprise housing and the lead-foot-line that is connected with housing, it is characterized in that: housing one end is provided with opening cavity, and a circumference of the other end is provided with an above sintering hole, is sintered to fix a lead-foot-line by glass insulator respectively in each sintering hole.
Do agglomerant with glass insulator following some benefit is arranged: the first, strengthen sintering strength; The second, increase the insulation degree; Three, sealing property is good; Four, the sintering place is smooth full.
On the basis of above-mentioned main technical schemes, can increase following further perfect technical scheme:
Described sintering hole is symmetrically distributed with the center of housing end face.
On the housing of sintering hole corresponding end, be provided with center pit, be provided with a tracheae in the center pit.
On the housing of sintering hole corresponding end, be provided with pilot hole.
Described housing is U.S. mark 316L Stainless Steel Shell.
Described lead-foot-line is soft attitude Covar lead-foot-line, guarantees that sensor has good conducted signal.
The beneficial effects of the utility model are to adopt integrated design, have reduced TO seat and welding link, have improved production efficiency; Glass insulator (being gob) is full, does not have the gaps and omissions phenomenon of climbing, flawless, bubble, glass insulator under 100MPa pressure, slip＜1 * 10
-9Pa.m
3/ S, this integrated pedestal failure rate ten thousand/, improved reliability of products, prolonged the serviceable life of product; After adopting the integrated matrix of this pressure transducer, transducer sensitivity height, frequency response height; Measurement range is wide, can survey the high pressure of minute-pressure to height to 60Mpa that is low to moderate 10Pa, increases the extension and the scope of application of product; Precision height, reliable operation, its precision can reach ± and 0.2%～0.02%; Be easy to microminaturization.
Below in conjunction with drawings and Examples the utility model is further specified.
Description of drawings:
Fig. 1 is a front view of the present utility model;
Fig. 2 is a vertical view of the present utility model;
Fig. 3 is an enforcement illustration of the present utility model.
Embodiment
As shown in Figure 2, the integrated pedestal of the utility model piezoresistive pressure sensor, comprise housing 1, housing one end is provided with six sintering holes, eight sintering holes or more also can be set, six sintering holes are symmetrically distributed in the both sides at housing center, every side is three sintering holes of distribution evenly, six sintering pore size distributions are on same circumference, as shown in Figure 1, be provided with lead-foot-line 3 in each sintering hole, an end of lead-foot-line is arranged in the sintering hole and by glass insulator 2 and is sintered to fix in housing, the other end of lead-foot-line reaches outside, on the housing of sintering hole corresponding end, also be provided with center pit, be provided with a tracheae 4 in the center pit and be sintered to fix in housing, as shown in Figure 3 by glass insulator, the other end of housing is an opening cavity, be provided with chip 6 in the die cavity, chip is connected with six lead-foot-lines respectively by lead, is marked with silicone oil 7 in the die cavity on the chip, be provided with corrugated plate 8 on the silicone oil successively, press mold 9 is encapsulated in silicone oil in the die cavity, and by pressure ring 10 fastening press mold and corrugated plates.
Housing 1 adopts U.S. mark 316L stainless steel bar to make, each size in the housing is all passed through the exact science design, accurately process with numerically controlled lathe, each sintering hole in the housing 1 all has special-purpose drill jig to guarantee size and positional precision, is provided with the pilot hole 5 that is used to process at the non-central place of housing of sintering hole corresponding end; Described lead-foot-line 3 is soft attitude Covar lead-foot-line, guarantees that sensor has good conducted signal.
Claims (6)
1. the integrated pedestal of piezoresistive pressure sensor, comprise housing (1) and the lead-foot-line (3) that is connected with housing (1), it is characterized in that: housing (1) one end is provided with opening cavity, one circumference of the other end is provided with an above sintering hole, is sintered to fix a lead-foot-line by glass insulator (2) respectively in each sintering hole.
2. the integrated pedestal of piezoresistive pressure sensor according to claim 1 is characterized in that: described sintering hole is symmetrically distributed with the center of housing (1) end face.
3. the integrated pedestal of piezoresistive pressure sensor according to claim 1 is characterized in that: be provided with center pit on the housing of sintering hole corresponding end, be provided with a tracheae (4) in the center pit.
4. the integrated pedestal of piezoresistive pressure sensor according to claim 3 is characterized in that: be provided with pilot hole (5) on the housing of sintering hole corresponding end.
5. the integrated pedestal of piezoresistive pressure sensor according to claim 1 is characterized in that: described housing (1) is U.S. mark 316L Stainless Steel Shell.
6. the integrated pedestal of piezoresistive pressure sensor according to claim 1 is characterized in that: described lead-foot-line (3) is soft attitude Covar lead-foot-line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020237242XU CN201707160U (en) | 2010-06-25 | 2010-06-25 | Piezoresistive pressure sensor integrated base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020237242XU CN201707160U (en) | 2010-06-25 | 2010-06-25 | Piezoresistive pressure sensor integrated base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201707160U true CN201707160U (en) | 2011-01-12 |
Family
ID=43444323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201020237242XU Expired - Fee Related CN201707160U (en) | 2010-06-25 | 2010-06-25 | Piezoresistive pressure sensor integrated base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201707160U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376182A (en) * | 2012-04-28 | 2013-10-30 | 浙江三花股份有限公司 | Heat exchange device and pressure sensor thereof |
| CN103438919A (en) * | 2013-09-13 | 2013-12-11 | 蚌埠市创业电子有限责任公司 | Integrated base of multi-parameter silicon piezoresistive differential pressure transducer |
| CN115060410A (en) * | 2022-06-09 | 2022-09-16 | 浙江大学 | Hydraulically smooth micro-flattening film pressure sensing array and preparation process thereof |
-
2010
- 2010-06-25 CN CN201020237242XU patent/CN201707160U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103376182A (en) * | 2012-04-28 | 2013-10-30 | 浙江三花股份有限公司 | Heat exchange device and pressure sensor thereof |
| CN103438919A (en) * | 2013-09-13 | 2013-12-11 | 蚌埠市创业电子有限责任公司 | Integrated base of multi-parameter silicon piezoresistive differential pressure transducer |
| CN103438919B (en) * | 2013-09-13 | 2016-01-20 | 蚌埠市创业电子有限责任公司 | Multi-parameter silicon pressure drag differential pressure pick-up integrated base |
| CN115060410A (en) * | 2022-06-09 | 2022-09-16 | 浙江大学 | Hydraulically smooth micro-flattening film pressure sensing array and preparation process thereof |
| CN115060410B (en) * | 2022-06-09 | 2023-09-26 | 浙江大学 | Hydraulic smooth micro-flattening film pressure sensing array and preparation process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110112 Termination date: 20190625 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |