CN207675354U - A kind of MEMS oil-filled pressure transducers measured for negative pressure - Google Patents
A kind of MEMS oil-filled pressure transducers measured for negative pressure Download PDFInfo
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- CN207675354U CN207675354U CN201721793693.XU CN201721793693U CN207675354U CN 207675354 U CN207675354 U CN 207675354U CN 201721793693 U CN201721793693 U CN 201721793693U CN 207675354 U CN207675354 U CN 207675354U
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Abstract
The utility model is related to a kind of MEMS oil-filled pressure transducers measured for negative pressure, including pedestal, pedestal is equipped with the cavity for accommodating silicone oil, the upside of pedestal is equipped with the metallic membrane for incuding ambient pressure, sealing cavity is formed between pedestal and metallic membrane, pedestal bottom plate corresponding with metallic membrane is equipped with through-hole, the lower surface of bottom plate is fixed with pressure chip, the venthole of pressure chip is communicated with through-hole, pressure chip is adhesively fixed on by fluid sealant on bottom plate, and silicone oil is filled in the cavity, the through-hole and the venthole.The MEMS oil-filled pressure transducers of the utility model, when measuring negative pressure, pressure is acted on by the venthole of metallic membrane, silicone oil, pressure chip on pressure chip, so that pressure chip tends to be adjacent in the lower surface of bottom plate, thus without the adhesive strength considered between pressure chip and pedestal, pressure chip disengaging will not occur in long-term progress negative pressure measurement, and simple in structure and reliability is high.
Description
Technical field
The utility model is related to MEMS pressure sensor manufacturing technology, especially a kind of MEMS measured for negative pressure is oil-filled
Pressure sensor.
Background technology
MEMS (MEMS, Micro-Electro-Mechanical System), also referred to as mems
System, micro-system, micromechanics etc..As a kind of MEMS disclosed in the Chinese publication file of Publication No. CN204128731U is oil-filled
Pressure sensor, including pressure chip and be arranged in the metal base for having cavity, metal base is equipped with what radially inward extended
Double-layer circuit board is arranged on boss for boss, and pressure chip only has in cavity and is bonded on double-layer circuit board, and silicon is full of in cavity
Oil.The front of the MEMS oil-filled pressure transducers as disclosed in the patent document, pressure chip is contacted with silicone oil and induction pressure becomes
Change, when measuring positive pressure, tend to compress between pressure chip and substrate (circuit board), it is possible to select adhesive strength compared with
Small and small thermal stress silica gel (being commonly called as flexible glue) is adhered to pressure chip in substrate (circuit board)；But it is (true measuring negative pressure
Under dummy status) pressure when, be to tend to separate out between pressure chip and substrate (circuit board), flexible glue bonding pressure chip due to
Adhesive strength is limited, can be detached from or fall off with substrate (circuit board), so B/P EGR Back Pressure Transducer EGR can generally select adhesive strength big
Epoxide-resin glue (being commonly called as ebonite) carrys out adhering chip.Although pressure chip can be prevented de- with substrate using ebonite bonding pressure chip
From still, since ebonite bonding thermal stress is big, creep is big, the temperature characterisitic and long-time stability of sensor are bad.
Utility model content
The purpose of this utility model is to provide a kind of MEMS oil-filled pressure transducers measured for negative pressure, for solving
The problem of existing MEMS oil-filled pressure transducer unreasonable structures for measuring negative pressure.
To solve the above-mentioned problems, the utility model provides a kind of MEMS oil-filled pressure transducers measured for negative pressure,
Including pedestal, the pedestal is equipped with the cavity for accommodating silicone oil, and the upside of the pedestal is equipped with the gold for incuding ambient pressure
Belong to diaphragm, forms sealing cavity, pedestal bottom corresponding with the metallic membrane between the pedestal and the metallic membrane
Plate is equipped with through-hole, and the lower surface of the bottom plate is fixed with pressure chip, the venthole of the pressure chip and the through-hole phase
Logical, the pressure chip is adhesively fixed on by fluid sealant on the bottom plate, in the cavity, the through-hole and the venthole
Filled with silicone oil.
The MEMS oil-filled pressure transducers provided by the utility model measured for negative pressure also have following technical characteristic：
Further, the bottom plate is rounded and the through-hole is located at the center of the bottom plate.
Further, the lower surface of the bottom plate is further fixed on the circuit board being connected with the pressure chip, the circuit
The first avoid holes for avoiding the pressure chip are additionally provided on plate, the diameter of first avoid holes is more than the pressure core
The diameter of piece.
Further, it is additionally provided with oil-filled hole on the bottom plate, the oil-filled hole is by steel ball sealing, on the circuit board also
Equipped with the second avoid holes for avoiding the steel ball, the diameter of second avoid holes is more than the diameter of the steel ball.
Further, the lead exported for signal is additionally provided on the circuit board, the pressure chip passes through bonding line
It is connected with the circuit board.
Further, the lower surface of the circuit board is further fixed on protective cap, and the pressure chip is located at the protective cap
It is interior.
Further, the fluid sealant is flexible glue.
Further, the metallic membrane is weldingly fixed on by weld-ring on the pedestal.
Further, the height of the weld-ring is more than the height of the pedestal, and the weld-ring is equipped with seal groove, described close
Sealing ring is installed in sealing groove.
Further, the pedestal is stainless steel base seat.
The utility model has the advantages that：By the way that through-hole is arranged on the bottom plate of pedestal and in the following table in bottom plate
Face is adhesively fixed pressure chip by fluid sealant, and the venthole of pressure chip is communicated with the through-hole on bottom plate, the cavity of pedestal and
Silicone oil is filled in the through-hole of bottom plate, when measuring negative pressure, pressure is made by the venthole of metallic membrane, silicone oil, pressure chip
With on pressure chip so that pressure chip tends to be adjacent in the lower surface of bottom plate, thus without consideration pressure chip and base
Pressure chip disengaging will not occur in adhesive strength between seat, long-term progress negative pressure measurement, and simple in structure and reliability is high.
Description of the drawings
Fig. 1 is the structural schematic diagram of the MEMS oil-filled pressure transducers measured for negative pressure of the utility model embodiment.
Specific implementation mode
The utility model is described in detail below with reference to attached drawing and in conjunction with the embodiments.It should be noted that not rushing
In the case of prominent, the feature in the embodiments of the present invention and embodiment can be combined with each other.
One embodiment of the MEMS oil-filled pressure transducers measured for negative pressure of the utility model as shown in Figure 1
In, which includes pedestal 10, and pedestal 10 is equipped with the sky for accommodating silicone oil 101
Chamber, the upside of pedestal 10 are equipped with the metallic membrane 20 for incuding ambient pressure, are formed between pedestal 10 and metallic membrane 20 close
Cavity is sealed, the bottom plate 11 corresponding with metallic membrane 20 of pedestal 10 is equipped with through-hole 12, and the lower surface of bottom plate 11 is fixed with pressure core
The venthole 31 of piece 30, pressure chip 30 is communicated with through-hole 12, and pressure chip 30 is adhesively fixed on bottom plate 11 by fluid sealant 40
On, silicone oil 101 is filled in the cavity, through-hole 12 and venthole 31.The MEMS measured for negative pressure in the embodiment fills
Oil pressure force snesor, by the way that through-hole is arranged on the bottom plate of pedestal and is adhesively fixed pressure by fluid sealant in the lower surface of bottom plate
Power chip, the venthole of pressure chip are communicated with the through-hole on bottom plate, and silicone oil is filled in the cavity of pedestal and the through-hole of bottom plate,
When measuring negative pressure, pressure is acted on by the venthole of metallic membrane, silicone oil, pressure chip on pressure chip so that pressure
Chip tends to be adjacent in the lower surface of bottom plate, thus without the adhesive strength considered between pressure chip and pedestal, for a long time into
Pressure chip disengaging will not occur in the measurement of row negative pressure, and simple in structure and reliability is high.
It is understood that the oil-filled pressures of MEMS as disclosed in the Chinese publication file of Publication No. CN204128731U
Force snesor, the front of " pressure chip " therein is contacted with silicone oil carries out pressure detecting with sensed pressure, and the application passes through pressure
The venthole of power chip back is contacted with silicone oil carries out pressure detecting with sensed pressure.When the tow sides of pressure chip are pressurized all
The pressure signal proportional with value of thrust can be exported, specifically, containing 4 resistance on pressure chip, constitutes a favour
Stone electric bridge, when no pressure, 4 resistance are identical, bridge balance, output zero；When being under pressure, 4 electricity of different location
Resistance change in resistance differs, and Wheatstone bridge not rebalancing forms the differential output signal directly proportional to pressure value.Front be pressurized and
The back side, which is pressurized, can all this feature, and only the symbol of output signal is exactly the opposite, only need as needed on circuit boards by pressure
Two leading-out terminals of chip are exchanged.
In the above-described embodiments, which also has following technical characteristic：
Preferably, bottom plate 11 is rounded and through-hole 12 is located at the center of bottom plate 11, thus easy to process and can ensure metallic membrane sense
The pressure known can be reliably transmitted on pressure chip；Can with understanding, pedestal 10 is cylindrical.Preferably, bottom plate
11 lower surface is further fixed on the circuit board 50 being connected with pressure chip 30, is additionally provided on circuit board 50 for avoiding pressure chip
30 the first avoid holes 51, the diameter of the first avoid holes 51 are more than the diameter of pressure chip 30, are thus convenient for circuit board, pressure core
The installation of piece is fixed so that pressure chip can directly be adhesively fixed on the lower surface of bottom plate so that pressure chip is reliable with pedestal
Ground is tightly connected accurately to perceive the pressure of silicone oil transmission.Preferably, oil-filled hole 13 is additionally provided on bottom plate 11, oil-filled hole 13 is logical
The sealing of steel ball 14 is crossed, the second avoid holes 52 for avoiding steel ball 14, the diameter of the second avoid holes 52 are additionally provided on circuit board 50
More than the diameter of steel ball 14.Preferably, the lead 53 exported for signal is additionally provided on circuit board 50, pressure chip 30 passes through nation
Alignment 32 is connected with circuit board 50.Preferably, the lower surface of circuit board 50 is further fixed on protective cap 60, and pressure chip 30, which is located at, to be protected
It is additionally provided with through-hole 61 in helmet 60, on protective cap, pressure chip can be protected by the way that protective cap is arranged, avoid making because of collision
It is damaged at pressure chip.
In the above embodiment, it is preferable that fluid sealant 40 is flexible glue, it can be used that the adhesive strengths such as silica gel are smaller and thermal stress
Small fluid sealant, so that the MEMS oil-filled pressure transducer temperature drifts are small, long-time stability are good.
In the above embodiment, it is preferable that metallic membrane 20 is weldingly fixed on by weld-ring 70 on pedestal 10, so that
Metallic membrane fixes reliable, good airproof performance.Preferably, the height of weld-ring 70 is more than the height of pedestal 10, and weld-ring 70 is equipped with close
Sealing groove is equipped with sealing ring 71 in the seal groove, thus the installation of the pressure sensor can be convenient for fix.Preferably, pedestal
10 use stainless steel base seat, and structural strength is high, good reliability.
Finally it should be noted that：Above example is only to illustrate the technical solution of the utility model, rather than its limitations；
Although the utility model is described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that：
It still can be with technical scheme described in the above embodiments is modified, or is carried out to which part technical characteristic etc.
With replacement；And these modifications or replacements, various embodiments of the utility model technology that it does not separate the essence of the corresponding technical solution
The spirit and scope of scheme.
Claims (10)
1. a kind of MEMS oil-filled pressure transducers measured for negative pressure, including pedestal, the pedestal, which is equipped with, accommodates silicone oil
Cavity, the upside of the pedestal is equipped with the metallic membrane for incuding ambient pressure, between the pedestal and the metallic membrane
Form sealing cavity, which is characterized in that pedestal bottom plate corresponding with the metallic membrane is equipped with through-hole, the bottom plate
Lower surface is fixed with pressure chip, and the venthole of the pressure chip is communicated with the through-hole, and the pressure chip passes through sealing
Glue sticking is fixed on the bottom plate, and silicone oil is filled in the cavity, the through-hole and the venthole.
2. the MEMS oil-filled pressure transducers according to claim 1 measured for negative pressure, it is characterised in that：The bottom plate
The rounded and described through-hole is located at the center of the bottom plate.
3. the MEMS oil-filled pressure transducers according to claim 1 measured for negative pressure, it is characterised in that：The bottom plate
Lower surface be further fixed on the circuit board being connected with the pressure chip, be additionally provided on the circuit board for avoiding the pressure
First avoid holes of chip, the diameter of first avoid holes are more than the diameter of the pressure chip.
4. the MEMS oil-filled pressure transducers according to claim 3 measured for negative pressure, it is characterised in that：The bottom plate
On be additionally provided with oil-filled hole, the oil-filled hole is additionally provided with for avoiding the steel ball by steel ball sealing on the circuit board
Two avoid holes, the diameter of second avoid holes are more than the diameter of the steel ball.
5. the MEMS oil-filled pressure transducers according to claim 3 measured for negative pressure, which is characterized in that the circuit
The lead exported for signal is additionally provided on plate, the pressure chip is connected by bonding line with the circuit board.
6. the MEMS oil-filled pressure transducers according to claim 3 measured for negative pressure, it is characterised in that：The circuit
The lower surface of plate is further fixed on protective cap, and the pressure chip is located in the protective cap.
7. the MEMS oil-filled pressure transducers according to claim 1 measured for negative pressure, it is characterised in that：The sealing
Glue is flexible glue.
8. the MEMS oil-filled pressure transducers according to claim 1 measured for negative pressure, it is characterised in that：The metal
Diaphragm is weldingly fixed on by weld-ring on the pedestal.
9. the MEMS oil-filled pressure transducers according to claim 8 measured for negative pressure, it is characterised in that：The weld-ring
Height be more than the height of the pedestal, the weld-ring is equipped with seal groove, is equipped with sealing ring in the seal groove.
10. the MEMS oil-filled pressure transducers according to claim 1 measured for negative pressure, it is characterised in that：The base
Seat is stainless steel base seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721793693.XU CN207675354U (en) | 2017-12-20 | 2017-12-20 | A kind of MEMS oil-filled pressure transducers measured for negative pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721793693.XU CN207675354U (en) | 2017-12-20 | 2017-12-20 | A kind of MEMS oil-filled pressure transducers measured for negative pressure |
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| CN207675354U true CN207675354U (en) | 2018-07-31 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907262A (en) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducers for negative pressure measurement |
| CN109738107A (en) * | 2019-01-04 | 2019-05-10 | 胡靖阳 | A kind of pressure sensor of hydraulic oil formula high stable |
-
2017
- 2017-12-20 CN CN201721793693.XU patent/CN207675354U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907262A (en) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducers for negative pressure measurement |
| CN109738107A (en) * | 2019-01-04 | 2019-05-10 | 胡靖阳 | A kind of pressure sensor of hydraulic oil formula high stable |
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