CN201678729U - 循环蒸镀机构 - Google Patents
循环蒸镀机构 Download PDFInfo
- Publication number
- CN201678729U CN201678729U CN2010201887823U CN201020188782U CN201678729U CN 201678729 U CN201678729 U CN 201678729U CN 2010201887823 U CN2010201887823 U CN 2010201887823U CN 201020188782 U CN201020188782 U CN 201020188782U CN 201678729 U CN201678729 U CN 201678729U
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- evaporation
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- 238000001704 evaporation Methods 0.000 title claims abstract description 240
- 230000008020 evaporation Effects 0.000 title claims abstract description 236
- 230000000694 effects Effects 0.000 claims description 13
- 230000033001 locomotion Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 39
- 238000000034 method Methods 0.000 abstract description 30
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 36
- 230000008021 deposition Effects 0.000 description 35
- 238000012423 maintenance Methods 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010201887823U CN201678729U (zh) | 2010-05-06 | 2010-05-06 | 循环蒸镀机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2010201887823U CN201678729U (zh) | 2010-05-06 | 2010-05-06 | 循环蒸镀机构 |
Publications (1)
Publication Number | Publication Date |
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CN201678729U true CN201678729U (zh) | 2010-12-22 |
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CN2010201887823U Expired - Fee Related CN201678729U (zh) | 2010-05-06 | 2010-05-06 | 循环蒸镀机构 |
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CN (1) | CN201678729U (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101956174A (zh) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | 循环蒸镀装置 |
CN104593731A (zh) * | 2015-02-04 | 2015-05-06 | 深圳市华星光电技术有限公司 | 蒸镀换料一体化设备及其使用方法 |
CN108998764A (zh) * | 2018-08-20 | 2018-12-14 | 深圳市华星光电技术有限公司 | 一种蒸发源装置 |
CN109321884A (zh) * | 2018-10-17 | 2019-02-12 | 武汉华星光电半导体显示技术有限公司 | 蒸镀装置 |
WO2020133686A1 (zh) * | 2018-12-29 | 2020-07-02 | 深圳市华星光电半导体显示技术有限公司 | 线源装置和 oled 蒸镀机 |
-
2010
- 2010-05-06 CN CN2010201887823U patent/CN201678729U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101956174A (zh) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | 循环蒸镀装置 |
CN104593731A (zh) * | 2015-02-04 | 2015-05-06 | 深圳市华星光电技术有限公司 | 蒸镀换料一体化设备及其使用方法 |
CN108998764A (zh) * | 2018-08-20 | 2018-12-14 | 深圳市华星光电技术有限公司 | 一种蒸发源装置 |
CN109321884A (zh) * | 2018-10-17 | 2019-02-12 | 武汉华星光电半导体显示技术有限公司 | 蒸镀装置 |
WO2020077719A1 (zh) * | 2018-10-17 | 2020-04-23 | 武汉华星光电半导体显示技术有限公司 | 蒸镀装置 |
WO2020133686A1 (zh) * | 2018-12-29 | 2020-07-02 | 深圳市华星光电半导体显示技术有限公司 | 线源装置和 oled 蒸镀机 |
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