CN202482419U - 基板镀膜设备 - Google Patents
基板镀膜设备 Download PDFInfo
- Publication number
- CN202482419U CN202482419U CN2012200162163U CN201220016216U CN202482419U CN 202482419 U CN202482419 U CN 202482419U CN 2012200162163 U CN2012200162163 U CN 2012200162163U CN 201220016216 U CN201220016216 U CN 201220016216U CN 202482419 U CN202482419 U CN 202482419U
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- 238000000576 coating method Methods 0.000 title abstract description 19
- 239000011248 coating agent Substances 0.000 title abstract description 12
- 238000001704 evaporation Methods 0.000 claims abstract description 128
- 230000008020 evaporation Effects 0.000 claims abstract description 102
- 239000000463 material Substances 0.000 claims abstract description 36
- 238000005086 pumping Methods 0.000 claims abstract description 14
- 238000012806 monitoring device Methods 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims description 142
- 238000010894 electron beam technology Methods 0.000 claims description 54
- 239000007888 film coating Substances 0.000 claims description 42
- 238000009501 film coating Methods 0.000 claims description 42
- 238000010438 heat treatment Methods 0.000 claims description 26
- 238000001816 cooling Methods 0.000 claims description 22
- 238000013016 damping Methods 0.000 claims description 20
- 238000009833 condensation Methods 0.000 claims description 18
- 230000005494 condensation Effects 0.000 claims description 18
- 238000012423 maintenance Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 9
- 239000011553 magnetic fluid Substances 0.000 claims description 8
- 230000003373 anti-fouling effect Effects 0.000 claims description 7
- 238000005566 electron beam evaporation Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 abstract description 7
- 239000007921 spray Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 208000027418 Wounds and injury Diseases 0.000 description 11
- 239000011521 glass Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 238000009834 vaporization Methods 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229960001866 silicon dioxide Drugs 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- DZKDPOPGYFUOGI-UHFFFAOYSA-N tungsten dioxide Inorganic materials O=[W]=O DZKDPOPGYFUOGI-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 208000002925 dental caries Diseases 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910001922 gold oxide Inorganic materials 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- -1 golden Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200162163U CN202482419U (zh) | 2012-01-13 | 2012-01-13 | 基板镀膜设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200162163U CN202482419U (zh) | 2012-01-13 | 2012-01-13 | 基板镀膜设备 |
Publications (1)
Publication Number | Publication Date |
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CN202482419U true CN202482419U (zh) | 2012-10-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2012200162163U Expired - Fee Related CN202482419U (zh) | 2012-01-13 | 2012-01-13 | 基板镀膜设备 |
Country Status (1)
Country | Link |
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CN (1) | CN202482419U (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102703867A (zh) * | 2012-01-13 | 2012-10-03 | 东莞宏威数码机械有限公司 | 电子轰击镀膜机 |
CN104195524A (zh) * | 2014-09-09 | 2014-12-10 | 桑德斯微电子器件(南京)有限公司 | 一种气相沉积清理行星盘的系统及其清洗方法 |
CN105018884A (zh) * | 2015-07-30 | 2015-11-04 | 苏州方昇光电装备技术有限公司 | 一种小型真空蒸镀仪 |
CN106546717A (zh) * | 2016-11-03 | 2017-03-29 | 清华大学 | 一种可视化高温热成形工艺试验系统 |
CN108975724A (zh) * | 2018-08-23 | 2018-12-11 | 福莱特玻璃集团股份有限公司 | 一种用于在线镀膜玻璃生产的卧式蒸发装置 |
-
2012
- 2012-01-13 CN CN2012200162163U patent/CN202482419U/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102703867A (zh) * | 2012-01-13 | 2012-10-03 | 东莞宏威数码机械有限公司 | 电子轰击镀膜机 |
CN104195524A (zh) * | 2014-09-09 | 2014-12-10 | 桑德斯微电子器件(南京)有限公司 | 一种气相沉积清理行星盘的系统及其清洗方法 |
CN104195524B (zh) * | 2014-09-09 | 2016-12-14 | 桑德斯微电子器件(南京)有限公司 | 一种气相沉积清理行星盘的系统及其清洗方法 |
CN105018884A (zh) * | 2015-07-30 | 2015-11-04 | 苏州方昇光电装备技术有限公司 | 一种小型真空蒸镀仪 |
CN105018884B (zh) * | 2015-07-30 | 2018-04-10 | 苏州方昇光电装备技术有限公司 | 一种小型真空蒸镀仪 |
CN106546717A (zh) * | 2016-11-03 | 2017-03-29 | 清华大学 | 一种可视化高温热成形工艺试验系统 |
CN108975724A (zh) * | 2018-08-23 | 2018-12-11 | 福莱特玻璃集团股份有限公司 | 一种用于在线镀膜玻璃生产的卧式蒸发装置 |
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