CN201072754Y - 硅片装卸装置 - Google Patents
硅片装卸装置 Download PDFInfo
- Publication number
- CN201072754Y CN201072754Y CNU2007201752538U CN200720175253U CN201072754Y CN 201072754 Y CN201072754 Y CN 201072754Y CN U2007201752538 U CNU2007201752538 U CN U2007201752538U CN 200720175253 U CN200720175253 U CN 200720175253U CN 201072754 Y CN201072754 Y CN 201072754Y
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- CN
- China
- Prior art keywords
- graphite boat
- silicon chip
- jacking
- base plate
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2007201752538U CN201072754Y (zh) | 2007-08-29 | 2007-08-29 | 硅片装卸装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2007201752538U CN201072754Y (zh) | 2007-08-29 | 2007-08-29 | 硅片装卸装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201072754Y true CN201072754Y (zh) | 2008-06-11 |
Family
ID=39551310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNU2007201752538U Expired - Fee Related CN201072754Y (zh) | 2007-08-29 | 2007-08-29 | 硅片装卸装置 |
Country Status (1)
Country | Link |
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CN (1) | CN201072754Y (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102263050A (zh) * | 2011-08-01 | 2011-11-30 | 苏州固锝电子股份有限公司 | 一种用于移动石墨舟上半导体晶粒的装置 |
CN108807247A (zh) * | 2018-06-01 | 2018-11-13 | 深圳市捷佳伟创新能源装备股份有限公司 | 一种石墨舟接驳缓存方法 |
-
2007
- 2007-08-29 CN CNU2007201752538U patent/CN201072754Y/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102263050A (zh) * | 2011-08-01 | 2011-11-30 | 苏州固锝电子股份有限公司 | 一种用于移动石墨舟上半导体晶粒的装置 |
CN102263050B (zh) * | 2011-08-01 | 2013-05-01 | 苏州固锝电子股份有限公司 | 一种用于移动石墨舟上半导体晶粒的装置 |
CN108807247A (zh) * | 2018-06-01 | 2018-11-13 | 深圳市捷佳伟创新能源装备股份有限公司 | 一种石墨舟接驳缓存方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090220 Address after: Jiangsu city of Jintan Province Yao Tang Zhen Jin Hongwu Road No. 18, zip code: 213213 Patentee after: Changzhou EGing Photovoltaic Technology Co., Ltd. Address before: Jiangsu city of Jintan Province Yao Tang Town Industrial Park Jin Wu Road No. 18, zip code: 213213 Co-patentee before: Liu Zhigang Patentee before: Xi Jian Hua |
|
ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU YIJING OPTO-ELECTRICAL SCIENCE CO., LTD. Free format text: FORMER OWNER: XUN JIANHUA Effective date: 20090220 |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080611 Termination date: 20120829 |